JP2010527013A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2010527013A5 JP2010527013A5 JP2010507821A JP2010507821A JP2010527013A5 JP 2010527013 A5 JP2010527013 A5 JP 2010527013A5 JP 2010507821 A JP2010507821 A JP 2010507821A JP 2010507821 A JP2010507821 A JP 2010507821A JP 2010527013 A5 JP2010527013 A5 JP 2010527013A5
- Authority
- JP
- Japan
- Prior art keywords
- scale
- measuring device
- movable
- position measuring
- mmy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007935 neutral effect Effects 0.000 claims 5
- 230000008878 coupling Effects 0.000 claims 3
- 238000010168 coupling process Methods 0.000 claims 3
- 238000005859 coupling reaction Methods 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 2
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102007023300A DE102007023300A1 (de) | 2007-05-16 | 2007-05-16 | Positionsmesseinrichtung und Anordnung derselben |
| DE102007023300.2 | 2007-05-16 | ||
| PCT/EP2008/003552 WO2008138501A1 (de) | 2007-05-16 | 2008-05-02 | Positionsmesseinrichtung |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010527013A JP2010527013A (ja) | 2010-08-05 |
| JP2010527013A5 true JP2010527013A5 (enExample) | 2011-05-19 |
| JP5079874B2 JP5079874B2 (ja) | 2012-11-21 |
Family
ID=39651082
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010507821A Active JP5079874B2 (ja) | 2007-05-16 | 2008-05-02 | 位置測定装置 |
| JP2010507822A Active JP5253498B2 (ja) | 2007-05-16 | 2008-05-02 | 光学位置測定装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010507822A Active JP5253498B2 (ja) | 2007-05-16 | 2008-05-02 | 光学位置測定装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7907286B2 (enExample) |
| EP (2) | EP2149036B1 (enExample) |
| JP (2) | JP5079874B2 (enExample) |
| CN (2) | CN101680745B (enExample) |
| AT (1) | ATE487109T1 (enExample) |
| DE (2) | DE102007023300A1 (enExample) |
| WO (2) | WO2008138501A1 (enExample) |
Families Citing this family (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0613902D0 (en) * | 2006-07-13 | 2006-08-23 | Renishaw Plc | Scale and readhead |
| DE102007023300A1 (de) * | 2007-05-16 | 2008-11-20 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung und Anordnung derselben |
| US10259607B2 (en) * | 2008-03-04 | 2019-04-16 | Vanrx Pharmasystems Inc. | Aseptic robotic filling system and method |
| JP5268529B2 (ja) * | 2008-09-29 | 2013-08-21 | キヤノン株式会社 | 変位計測装置及び半導体製造装置 |
| US8449483B2 (en) * | 2008-12-02 | 2013-05-28 | Patrick Eddy | Compression device and control system for applying pressure to a limb of a living being |
| DE102010003157B4 (de) * | 2010-03-23 | 2019-10-24 | Dr. Johannes Heidenhain Gmbh | Vorrichtung zur interferentiellen Abstandsmessung |
| JP2013534319A (ja) * | 2010-08-19 | 2013-09-02 | エレスタ・リレイズ・ゲーエムベーハー | 位置測定デバイス |
| CA2815094C (en) * | 2010-10-25 | 2018-01-16 | Nikon Corporation | Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure |
| DE102011081879A1 (de) * | 2010-11-03 | 2012-05-03 | Dr. Johannes Heidenhain Gmbh | Optische Winkelmesseinrichtung |
| DE102010043469A1 (de) * | 2010-11-05 | 2012-05-10 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102011082156A1 (de) * | 2010-12-16 | 2012-06-21 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102010063253A1 (de) | 2010-12-16 | 2012-06-21 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102011076055A1 (de) * | 2011-05-18 | 2012-11-22 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102011076178B4 (de) * | 2011-05-20 | 2022-03-31 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| US8604413B2 (en) * | 2011-06-13 | 2013-12-10 | Mitutoyo Corporation | Optical encoder including displacement sensing normal to the encoder scale grating surface |
| NL2009197A (en) | 2011-08-25 | 2013-02-27 | Asml Netherlands Bv | System for detection motion, lithographic apparatus and device manufacturing method. |
| DE102011111900A1 (de) * | 2011-08-30 | 2013-02-28 | Dr. Johannes Heidenhain Gmbh | Vorrichtung zur interferometrischen Abstandsbestimmung |
| US8724095B2 (en) | 2011-10-25 | 2014-05-13 | Nikon Corporation | Optical assembly for laser radar |
| EP2629325B1 (de) | 2012-02-17 | 2014-10-22 | Dr. Johannes Heidenhain GmbH | Anordnung und Verfahren zur Positionierung eines Bearbeitungswerkzeuges gegenüber einem Werkstück |
| SG11201503261TA (en) | 2012-11-19 | 2015-05-28 | Asml Netherlands Bv | Position measurement system, grating for a position measurement system and method |
| CN103148779B (zh) * | 2013-01-30 | 2016-01-13 | 中国科学院长春光学精密机械与物理研究所 | 位置测量设备中光源的调整装置 |
| DE102014208988A1 (de) * | 2013-09-11 | 2015-03-12 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102013220214A1 (de) * | 2013-10-07 | 2015-04-09 | Dr. Johannes Heidenhain Gmbh | Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück |
| DE102013220196A1 (de) * | 2013-10-07 | 2015-04-09 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102013221898A1 (de) * | 2013-10-29 | 2015-04-30 | Dr. Johannes Heidenhain Gmbh | Vorrichtung zur Positionsbestimmung |
| JP6359340B2 (ja) * | 2014-05-27 | 2018-07-18 | 株式会社ミツトヨ | スケール及び光学式エンコーダ |
| JP6088466B2 (ja) * | 2014-06-09 | 2017-03-01 | ファナック株式会社 | 反射型の光学式エンコーダ |
| DE102014211004A1 (de) | 2014-06-10 | 2015-12-17 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102015200293A1 (de) * | 2015-01-13 | 2016-07-14 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102015219810A1 (de) * | 2015-10-13 | 2017-04-13 | Dr. Johannes Heidenhain Gmbh | X-Y-Tisch mit einer Positionsmesseinrichtung |
| US10126560B2 (en) * | 2016-02-18 | 2018-11-13 | National Engineering Research Center for Optical Instrumentation | Spectrum-generation system based on multiple-diffraction optical phasometry |
| DE102016214456A1 (de) * | 2016-08-04 | 2018-02-08 | Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung | Positionsmesseinrichtung und Verfahren zum Betreiben einer Positionsmesseinrichtung |
| TWI648520B (zh) | 2016-10-21 | 2019-01-21 | 財團法人工業技術研究院 | 光學編碼裝置 |
| DE102017201257A1 (de) * | 2017-01-26 | 2018-07-26 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| TWI680648B (zh) | 2018-12-26 | 2019-12-21 | 財團法人工業技術研究院 | 編碼盤、檢光器、光學絕對式旋轉編碼器及編碼值輸出、偵錯與除錯的方法 |
| DE102019206937A1 (de) | 2019-05-14 | 2020-11-19 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| TWI716246B (zh) | 2019-12-31 | 2021-01-11 | 財團法人工業技術研究院 | 光學編碼器 |
| DE102020202080A1 (de) | 2020-02-19 | 2021-08-19 | Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung | Optische Positionsmesseinrichtung |
| CN115993088A (zh) | 2021-10-20 | 2023-04-21 | 约翰内斯.海德汉博士有限公司 | 光学位置测量设备 |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3884580A (en) * | 1973-09-07 | 1975-05-20 | Gerber Scientific Instr Co | Apparatus for measuring and positioning by interferometry |
| DE2521618B1 (de) * | 1975-05-15 | 1976-03-11 | Zeiss Carl Fa | Vorrichtung zum Messen oder Einstellen von zweidimensionalen Lagekoordinaten |
| GB8413955D0 (en) | 1984-05-31 | 1984-07-04 | Pa Consulting Services | Displacement measuring apparatus |
| DE8628805U1 (de) | 1986-10-29 | 1989-01-26 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Lichtelektrische Längen- oder Winkelmeßeinrichtung |
| DE3905730C2 (de) | 1989-02-24 | 1995-06-14 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
| DE4033013C2 (de) * | 1990-10-18 | 1994-11-17 | Heidenhain Gmbh Dr Johannes | Polarisationsoptische Anordnung |
| DE4033556A1 (de) | 1990-10-22 | 1992-04-23 | Suess Kg Karl | Messanordnung fuer x,y,(phi)-koordinatentische |
| JP3028716B2 (ja) * | 1993-09-29 | 2000-04-04 | キヤノン株式会社 | 光学式変位センサ |
| ATE192566T1 (de) * | 1994-02-23 | 2000-05-15 | Heidenhain Gmbh Dr Johannes | Positionsmessvorrichtung |
| JP3530573B2 (ja) * | 1994-04-27 | 2004-05-24 | キヤノン株式会社 | 光学式変位センサ |
| JP3158878B2 (ja) * | 1994-07-28 | 2001-04-23 | 松下電器産業株式会社 | 光学式エンコーダ |
| DE19521295C2 (de) * | 1995-06-10 | 2000-07-13 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Positionsmeßeinrichtung |
| DE19748802B4 (de) * | 1996-11-20 | 2010-09-09 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmeßeinrichtung |
| DE19652563A1 (de) * | 1996-12-17 | 1998-06-18 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Positionsmeßeinrichtung |
| EP0978708B1 (de) * | 1998-08-01 | 2005-10-05 | Dr. Johannes Heidenhain GmbH | Rotatorische Positionsmesseinrichtung |
| DE29916394U1 (de) * | 1999-09-17 | 2001-02-15 | Dr. Johannes Heidenhain Gmbh, 83301 Traunreut | Optische Positionsmeßeinrichtung |
| DE19962278A1 (de) * | 1999-12-23 | 2001-08-02 | Heidenhain Gmbh Dr Johannes | Positionsmeßeinrichtung |
| DE10022619A1 (de) * | 2000-04-28 | 2001-12-06 | Heidenhain Gmbh Dr Johannes | Abtasteinheit für eine optische Positionsmesseinrichtung |
| JP2002090114A (ja) * | 2000-07-10 | 2002-03-27 | Mitsutoyo Corp | 光スポット位置センサ及び変位測定装置 |
| EP1319170B1 (de) * | 2000-09-14 | 2005-03-09 | Dr. Johannes Heidenhain GmbH | Positionsmesseinrichtung |
| JP3720751B2 (ja) * | 2001-10-23 | 2005-11-30 | オリンパス株式会社 | 光学式エンコーダ |
| CN1253699C (zh) | 2002-03-18 | 2006-04-26 | 株式会社三丰 | 对偏移具有低灵敏度的光学位移传感装置 |
| DE10333772A1 (de) * | 2002-08-07 | 2004-02-26 | Dr. Johannes Heidenhain Gmbh | Interferenzielle Positionsmesseinrichtung |
| DE102005006247A1 (de) * | 2005-02-11 | 2006-08-17 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| US7512452B2 (en) | 2005-06-13 | 2009-03-31 | Mauro George E | Positioning system for eliminating lost motion effect |
| DE102005029917A1 (de) * | 2005-06-28 | 2007-01-04 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| DE102005043569A1 (de) * | 2005-09-12 | 2007-03-22 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| KR20080045219A (ko) | 2005-09-21 | 2008-05-22 | 코닌클리케 필립스 일렉트로닉스 엔.브이. | 물체의 움직임을 검출하기 위한 시스템 |
| US7636165B2 (en) * | 2006-03-21 | 2009-12-22 | Asml Netherlands B.V. | Displacement measurement systems lithographic apparatus and device manufacturing method |
| DE102006042743A1 (de) * | 2006-09-12 | 2008-03-27 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| DE102007023300A1 (de) * | 2007-05-16 | 2008-11-20 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung und Anordnung derselben |
| JP5095475B2 (ja) * | 2008-04-14 | 2012-12-12 | 株式会社森精機製作所 | 光学式変位測定装置 |
-
2007
- 2007-05-16 DE DE102007023300A patent/DE102007023300A1/de not_active Withdrawn
-
2008
- 2008-04-28 US US12/110,940 patent/US7907286B2/en active Active
- 2008-04-28 US US12/110,929 patent/US7796272B2/en active Active
- 2008-05-02 WO PCT/EP2008/003552 patent/WO2008138501A1/de not_active Ceased
- 2008-05-02 JP JP2010507821A patent/JP5079874B2/ja active Active
- 2008-05-02 EP EP08758369.6A patent/EP2149036B1/de active Active
- 2008-05-02 JP JP2010507822A patent/JP5253498B2/ja active Active
- 2008-05-02 WO PCT/EP2008/003553 patent/WO2008138502A1/de not_active Ceased
- 2008-05-02 AT AT08758368T patent/ATE487109T1/de active
- 2008-05-02 DE DE502008001727T patent/DE502008001727D1/de active Active
- 2008-05-02 CN CN2008800163321A patent/CN101680745B/zh active Active
- 2008-05-02 EP EP08758368A patent/EP2149029B1/de active Active
- 2008-05-02 CN CN2008800162193A patent/CN101688795B/zh active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2010527013A5 (enExample) | ||
| JP5079874B2 (ja) | 位置測定装置 | |
| US8938317B2 (en) | System and method for calibrating laser cutting machines | |
| JP6278605B2 (ja) | 位置測定装置とこのような位置測定装置を備えた構造体 | |
| JP5804899B2 (ja) | 光学式角度測定装置 | |
| JP6329456B2 (ja) | 光学式位置測定装置 | |
| JP2010515070A (ja) | 目標物の位置の非接触式干渉計型検出のための位置検出システム及びこれを備えた走査システム | |
| JP2008129021A5 (enExample) | ||
| JP2008129021A (ja) | エンコーダ | |
| JP5128368B2 (ja) | エンコーダ用のスケール及びエンコーダ | |
| JP2019117386A5 (ja) | エンコーダ装置及び露光装置 | |
| JP2007333722A5 (enExample) | ||
| JP6386337B2 (ja) | 光学式エンコーダ | |
| JP6391155B2 (ja) | 絶対角測定装置及び絶対角測定方法 | |
| JP6401594B2 (ja) | 3次元チルトセンサ及びこれを用いた測定対象の3軸廻りの角度変位を測定する方法 | |
| JP6525546B2 (ja) | 位置計測装置 | |
| JP6215572B2 (ja) | 変位計測装置 | |
| CN101303222A (zh) | 光学尺 | |
| JP2011033368A (ja) | 光学式エンコーダ | |
| US9303981B2 (en) | Position-measuring device | |
| US11353583B2 (en) | Optical position-measurement device with varying focal length along a transverse direction | |
| JP6570289B2 (ja) | 機械を較正するための測定マークシステム | |
| JP2015087193A5 (enExample) | ||
| KR101174000B1 (ko) | 회절소자와 간섭현상을 이용한 4자유도 운동오차 측정 방법 및 장치 | |
| JP2011145150A (ja) | 光学式エンコーダの設計方法 |