JP5562077B2 - 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法 - Google Patents

光学式エンコーダ、エンコーダ、干渉計測装置、計測方法 Download PDF

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Publication number
JP5562077B2
JP5562077B2 JP2010052652A JP2010052652A JP5562077B2 JP 5562077 B2 JP5562077 B2 JP 5562077B2 JP 2010052652 A JP2010052652 A JP 2010052652A JP 2010052652 A JP2010052652 A JP 2010052652A JP 5562077 B2 JP5562077 B2 JP 5562077B2
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JP
Japan
Prior art keywords
sin
light
sets
phase
element array
Prior art date
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Expired - Fee Related
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JP2010052652A
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English (en)
Japanese (ja)
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JP2011185810A (ja
JP2011185810A5 (enExample
Inventor
公 石塚
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Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2010052652A priority Critical patent/JP5562077B2/ja
Priority to US13/038,597 priority patent/US8742322B2/en
Priority to EP11157257.4A priority patent/EP2369303B1/en
Publication of JP2011185810A publication Critical patent/JP2011185810A/ja
Publication of JP2011185810A5 publication Critical patent/JP2011185810A5/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2010052652A 2010-03-10 2010-03-10 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法 Expired - Fee Related JP5562077B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010052652A JP5562077B2 (ja) 2010-03-10 2010-03-10 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法
US13/038,597 US8742322B2 (en) 2010-03-10 2011-03-02 Encoder and interferometer that generate M-phase signals by multiplying N-phase signals by M coefficient sets, where N is not less than 6 and M is not smaller than 2
EP11157257.4A EP2369303B1 (en) 2010-03-10 2011-03-08 Optical encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010052652A JP5562077B2 (ja) 2010-03-10 2010-03-10 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法

Publications (3)

Publication Number Publication Date
JP2011185810A JP2011185810A (ja) 2011-09-22
JP2011185810A5 JP2011185810A5 (enExample) 2013-04-25
JP5562077B2 true JP5562077B2 (ja) 2014-07-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010052652A Expired - Fee Related JP5562077B2 (ja) 2010-03-10 2010-03-10 光学式エンコーダ、エンコーダ、干渉計測装置、計測方法

Country Status (3)

Country Link
US (1) US8742322B2 (enExample)
EP (1) EP2369303B1 (enExample)
JP (1) JP5562077B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5984364B2 (ja) * 2011-11-22 2016-09-06 キヤノン株式会社 光学式エンコーダおよびこれを備えた装置
KR101361625B1 (ko) * 2012-06-11 2014-02-12 한국표준과학연구원 위치 측정 장치 및 위치 측정 방법
JP5964162B2 (ja) * 2012-07-18 2016-08-03 株式会社ミツトヨ エンコーダ
JP6003372B2 (ja) * 2012-08-07 2016-10-05 富士通株式会社 光学式ロータリーエンコーダ及びその補正方法
JP2015041648A (ja) * 2013-08-20 2015-03-02 株式会社東芝 パターン形成方法、パターン形成用マスク及びパターン形成装置
JP6247050B2 (ja) * 2013-08-28 2017-12-13 Ｎｅｃプラットフォームズ株式会社 情報処理装置、及び、位置検出方法
JP6138664B2 (ja) * 2013-10-30 2017-05-31 オークマ株式会社 光学式エンコーダ
JP6369042B2 (ja) 2013-11-05 2018-08-08 日本精工株式会社 光学式エンコーダユニット及び光学式エンコーダ
US10312837B2 (en) * 2016-05-02 2019-06-04 Canon Kabushiki Kaisha Information processing apparatus, and recording medium storing computer program
JP7203556B2 (ja) 2018-10-11 2023-01-13 オルガノ株式会社 非水電解液の製造装置および非水電解液の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3239108A1 (de) * 1982-10-22 1984-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmessverfahren und einrichtungen zur durchfuehrung des verfahrens
JPS63157016A (ja) * 1986-12-22 1988-06-30 Yokogawa Electric Corp 光学式変位測定装置
JPH03128418A (ja) * 1989-07-20 1991-05-31 Yokogawa Electric Corp 光学式エンコーダ
US5173936A (en) * 1990-05-08 1992-12-22 The Goeken Group Corporation Telephone handset holder assembly
US5572019A (en) * 1991-03-12 1996-11-05 Canon Kabushiki Kaisha Encoder with varying width light receiver and apparatus having the encoder
DE4338680C1 (de) * 1993-11-12 1995-03-23 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmeßeinrichtung
JPH08226804A (ja) 1995-02-21 1996-09-03 Canon Inc 変位情報検出装置及びこれを用いたドライブ制御装置
AUPP777898A0 (en) * 1998-12-17 1999-01-21 Bishop Innovation Pty Limited Position sensor
US6803560B1 (en) * 1999-06-10 2004-10-12 Canon Kabushiki Kaisha Optical encoder
WO2003021197A1 (en) * 2001-08-30 2003-03-13 Microe Systems Corporation Harmonic suppressing photodetector array
JP2003279382A (ja) * 2002-03-20 2003-10-02 Mitsutoyo Corp 光電式エンコーダ
JP4291168B2 (ja) * 2004-01-21 2009-07-08 オリンパス株式会社 光学式エンコーダ用光検出器

Also Published As

Publication number Publication date
EP2369303A1 (en) 2011-09-28
US8742322B2 (en) 2014-06-03
EP2369303B1 (en) 2016-11-23
JP2011185810A (ja) 2011-09-22
US20110220780A1 (en) 2011-09-15

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