JP7181808B2 - 光学式の位置測定装置 - Google Patents
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
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- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
- G01D5/24433—Error prevention by mechanical means
- G01D5/24438—Special design of the sensing element or scale
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
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- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/366—Particular pulse shapes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
- G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions
Description
走査ユニット内では、周期的な透過型送信回折格子と、隣接して配置された送信ギャップとからなる送信回折格子装置が発散性に放射する光源の前方に配置されており、
検出装置が、増分信号検出器と参照信号検出器とを含む。
11 基準尺キャリア
12.1,12.2 増分目盛
12.1a,12.1b,12.2a,12.2b 目盛範囲
13.1,13.2 参照マーク
14.1 周期的部分
14.1a,14.1b 目盛範囲
14.2 非周期的部分
14.2a,14.2b 目盛範囲
20 走査ユニット
21 キャリア要素
22 光源
23.1 透過型送信回折格子
23.2 送信ギャップ
25.1 増分信号検出器
25.2 参照信号検出器
25.2a,25.2b,25.2c,25.2d 検出器アレイ
11.2 増分目盛
113.2 参照マーク
B 全幅
bP,bap 幅
bRM 目盛範囲の幅
x,y 測定方向
x1′,x2′ 増分目盛方向
y1′,y2′ 方向
xREF,xREF 参照位置
S 対称軸線
TPINC 増分目盛格子定数
TPRMF 参照マークの細かい格子定数
TPRMG 参照マークの粗い格子定数
TPRM1 第1参照マーク格子定数
TPRM2 第2参照マーク格子定数
TPRM3 第3参照マーク格子定数
RM1 参照マーク範囲
RM2 参照マーク範囲
V 比率
β 角度
Claims (15)
- 少なくとも2つの測定方向(x、y)に沿って互いに相対的に移動可能な2つの物体の相対位置を決定するための光学式の位置測定装置において、
走査ユニット(20)であって、両方の物体のうちのいずれか一方に結合されており、それぞれ少なくとも1つの光源(22)、1つ以上の回折格子(23.1,23.2)、および検出装置を含む2つの走査ユニット(20)、および
他方の物体に結合されており、第1の測定方向(x)に沿って延在する2つのトラックを備える基準尺(10)であって、トラックが増分目盛(12.1,12.2;112.2)を有し、該増分目盛が、それぞれ増分目盛方向(x1′,x2′)に沿って周期的に配置された、異なる光学特性を有する目盛範囲(12.1a,12.1b,12.2a,12.2b;112.2a,112.2b)からなり、両方の増分目盛方向(x1′,x2′)が0°から90°までの間の角度(β)をなし、両方の増分目盛(12.1,12.2;112.2)のそれぞれに少なくとも1つの参照マーク(13.1,13.2;113.2)が組み込まれており、該参照マークを走査することにより、それぞれの測定方向(x,y)に沿った所定の参照位置(xREF,yREF)で参照信号が生成可能であり、参照マーク(13.1,13.2;113.2)が、非周期的部分(14.2)および周期的部分(14.1)の両方を含む基準尺を備える光学式の位置測定装置。 - 請求項1に記載の光学式の位置測定装置において、
前記参照マーク(13.1,13.2;113.2)が、それぞれの前記増分目盛(12.1,12.2;112.2)の面状に制限された部分範囲に配置されており、この部分範囲内に、参照マークの前記非周期的部分(14.2)と前記周期的部分(14.1)とが互いに混合して形成されている位置測定装置。 - 請求項2に記載の光学式の位置測定装置において、
前記部分範囲が長方形に形成されており、長方形の縦軸線がそれぞれの前記増分目盛(12.1,12.2;112.2)の前記増分目盛方向(x1′,x2′)に対して垂直方向に向けられている位置測定装置。 - 請求項3に記載の光学式の位置測定装置において、
長方形の前記参照マーク(13.1,13.2;113.2)が、それぞれの前記増分目盛(12.1,12.2;112.2)を有するトラックの全幅(B)にわたって延在している光学式の位置測定装置。 - 請求項1から4までのいずれか1項に記載の光学式の位置測定装置において、
それぞれの前記増分目盛方向(x1′,x2′)に対して垂直方向に、参照マークの前記非周期的部分(14.2)および前記周期的部分(14.1)が空間的に独立して形成されている位置測定装置。 - 請求項5に記載の光学式の位置測定装置において、
参照マークの前記周期的部分(14.1)が、それぞれの増分目盛格子定数(TPINC)と同一の第1参照マーク格子定数(TPRM1)を備え、
参照マークの前記非周期的部分(14.2)が、前記増分目盛方向(x1′,x2′)に沿って局所的に変化する第2参照マーク格子定数(TPRM2)を備える複数の格子パターンをそれぞれ含む位置測定装置。 - 請求項6に記載の位置測定装置において、
参照マークの前記非周期的部分(14.2)が、鏡面対称的に形成された複数の格子パターンをそれぞれ含み、該格子パターンの前記第2参照マーク格子定数(TPRM2)が、中心の対称軸線(S)を起点として前記増分目盛方向(x1′,x2′)に対して垂直方向に外側に向かって対称的に増大する光学式の位置測定装置。 - 請求項5に記載の光学式の位置測定装置において、
参照マークの前記非周期的部分(14.2)が、前記増分目盛方向(x1′,x2′)に対して垂直方向に、第3参照マーク格子定数(TPRM3)によって周期的に配置されている光学式の位置測定装置。 - 請求項8に記載の光学式の位置測定装置において、
前記第3参照マーク格子定数(TPRM3)が、走査ユニット(20)の変位が前記増分目盛方向(x1′,x2′)に対して垂直方向に信号変化を誘起しないように選択されている光学式の位置測定装置。 - 請求項5に記載の光学式の位置測定装置において、
参照マークの前記周期的部分(14.1)および前記非周期的部分(14.2)が互いに1:1の面積比を有する光学式の位置測定装置。 - 請求項1から4までのいずれか1項に記載の光学式の位置測定装置において、
参照マークの周期的部分が周期的な上部パターンとして参照マーク(113.2)の非周期的部分に組み込まれて構成されている光学式の位置測定装置。 - 請求項11に記載の光学式の位置測定装置において、
参照マークの周期的部分が参照マークの細かい格子定数(TPRMF)を備え、該格子定数が、それぞれの増分目盛(112.2)の増分目盛格子定数(TPINC)に対応し、
参照マークの非周期的部分が、異なる2つの参照マーク範囲によって形成されており、該参照マーク範囲が、前記増分目盛方向(x1′,x2′)に沿って参照マークの粗い格子定数(TPRMG)によって交互に配置されており、目盛範囲の幅(bRM)と参照マークの細かい格子定数(TRFRMF)とのそれぞれ異なる比率を備える光学式の位置測定装置。 - 請求項12に記載の光学式の位置測定装置において、
構成の異なる参照マーク範囲が、前記増分目盛方向(x1′,x2′)に沿って非周期的に配置されており、参照マーク範囲が、中心の対称軸線を起点として鏡面対称的に外側に向かってそれぞれ増大する参照マークの粗い格子定数(TPRMG)によって配置されている光学式の位置測定装置。 - 請求項1から13までのいずれか1項に記載の光学式の位置測定装置において、
前記走査ユニット(20)内では、周期的な透過型送信回折格子(23.1)と、隣接して配置された送信ギャップ(23.2)とからなる送信回折格子装置が、発散性に放射する光源(22)の前方に配置されており、
検出装置が、増分信号検出器(25.1)と参照信号検出器(25.2)とを含む光学式の位置測定装置。 - 請求項1から14までのいずれか1項に記載の光学式の位置測定装置において、
前記基準尺(10)が反射性の基準尺として形成されており、異なる位相シフト作用を有する交互に配置された反射性の目盛範囲を備える光学式の位置測定装置。
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2018
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2019
- 2019-01-30 EP EP19154406.3A patent/EP3527951B1/de active Active
- 2019-01-30 ES ES19154406T patent/ES2871791T3/es active Active
- 2019-02-02 CN CN201910106803.8A patent/CN110174048B/zh active Active
- 2019-02-15 US US16/276,636 patent/US10775202B2/en active Active
- 2019-02-20 JP JP2019027993A patent/JP7181808B2/ja active Active
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DE102018202556A1 (de) | 2019-08-22 |
JP2019144243A (ja) | 2019-08-29 |
CN110174048A (zh) | 2019-08-27 |
EP3527951B1 (de) | 2021-04-14 |
CN110174048B (zh) | 2021-11-23 |
US10775202B2 (en) | 2020-09-15 |
EP3527951A1 (de) | 2019-08-21 |
US20200025591A1 (en) | 2020-01-23 |
ES2871791T3 (es) | 2021-11-02 |
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