JP5046523B2 - 位置測定装置 - Google Patents

位置測定装置 Download PDF

Info

Publication number
JP5046523B2
JP5046523B2 JP2006031779A JP2006031779A JP5046523B2 JP 5046523 B2 JP5046523 B2 JP 5046523B2 JP 2006031779 A JP2006031779 A JP 2006031779A JP 2006031779 A JP2006031779 A JP 2006031779A JP 5046523 B2 JP5046523 B2 JP 5046523B2
Authority
JP
Japan
Prior art keywords
impulse signal
scale
signal detector
reference impulse
incremental
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006031779A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006220655A (ja
JP2006220655A5 (enExample
Inventor
ユルゲン・ショーザー
ミヒャエル・ヘルマン
ヴォルフガング・ホルツアプフェル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JP2006220655A publication Critical patent/JP2006220655A/ja
Publication of JP2006220655A5 publication Critical patent/JP2006220655A5/ja
Application granted granted Critical
Publication of JP5046523B2 publication Critical patent/JP5046523B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2454—Encoders incorporating incremental and absolute signals
    • G01D5/2455—Encoders incorporating incremental and absolute signals with incremental and absolute tracks on the same encoder
    • G01D5/2457—Incremental encoders having reference marks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2006031779A 2005-02-11 2006-02-09 位置測定装置 Expired - Fee Related JP5046523B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005006247.4 2005-02-11
DE102005006247A DE102005006247A1 (de) 2005-02-11 2005-02-11 Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2006220655A JP2006220655A (ja) 2006-08-24
JP2006220655A5 JP2006220655A5 (enExample) 2008-12-04
JP5046523B2 true JP5046523B2 (ja) 2012-10-10

Family

ID=36128274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006031779A Expired - Fee Related JP5046523B2 (ja) 2005-02-11 2006-02-09 位置測定装置

Country Status (5)

Country Link
US (1) US7348546B2 (enExample)
EP (1) EP1691172B1 (enExample)
JP (1) JP5046523B2 (enExample)
DE (1) DE102005006247A1 (enExample)
ES (1) ES2562238T3 (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006021484A1 (de) * 2006-05-09 2007-11-15 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP4928206B2 (ja) 2006-09-22 2012-05-09 キヤノン株式会社 エンコーダ
DE102007035345A1 (de) * 2006-11-20 2008-05-21 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007023300A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
US10259607B2 (en) * 2008-03-04 2019-04-16 Vanrx Pharmasystems Inc. Aseptic robotic filling system and method
JP5113000B2 (ja) * 2008-09-19 2013-01-09 株式会社ミツトヨ 光電式エンコーダ
JP5666126B2 (ja) * 2008-12-23 2015-02-12 アバゴ・テクノロジーズ・ジェネラル・アイピー（シンガポール）プライベート・リミテッド 単一トラック式光学エンコーダ
KR20100135048A (ko) * 2009-06-16 2010-12-24 삼성전자주식회사 경사 보상이 가능한 인코더, 이를 이용한 하드 디스크 드라이브 및 하드 디스크 드라이브를 위한 서보 트랙 기록 장치
DE102009046773A1 (de) * 2009-11-17 2011-05-19 Dr. Johannes Heidenhain Gmbh Abtasteinheit einer Positionsmesseinrichtung
JP5391115B2 (ja) * 2010-03-18 2014-01-15 株式会社ミツトヨ 光電式エンコーダ
EP2386832B1 (en) * 2010-05-10 2017-04-12 Mitutoyo Corporation Photoelectric encoder
US9074911B2 (en) 2011-08-26 2015-07-07 Nikon Corporation Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects
DE102012221566A1 (de) * 2012-11-26 2014-05-28 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102014215633A1 (de) * 2013-11-28 2015-05-28 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP6359340B2 (ja) 2014-05-27 2018-07-18 株式会社ミツトヨ スケール及び光学式エンコーダ
JP6474289B2 (ja) * 2015-03-19 2019-02-27 株式会社キーエンス 光学式ロータリーエンコーダ
JP6684087B2 (ja) * 2015-12-18 2020-04-22 セイコーＮｐｃ株式会社 光エンコーダ
JP6732487B2 (ja) * 2016-03-17 2020-07-29 株式会社東京精密 リニア・スケールを有するエンコーダ及びその原点決定方法
DE102017201257A1 (de) * 2017-01-26 2018-07-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
EP3623769A1 (en) 2018-09-12 2020-03-18 Renishaw PLC Measurement device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE379241B (enExample) 1974-01-15 1975-09-29 Aga Ab
DE19726935B4 (de) 1997-06-25 2014-06-12 Dr. Johannes Heidenhain Gmbh Optische Positionsmeßeinrichtung
EP0896206B1 (de) * 1997-08-07 2002-12-11 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine optische Positionsmesseinrichtung
DE19754595B4 (de) * 1997-12-10 2011-06-01 Dr. Johannes Heidenhain Gmbh Lichtelektrische Positionsmeßeinrichtung
DE19936181A1 (de) * 1998-11-19 2000-05-25 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
DE19918101A1 (de) * 1999-04-22 2000-10-26 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
DE19941318A1 (de) * 1999-08-31 2001-03-15 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
GB0103582D0 (en) 2001-02-14 2001-03-28 Renishaw Plc Position determination system
US7002137B2 (en) * 2001-08-30 2006-02-21 Gsi Lumonics Corporation Reference point talbot encoder
WO2003021194A2 (en) * 2001-08-30 2003-03-13 Microe Systems Corporation Reference point talbot encoder
WO2004005855A2 (en) * 2002-07-08 2004-01-15 Microe Systems Corporation Multi-track optical encoder employing beam divider
US6664535B1 (en) * 2002-07-16 2003-12-16 Mitutoyo Corporation Scale structures and methods usable in an absolute position transducer
GB0316921D0 (en) * 2003-07-19 2003-08-27 Renishaw Plc Reader for a scale marking

Also Published As

Publication number Publication date
JP2006220655A (ja) 2006-08-24
EP1691172A3 (de) 2012-06-20
DE102005006247A1 (de) 2006-08-17
EP1691172B1 (de) 2016-02-03
US20060180748A1 (en) 2006-08-17
ES2562238T3 (es) 2016-03-03
EP1691172A2 (de) 2006-08-16
US7348546B2 (en) 2008-03-25

Similar Documents

Publication Publication Date Title
JP5046523B2 (ja) 位置測定装置
JP4324261B2 (ja) 光学位置測定装置用の走査ユニット
JP5717633B2 (ja) 光学式位置測定装置
JP4503799B2 (ja) 光学的位置測定装置
JP4503822B2 (ja) 位置測定装置
JP5976279B2 (ja) 光学式エンコーダおよび位置測定方法
EP2023094B1 (en) Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels
ES2376656T3 (es) Dispositivo medidor de posición.
JP4266834B2 (ja) 光学エンコーダ
JPH11142114A5 (enExample)
JPH05133769A (ja) 干渉位置測定装置
JP2018530751A (ja) エンコーダ装置
JP2006220655A5 (enExample)
US6914235B2 (en) Position measuring system and method for operating a position measuring system
JP2818800B2 (ja) 位置に依存する信号を発生する装置
EP2469241B1 (en) Optical encoder readhead configuration
JP4303804B2 (ja) 光学位置測定装置
JP5693840B2 (ja) 基準信号を検出可能な光ファイバ干渉型格子エンコーダ
JPH1183432A5 (enExample)
US6552810B1 (en) Optical measuring system
JPH095026A (ja) 光電位置測定装置
JP3881339B2 (ja) 位置測定装置
JPH09113213A (ja) 高調波信号成分を濾波する装置
JP2004501356A (ja) 光学式位置測定装置用走査ユニット
JP2022500646A (ja) 測定装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081017

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20081017

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20100517

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110304

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120110

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120402

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120626

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120717

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150727

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 5046523

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees