ES2562238T3 - Dispositivo de medición de la posición - Google Patents
Dispositivo de medición de la posición Download PDFInfo
- Publication number
- ES2562238T3 ES2562238T3 ES06002322.3T ES06002322T ES2562238T3 ES 2562238 T3 ES2562238 T3 ES 2562238T3 ES 06002322 T ES06002322 T ES 06002322T ES 2562238 T3 ES2562238 T3 ES 2562238T3
- Authority
- ES
- Spain
- Prior art keywords
- pulse signal
- reference pulse
- division
- signal
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005259 measurement Methods 0.000 claims abstract description 36
- 238000001514 detection method Methods 0.000 claims abstract description 23
- 230000000737 periodic effect Effects 0.000 claims abstract description 21
- 230000003287 optical effect Effects 0.000 claims abstract description 6
- 230000005693 optoelectronics Effects 0.000 claims abstract description 6
- 230000001419 dependent effect Effects 0.000 claims abstract description 5
- 230000001360 synchronised effect Effects 0.000 claims abstract 2
- 238000002310 reflectometry Methods 0.000 claims 1
- 238000001914 filtration Methods 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 238000005286 illumination Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 235000009754 Vitis X bourquina Nutrition 0.000 description 1
- 235000012333 Vitis X labruscana Nutrition 0.000 description 1
- 240000006365 Vitis vinifera Species 0.000 description 1
- 235000014787 Vitis vinifera Nutrition 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2454—Encoders incorporating incremental and absolute signals
- G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
- G01D5/2457—Incremental encoders having reference marks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005006247 | 2005-02-11 | ||
| DE102005006247A DE102005006247A1 (de) | 2005-02-11 | 2005-02-11 | Positionsmesseinrichtung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2562238T3 true ES2562238T3 (es) | 2016-03-03 |
Family
ID=36128274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES06002322.3T Active ES2562238T3 (es) | 2005-02-11 | 2006-02-04 | Dispositivo de medición de la posición |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7348546B2 (enExample) |
| EP (1) | EP1691172B1 (enExample) |
| JP (1) | JP5046523B2 (enExample) |
| DE (1) | DE102005006247A1 (enExample) |
| ES (1) | ES2562238T3 (enExample) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006021484A1 (de) * | 2006-05-09 | 2007-11-15 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| JP4928206B2 (ja) | 2006-09-22 | 2012-05-09 | キヤノン株式会社 | エンコーダ |
| DE102007035345A1 (de) * | 2006-11-20 | 2008-05-21 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| DE102007023300A1 (de) * | 2007-05-16 | 2008-11-20 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung und Anordnung derselben |
| US10259607B2 (en) * | 2008-03-04 | 2019-04-16 | Vanrx Pharmasystems Inc. | Aseptic robotic filling system and method |
| JP5113000B2 (ja) * | 2008-09-19 | 2013-01-09 | 株式会社ミツトヨ | 光電式エンコーダ |
| JP5666126B2 (ja) * | 2008-12-23 | 2015-02-12 | アバゴ・テクノロジーズ・ジェネラル・アイピー（シンガポール）プライベート・リミテッド | 単一トラック式光学エンコーダ |
| KR20100135048A (ko) * | 2009-06-16 | 2010-12-24 | 삼성전자주식회사 | 경사 보상이 가능한 인코더, 이를 이용한 하드 디스크 드라이브 및 하드 디스크 드라이브를 위한 서보 트랙 기록 장치 |
| DE102009046773A1 (de) * | 2009-11-17 | 2011-05-19 | Dr. Johannes Heidenhain Gmbh | Abtasteinheit einer Positionsmesseinrichtung |
| JP5391115B2 (ja) * | 2010-03-18 | 2014-01-15 | 株式会社ミツトヨ | 光電式エンコーダ |
| EP2386832B1 (en) * | 2010-05-10 | 2017-04-12 | Mitutoyo Corporation | Photoelectric encoder |
| US9074911B2 (en) | 2011-08-26 | 2015-07-07 | Nikon Corporation | Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects |
| DE102012221566A1 (de) * | 2012-11-26 | 2014-05-28 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102014215633A1 (de) * | 2013-11-28 | 2015-05-28 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| JP6359340B2 (ja) | 2014-05-27 | 2018-07-18 | 株式会社ミツトヨ | スケール及び光学式エンコーダ |
| JP6474289B2 (ja) * | 2015-03-19 | 2019-02-27 | 株式会社キーエンス | 光学式ロータリーエンコーダ |
| JP6684087B2 (ja) * | 2015-12-18 | 2020-04-22 | セイコーＮｐｃ株式会社 | 光エンコーダ |
| JP6732487B2 (ja) * | 2016-03-17 | 2020-07-29 | 株式会社東京精密 | リニア・スケールを有するエンコーダ及びその原点決定方法 |
| DE102017201257A1 (de) * | 2017-01-26 | 2018-07-26 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| EP3623769A1 (en) | 2018-09-12 | 2020-03-18 | Renishaw PLC | Measurement device |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE379241B (enExample) | 1974-01-15 | 1975-09-29 | Aga Ab | |
| DE19726935B4 (de) | 1997-06-25 | 2014-06-12 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmeßeinrichtung |
| EP0896206B1 (de) * | 1997-08-07 | 2002-12-11 | Dr. Johannes Heidenhain GmbH | Abtasteinheit für eine optische Positionsmesseinrichtung |
| DE19754595B4 (de) * | 1997-12-10 | 2011-06-01 | Dr. Johannes Heidenhain Gmbh | Lichtelektrische Positionsmeßeinrichtung |
| DE19936181A1 (de) * | 1998-11-19 | 2000-05-25 | Heidenhain Gmbh Dr Johannes | Optische Positionsmeßeinrichtung |
| DE19918101A1 (de) * | 1999-04-22 | 2000-10-26 | Heidenhain Gmbh Dr Johannes | Optische Positionsmeßeinrichtung |
| DE19941318A1 (de) * | 1999-08-31 | 2001-03-15 | Heidenhain Gmbh Dr Johannes | Optische Positionsmeßeinrichtung |
| GB0103582D0 (en) | 2001-02-14 | 2001-03-28 | Renishaw Plc | Position determination system |
| US7002137B2 (en) * | 2001-08-30 | 2006-02-21 | Gsi Lumonics Corporation | Reference point talbot encoder |
| WO2003021194A2 (en) * | 2001-08-30 | 2003-03-13 | Microe Systems Corporation | Reference point talbot encoder |
| WO2004005855A2 (en) * | 2002-07-08 | 2004-01-15 | Microe Systems Corporation | Multi-track optical encoder employing beam divider |
| US6664535B1 (en) * | 2002-07-16 | 2003-12-16 | Mitutoyo Corporation | Scale structures and methods usable in an absolute position transducer |
| GB0316921D0 (en) * | 2003-07-19 | 2003-08-27 | Renishaw Plc | Reader for a scale marking |
-
2005
- 2005-02-11 DE DE102005006247A patent/DE102005006247A1/de not_active Withdrawn
-
2006
- 2006-02-04 ES ES06002322.3T patent/ES2562238T3/es active Active
- 2006-02-04 EP EP06002322.3A patent/EP1691172B1/de not_active Not-in-force
- 2006-02-09 JP JP2006031779A patent/JP5046523B2/ja not_active Expired - Fee Related
- 2006-02-09 US US11/350,460 patent/US7348546B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP5046523B2 (ja) | 2012-10-10 |
| JP2006220655A (ja) | 2006-08-24 |
| EP1691172A3 (de) | 2012-06-20 |
| DE102005006247A1 (de) | 2006-08-17 |
| EP1691172B1 (de) | 2016-02-03 |
| US20060180748A1 (en) | 2006-08-17 |
| EP1691172A2 (de) | 2006-08-16 |
| US7348546B2 (en) | 2008-03-25 |
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