JP2011222708A - 固体撮像装置、固体撮像装置の製造方法、および電子機器 - Google Patents

固体撮像装置、固体撮像装置の製造方法、および電子機器 Download PDF

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JP2011222708A
JP2011222708A JP2010089606A JP2010089606A JP2011222708A JP 2011222708 A JP2011222708 A JP 2011222708A JP 2010089606 A JP2010089606 A JP 2010089606A JP 2010089606 A JP2010089606 A JP 2010089606A JP 2011222708 A JP2011222708 A JP 2011222708A
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JP2011222708A5 (enExample
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Yusuke Matsumura
勇佑 松村
Takashi Machida
貴志 町田
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Sony Corp
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Sony Corp
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Priority to JP2010089606A priority Critical patent/JP2011222708A/ja
Priority to CN2011100824811A priority patent/CN102214669A/zh
Priority to US13/078,569 priority patent/US8716719B2/en
Publication of JP2011222708A publication Critical patent/JP2011222708A/ja
Publication of JP2011222708A5 publication Critical patent/JP2011222708A5/ja
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/014Manufacture or treatment of image sensors covered by group H10F39/12 of CMOS image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/186Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors having arrangements for blooming suppression
    • H10F39/1865Overflow drain structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H10F39/80373Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor characterised by the gate of the transistor
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors
    • H04N25/77Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
    • H04N25/771Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components comprising storage means other than floating diffusion

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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP2010089606A 2010-04-08 2010-04-08 固体撮像装置、固体撮像装置の製造方法、および電子機器 Pending JP2011222708A (ja)

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Application Number Priority Date Filing Date Title
JP2010089606A JP2011222708A (ja) 2010-04-08 2010-04-08 固体撮像装置、固体撮像装置の製造方法、および電子機器
CN2011100824811A CN102214669A (zh) 2010-04-08 2011-04-01 固态成像器件及其制造方法和电子设备
US13/078,569 US8716719B2 (en) 2010-04-08 2011-04-01 Solid-state imaging device, method of manufacturing solid-state imaging device, and electronic apparatus

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JP2010089606A JP2011222708A (ja) 2010-04-08 2010-04-08 固体撮像装置、固体撮像装置の製造方法、および電子機器

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JP2011222708A5 JP2011222708A5 (enExample) 2013-05-09

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US (1) US8716719B2 (enExample)
JP (1) JP2011222708A (enExample)
CN (1) CN102214669A (enExample)

Cited By (14)

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Publication number Priority date Publication date Assignee Title
JP2011249406A (ja) * 2010-05-24 2011-12-08 Brookman Technology Inc 固体撮像装置
CN102547168A (zh) * 2010-12-15 2012-07-04 索尼公司 固体摄像元件、固体摄像元件的驱动方法和电子装置
WO2012176454A1 (ja) * 2011-06-22 2012-12-27 パナソニック株式会社 固体撮像装置
JP2013171888A (ja) * 2012-02-17 2013-09-02 Canon Inc 撮像装置
JP2015188049A (ja) * 2014-03-14 2015-10-29 キヤノン株式会社 固体撮像装置及び撮像システム
US9219096B2 (en) 2013-02-26 2015-12-22 Kabushiki Kaisha Toshiba Solid-state imaging device
WO2016147901A1 (ja) * 2015-03-18 2016-09-22 ソニー株式会社 固体撮像素子、撮像装置、並びに電子機器
JP2018061060A (ja) * 2017-12-28 2018-04-12 キヤノン株式会社 固体撮像装置及び撮像システム
JP2018516013A (ja) * 2015-05-19 2018-06-14 マジック リープ, インコーポレイテッドMagic Leap,Inc. セミグローバルシャッタイメージャ
KR20180106989A (ko) * 2017-03-21 2018-10-01 캐논 가부시끼가이샤 고체 촬상 장치, 촬상 시스템 및 이동체
JP2019029643A (ja) * 2017-07-31 2019-02-21 パナソニックIpマネジメント株式会社 撮像装置
WO2020017115A1 (ja) * 2018-07-19 2020-01-23 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子、および、撮像装置
JP2020061576A (ja) * 2013-07-03 2020-04-16 ソニー株式会社 固体撮像装置およびその製造方法
JP2023121769A (ja) * 2017-07-31 2023-08-31 パナソニックIpマネジメント株式会社 撮像装置

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CN104637959B (zh) * 2013-11-08 2018-02-02 苏州东微半导体有限公司 半导体感光器件及其制造方法
JP2015095468A (ja) * 2013-11-08 2015-05-18 ソニー株式会社 固体撮像素子および固体撮像素子の製造方法、並びに電子機器
KR20150109559A (ko) * 2014-03-20 2015-10-02 주식회사 동부하이텍 씨모스 이미지 센서 및 그 제조 방법
JP2015220339A (ja) * 2014-05-16 2015-12-07 株式会社東芝 固体撮像装置
KR102290502B1 (ko) 2014-07-31 2021-08-19 삼성전자주식회사 이미지 센서 및 이의 제조 방법
JP6700656B2 (ja) * 2014-10-31 2020-05-27 キヤノン株式会社 撮像装置
CN113437103A (zh) * 2015-02-27 2021-09-24 索尼公司 固态成像装置及电子装置
US10205893B2 (en) * 2015-03-25 2019-02-12 Sony Corporation Solid-state imaging device and driving method of solid-state imaging device
US10141356B2 (en) * 2015-10-15 2018-11-27 Semiconductor Components Industries, Llc Image sensor pixels having dual gate charge transferring transistors
JP6734649B2 (ja) * 2015-12-28 2020-08-05 キヤノン株式会社 撮像装置、撮像システム、及び、撮像装置の制御方法
JP2017143189A (ja) * 2016-02-10 2017-08-17 ルネサスエレクトロニクス株式会社 固体撮像素子
JP2017183563A (ja) * 2016-03-31 2017-10-05 ソニー株式会社 撮像装置、駆動方法、および、電子機器
JP6957226B2 (ja) 2017-06-20 2021-11-02 キヤノン株式会社 光電変換装置および機器
US11398519B2 (en) * 2017-12-09 2022-07-26 National University Corporation Shizuoka University Charge modulation element and solid-state imaging device
US10559614B2 (en) * 2018-03-09 2020-02-11 Semiconductor Components Industries, Llc Dual conversion gain circuitry with buried channels
JP2019169501A (ja) * 2018-03-22 2019-10-03 ソニーセミコンダクタソリューションズ株式会社 撮像素子及び電子機器
US10623728B2 (en) * 2018-07-06 2020-04-14 Stmicroelectronics (Grenoble 2) Sas Image sensors for advanced driver assistance systems utilizing safety pixels to detect malfunctions
JP2020021775A (ja) * 2018-07-30 2020-02-06 キヤノン株式会社 固体撮像装置及び撮像システム
JP7327916B2 (ja) * 2018-09-11 2023-08-16 キヤノン株式会社 光電変換装置および機器
JP6929266B2 (ja) * 2018-12-17 2021-09-01 キヤノン株式会社 光電変換装置、光電変換システム、移動体
TWI685959B (zh) * 2019-01-07 2020-02-21 力晶積成電子製造股份有限公司 影像感測器及其製造方法
CN110085608B (zh) * 2019-03-12 2021-05-18 上海集成电路研发中心有限公司 一种高性能cmos成像传感器结构及其制作方法
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US11664398B2 (en) * 2019-09-27 2023-05-30 Taiwan Semiconductor Manufacturing Company, Ltd. Image sensor and manufacturing method thereof
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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124180A (ja) * 1983-12-09 1985-07-03 Victor Co Of Japan Ltd 固体撮像板及び撮像方式
JPS63142858A (ja) * 1986-12-05 1988-06-15 Matsushita Electronics Corp 固体撮像装置
JPH05268526A (ja) * 1992-03-19 1993-10-15 Nec Corp 電荷結合装置
JPH08213582A (ja) * 1995-02-02 1996-08-20 Sony Corp 半導体装置及び半導体装置の製造方法
JP2005183922A (ja) * 2003-11-28 2005-07-07 Seiko Epson Corp 固体撮像装置及びその製造方法
JP2006261532A (ja) * 2005-03-18 2006-09-28 Seiko Epson Corp 固体撮像装置及びその駆動方法
JP2008004692A (ja) * 2006-06-21 2008-01-10 Nikon Corp 固体撮像装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07120774A (ja) * 1993-10-27 1995-05-12 Kyocera Corp 画像表示装置および画像表示装置の電極接続方法
US7271430B2 (en) 2004-06-04 2007-09-18 Samsung Electronics Co., Ltd. Image sensors for reducing dark current and methods of fabricating the same
JP4581792B2 (ja) 2004-07-05 2010-11-17 コニカミノルタホールディングス株式会社 固体撮像装置及びこれを備えたカメラ
JP4069918B2 (ja) 2004-09-27 2008-04-02 セイコーエプソン株式会社 固体撮像装置
US7115924B1 (en) * 2005-06-03 2006-10-03 Avago Technologies Sensor Ip Pte. Ltd. Pixel with asymmetric transfer gate channel doping
KR100699863B1 (ko) 2005-08-29 2007-03-27 삼성전자주식회사 크로스토크를 방지할 수 있는 cmos 이미지 센서 및 그제조방법
KR100808950B1 (ko) 2007-01-30 2008-03-04 삼성전자주식회사 씨모스 이미지 센서 및 그 제조 방법
KR101152389B1 (ko) * 2007-09-13 2012-06-05 삼성전자주식회사 이미지 센서와 그 제조 방법
JP5568880B2 (ja) 2008-04-03 2014-08-13 ソニー株式会社 固体撮像装置、固体撮像装置の駆動方法および電子機器

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124180A (ja) * 1983-12-09 1985-07-03 Victor Co Of Japan Ltd 固体撮像板及び撮像方式
JPS63142858A (ja) * 1986-12-05 1988-06-15 Matsushita Electronics Corp 固体撮像装置
JPH05268526A (ja) * 1992-03-19 1993-10-15 Nec Corp 電荷結合装置
JPH08213582A (ja) * 1995-02-02 1996-08-20 Sony Corp 半導体装置及び半導体装置の製造方法
JP2005183922A (ja) * 2003-11-28 2005-07-07 Seiko Epson Corp 固体撮像装置及びその製造方法
JP2006261532A (ja) * 2005-03-18 2006-09-28 Seiko Epson Corp 固体撮像装置及びその駆動方法
JP2008004692A (ja) * 2006-06-21 2008-01-10 Nikon Corp 固体撮像装置

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* Cited by examiner, † Cited by third party
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JP2011249406A (ja) * 2010-05-24 2011-12-08 Brookman Technology Inc 固体撮像装置
CN102547168A (zh) * 2010-12-15 2012-07-04 索尼公司 固体摄像元件、固体摄像元件的驱动方法和电子装置
WO2012176454A1 (ja) * 2011-06-22 2012-12-27 パナソニック株式会社 固体撮像装置
JPWO2012176454A1 (ja) * 2011-06-22 2015-02-23 パナソニック株式会社 固体撮像装置
US9466641B2 (en) 2011-06-22 2016-10-11 Panasonic Intellectual Property Management Co., Ltd. Solid-state imaging device
JP2013171888A (ja) * 2012-02-17 2013-09-02 Canon Inc 撮像装置
US9219096B2 (en) 2013-02-26 2015-12-22 Kabushiki Kaisha Toshiba Solid-state imaging device
JP2020061576A (ja) * 2013-07-03 2020-04-16 ソニー株式会社 固体撮像装置およびその製造方法
JP7040510B2 (ja) 2013-07-03 2022-03-23 ソニーグループ株式会社 固体撮像装置およびその製造方法
US11019291B2 (en) 2014-03-14 2021-05-25 Canon Kabushiki Kaisha Solid-state imaging device and imaging system
US10462400B2 (en) 2014-03-14 2019-10-29 Canon Kabushiki Kaisha Solid-state imaging device and imaging system
US10057519B2 (en) 2014-03-14 2018-08-21 Canon Kabushiki Kaisha Solid-state imaging device and imaging system
JP2015188049A (ja) * 2014-03-14 2015-10-29 キヤノン株式会社 固体撮像装置及び撮像システム
US12133006B2 (en) 2014-03-14 2024-10-29 Canon Kabushiki Kaisha Solid-state imaging device and imaging system
US10497740B2 (en) 2015-03-18 2019-12-03 Sony Corporation Solid-state imaging element, imaging device, and electronic device
WO2016147901A1 (ja) * 2015-03-18 2016-09-22 ソニー株式会社 固体撮像素子、撮像装置、並びに電子機器
US10367026B2 (en) 2015-03-18 2019-07-30 Sony Corporation Solid-state imaging element, imaging device, and electronic device
US10163964B2 (en) 2015-03-18 2018-12-25 Sony Corporation Solid-state imaging element, imaging device, and electronic device
US10892293B2 (en) 2015-03-18 2021-01-12 Sony Corporation Solid-state imaging element, imaging device, and electronic device
US10692919B2 (en) 2015-03-18 2020-06-23 Sony Corporation Solid-state imaging element, imaging device, and electronic device
JP7438251B2 (ja) 2015-05-19 2024-02-26 マジック リープ, インコーポレイテッド セミグローバルシャッタイメージャ
JP7128872B2 (ja) 2015-05-19 2022-08-31 マジック リープ, インコーポレイテッド セミグローバルシャッタイメージャ
JP2021013186A (ja) * 2015-05-19 2021-02-04 マジック リープ, インコーポレイテッドMagic Leap,Inc. セミグローバルシャッタイメージャ
JP2018516013A (ja) * 2015-05-19 2018-06-14 マジック リープ, インコーポレイテッドMagic Leap,Inc. セミグローバルシャッタイメージャ
JP2022060543A (ja) * 2015-05-19 2022-04-14 マジック リープ, インコーポレイテッド セミグローバルシャッタイメージャ
JP2018157127A (ja) * 2017-03-21 2018-10-04 キヤノン株式会社 固体撮像装置及び撮像システム
KR102262794B1 (ko) * 2017-03-21 2021-06-09 캐논 가부시끼가이샤 고체 촬상 장치, 촬상 시스템 및 이동체
KR20180106989A (ko) * 2017-03-21 2018-10-01 캐논 가부시끼가이샤 고체 촬상 장치, 촬상 시스템 및 이동체
JP2019029643A (ja) * 2017-07-31 2019-02-21 パナソニックIpマネジメント株式会社 撮像装置
JP2023121769A (ja) * 2017-07-31 2023-08-31 パナソニックIpマネジメント株式会社 撮像装置
JP2018061060A (ja) * 2017-12-28 2018-04-12 キヤノン株式会社 固体撮像装置及び撮像システム
US11558571B2 (en) 2018-07-19 2023-01-17 Sony Semiconductor Solutions Corporation Solid-state imaging element and imaging device
WO2020017115A1 (ja) * 2018-07-19 2020-01-23 ソニーセミコンダクタソリューションズ株式会社 固体撮像素子、および、撮像装置

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US20110248371A1 (en) 2011-10-13
US8716719B2 (en) 2014-05-06

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