JP2011150365A5 - - Google Patents

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JP2011150365A5
JP2011150365A5 JP2011059412A JP2011059412A JP2011150365A5 JP 2011150365 A5 JP2011150365 A5 JP 2011150365A5 JP 2011059412 A JP2011059412 A JP 2011059412A JP 2011059412 A JP2011059412 A JP 2011059412A JP 2011150365 A5 JP2011150365 A5 JP 2011150365A5
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JP5019338B2 (ja
JP2011150365A (ja
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  1. 発色団基がポリマーに化学的に結合しており、そして芳香族炭化水素環を含む基、置換されているかもしくは置換されていないフェニル基、置換されているかもしくは置換されていないアントラシル基、置換されているかもしくは置換されていないフェナントリル基、置換されているかもしくは置換されていないナフチル基、酸素、窒素、硫黄及びこれらの混合物から選択されるヘテロ原子を含む置換されているかもしくは置換されていない複素環式芳香族環から選択される、請求項１の組成物。
JP2011059412A 2004-03-25 2011-03-17 光結像性ポジ型底面反射防止膜 Active JP5019338B2 (ja)

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US10/808,884 US20050214674A1 (en) 2004-03-25 2004-03-25 Positive-working photoimageable bottom antireflective coating
US10/808,884 2004-03-25

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JP2007504508A Division JP5008079B2 (ja) 2004-03-25 2005-03-23 光結像性ポジ型底面反射防止膜

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JP2011150365A JP2011150365A (ja) 2011-08-04
JP2011150365A5 true JP2011150365A5 (ja) 2012-03-01
JP5019338B2 JP5019338B2 (ja) 2012-09-05

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JP2007504508A Active JP5008079B2 (ja) 2004-03-25 2005-03-23 光結像性ポジ型底面反射防止膜
JP2011059412A Active JP5019338B2 (ja) 2004-03-25 2011-03-17 光結像性ポジ型底面反射防止膜
JP2012003737A Active JP5391462B2 (ja) 2004-03-25 2012-01-12 光結像性ポジ型底面反射防止膜

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US (3) US20050214674A1 (ja)
EP (1) EP1738225B1 (ja)
JP (3) JP5008079B2 (ja)
KR (2) KR101241468B1 (ja)
CN (2) CN102879999B (ja)
MY (1) MY147755A (ja)
SG (2) SG183654A1 (ja)
TW (2) TWI407259B (ja)
WO (1) WO2005093513A2 (ja)

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