JP2011049533A - 発光素子及びその製造方法 - Google Patents
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- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/12—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
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- H—ELECTRICITY
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- H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
- H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/89—Deposition of materials, e.g. coating, cvd, or ald
- Y10S977/893—Deposition in pores, molding, with subsequent removal of mold
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/949—Radiation emitter using nanostructure
- Y10S977/95—Electromagnetic energy
Abstract
【解決手段】シリコン基板と、シリコン基板上に形成された金属性バッファ層と、金属性バッファ層上に形成されたパターニングされた分散ブラッグ反射層と、パターニングされた分散ブラッグ反射層とパターニングされた分散ブラッグ反射層のパターン間の領域との上に形成された窒化物系薄膜層と、AlxGa1−xInyN(0≦x<1,0≦y<1)発光層と、を備える発光素子。
【選択図】図1B
Description
110 シリコン基板
130 射バッファ層
132 金属性バッファ層
134 分散ブラッグ反射層
136 XY材料層
150 発光層構造
MH ホール
Claims (19)
- シリコン基板と、
前記シリコン基板上に形成された金属性バッファ層と、
前記金属性バッファ層上に形成されたパターニングされた分散ブラッグ反射層と、
前記パターニングされた分散ブラッグ反射層と前記パターニングされた分散ブラッグ反射層のパターン間の領域との上に形成された窒化物系薄膜層と、
AlxGa1−xInyN(0≦x<1,0≦y<1)発光層と、を備える発光素子。 - 前記分散ブラッグ反射層は、SiC、AlN、GaN、BN、BP、AlInGaN、及びAlBGaNから選択されたいずれか一つの材料からなる層とSiO2からなる層とが交互に積層されて形成されることを特徴とする請求項1に記載の発光素子。
- 前記窒化物系薄膜層は、AlxGa1−xInyN(0≦x≦1,0≦y≦1)からなることを特徴とする請求項1に記載の発光素子。
- 前記金属性バッファ層は、材料X及び材料Yを含む単層または複数層の膜構造で形成され、ここで、材料Xは、Ti、Cr、Zr、Hf、Nb、及びTaから選択されたいずれか一つであり、材料Yは、N、B、及びB2から選択されたいずれか一つである請求項1または3のうちいずれか1項に記載の発光素子。
- 前記パターニングされた分散ブラッグ反射層は、複数のホールを含み、
前記金属性バッファ層は、前記分散ブラッグ反射層と同じ形状のパターンを有することを特徴とする請求項1に記載の発光素子。 - 前記パターニングされた分散ブラッグ反射層上に材料X及び材料Yを含むXY材料層がさらに形成され、ここで、材料Xは、Ti、Cr、Zr、Hf、Nb、及びTaから選択されたいずれか一つであり、材料Yは、N、B、及びB2から選択されたいずれか一つである請求項5に記載の発光素子。
- 前記ホールの内部に材料X及び材料Yを含むXY材料層をさらに備え、
前記複数のホールはナノメートルオーダーのサイズを持ち、、材料Xは、Ti、Cr、Zr、Hf、Nb、及びTaから選択されたいずれか一つであり、材料Yは、N、B、及びB2から選択されたいずれか一つである請求項5に記載の発光素子。 - 前記金属性バッファ層は、1nmないし1μm範囲の厚さを持つことを特徴とする請求項1に記載の発光素子。
- シリコン基板上に金属性バッファ層及びパターニングされた分散ブラッグ反射層を備える反射バッファ層を形成する工程と、
GaNベースの発光層構造を形成する工程と、を含む発光素子の製造方法。 - 前記反射バッファ層を形成する工程は、
前記シリコン基板上に前記金属性バッファ層を形成する工程と、
前記金属性バッファ層上に前記分散ブラッグ反射層を形成する工程と、
前記分散ブラッグ反射層を複数のホールが形成されるようにパターニングする工程と、を含む請求項9に記載の発光素子の製造方法。 - 前記分散ブラッグ反射層は、
SiC、AlN、GaN、BN、BP、AlInGaN、及びAlBGaNから選択されたいずれか一つの材料からなる層と、SiO2からなる層とを交互に積層して形成されることを特徴とする請求項10に記載の発光素子の製造方法。 - 前記分散ブラッグ反射層は、SiCからなる層とSiO2からなる層とが交互に積層されて形成されることを特徴とする請求項11に記載の発光素子の製造方法。
- 前記金属性バッファ層を、材料X及び材料Yを含む単層または複数層の膜構造に形成し、ここで、材料Xは、Ti、Cr、Zr、Hf、Nb、及びTaから選択されたいずれか一つであり、材料Yは、N、B、及びB2から選択されたいずれか一つである請求項9ないし12のうちいずれか1項に記載の発光素子の製造方法。
- 前記分散ブラッグ反射層をパターニングする工程で、
前記金属性バッファ層を前記分散ブラッグ反射層と同じ形状でパターニングすることを特徴とする請求項10に記載の発光素子の製造方法。 - 前記パターニングされた分散ブラッグ反射層上に材料X及び材料Yを含むXY材料層を形成する工程をさらに含み、ここで、材料Xは、Ti、Cr、Zr、Hf、Nb、及びTaから選択されたいずれか一つであり、材料Yは、N、B、及びB2から選択されたいずれか一つである請求項10に記載の発光素子の製造方法。
- 前記発光層構造を形成する工程は、
前記複数のホールの内部及び前記XY材料層上にGaNベースの半導体材料を垂直成長させる工程を含む請求項15に記載の発光素子の製造方法。 - 前記複数のホールをナノメートルオーダーのサイズに形成することを特徴とする請求項10に記載の発光素子の製造方法。
- 前記発光層構造を形成する工程は、
前記複数のホール内部にナノロッドの形状にGaNベースの半導体材料を形成する工程と、
ナノロッド形状に成長したGaNベースの半導体材料をエピタキシャル横方向成長させる工程と、を含む請求項17に記載の発光素子の製造方法。 - 前記発光層構造を形成する工程は、
前記複数のホールの内部に材料X及び材料Yを含むXY材料層(ここで、材料Xは、Ti、Cr、Zr、Hf、Nb、及びTaから選択されたいずれか一つであり、材料Yは、N、B、及びB2から選択されたいずれか一つである)を形成する工程と、
前記XY材料層からベースの半導体材料をエピタキシャル横方向成長させる工程と、を含む請求項17に記載の発光素子の製造方法。
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KR101981119B1 (ko) * | 2011-11-25 | 2019-05-22 | 엘지이노텍 주식회사 | 자외선 반도체 발광 소자 |
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KR101650840B1 (ko) | 2016-08-24 |
US20110049549A1 (en) | 2011-03-03 |
US9793432B2 (en) | 2017-10-17 |
US8476670B2 (en) | 2013-07-02 |
US20160111592A1 (en) | 2016-04-21 |
US20130260495A1 (en) | 2013-10-03 |
US9224909B2 (en) | 2015-12-29 |
KR20110021406A (ko) | 2011-03-04 |
JP5618655B2 (ja) | 2014-11-05 |
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