JP2004069702A5 - - Google Patents

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Publication number
JP2004069702A5
JP2004069702A5 JP2003286880A JP2003286880A JP2004069702A5 JP 2004069702 A5 JP2004069702 A5 JP 2004069702A5 JP 2003286880 A JP2003286880 A JP 2003286880A JP 2003286880 A JP2003286880 A JP 2003286880A JP 2004069702 A5 JP2004069702 A5 JP 2004069702A5
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JP
Japan
Prior art keywords
beam bundle
partial beam
grating
scanning
light source
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JP2003286880A
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English (en)
Japanese (ja)
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JP2004069702A (ja
JP4856844B2 (ja
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Publication of JP2004069702A5 publication Critical patent/JP2004069702A5/ja
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JP2003286880A 2002-08-07 2003-08-05 干渉式位置測定装置 Expired - Fee Related JP4856844B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10236230.0 2002-08-07
DE10236230 2002-08-07

Publications (3)

Publication Number Publication Date
JP2004069702A JP2004069702A (ja) 2004-03-04
JP2004069702A5 true JP2004069702A5 (enExample) 2006-08-10
JP4856844B2 JP4856844B2 (ja) 2012-01-18

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Family Applications (1)

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JP2003286880A Expired - Fee Related JP4856844B2 (ja) 2002-08-07 2003-08-05 干渉式位置測定装置

Country Status (5)

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US (1) US7154609B2 (enExample)
EP (1) EP1396704B1 (enExample)
JP (1) JP4856844B2 (enExample)
CN (1) CN100334422C (enExample)
DE (1) DE10333772A1 (enExample)

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DE102005043569A1 (de) * 2005-09-12 2007-03-22 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7636165B2 (en) * 2006-03-21 2009-12-22 Asml Netherlands B.V. Displacement measurement systems lithographic apparatus and device manufacturing method
GB0613902D0 (en) * 2006-07-13 2006-08-23 Renishaw Plc Scale and readhead
KR101184167B1 (ko) 2006-09-08 2012-09-18 지에스아이 그룹 코포레이션 광 위치 인코더
CN100424467C (zh) * 2006-12-08 2008-10-08 华中科技大学 一种大量程直线型相位光栅轮廓测量位移传感器
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
JP5212840B2 (ja) * 2007-10-05 2013-06-19 株式会社ニコン エンコーダ
DE102007055665A1 (de) * 2007-11-21 2009-05-28 Dr. Johannes Heidenhain Gmbh Interferometeranordnung und Verfahren zu deren Betrieb
US9618369B2 (en) * 2008-08-26 2017-04-11 The University Court Of The University Of Glasgow Uses of electromagnetic interference patterns
CN102197286B (zh) * 2008-10-23 2014-09-03 株式会社尼康 编码器
WO2010089824A1 (ja) * 2009-02-06 2010-08-12 株式会社ニコン エンコーダ
JP5814339B2 (ja) 2010-03-30 2015-11-17 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ 干渉計エンコーダ・システム
DE102010063253A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP5849103B2 (ja) 2011-02-01 2016-01-27 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ 干渉ヘテロダイン光学エンコーダシステム
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DE102011082570A1 (de) * 2011-09-13 2013-03-14 Dr. Johannes Heidenhain Gmbh Rotatorische Positionsmesseinrichtung
US9080899B2 (en) * 2011-12-23 2015-07-14 Mitutoyo Corporation Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch
TWI516746B (zh) 2012-04-20 2016-01-11 賽格股份有限公司 在干涉編碼系統中執行非諧循環錯誤補償的方法、裝置及計算機程式產品，以及微影系統
DE102013221898A1 (de) * 2013-10-29 2015-04-30 Dr. Johannes Heidenhain Gmbh Vorrichtung zur Positionsbestimmung
JP6386337B2 (ja) 2014-10-23 2018-09-05 株式会社ミツトヨ 光学式エンコーダ
JP6437802B2 (ja) * 2014-11-28 2018-12-12 株式会社ミツトヨ 光学式エンコーダ
JP6593868B2 (ja) 2015-07-28 2019-10-23 株式会社ミツトヨ 変位検出装置
US9651404B2 (en) * 2015-09-29 2017-05-16 Mitutoyo Corporation Optical encoder having an optical portion comprising dual lenses and an aperture portion positioned in relation to a moiré grating
CN105547184B (zh) * 2015-12-23 2018-12-07 华中科技大学 一种平面度误差测量装置及其二维扫描工作台
US10126560B2 (en) * 2016-02-18 2018-11-13 National Engineering Research Center for Optical Instrumentation Spectrum-generation system based on multiple-diffraction optical phasometry
JP2018066629A (ja) * 2016-10-19 2018-04-26 太陽誘電株式会社 ロードセル
JP6838954B2 (ja) * 2016-12-13 2021-03-03 株式会社ミツトヨ 光電式エンコーダ
US10274344B2 (en) 2016-12-27 2019-04-30 Mitutoyo Corporation Displacement encoder
US10094685B2 (en) 2016-12-27 2018-10-09 Mitutoyo Corporation Displacement encoder
US10168189B1 (en) * 2017-06-29 2019-01-01 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration for providing displacement signal having a plurality of spatial phase detectors arranged in a spatial phase sequence along a direction transverse to the measuring axis
US10302466B2 (en) 2017-06-29 2019-05-28 Mitutoyo Corporation Contamination and defect resistant optical encoder configuration including first and second illumination source diffraction gratings arranged in first and second parallel planes for providing displacement signals
DE102019214895B4 (de) * 2018-09-28 2024-08-22 Mitutoyo Corporation Verschmutzungs- und defektbeständige optische Drehgeberkonfiguration zum Liefern von Verschiebungssignalen
CN110375640B (zh) * 2019-06-06 2020-12-29 杭州电子科技大学 一种测量透明物体的旋转式相移干涉仪及测量方法
CN110285761B (zh) * 2019-07-03 2021-02-23 哈尔滨工业大学 一种结构紧凑的光栅三维位移测量装置
CN110907140B (zh) * 2019-11-25 2024-10-29 南京南智先进光电集成技术研究院有限公司 一种光栅周期的测量装置及方法

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