JP2016008965A5 - - Google Patents

Download PDF

Info

Publication number
JP2016008965A5
JP2016008965A5 JP2015085718A JP2015085718A JP2016008965A5 JP 2016008965 A5 JP2016008965 A5 JP 2016008965A5 JP 2015085718 A JP2015085718 A JP 2015085718A JP 2015085718 A JP2015085718 A JP 2015085718A JP 2016008965 A5 JP2016008965 A5 JP 2016008965A5
Authority
JP
Japan
Prior art keywords
reference mark
ref
spatial frequency
scale
generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015085718A
Other languages
English (en)
Japanese (ja)
Other versions
JP6293700B2 (ja
JP2016008965A (ja
Filing date
Publication date
Priority claimed from DE102014212268.6A external-priority patent/DE102014212268A1/de
Application filed filed Critical
Publication of JP2016008965A publication Critical patent/JP2016008965A/ja
Publication of JP2016008965A5 publication Critical patent/JP2016008965A5/ja
Application granted granted Critical
Publication of JP6293700B2 publication Critical patent/JP6293700B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015085718A 2014-06-26 2015-04-20 エンコーダ Active JP6293700B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014212268.6A DE102014212268A1 (de) 2014-06-26 2014-06-26 Positionsmesseinrichtung
DE102014212268.6 2014-06-26

Publications (3)

Publication Number Publication Date
JP2016008965A JP2016008965A (ja) 2016-01-18
JP2016008965A5 true JP2016008965A5 (enExample) 2018-02-08
JP6293700B2 JP6293700B2 (ja) 2018-03-14

Family

ID=53373327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015085718A Active JP6293700B2 (ja) 2014-06-26 2015-04-20 エンコーダ

Country Status (3)

Country Link
EP (1) EP2963391B1 (enExample)
JP (1) JP6293700B2 (enExample)
DE (1) DE102014212268A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6400036B2 (ja) 2016-03-14 2018-10-03 キヤノン株式会社 位置検出装置、工作装置、および、露光装置
DE102017201257A1 (de) * 2017-01-26 2018-07-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP7475973B2 (ja) 2020-06-08 2024-04-30 キヤノン株式会社 光学式エンコーダ及び制御装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59102126D1 (de) * 1991-05-18 1994-08-11 Heidenhain Gmbh Dr Johannes Interferentielle Positionsmessvorrichtung.
DE4212281A1 (de) * 1991-07-11 1993-10-14 Heidenhain Gmbh Dr Johannes Interferentielle Positionsmeßvorrichtung
JP2002512786A (ja) 1998-04-29 2002-05-08 メルク エンド カムパニー インコーポレーテッド ラットアグーチ関連タンパク質をコードする核酸
DE19941318A1 (de) 1999-08-31 2001-03-15 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
DE19956912A1 (de) * 1999-11-26 2001-08-09 Heidenhain Gmbh Dr Johannes Winkelmeßsystem und Winkelmeßverfahren zur berührungslosen Winkelmessung
DE102008044858A1 (de) * 2008-08-28 2010-03-04 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Similar Documents

Publication Publication Date Title
CN103852090B (zh) 位置测量装置
CN102138060B (zh) 光学位置测量设备
JP6987045B2 (ja) エンコーダ装置
JP6000759B2 (ja) スケール、エンコーダ、レンズ装置、および、撮像システム
JP2009186471A5 (enExample)
JP2012037392A5 (enExample)
JP2008129021A5 (enExample)
JP6400036B2 (ja) 位置検出装置、工作装置、および、露光装置
DE502007006292D1 (de) Positionsmesseinrichtung
JP2008129022A5 (enExample)
EP3035003A1 (en) Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, position detection method, program, and storage medium
JP2018530751A5 (enExample)
JP5046523B2 (ja) 位置測定装置
JP6465950B2 (ja) 光学式エンコーダ
JP2016008965A5 (enExample)
JP2019117386A5 (ja) エンコーダ装置及び露光装置
JP2014055893A5 (enExample)
US10190892B2 (en) Encoder
JP6293700B2 (ja) エンコーダ
JP6440609B2 (ja) 位置検出装置、レンズ装置、撮像システム、工作装置、露光装置、位置検出方法、プログラム、記憶媒体
JP2007040996A5 (enExample)
JP2007040996A (ja) 光学式エンコーダ
JP6427093B2 (ja) 光学式位置測定装置
KR101361625B1 (ko) 위치 측정 장치 및 위치 측정 방법
JP2016161431A5 (enExample)