JP5118246B1 - 光ファイバセンサ - Google Patents
光ファイバセンサ Download PDFInfo
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- JP5118246B1 JP5118246B1 JP2011271701A JP2011271701A JP5118246B1 JP 5118246 B1 JP5118246 B1 JP 5118246B1 JP 2011271701 A JP2011271701 A JP 2011271701A JP 2011271701 A JP2011271701 A JP 2011271701A JP 5118246 B1 JP5118246 B1 JP 5118246B1
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 11
- 230000003287 optical effect Effects 0.000 claims abstract description 95
- 238000005259 measurement Methods 0.000 claims abstract description 52
- 230000003111 delayed effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 6
- 230000000737 periodic effect Effects 0.000 abstract 1
- 239000000835 fiber Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 5
- 230000010354 integration Effects 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 241001024304 Mino Species 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02023—Indirect probing of object, e.g. via influence on cavity or fibre
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35335—Aspects of emitters or receivers used by an interferometer in an optical fibre sensor arrangement
Abstract
【解決手段】干渉計の入力を周期性光パルスとし、参照光パルスの前半と後半で位相を90度(直交位相)異なる位相とし、計測光パルスと干渉させることにより、90度異なる2つの干渉出力値i1、i2を得て、その参照光と計測光の値r、sとから、参照光と計測光の位相差をθとして、2つの余弦値cosθ1、cosθ2を算出して余弦曲線上に位置を定め、その角度θ1、θ2を求めることによって、干渉光の強度変動、位相動作点変動の影響を除外するとともに、1周期前との角度の差分を積算して、センサ出力とすることにより、センサ信号として変動できる位相範囲が、±90度(半波長)を超えることを許容する光ファイバセンサを提供する。
【選択図】図1
Description
i=r+s+2√(r・s)cosθ (i、r、sは電気変換値)
で示され、真に得たいセンサ信号はθ値であるが、従来方式ではiとしてのみ求められることから、伝送経路でのi、r、sの強度変動による変動誤差分を分離することはできないという欠点があった。
i1=r+s+2√(r・s)cosθ1
i2=r+s+2√(r・s)cosθ2
となり、本発明では、r、s値も既値として得られる為
cosθ1=(i1−r−s)/2√(r・s)
cosθ2=(i2−r−s)/2√(r・s)
を演算により算出することができ、前記参照光φ2とφ3が直交位相にあることを前提として、前記cosθ1と前記cosθ2との大きさ比較と、前記cosθ1と前記cosθ2との絶対値比較により、余弦曲線上に前記cosθ1及び前記cosθ2の位置を定めることができることから、θ1及びθ2を求め、1周期前に求めたθ1a、θ2aとから、1周期前との前記位相差θの差分Δθ1=θ1−θ1a、Δθ2=θ2−θ2aを求めて、Δθ1とΔθ2のうち、前記cosθ1と前記cosθ2の絶対値比較で小さい側が直線性の良い差分Δθとして選択し、毎周期の前記Δθの積算値θsをセンサ出力とする演算処理部を備えることによって達成される。
(1)cosθ1、cosθ2について、絶対値が0に近い方を識別する。
(2)cosθ1、cosθ2について、その大小を比較、識別する。
(3)cosθ1、cosθ2が参照光位相で90度離れていること、絶対値が0に近い側を基準として、2つの大小の条件から、余弦曲線上に2つのcosθ位置を定める。
(4)余弦曲線上の定められたcosθ1、cosθ2位置より、その角度θ1、θ2を求める。
(5)1周期前のcosθ1、cosθ2より得られた角度をθ1a、θ2aとする。
(6)1周期前との位相変化の差分ΔθをΔθ1=θ1−θ1a、Δθ2=θ2−θ2aとして求める。
(7)Δθ1、Δθ2より、cosθ1、cosθ2で、絶対値が0に近い側の差分をΔθとして選択、出力する。
本発明では、1周期前との位相変化の差分Δθが90度以内であれば、cosθ1、cosθ2は余弦曲線上に正しく位置を定めることができる。
2 センサ部
3 演算処理部
11 レーザ光源
12 パルス発生器
13,光強度変調器
14,光位相変調器
15,光方向性結合器
21 光カプラー
22 光遅延ファイバ
23,25 コリメータ
24,26 ミラー
301 O/E変換器
302〜306 アナログスイッチ
307〜311 低域濾波器
312〜316 A/D変換器
317 cosθ演算器
318 差分θ(Δθ)演算器
319 積算θ(Σθ)演算器
Claims (1)
- 周期Tでパルス幅3tの光パルスの前中半t1,t2と後半t3との光位相差を90度(直交位相)に位相変調した光パルスを計測用光信号とする計測用光信号発生部と、
前記計測用光信号を光カプラーにより2波に分波し、第一の分波をt時間遅延させ、かつセンサ外力により、その光路長を変動させた光信号を計測光とし、第二の分波の参照光とを結合させる光カプラー出力が、参照光の前半t1のみの部分(R)、計測光の前半t1と参照光の中間t2との干渉部分(I1)、計測光の中間t2と参照光の後半t3との干渉部分(I2)及び計測光の後半t3のみの部分(S)からなる、時分割多重光信号(R、I1、I2、S)を出力するセンサ部と、
前記時分割多重光信号(R、I1、I2、S)を電気信号に変換し、電気信号値r、i1、i2、sを個々に得て、干渉時の計測光と参照光との位相差をθとして、干渉出力i1より、cosθ1=(i1−r−s)/2√(r・s)と、干渉出力i2より、cosθ2=(i2−r−s)/2√(r・s)を算出し、前記cosθ1と前記cosθ2との大きさ、絶対値及び前記直交位相を条件として、余弦曲線上に前記cosθ1及び前記cosθ2の位置を定めることにより、角度θ1及びθ2を求め、1周期前に求めた角度θ1a、θ2aとの差分をΔθ1=θ1−θ1a、Δθ2=θ2−θ2aとし、Δθ1とΔθ2のうち、前記cosθ1と前記cosθ2の絶対値で小さい側の差分をΔθとして選択し、周期ごとに前記Δθを積算し、その積算値θsをセンサ出力とする演算処理部と、を備えることを特徴とする光ファイバセンサ。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011271701A JP5118246B1 (ja) | 2011-11-25 | 2011-11-25 | 光ファイバセンサ |
EP12852226.5A EP2784451B1 (en) | 2011-11-25 | 2012-11-19 | Optical fiber sensor |
NO12852226A NO2784451T3 (ja) | 2011-11-25 | 2012-11-19 | |
CA2856844A CA2856844C (en) | 2011-11-25 | 2012-11-19 | Optical fiber sensor |
PCT/JP2012/079907 WO2013077280A1 (ja) | 2011-11-25 | 2012-11-19 | 光ファイバセンサ |
US14/357,323 US9273948B2 (en) | 2011-11-25 | 2012-11-19 | Optical fiber sensor |
ES12852226.5T ES2671935T3 (es) | 2011-11-25 | 2012-11-19 | Sensor de fibra óptica |
Applications Claiming Priority (1)
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JP2011271701A JP5118246B1 (ja) | 2011-11-25 | 2011-11-25 | 光ファイバセンサ |
Publications (2)
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JP5118246B1 true JP5118246B1 (ja) | 2013-01-16 |
JP2013113838A JP2013113838A (ja) | 2013-06-10 |
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JP2011271701A Active JP5118246B1 (ja) | 2011-11-25 | 2011-11-25 | 光ファイバセンサ |
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US (1) | US9273948B2 (ja) |
EP (1) | EP2784451B1 (ja) |
JP (1) | JP5118246B1 (ja) |
CA (1) | CA2856844C (ja) |
ES (1) | ES2671935T3 (ja) |
NO (1) | NO2784451T3 (ja) |
WO (1) | WO2013077280A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6763567B2 (ja) * | 2016-07-14 | 2020-09-30 | 白山工業株式会社 | 光ファイバセンサ |
WO2019220400A1 (en) | 2018-05-16 | 2019-11-21 | Shekel Scales (2008) Ltd | Weighing load cells and arrangements employing them in shelves |
EP3815013A4 (en) | 2018-06-28 | 2022-05-18 | Shekel Scales (2008) Ltd. | SYSTEMS AND METHODS OF WEIGHING PRODUCTS ON A SHELF |
CN113237635A (zh) * | 2021-04-27 | 2021-08-10 | 南昌虚拟现实研究院股份有限公司 | 液晶透镜相位检测装置和方法 |
JP7371830B1 (ja) | 2023-01-31 | 2023-10-31 | 白山工業株式会社 | 光ファイバセンサ及びそれを用いた計測システム |
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US4770535A (en) * | 1985-02-08 | 1988-09-13 | The Board Of Trustees Of The Leland Stanford Junior University | Distributed sensor array and method using a pulsed signal source |
US4697926A (en) * | 1985-02-08 | 1987-10-06 | The Board Of Trustees Of The Leland Stanford Junior University | Coherent distributed sensor and method using short coherence length sources |
US4699513A (en) * | 1985-02-08 | 1987-10-13 | Stanford University | Distributed sensor and method using coherence multiplexing of fiber-optic interferometric sensors |
GB9605144D0 (en) * | 1996-03-11 | 1996-05-08 | Sensor Dynamics Ltd | Apparatus for sensing one or more parameters |
US7480056B2 (en) * | 2004-06-04 | 2009-01-20 | Optoplan As | Multi-pulse heterodyne sub-carrier interrogation of interferometric sensors |
FR2889305B1 (fr) * | 2005-07-28 | 2007-10-19 | Sercel Sa | Reseau d'interferometres a fibre optique |
US7339678B2 (en) * | 2005-11-09 | 2008-03-04 | Northrop Grumman Corporation | Method and system of using odd harmonics for phase generated carrier homodyne |
JP4844325B2 (ja) | 2006-09-28 | 2011-12-28 | 沖電気工業株式会社 | 光ファイバセンサシステム |
US7999946B2 (en) * | 2007-10-16 | 2011-08-16 | Us Sensor Systems, Inc. | Fiber optic particle motion sensor system |
JP5118004B2 (ja) | 2008-11-12 | 2013-01-16 | 白山工業株式会社 | 光ファイバセンサ |
JP2011128127A (ja) * | 2009-12-15 | 2011-06-30 | Hakusan Kogyo Kk | 光ファイバセンサ |
WO2012068558A1 (en) * | 2010-11-18 | 2012-05-24 | Redfen Integrated Optics, Inc. | Pulse labeling for high-bandwidth fiber-optic distributed acoustic sensing with reduced cross-talk |
US9234790B2 (en) * | 2012-03-19 | 2016-01-12 | The Board Of Trustees Of The Leland Stanford Junior University | Apparatus and methods utilizing optical sensors operating in the reflection mode |
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- 2011-11-25 JP JP2011271701A patent/JP5118246B1/ja active Active
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2012
- 2012-11-19 NO NO12852226A patent/NO2784451T3/no unknown
- 2012-11-19 US US14/357,323 patent/US9273948B2/en active Active
- 2012-11-19 WO PCT/JP2012/079907 patent/WO2013077280A1/ja active Application Filing
- 2012-11-19 ES ES12852226.5T patent/ES2671935T3/es active Active
- 2012-11-19 EP EP12852226.5A patent/EP2784451B1/en active Active
- 2012-11-19 CA CA2856844A patent/CA2856844C/en active Active
Also Published As
Publication number | Publication date |
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JP2013113838A (ja) | 2013-06-10 |
CA2856844C (en) | 2019-11-05 |
WO2013077280A1 (ja) | 2013-05-30 |
US20140300900A1 (en) | 2014-10-09 |
EP2784451A1 (en) | 2014-10-01 |
CA2856844A1 (en) | 2013-05-30 |
US9273948B2 (en) | 2016-03-01 |
EP2784451A4 (en) | 2016-01-27 |
EP2784451B1 (en) | 2018-03-07 |
NO2784451T3 (ja) | 2018-08-04 |
ES2671935T3 (es) | 2018-06-11 |
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