DE19726935B4 - Optische Positionsmeßeinrichtung - Google Patents

Optische Positionsmeßeinrichtung Download PDF

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Publication number
DE19726935B4
DE19726935B4 DE19726935.4A DE19726935A DE19726935B4 DE 19726935 B4 DE19726935 B4 DE 19726935B4 DE 19726935 A DE19726935 A DE 19726935A DE 19726935 B4 DE19726935 B4 DE 19726935B4
Authority
DE
Germany
Prior art keywords
reference pulse
measuring device
position measuring
scale
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE19726935.4A
Other languages
German (de)
English (en)
Other versions
DE19726935A1 (de
Inventor
Dr. Holzapfel Wolfgang
Dr. Mayer Elmar J.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Priority to DE19726935.4A priority Critical patent/DE19726935B4/de
Priority to EP98110401A priority patent/EP0887625B1/de
Priority to DE59813254T priority patent/DE59813254D1/de
Priority to AT98110401T priority patent/ATE312335T1/de
Priority to JP17029898A priority patent/JP4303804B2/ja
Priority to US09/103,327 priority patent/US6097490A/en
Publication of DE19726935A1 publication Critical patent/DE19726935A1/de
Application granted granted Critical
Publication of DE19726935B4 publication Critical patent/DE19726935B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Vehicle Body Suspensions (AREA)
  • Eye Examination Apparatus (AREA)
  • Body Structure For Vehicles (AREA)
DE19726935.4A 1997-06-25 1997-06-25 Optische Positionsmeßeinrichtung Expired - Fee Related DE19726935B4 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
DE19726935.4A DE19726935B4 (de) 1997-06-25 1997-06-25 Optische Positionsmeßeinrichtung
EP98110401A EP0887625B1 (de) 1997-06-25 1998-06-06 Optische Positionsmesseinrichtung
DE59813254T DE59813254D1 (de) 1997-06-25 1998-06-06 Optische Positionsmesseinrichtung
AT98110401T ATE312335T1 (de) 1997-06-25 1998-06-06 Optische positionsmesseinrichtung
JP17029898A JP4303804B2 (ja) 1997-06-25 1998-06-17 光学位置測定装置
US09/103,327 US6097490A (en) 1997-06-25 1998-06-23 Optical position measuring instrument for generating a reference pulse signal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19726935.4A DE19726935B4 (de) 1997-06-25 1997-06-25 Optische Positionsmeßeinrichtung

Publications (2)

Publication Number Publication Date
DE19726935A1 DE19726935A1 (de) 1999-01-07
DE19726935B4 true DE19726935B4 (de) 2014-06-12

Family

ID=7833583

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19726935.4A Expired - Fee Related DE19726935B4 (de) 1997-06-25 1997-06-25 Optische Positionsmeßeinrichtung
DE59813254T Expired - Lifetime DE59813254D1 (de) 1997-06-25 1998-06-06 Optische Positionsmesseinrichtung

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE59813254T Expired - Lifetime DE59813254D1 (de) 1997-06-25 1998-06-06 Optische Positionsmesseinrichtung

Country Status (5)

Country Link
US (1) US6097490A (enExample)
EP (1) EP0887625B1 (enExample)
JP (1) JP4303804B2 (enExample)
AT (1) ATE312335T1 (enExample)
DE (2) DE19726935B4 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0896206B1 (de) 1997-08-07 2002-12-11 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine optische Positionsmesseinrichtung
EP1003012B3 (de) 1998-11-19 2011-04-20 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
EP1028309B1 (de) * 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
DE19962278A1 (de) 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
GB0103582D0 (en) 2001-02-14 2001-03-28 Renishaw Plc Position determination system
DE10127239A1 (de) * 2001-05-28 2002-12-12 Inst Mikroelektronik Und Mecha Verfahren und Computerprogrammprodukt zur Auswertung von durch Meßgeräte aufgenommenen Daten
US6723980B2 (en) * 2001-07-16 2004-04-20 Wai-Hon Lee Position sensor with grating to detect moving object with periodic pattern
DE10217726A1 (de) * 2002-04-17 2003-11-27 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
US7191943B2 (en) * 2004-07-28 2007-03-20 Caterpillar Inc Robust barcode and reader for rod position determination
DE102005006247A1 (de) 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
GB0523273D0 (en) * 2005-11-16 2005-12-21 Renishaw Plc Scale and readhead apparatus and method
DE102006021484A1 (de) * 2006-05-09 2007-11-15 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
GB201301186D0 (en) * 2012-12-20 2013-03-06 Renishaw Plc Optical element
JP5853115B1 (ja) * 2015-05-25 2016-02-09 株式会社Ｎｔｔファシリティーズ 変位計、位置検出方法及びプログラム
DE102018202556A1 (de) * 2018-02-20 2019-08-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1814785A1 (de) * 1968-12-14 1970-06-25 Johannes Heidenhain Feinmechan Zaehlanordnung
US4451731A (en) * 1981-08-10 1984-05-29 Hewlett-Packard Company Apparatus and method for modulating light to generate an index pulse
EP0195130A2 (de) * 1985-03-19 1986-09-24 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
US4823001A (en) * 1986-08-15 1989-04-18 Ricoh Company, Ltd. Method of measuring the amount of movement of an object having uniformly periodic structure
US5065017A (en) * 1990-04-20 1991-11-12 Hoech Robert W Zero mark for optical encoder using stator mask patterns and rotor patterns
DE4212281C2 (enExample) * 1991-07-11 1994-02-03 Dr. Johannes Heidenhain Gmbh, 83301 Traunreut, De
EP0635701A1 (de) * 1993-07-17 1995-01-25 Dr. Johannes Heidenhain GmbH Längen- oder Winkelmesseinrichtung
DE3904898C2 (de) * 1988-02-22 1997-11-27 Mitutoyo Corp Optischer Kodierer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT394275B (de) * 1981-06-22 1992-02-25 Rieder Heinz Lagemesssystem, insbesondere inkrementales lagemesssystem
US4678908A (en) * 1983-07-25 1987-07-07 Bei Electronics, Inc. Zero reference generating method and apparatus for optical encoders
JP2549514B2 (ja) * 1986-11-13 1996-10-30 株式会社 ソキア 光電式エンコ−ダの基準点信号発生機構
CH683798A5 (fr) * 1990-12-10 1994-05-13 Tesa Sa Capteur de position pour un appareil de mesure de grandeurs linéaires ou angulaires.
ATE108274T1 (de) * 1991-05-18 1994-07-15 Heidenhain Gmbh Dr Johannes Interferentielle positionsmessvorrichtung.

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1814785A1 (de) * 1968-12-14 1970-06-25 Johannes Heidenhain Feinmechan Zaehlanordnung
US4451731A (en) * 1981-08-10 1984-05-29 Hewlett-Packard Company Apparatus and method for modulating light to generate an index pulse
EP0195130A2 (de) * 1985-03-19 1986-09-24 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
US4823001A (en) * 1986-08-15 1989-04-18 Ricoh Company, Ltd. Method of measuring the amount of movement of an object having uniformly periodic structure
DE3904898C2 (de) * 1988-02-22 1997-11-27 Mitutoyo Corp Optischer Kodierer
US5065017A (en) * 1990-04-20 1991-11-12 Hoech Robert W Zero mark for optical encoder using stator mask patterns and rotor patterns
DE4212281C2 (enExample) * 1991-07-11 1994-02-03 Dr. Johannes Heidenhain Gmbh, 83301 Traunreut, De
EP0635701A1 (de) * 1993-07-17 1995-01-25 Dr. Johannes Heidenhain GmbH Längen- oder Winkelmesseinrichtung

Also Published As

Publication number Publication date
EP0887625A2 (de) 1998-12-30
ATE312335T1 (de) 2005-12-15
DE59813254D1 (de) 2006-01-12
JP4303804B2 (ja) 2009-07-29
EP0887625A3 (de) 2000-10-04
US6097490A (en) 2000-08-01
EP0887625B1 (de) 2005-12-07
JPH1183432A (ja) 1999-03-26
DE19726935A1 (de) 1999-01-07

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8110 Request for examination paragraph 44
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R020 Patent grant now final

Effective date: 20150313

R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee