JPH1183432A5 - - Google Patents

Info

Publication number
JPH1183432A5
JPH1183432A5 JP1998170298A JP17029898A JPH1183432A5 JP H1183432 A5 JPH1183432 A5 JP H1183432A5 JP 1998170298 A JP1998170298 A JP 1998170298A JP 17029898 A JP17029898 A JP 17029898A JP H1183432 A5 JPH1183432 A5 JP H1183432A5
Authority
JP
Japan
Prior art keywords
reference pulse
graduation
scanning
light
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998170298A
Other languages
English (en)
Japanese (ja)
Other versions
JP4303804B2 (ja
JPH1183432A (ja
Filing date
Publication date
Priority claimed from DE19726935.4A external-priority patent/DE19726935B4/de
Application filed filed Critical
Publication of JPH1183432A publication Critical patent/JPH1183432A/ja
Publication of JPH1183432A5 publication Critical patent/JPH1183432A5/ja
Application granted granted Critical
Publication of JP4303804B2 publication Critical patent/JP4303804B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP17029898A 1997-06-25 1998-06-17 光学位置測定装置 Expired - Fee Related JP4303804B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19726935:4 1997-06-25
DE19726935.4A DE19726935B4 (de) 1997-06-25 1997-06-25 Optische Positionsmeßeinrichtung

Publications (3)

Publication Number Publication Date
JPH1183432A JPH1183432A (ja) 1999-03-26
JPH1183432A5 true JPH1183432A5 (enExample) 2005-08-25
JP4303804B2 JP4303804B2 (ja) 2009-07-29

Family

ID=7833583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17029898A Expired - Fee Related JP4303804B2 (ja) 1997-06-25 1998-06-17 光学位置測定装置

Country Status (5)

Country Link
US (1) US6097490A (enExample)
EP (1) EP0887625B1 (enExample)
JP (1) JP4303804B2 (enExample)
AT (1) ATE312335T1 (enExample)
DE (2) DE19726935B4 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0896206B1 (de) 1997-08-07 2002-12-11 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine optische Positionsmesseinrichtung
EP1003012B3 (de) 1998-11-19 2011-04-20 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
EP1028309B1 (de) * 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
DE19962278A1 (de) 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
GB0103582D0 (en) 2001-02-14 2001-03-28 Renishaw Plc Position determination system
DE10127239A1 (de) * 2001-05-28 2002-12-12 Inst Mikroelektronik Und Mecha Verfahren und Computerprogrammprodukt zur Auswertung von durch Meßgeräte aufgenommenen Daten
US6723980B2 (en) * 2001-07-16 2004-04-20 Wai-Hon Lee Position sensor with grating to detect moving object with periodic pattern
DE10217726A1 (de) * 2002-04-17 2003-11-27 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
US7191943B2 (en) * 2004-07-28 2007-03-20 Caterpillar Inc Robust barcode and reader for rod position determination
DE102005006247A1 (de) 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
GB0523273D0 (en) * 2005-11-16 2005-12-21 Renishaw Plc Scale and readhead apparatus and method
DE102006021484A1 (de) * 2006-05-09 2007-11-15 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
GB201301186D0 (en) 2012-12-20 2013-03-06 Renishaw Plc Optical element
JP5853115B1 (ja) * 2015-05-25 2016-02-09 株式会社Ｎｔｔファシリティーズ 変位計、位置検出方法及びプログラム
DE102018202556A1 (de) * 2018-02-20 2019-08-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1814785A1 (de) * 1968-12-14 1970-06-25 Johannes Heidenhain Feinmechan Zaehlanordnung
AT394275B (de) * 1981-06-22 1992-02-25 Rieder Heinz Lagemesssystem, insbesondere inkrementales lagemesssystem
US4451731A (en) * 1981-08-10 1984-05-29 Hewlett-Packard Company Apparatus and method for modulating light to generate an index pulse
US4678908A (en) * 1983-07-25 1987-07-07 Bei Electronics, Inc. Zero reference generating method and apparatus for optical encoders
DE3509871C2 (de) * 1985-03-19 1987-03-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmeßeinrichtung
JPS6347616A (ja) * 1986-08-15 1988-02-29 Ricoh Co Ltd 移動量測定方法
JP2549514B2 (ja) * 1986-11-13 1996-10-30 株式会社 ソキア 光電式エンコ−ダの基準点信号発生機構
JPH07888Y2 (ja) * 1988-02-22 1995-01-11 株式会社ミツトヨ 光学式変位検出器
US5065017A (en) * 1990-04-20 1991-11-12 Hoech Robert W Zero mark for optical encoder using stator mask patterns and rotor patterns
CH683798A5 (fr) * 1990-12-10 1994-05-13 Tesa Sa Capteur de position pour un appareil de mesure de grandeurs linéaires ou angulaires.
DE59102126D1 (de) * 1991-05-18 1994-08-11 Heidenhain Gmbh Dr Johannes Interferentielle Positionsmessvorrichtung.
DE4212281A1 (de) * 1991-07-11 1993-10-14 Heidenhain Gmbh Dr Johannes Interferentielle Positionsmeßvorrichtung
EP0635701B1 (de) * 1993-07-17 1997-10-29 Dr. Johannes Heidenhain GmbH Längen- oder Winkelmesseinrichtung

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