JP4303804B2 - 光学位置測定装置 - Google Patents

光学位置測定装置 Download PDF

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Publication number
JP4303804B2
JP4303804B2 JP17029898A JP17029898A JP4303804B2 JP 4303804 B2 JP4303804 B2 JP 4303804B2 JP 17029898 A JP17029898 A JP 17029898A JP 17029898 A JP17029898 A JP 17029898A JP 4303804 B2 JP4303804 B2 JP 4303804B2
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JP
Japan
Prior art keywords
reference pulse
position measuring
scale
scanning
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP17029898A
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English (en)
Japanese (ja)
Other versions
JPH1183432A5 (enExample
JPH1183432A (ja
Inventor
ヴオルフガング・ホルツプフエル
エルマール・ヨット・マイエル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JPH1183432A publication Critical patent/JPH1183432A/ja
Publication of JPH1183432A5 publication Critical patent/JPH1183432A5/ja
Application granted granted Critical
Publication of JP4303804B2 publication Critical patent/JP4303804B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/366—Particular pulse shapes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Vehicle Body Suspensions (AREA)
  • Eye Examination Apparatus (AREA)
  • Body Structure For Vehicles (AREA)
JP17029898A 1997-06-25 1998-06-17 光学位置測定装置 Expired - Fee Related JP4303804B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19726935.4A DE19726935B4 (de) 1997-06-25 1997-06-25 Optische Positionsmeßeinrichtung
DE19726935:4 1997-06-25

Publications (3)

Publication Number Publication Date
JPH1183432A JPH1183432A (ja) 1999-03-26
JPH1183432A5 JPH1183432A5 (enExample) 2005-08-25
JP4303804B2 true JP4303804B2 (ja) 2009-07-29

Family

ID=7833583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17029898A Expired - Fee Related JP4303804B2 (ja) 1997-06-25 1998-06-17 光学位置測定装置

Country Status (5)

Country Link
US (1) US6097490A (enExample)
EP (1) EP0887625B1 (enExample)
JP (1) JP4303804B2 (enExample)
AT (1) ATE312335T1 (enExample)
DE (2) DE19726935B4 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0896206B1 (de) 1997-08-07 2002-12-11 Dr. Johannes Heidenhain GmbH Abtasteinheit für eine optische Positionsmesseinrichtung
EP1003012B3 (de) 1998-11-19 2011-04-20 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
EP1028309B1 (de) * 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
DE19962278A1 (de) 1999-12-23 2001-08-02 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
GB0103582D0 (en) 2001-02-14 2001-03-28 Renishaw Plc Position determination system
DE10127239A1 (de) * 2001-05-28 2002-12-12 Inst Mikroelektronik Und Mecha Verfahren und Computerprogrammprodukt zur Auswertung von durch Meßgeräte aufgenommenen Daten
US6723980B2 (en) * 2001-07-16 2004-04-20 Wai-Hon Lee Position sensor with grating to detect moving object with periodic pattern
DE10217726A1 (de) * 2002-04-17 2003-11-27 Heidenhain Gmbh Dr Johannes Optische Positionsmesseinrichtung
US7191943B2 (en) * 2004-07-28 2007-03-20 Caterpillar Inc Robust barcode and reader for rod position determination
DE102005006247A1 (de) 2005-02-11 2006-08-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
GB0523273D0 (en) * 2005-11-16 2005-12-21 Renishaw Plc Scale and readhead apparatus and method
DE102006021484A1 (de) * 2006-05-09 2007-11-15 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
GB201301186D0 (en) * 2012-12-20 2013-03-06 Renishaw Plc Optical element
JP5853115B1 (ja) * 2015-05-25 2016-02-09 株式会社Ｎｔｔファシリティーズ 変位計、位置検出方法及びプログラム
DE102018202556A1 (de) * 2018-02-20 2019-08-22 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1814785A1 (de) * 1968-12-14 1970-06-25 Johannes Heidenhain Feinmechan Zaehlanordnung
AT394275B (de) * 1981-06-22 1992-02-25 Rieder Heinz Lagemesssystem, insbesondere inkrementales lagemesssystem
US4451731A (en) * 1981-08-10 1984-05-29 Hewlett-Packard Company Apparatus and method for modulating light to generate an index pulse
US4678908A (en) * 1983-07-25 1987-07-07 Bei Electronics, Inc. Zero reference generating method and apparatus for optical encoders
DE3509871C2 (de) * 1985-03-19 1987-03-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmeßeinrichtung
JPS6347616A (ja) * 1986-08-15 1988-02-29 Ricoh Co Ltd 移動量測定方法
JP2549514B2 (ja) * 1986-11-13 1996-10-30 株式会社 ソキア 光電式エンコ−ダの基準点信号発生機構
JPH07888Y2 (ja) * 1988-02-22 1995-01-11 株式会社ミツトヨ 光学式変位検出器
US5065017A (en) * 1990-04-20 1991-11-12 Hoech Robert W Zero mark for optical encoder using stator mask patterns and rotor patterns
CH683798A5 (fr) * 1990-12-10 1994-05-13 Tesa Sa Capteur de position pour un appareil de mesure de grandeurs linéaires ou angulaires.
ATE108274T1 (de) * 1991-05-18 1994-07-15 Heidenhain Gmbh Dr Johannes Interferentielle positionsmessvorrichtung.
DE4212281A1 (de) * 1991-07-11 1993-10-14 Heidenhain Gmbh Dr Johannes Interferentielle Positionsmeßvorrichtung
DE59307609D1 (de) * 1993-07-17 1997-12-04 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmesseinrichtung

Also Published As

Publication number Publication date
EP0887625A2 (de) 1998-12-30
ATE312335T1 (de) 2005-12-15
DE59813254D1 (de) 2006-01-12
EP0887625A3 (de) 2000-10-04
US6097490A (en) 2000-08-01
EP0887625B1 (de) 2005-12-07
DE19726935B4 (de) 2014-06-12
JPH1183432A (ja) 1999-03-26
DE19726935A1 (de) 1999-01-07

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