CN110375640B - 一种测量透明物体的旋转式相移干涉仪及测量方法 - Google Patents
一种测量透明物体的旋转式相移干涉仪及测量方法 Download PDFInfo
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- CN110375640B CN110375640B CN201910491939.5A CN201910491939A CN110375640B CN 110375640 B CN110375640 B CN 110375640B CN 201910491939 A CN201910491939 A CN 201910491939A CN 110375640 B CN110375640 B CN 110375640B
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- 230000010363 phase shift Effects 0.000 title claims abstract description 50
- 238000000034 method Methods 0.000 title claims abstract description 17
- 238000003384 imaging method Methods 0.000 claims abstract description 4
- 239000011159 matrix material Substances 0.000 claims description 16
- 238000005259 measurement Methods 0.000 claims description 2
- 238000000691 measurement method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000005305 interferometry Methods 0.000 description 3
- 230000001427 coherent effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02083—Interferometers characterised by particular signal processing and presentation
- G01B9/02085—Combining two or more images of different regions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
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- Signal Processing (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
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CN201910491939.5A CN110375640B (zh) | 2019-06-06 | 2019-06-06 | 一种测量透明物体的旋转式相移干涉仪及测量方法 |
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CN110375640B true CN110375640B (zh) | 2020-12-29 |
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CN111664800B (zh) * | 2020-05-19 | 2022-01-07 | 上海大学 | 一种平行平板多表面检测方法及夹具 |
CN111750784B (zh) * | 2020-06-04 | 2022-11-08 | 上海大学 | 可实现任意测量位置下多表面被测件的测量和算法选择的方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4231578A1 (de) * | 1992-09-21 | 1994-03-24 | Nova C O R D Ag Vaduz | Verfahren zur Ermittlung von Verformungen an einem Prüfobjekt mit diffus streuender Oberfläche, typischerweise an Reifen, sowie Meßkopf zur Durchführung des Verfahrens |
CN1483995A (zh) * | 2002-08-07 | 2004-03-24 | Լ����˹���Ǻ�����ʿ�ɷ�����˾ | 干涉测位仪 |
CN101023567A (zh) * | 2004-09-22 | 2007-08-22 | 康宁股份有限公司 | 来自模式选择调谐器的光学反馈 |
CN101089550A (zh) * | 2007-07-13 | 2007-12-19 | 上海大学 | 基于数字微镜和数据合成技术的透明物体或反射物体的形貌测量装置和方法 |
CN101718531A (zh) * | 2009-11-06 | 2010-06-02 | 北京理工大学 | 差动共焦与点衍射干涉相结合测量球体形貌及壁厚的方法与装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5398112A (en) * | 1993-10-04 | 1995-03-14 | Wyko Corporation | Method for testing an optical window with a small wedge angle |
US20090078316A1 (en) * | 2007-09-24 | 2009-03-26 | Qualcomm Incorporated | Interferometric photovoltaic cell |
CN102109414B (zh) * | 2010-12-15 | 2012-05-02 | 深圳大学 | 利用外差干涉标定空间光调制器相位调制的方法和装置 |
IT1404208B1 (it) * | 2011-02-28 | 2013-11-15 | Gerresheimer Pisa Spa | Metodo e dispositivo di misura dello spessore di un oggetto trasparente su linee di produzione automatica |
CN102589440B (zh) * | 2012-01-11 | 2014-11-05 | 西安交通大学 | 连续变角度数字全息干涉测量的方法 |
CN103292738B (zh) * | 2013-06-26 | 2015-12-09 | 中国科学院光电技术研究所 | 一种球面面形误差绝对检测方法 |
CN204479017U (zh) * | 2015-03-13 | 2015-07-15 | 浙江师范大学 | 螺旋相移干涉仪装置 |
CN106813594B (zh) * | 2017-01-03 | 2019-02-01 | 中国科学院上海光学精密机械研究所 | 大口径掠入射反射聚焦镜高精度面形检测方法 |
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- 2019-06-06 CN CN201910491939.5A patent/CN110375640B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4231578A1 (de) * | 1992-09-21 | 1994-03-24 | Nova C O R D Ag Vaduz | Verfahren zur Ermittlung von Verformungen an einem Prüfobjekt mit diffus streuender Oberfläche, typischerweise an Reifen, sowie Meßkopf zur Durchführung des Verfahrens |
CN1483995A (zh) * | 2002-08-07 | 2004-03-24 | Լ����˹���Ǻ�����ʿ�ɷ�����˾ | 干涉测位仪 |
CN101023567A (zh) * | 2004-09-22 | 2007-08-22 | 康宁股份有限公司 | 来自模式选择调谐器的光学反馈 |
CN101089550A (zh) * | 2007-07-13 | 2007-12-19 | 上海大学 | 基于数字微镜和数据合成技术的透明物体或反射物体的形貌测量装置和方法 |
CN101718531A (zh) * | 2009-11-06 | 2010-06-02 | 北京理工大学 | 差动共焦与点衍射干涉相结合测量球体形貌及壁厚的方法与装置 |
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