CN105008865B - 编码器设备及其读头、光学元件和制造衍射光栅的方法 - Google Patents

编码器设备及其读头、光学元件和制造衍射光栅的方法 Download PDF

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Publication number
CN105008865B
CN105008865B CN201380072987.1A CN201380072987A CN105008865B CN 105008865 B CN105008865 B CN 105008865B CN 201380072987 A CN201380072987 A CN 201380072987A CN 105008865 B CN105008865 B CN 105008865B
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diffraction
diffractive features
feature
optical element
features
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CN105008865A (zh
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贾森·肯普顿·斯拉克
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Renishaw PLC
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Renishaw PLC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
CN201380072987.1A 2012-12-20 2013-10-15 编码器设备及其读头、光学元件和制造衍射光栅的方法 Active CN105008865B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
EP12250185 2012-12-20
EP12250185.1 2012-12-20
GB1301186.1 2013-01-23
GBGB1301186.1A GB201301186D0 (en) 2012-12-20 2013-01-23 Optical element
PCT/GB2013/052684 WO2014096764A1 (en) 2012-12-20 2013-10-15 Optical element

Publications (2)

Publication Number Publication Date
CN105008865A CN105008865A (zh) 2015-10-28
CN105008865B true CN105008865B (zh) 2017-10-20

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Country Status (8)

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US (2) US9952068B2 (enExample)
EP (2) EP3564628B1 (enExample)
JP (1) JP6563813B2 (enExample)
KR (1) KR102128135B1 (enExample)
CN (1) CN105008865B (enExample)
ES (2) ES2744978T3 (enExample)
GB (1) GB201301186D0 (enExample)
WO (1) WO2014096764A1 (enExample)

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* Cited by examiner, † Cited by third party
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JP6957088B2 (ja) * 2017-04-19 2021-11-02 株式会社ミツトヨ 光学式エンコーダ
CN109141293B (zh) * 2018-08-08 2020-04-24 深圳市银星智能科技股份有限公司 基于结构光的物体测量方法及电子设备
US10979248B1 (en) * 2018-12-26 2021-04-13 Open Invention Network Llc Onboarding a VNF which includes a VNFC composed of manageable software elements
CN111290063A (zh) * 2019-12-23 2020-06-16 南开大学 一种复振幅调制的介质-金属双层超表面
CN113237498A (zh) * 2021-05-13 2021-08-10 华北水利水电大学 一种基于平面变周期透射光栅的光学位移传感系统
EP4484898A1 (en) 2023-06-29 2025-01-01 Renishaw PLC Encoder apparatus
CN118857116B (zh) * 2024-09-24 2025-02-07 杭州隆硕科技有限公司 一种基于光电反射的位移测量方法、装置、设备及介质

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EP0887625A2 (de) * 1997-06-25 1998-12-30 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
CN1973185A (zh) * 2004-06-21 2007-05-30 瑞尼斯豪公司 刻度尺读取设备
EP2113748A2 (en) * 2008-05-01 2009-11-04 Mitutoyo Corporation Absolute position length measurement type encoder
CN101750108A (zh) * 2008-12-17 2010-06-23 菲高合作社 绝对位置编码器

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DE3412128C1 (de) 1984-03-31 1985-05-09 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmesseinrichtung
GB8413955D0 (en) 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
GB8432574D0 (en) 1984-12-22 1985-02-06 Renishaw Plc Opto-electronic scale-reading apparatus
JP2539269B2 (ja) * 1989-07-17 1996-10-02 オークマ株式会社 光学式エンコ―ダ
JP2575935B2 (ja) 1990-07-30 1997-01-29 オークマ株式会社 位置検出装置
US5113286A (en) * 1990-09-27 1992-05-12 At&T Bell Laboratories Diffraction grating apparatus and method of forming a surface relief pattern in diffraction grating apparatus
EP0541827B1 (de) * 1991-11-04 1995-04-12 Dr. Johannes Heidenhain GmbH Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale
DE4436784B4 (de) 1993-10-26 2005-08-18 Carl Zeiss Absolutes Positionsmeßsystem
DE4338680C1 (de) * 1993-11-12 1995-03-23 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmeßeinrichtung
JP2695623B2 (ja) 1994-11-25 1998-01-14 株式会社ミツトヨ 光学式エンコーダ
GB9424969D0 (en) 1994-12-10 1995-02-08 Renishaw Plc Opto-electronic scale reading apparatus
DE19502727A1 (de) * 1995-01-28 1996-08-01 Heidenhain Gmbh Dr Johannes Phasengitter
DE19511068A1 (de) * 1995-03-25 1996-09-26 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
JP3215289B2 (ja) * 1995-04-17 2001-10-02 オークマ株式会社 スケール及びエンコーダ
DE19532246A1 (de) 1995-09-01 1997-03-06 Heidenhain Gmbh Dr Johannes Vorrichtung zur Filterung von Oberwellen-Signalanteilen
JP3209914B2 (ja) * 1996-03-19 2001-09-17 オークマ株式会社 光学式エンコーダ
US6094307A (en) * 1996-05-17 2000-07-25 Okuma Corporation Optical grating and encoder
EP0896206B1 (de) 1997-08-07 2002-12-11 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine optische Positionsmesseinrichtung
US6723980B2 (en) 2001-07-16 2004-04-20 Wai-Hon Lee Position sensor with grating to detect moving object with periodic pattern
DE10347604A1 (de) 2003-10-14 2005-05-12 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
GB0613902D0 (en) * 2006-07-13 2006-08-23 Renishaw Plc Scale and readhead
WO2008110239A1 (en) * 2007-03-15 2008-09-18 Carl Zeiss Smt Ag Diffractive component, interferometer arrangement, method for qualifying a dual diffraction grating, method of manufacturing an optical element, and interferometric method
ITMI20110562A1 (it) 2011-04-06 2012-10-07 Comelz Spa Procedimento e dispositivo di rilevamento di posizione di un organo trasportatore.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0887625A2 (de) * 1997-06-25 1998-12-30 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
CN1973185A (zh) * 2004-06-21 2007-05-30 瑞尼斯豪公司 刻度尺读取设备
EP2113748A2 (en) * 2008-05-01 2009-11-04 Mitutoyo Corporation Absolute position length measurement type encoder
CN101750108A (zh) * 2008-12-17 2010-06-23 菲高合作社 绝对位置编码器

Also Published As

Publication number Publication date
ES2744978T3 (es) 2020-02-27
JP6563813B2 (ja) 2019-08-21
US10768026B2 (en) 2020-09-08
JP2016506516A (ja) 2016-03-03
WO2014096764A1 (en) 2014-06-26
CN105008865A (zh) 2015-10-28
KR102128135B1 (ko) 2020-06-29
US9952068B2 (en) 2018-04-24
EP2936073A1 (en) 2015-10-28
ES2909008T3 (es) 2022-05-04
EP3564628B1 (en) 2022-02-16
EP3564628A1 (en) 2019-11-06
US20180209824A1 (en) 2018-07-26
KR20150097738A (ko) 2015-08-26
US20150308865A1 (en) 2015-10-29
EP2936073B1 (en) 2019-06-12
GB201301186D0 (en) 2013-03-06

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