JP2006220655A5 - - Google Patents

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Publication number
JP2006220655A5
JP2006220655A5 JP2006031779A JP2006031779A JP2006220655A5 JP 2006220655 A5 JP2006220655 A5 JP 2006220655A5 JP 2006031779 A JP2006031779 A JP 2006031779A JP 2006031779 A JP2006031779 A JP 2006031779A JP 2006220655 A5 JP2006220655 A5 JP 2006220655A5
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JP
Japan
Prior art keywords
impulse signal
scale
signal detector
measuring device
reference impulse
Prior art date
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Granted
Application number
JP2006031779A
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English (en)
Japanese (ja)
Other versions
JP5046523B2 (ja
JP2006220655A (ja
Filing date
Publication date
Priority claimed from DE102005006247A external-priority patent/DE102005006247A1/de
Application filed filed Critical
Publication of JP2006220655A publication Critical patent/JP2006220655A/ja
Publication of JP2006220655A5 publication Critical patent/JP2006220655A5/ja
Application granted granted Critical
Publication of JP5046523B2 publication Critical patent/JP5046523B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006031779A 2005-02-11 2006-02-09 位置測定装置 Expired - Fee Related JP5046523B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005006247.4 2005-02-11
DE102005006247A DE102005006247A1 (de) 2005-02-11 2005-02-11 Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2006220655A JP2006220655A (ja) 2006-08-24
JP2006220655A5 true JP2006220655A5 (enExample) 2008-12-04
JP5046523B2 JP5046523B2 (ja) 2012-10-10

Family

ID=36128274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006031779A Expired - Fee Related JP5046523B2 (ja) 2005-02-11 2006-02-09 位置測定装置

Country Status (5)

Country Link
US (1) US7348546B2 (enExample)
EP (1) EP1691172B1 (enExample)
JP (1) JP5046523B2 (enExample)
DE (1) DE102005006247A1 (enExample)
ES (1) ES2562238T3 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006021484A1 (de) * 2006-05-09 2007-11-15 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP4928206B2 (ja) 2006-09-22 2012-05-09 キヤノン株式会社 エンコーダ
DE102007035345A1 (de) * 2006-11-20 2008-05-21 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
US10259607B2 (en) * 2008-03-04 2019-04-16 Vanrx Pharmasystems Inc. Aseptic robotic filling system and method
JP5113000B2 (ja) * 2008-09-19 2013-01-09 株式会社ミツトヨ 光電式エンコーダ
JP5666126B2 (ja) * 2008-12-23 2015-02-12 アバゴ・テクノロジーズ・ジェネラル・アイピー（シンガポール）プライベート・リミテッド 単一トラック式光学エンコーダ
KR20100135048A (ko) * 2009-06-16 2010-12-24 삼성전자주식회사 경사 보상이 가능한 인코더, 이를 이용한 하드 디스크 드라이브 및 하드 디스크 드라이브를 위한 서보 트랙 기록 장치
DE102009046773A1 (de) * 2009-11-17 2011-05-19 Dr. Johannes Heidenhain Gmbh Abtasteinheit einer Positionsmesseinrichtung
JP5391115B2 (ja) * 2010-03-18 2014-01-15 株式会社ミツトヨ 光電式エンコーダ
EP2386832B1 (en) * 2010-05-10 2017-04-12 Mitutoyo Corporation Photoelectric encoder
US9074911B2 (en) 2011-08-26 2015-07-07 Nikon Corporation Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects
DE102012221566A1 (de) * 2012-11-26 2014-05-28 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102014215633A1 (de) * 2013-11-28 2015-05-28 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP6359340B2 (ja) 2014-05-27 2018-07-18 株式会社ミツトヨ スケール及び光学式エンコーダ
JP6474289B2 (ja) * 2015-03-19 2019-02-27 株式会社キーエンス 光学式ロータリーエンコーダ
JP6684087B2 (ja) * 2015-12-18 2020-04-22 セイコーＮｐｃ株式会社 光エンコーダ
JP6732487B2 (ja) * 2016-03-17 2020-07-29 株式会社東京精密 リニア・スケールを有するエンコーダ及びその原点決定方法
DE102017201257A1 (de) * 2017-01-26 2018-07-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
EP3623769A1 (en) 2018-09-12 2020-03-18 Renishaw PLC Measurement device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE379241B (enExample) 1974-01-15 1975-09-29 Aga Ab
DE19726935B4 (de) 1997-06-25 2014-06-12 Dr. Johannes Heidenhain Gmbh Optische Positionsmeßeinrichtung
EP0896206B1 (de) * 1997-08-07 2002-12-11 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine optische Positionsmesseinrichtung
DE19754595B4 (de) * 1997-12-10 2011-06-01 Dr. Johannes Heidenhain Gmbh Lichtelektrische Positionsmeßeinrichtung
DE19936181A1 (de) * 1998-11-19 2000-05-25 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
DE19918101A1 (de) * 1999-04-22 2000-10-26 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
DE19941318A1 (de) * 1999-08-31 2001-03-15 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
GB0103582D0 (en) 2001-02-14 2001-03-28 Renishaw Plc Position determination system
US7002137B2 (en) * 2001-08-30 2006-02-21 Gsi Lumonics Corporation Reference point talbot encoder
WO2003021194A2 (en) * 2001-08-30 2003-03-13 Microe Systems Corporation Reference point talbot encoder
WO2004005855A2 (en) * 2002-07-08 2004-01-15 Microe Systems Corporation Multi-track optical encoder employing beam divider
US6664535B1 (en) * 2002-07-16 2003-12-16 Mitutoyo Corporation Scale structures and methods usable in an absolute position transducer
GB0316921D0 (en) * 2003-07-19 2003-08-27 Renishaw Plc Reader for a scale marking

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