JP2016506516A5 - - Google Patents
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- Publication number
- JP2016506516A5 JP2016506516A5 JP2015548743A JP2015548743A JP2016506516A5 JP 2016506516 A5 JP2016506516 A5 JP 2016506516A5 JP 2015548743 A JP2015548743 A JP 2015548743A JP 2015548743 A JP2015548743 A JP 2015548743A JP 2016506516 A5 JP2016506516 A5 JP 2016506516A5
- Authority
- JP
- Japan
- Prior art keywords
- order
- diffractive
- diffractive features
- optical element
- diffraction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 42
- 230000005670 electromagnetic radiation Effects 0.000 claims description 7
- 230000006798 recombination Effects 0.000 claims description 4
- 238000005215 recombination Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000002131 composite material Substances 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP12250185 | 2012-12-20 | ||
| EP12250185.1 | 2012-12-20 | ||
| GB1301186.1 | 2013-01-23 | ||
| GBGB1301186.1A GB201301186D0 (en) | 2012-12-20 | 2013-01-23 | Optical element |
| PCT/GB2013/052684 WO2014096764A1 (en) | 2012-12-20 | 2013-10-15 | Optical element |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016506516A JP2016506516A (ja) | 2016-03-03 |
| JP2016506516A5 true JP2016506516A5 (enExample) | 2016-12-08 |
| JP6563813B2 JP6563813B2 (ja) | 2019-08-21 |
Family
ID=47713780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015548743A Active JP6563813B2 (ja) | 2012-12-20 | 2013-10-15 | 光学要素 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US9952068B2 (enExample) |
| EP (2) | EP3564628B1 (enExample) |
| JP (1) | JP6563813B2 (enExample) |
| KR (1) | KR102128135B1 (enExample) |
| CN (1) | CN105008865B (enExample) |
| ES (2) | ES2744978T3 (enExample) |
| GB (1) | GB201301186D0 (enExample) |
| WO (1) | WO2014096764A1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6957088B2 (ja) * | 2017-04-19 | 2021-11-02 | 株式会社ミツトヨ | 光学式エンコーダ |
| CN109141293B (zh) * | 2018-08-08 | 2020-04-24 | 深圳市银星智能科技股份有限公司 | 基于结构光的物体测量方法及电子设备 |
| US10979248B1 (en) * | 2018-12-26 | 2021-04-13 | Open Invention Network Llc | Onboarding a VNF which includes a VNFC composed of manageable software elements |
| CN111290063A (zh) * | 2019-12-23 | 2020-06-16 | 南开大学 | 一种复振幅调制的介质-金属双层超表面 |
| CN113237498A (zh) * | 2021-05-13 | 2021-08-10 | 华北水利水电大学 | 一种基于平面变周期透射光栅的光学位移传感系统 |
| EP4484898A1 (en) | 2023-06-29 | 2025-01-01 | Renishaw PLC | Encoder apparatus |
| CN118857116B (zh) * | 2024-09-24 | 2025-02-07 | 杭州隆硕科技有限公司 | 一种基于光电反射的位移测量方法、装置、设备及介质 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3412128C1 (de) | 1984-03-31 | 1985-05-09 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Positionsmesseinrichtung |
| GB8413955D0 (en) | 1984-05-31 | 1984-07-04 | Pa Consulting Services | Displacement measuring apparatus |
| GB8432574D0 (en) | 1984-12-22 | 1985-02-06 | Renishaw Plc | Opto-electronic scale-reading apparatus |
| JP2539269B2 (ja) * | 1989-07-17 | 1996-10-02 | オークマ株式会社 | 光学式エンコ―ダ |
| JP2575935B2 (ja) | 1990-07-30 | 1997-01-29 | オークマ株式会社 | 位置検出装置 |
| US5113286A (en) * | 1990-09-27 | 1992-05-12 | At&T Bell Laboratories | Diffraction grating apparatus and method of forming a surface relief pattern in diffraction grating apparatus |
| EP0541827B1 (de) * | 1991-11-04 | 1995-04-12 | Dr. Johannes Heidenhain GmbH | Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale |
| DE4436784B4 (de) | 1993-10-26 | 2005-08-18 | Carl Zeiss | Absolutes Positionsmeßsystem |
| DE4338680C1 (de) * | 1993-11-12 | 1995-03-23 | Heidenhain Gmbh Dr Johannes | Längen- oder Winkelmeßeinrichtung |
| JP2695623B2 (ja) | 1994-11-25 | 1998-01-14 | 株式会社ミツトヨ | 光学式エンコーダ |
| GB9424969D0 (en) | 1994-12-10 | 1995-02-08 | Renishaw Plc | Opto-electronic scale reading apparatus |
| DE19502727A1 (de) * | 1995-01-28 | 1996-08-01 | Heidenhain Gmbh Dr Johannes | Phasengitter |
| DE19511068A1 (de) * | 1995-03-25 | 1996-09-26 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Positionsmeßeinrichtung |
| JP3215289B2 (ja) * | 1995-04-17 | 2001-10-02 | オークマ株式会社 | スケール及びエンコーダ |
| DE19532246A1 (de) | 1995-09-01 | 1997-03-06 | Heidenhain Gmbh Dr Johannes | Vorrichtung zur Filterung von Oberwellen-Signalanteilen |
| JP3209914B2 (ja) * | 1996-03-19 | 2001-09-17 | オークマ株式会社 | 光学式エンコーダ |
| US6094307A (en) * | 1996-05-17 | 2000-07-25 | Okuma Corporation | Optical grating and encoder |
| DE19726935B4 (de) | 1997-06-25 | 2014-06-12 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmeßeinrichtung |
| EP0896206B1 (de) | 1997-08-07 | 2002-12-11 | Dr. Johannes Heidenhain GmbH | Abtasteinheit für eine optische Positionsmesseinrichtung |
| US6723980B2 (en) | 2001-07-16 | 2004-04-20 | Wai-Hon Lee | Position sensor with grating to detect moving object with periodic pattern |
| DE10347604A1 (de) | 2003-10-14 | 2005-05-12 | Heidenhain Gmbh Dr Johannes | Optische Positionsmesseinrichtung |
| GB0413710D0 (en) | 2004-06-21 | 2004-07-21 | Renishaw Plc | Scale reading apparatus |
| GB0613902D0 (en) * | 2006-07-13 | 2006-08-23 | Renishaw Plc | Scale and readhead |
| WO2008110239A1 (en) * | 2007-03-15 | 2008-09-18 | Carl Zeiss Smt Ag | Diffractive component, interferometer arrangement, method for qualifying a dual diffraction grating, method of manufacturing an optical element, and interferometric method |
| JP5011201B2 (ja) | 2008-05-01 | 2012-08-29 | 株式会社ミツトヨ | 絶対位置測長型エンコーダ |
| ES2758525T3 (es) | 2008-12-17 | 2020-05-05 | Fagor Automation S Coop | Encoder de posición absoluta |
| ITMI20110562A1 (it) | 2011-04-06 | 2012-10-07 | Comelz Spa | Procedimento e dispositivo di rilevamento di posizione di un organo trasportatore. |
-
2013
- 2013-01-23 GB GBGB1301186.1A patent/GB201301186D0/en not_active Ceased
- 2013-10-15 ES ES13780378T patent/ES2744978T3/es active Active
- 2013-10-15 JP JP2015548743A patent/JP6563813B2/ja active Active
- 2013-10-15 EP EP19172096.0A patent/EP3564628B1/en active Active
- 2013-10-15 KR KR1020157019443A patent/KR102128135B1/ko active Active
- 2013-10-15 WO PCT/GB2013/052684 patent/WO2014096764A1/en not_active Ceased
- 2013-10-15 CN CN201380072987.1A patent/CN105008865B/zh active Active
- 2013-10-15 EP EP13780378.9A patent/EP2936073B1/en active Active
- 2013-10-15 ES ES19172096T patent/ES2909008T3/es active Active
- 2013-10-15 US US14/651,495 patent/US9952068B2/en active Active
-
2018
- 2018-03-19 US US15/925,002 patent/US10768026B2/en active Active
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