JP2011185810A5 - - Google Patents

Download PDF

Info

Publication number
JP2011185810A5
JP2011185810A5 JP2010052652A JP2010052652A JP2011185810A5 JP 2011185810 A5 JP2011185810 A5 JP 2011185810A5 JP 2010052652 A JP2010052652 A JP 2010052652A JP 2010052652 A JP2010052652 A JP 2010052652A JP 2011185810 A5 JP2011185810 A5 JP 2011185810A5
Authority
JP
Japan
Prior art keywords
light
light receiving
element array
receiving element
optical encoder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010052652A
Other languages
English (en)
Japanese (ja)
Other versions
JP5562077B2 (ja
JP2011185810A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010052652A priority Critical patent/JP5562077B2/ja
Priority claimed from JP2010052652A external-priority patent/JP5562077B2/ja
Priority to US13/038,597 priority patent/US8742322B2/en
Priority to EP11157257.4A priority patent/EP2369303B1/en
Publication of JP2011185810A publication Critical patent/JP2011185810A/ja
Publication of JP2011185810A5 publication Critical patent/JP2011185810A5/ja
Application granted granted Critical
Publication of JP5562077B2 publication Critical patent/JP5562077B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010052652A 2010-03-10 2010-03-10 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法 Expired - Fee Related JP5562077B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010052652A JP5562077B2 (ja) 2010-03-10 2010-03-10 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法
US13/038,597 US8742322B2 (en) 2010-03-10 2011-03-02 Encoder and interferometer that generate M-phase signals by multiplying N-phase signals by M coefficient sets, where N is not less than 6 and M is not smaller than 2
EP11157257.4A EP2369303B1 (en) 2010-03-10 2011-03-08 Optical encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010052652A JP5562077B2 (ja) 2010-03-10 2010-03-10 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法

Publications (3)

Publication Number Publication Date
JP2011185810A JP2011185810A (ja) 2011-09-22
JP2011185810A5 true JP2011185810A5 (enExample) 2013-04-25
JP5562077B2 JP5562077B2 (ja) 2014-07-30

Family

ID=44276111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010052652A Expired - Fee Related JP5562077B2 (ja) 2010-03-10 2010-03-10 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法

Country Status (3)

Country Link
US (1) US8742322B2 (enExample)
EP (1) EP2369303B1 (enExample)
JP (1) JP5562077B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5984364B2 (ja) * 2011-11-22 2016-09-06 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
KR101361625B1 (ko) * 2012-06-11 2014-02-12 한국표준과학연구원 위치 측정 장치 및 위치 측정 방법
JP5964162B2 (ja) * 2012-07-18 2016-08-03 株式会社ミツトヨ エンコーダ
JP6003372B2 (ja) * 2012-08-07 2016-10-05 富士通株式会社 光学式ロータリーエンコーダ及びその補正方法
JP2015041648A (ja) * 2013-08-20 2015-03-02 株式会社東芝 パターン形成方法、パターン形成用マスク及びパターン形成装置
JP6247050B2 (ja) * 2013-08-28 2017-12-13 Ｎｅｃプラットフォームズ株式会社 情報処理装置、及び、位置検出方法
JP6138664B2 (ja) * 2013-10-30 2017-05-31 オークマ株式会社 光学式エンコーダ
JP6369042B2 (ja) 2013-11-05 2018-08-08 日本精工株式会社 光学式エンコーダユニット及び光学式エンコーダ
US10312837B2 (en) * 2016-05-02 2019-06-04 Canon Kabushiki Kaisha Information processing apparatus, and recording medium storing computer program
JP7203556B2 (ja) 2018-10-11 2023-01-13 オルガノ株式会社 非水電解液の製造装置および非水電解液の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3239108A1 (de) * 1982-10-22 1984-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmessverfahren und einrichtungen zur durchfuehrung des verfahrens
JPS63157016A (ja) * 1986-12-22 1988-06-30 Yokogawa Electric Corp 光学式変位測定装置
JPH03128418A (ja) * 1989-07-20 1991-05-31 Yokogawa Electric Corp 光学式エンコーダ
US5173936A (en) * 1990-05-08 1992-12-22 The Goeken Group Corporation Telephone handset holder assembly
US5572019A (en) * 1991-03-12 1996-11-05 Canon Kabushiki Kaisha Encoder with varying width light receiver and apparatus having the encoder
DE4338680C1 (de) * 1993-11-12 1995-03-23 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmeßeinrichtung
JPH08226804A (ja) 1995-02-21 1996-09-03 Canon Inc 変位情報検出装置及びこれを用いたドライブ制御装置
AUPP777898A0 (en) * 1998-12-17 1999-01-21 Bishop Innovation Pty Limited Position sensor
US6803560B1 (en) * 1999-06-10 2004-10-12 Canon Kabushiki Kaisha Optical encoder
WO2003021197A1 (en) * 2001-08-30 2003-03-13 Microe Systems Corporation Harmonic suppressing photodetector array
JP2003279382A (ja) * 2002-03-20 2003-10-02 Mitsutoyo Corp 光電式エンコーダ
JP4291168B2 (ja) * 2004-01-21 2009-07-08 オリンパス株式会社 光学式エンコーダ用光検出器

Similar Documents

Publication Publication Date Title
JP2011185810A5 (enExample)
US8742322B2 (en) Encoder and interferometer that generate M-phase signals by multiplying N-phase signals by M coefficient sets, where N is not less than 6 and M is not smaller than 2
JP2004069702A5 (enExample)
JP6291313B2 (ja) 光周波数領域反射測定方法、光周波数領域反射測定装置およびそれを用いた位置または形状を測定する装置
JP6032924B2 (ja) エンコーダ
IN2014KN01350A (enExample)
JP2020515831A5 (enExample)
JP2011247879A (ja) 光学式エンコーダ
GB2507022A (en) Grating-based scanner with phase and pitch adjustment
WO2017187484A1 (ja) 物体撮像装置
JP2014055893A5 (enExample)
EP2314983B1 (en) Heterodyne interferometer
JP6386337B2 (ja) 光学式エンコーダ
JP2016506516A5 (enExample)
WO2017141241A3 (en) Dynamic full three dimensional display
WO2007016051A3 (en) Optical encoder having slanted optical detector elements for harmonic suppression
JP5118246B1 (ja) 光ファイバセンサ
JP2008232726A (ja) 物理量測定システム
JP6003372B2 (ja) 光学式ロータリーエンコーダ及びその補正方法
KR101078387B1 (ko) 광섬유 자이로스코프의 사냑 간섭계 시뮬레이터 및 사냑 간섭계의 시뮬레이션 방법
JP2016008965A5 (enExample)
EP2653838A3 (en) Multiple wavelength configuration for an optical encoder readhead
JP2005077137A (ja) エンコーダの出力信号処理装置
JP2016161433A5 (enExample)
WO2015038794A8 (en) Balanced two-arm x-ray grating interferometer