JP2016085055A - 光学式エンコーダ - Google Patents
光学式エンコーダ Download PDFInfo
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- JP2016085055A JP2016085055A JP2014216274A JP2014216274A JP2016085055A JP 2016085055 A JP2016085055 A JP 2016085055A JP 2014216274 A JP2014216274 A JP 2014216274A JP 2014216274 A JP2014216274 A JP 2014216274A JP 2016085055 A JP2016085055 A JP 2016085055A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 103
- 230000007547 defect Effects 0.000 abstract description 9
- 238000000034 method Methods 0.000 description 22
- 239000011521 glass Substances 0.000 description 12
- 230000010363 phase shift Effects 0.000 description 11
- 239000000758 substrate Substances 0.000 description 9
- 238000001514 detection method Methods 0.000 description 7
- 230000010287 polarization Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
- G02B27/4238—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application in optical recording or readout devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/144—Beam splitting or combining systems operating by reflection only using partially transparent surfaces without spectral selectivity
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optical Transform (AREA)
Abstract
Description
方式(1)として、特許文献1〜3が開示されている。この方式の例を、図9を用いて説明する。
方式(2)として、特許文献4〜6が開示されている。この方式の例を、図10を用いて説明する。
方式(3)として、特許文献7〜9が開示されている。この方式の例を、図11を用いて説明する。
方式(4)では、光学素子とスケールを用いて2つの光束の干渉縞を発生させ、この干渉縞を受光素子アレイで検出する。方式(4)として、特許文献10、11が開示されている。この方式の例を、図13を用いて説明する。
以下、図面を参照して本発明の実施の形態1に係る光学式エンコーダについて説明する。図1は、実施の形態1に係る光学式エンコーダの光学部分の概略を示す上面図である。
実施の形態2では、光の分割にインデックス格子を用いる例について説明する。図5は、実施の形態2に係る光学式エンコーダの光学部分の概略を示す上面図である。図5において、図1と同一の構成については同一の番号を付し、説明を省略する。
また、実施の形態2の光学式エンコーダ20は、インデックス格子21とインデックス格子22とを共通の構成とすることもできる。図8は、実施の形態3に係る反射型の光学式エンコーダの光学部分の概略を示す斜視図である。図8において、光学式エンコーダ30は、光源11と、ガラス基板31と、インデックス格子32と、スケール33と、オフセット回折格子14−1、14−2と、受光ユニット16−11〜16−23とを備える。
11 光源
12、15 無偏光ビームスプリッタ
13、33 スケール
14 オフセット回折格子
14−1、14−2 格子エリア
16 受光ユニット
16−11〜16−23 受光素子
17 検出ヘッド
21、22、32 インデックス格子
31 ガラス基板
Claims (9)
- 光源と、
光源からの光を分割する分割手段と、
受光ユニットと、
主面に格子が配置され、光路上に位置し且つ測位方向に移動可能なスケールと、
前記分割手段から前記受光ユニットまでの光路上に、分割された光を相異なる位相差で回折する複数の回折格子からなるオフセット回折格子を備え、
前記オフセット回折格子は、前記複数の回折格子が前記スケールの主面に平行な一面に配置され、測位方向に直交する方向に互いにオフセットし、
前記受光ユニットは、オフセット方向に複数の受光素子を配置する
ことを特徴とする光学式エンコーダ。 - 前記分割手段は、第1の無偏光ビームスプリッタであり、
前記光学式エンコーダは、前記スケールから前記受光ユニットまでの光路に第2の無偏光ビームスプリッタを備えることを特徴とする請求項1に記載の光学式エンコーダ。 - 前記オフセット回折格子は、前記スケールから前記第2の無偏光ビームスプリッタまでの光路に位置することを特徴とする請求項2に記載の光学式エンコーダ。
- 前記オフセット回折格子は、前記第1の無偏光ビームスプリッタから前記スケールまでの光路に位置することを特徴とする請求項2に記載の光学式エンコーダ。
- 前記分割手段は、インデックス格子であることを特徴とする請求項1に記載の光学式エンコーダ。
- 前記オフセット回折格子は、前記スケールから、前記受光ユニットへ光を出射する前記インデックス格子の部位までの光路に位置することを特徴とする請求項5に記載の光学式エンコーダ。
- 前記オフセット回折格子は、前記光源からの光が入射する前記インデックス格子の部位から前記スケールまでの光路に位置することを特徴とする請求項5に記載の光学式エンコーダ。
- 前記スケールが、光を反射することを特徴とする請求項5に記載の光学式エンコーダ。
- 前記受光ユニットは、オフセット方向に配置された複数の受光素子を複数列有することを特徴とする請求項1から8のいずれかに記載の光学式エンコーダ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014216274A JP6386337B2 (ja) | 2014-10-23 | 2014-10-23 | 光学式エンコーダ |
EP15190429.9A EP3012591B1 (en) | 2014-10-23 | 2015-10-19 | Optical encoder |
US14/919,188 US10831035B2 (en) | 2014-10-23 | 2015-10-21 | Optical encoder |
CN201510695498.2A CN105547338B (zh) | 2014-10-23 | 2015-10-23 | 光学编码器 |
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JP2014216274A JP6386337B2 (ja) | 2014-10-23 | 2014-10-23 | 光学式エンコーダ |
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JP2016085055A true JP2016085055A (ja) | 2016-05-19 |
JP6386337B2 JP6386337B2 (ja) | 2018-09-05 |
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JP2014216274A Active JP6386337B2 (ja) | 2014-10-23 | 2014-10-23 | 光学式エンコーダ |
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US (1) | US10831035B2 (ja) |
EP (1) | EP3012591B1 (ja) |
JP (1) | JP6386337B2 (ja) |
CN (1) | CN105547338B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018105845A (ja) * | 2016-12-27 | 2018-07-05 | 株式会社ミツトヨ | エンコーダ |
CN110927944A (zh) * | 2018-09-19 | 2020-03-27 | 伊鲁米那股份有限公司 | 样本的结构照明 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018185210A (ja) * | 2017-04-25 | 2018-11-22 | セイコーエプソン株式会社 | エンコーダー、プリンターおよびロボット |
JP2019066235A (ja) * | 2017-09-29 | 2019-04-25 | セイコーエプソン株式会社 | エンコーダー、プリンターおよびロボット |
JP2019086296A (ja) * | 2017-11-01 | 2019-06-06 | 株式会社ミツトヨ | 光学式エンコーダおよびこれを備えた測定器 |
JP2020056786A (ja) * | 2018-09-28 | 2020-04-09 | 株式会社ミツトヨ | 光学式ロータリーエンコーダ |
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2015
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- 2015-10-21 US US14/919,188 patent/US10831035B2/en active Active
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018105845A (ja) * | 2016-12-27 | 2018-07-05 | 株式会社ミツトヨ | エンコーダ |
CN110927944A (zh) * | 2018-09-19 | 2020-03-27 | 伊鲁米那股份有限公司 | 样本的结构照明 |
CN110927944B (zh) * | 2018-09-19 | 2022-10-14 | 伊鲁米那股份有限公司 | 样本的结构照明 |
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Publication number | Publication date |
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CN105547338B (zh) | 2020-03-03 |
JP6386337B2 (ja) | 2018-09-05 |
EP3012591B1 (en) | 2016-11-09 |
US10831035B2 (en) | 2020-11-10 |
CN105547338A (zh) | 2016-05-04 |
US20160116757A1 (en) | 2016-04-28 |
EP3012591A1 (en) | 2016-04-27 |
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