JP2011040734A - 酸化亜鉛バリスタを作製するための2つの独立した処理手順を介して酸化亜鉛バリスタを製造するプロセス - Google Patents
酸化亜鉛バリスタを作製するための2つの独立した処理手順を介して酸化亜鉛バリスタを製造するプロセス Download PDFInfo
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- JP2011040734A JP2011040734A JP2010161820A JP2010161820A JP2011040734A JP 2011040734 A JP2011040734 A JP 2011040734A JP 2010161820 A JP2010161820 A JP 2010161820A JP 2010161820 A JP2010161820 A JP 2010161820A JP 2011040734 A JP2011040734 A JP 2011040734A
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- Prior art keywords
- zno
- varistor
- zinc oxide
- doped
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title claims abstract description 440
- 239000011787 zinc oxide Substances 0.000 title claims abstract description 215
- 238000000034 method Methods 0.000 title claims abstract description 50
- 230000008569 process Effects 0.000 title claims abstract description 22
- 239000002245 particle Substances 0.000 claims abstract description 99
- 239000000463 material Substances 0.000 claims abstract description 83
- 239000000203 mixture Substances 0.000 claims abstract description 61
- 238000005245 sintering Methods 0.000 claims abstract description 31
- 229910052709 silver Inorganic materials 0.000 claims abstract description 8
- 239000004332 silver Substances 0.000 claims abstract description 8
- 150000002500 ions Chemical class 0.000 claims description 66
- 239000000843 powder Substances 0.000 claims description 29
- 239000011521 glass Substances 0.000 claims description 18
- 229910052787 antimony Inorganic materials 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000002156 mixing Methods 0.000 claims description 9
- 238000001354 calcination Methods 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 6
- 229910052727 yttrium Inorganic materials 0.000 claims description 6
- 229910052804 chromium Inorganic materials 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims description 5
- 238000000227 grinding Methods 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 229910052720 vanadium Inorganic materials 0.000 claims description 5
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000011230 binding agent Substances 0.000 claims description 4
- 229910052796 boron Inorganic materials 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 2
- 229910052684 Cerium Inorganic materials 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
- 229910001035 Soft ferrite Inorganic materials 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- YQOXCVSNNFQMLM-UHFFFAOYSA-N [Mn].[Ni]=O.[Co] Chemical compound [Mn].[Ni]=O.[Co] YQOXCVSNNFQMLM-UHFFFAOYSA-N 0.000 claims description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 claims description 2
- 229910002113 barium titanate Inorganic materials 0.000 claims description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910001317 nickel manganese cobalt oxide (NMC) Inorganic materials 0.000 claims description 2
- GNRSAWUEBMWBQH-UHFFFAOYSA-N nickel(II) oxide Inorganic materials [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 238000003837 high-temperature calcination Methods 0.000 claims 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 claims 1
- 238000010298 pulverizing process Methods 0.000 claims 1
- 239000003990 capacitor Substances 0.000 abstract description 4
- 238000002441 X-ray diffraction Methods 0.000 description 16
- 238000000975 co-precipitation Methods 0.000 description 15
- 239000000126 substance Substances 0.000 description 14
- 238000009472 formulation Methods 0.000 description 13
- 239000000243 solution Substances 0.000 description 13
- 238000010521 absorption reaction Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 230000009977 dual effect Effects 0.000 description 8
- 239000000047 product Substances 0.000 description 6
- 239000011651 chromium Substances 0.000 description 5
- 238000007639 printing Methods 0.000 description 5
- PTFCDOFLOPIGGS-UHFFFAOYSA-N Zinc dication Chemical compound [Zn+2] PTFCDOFLOPIGGS-UHFFFAOYSA-N 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 229910052797 bismuth Inorganic materials 0.000 description 3
- 229910052748 manganese Inorganic materials 0.000 description 3
- 239000011572 manganese Substances 0.000 description 3
- 239000002244 precipitate Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 description 2
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 239000001099 ammonium carbonate Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 229910000013 Ammonium bicarbonate Inorganic materials 0.000 description 1
- 229910002651 NO3 Inorganic materials 0.000 description 1
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 235000012538 ammonium bicarbonate Nutrition 0.000 description 1
- 235000012501 ammonium carbonate Nutrition 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910000416 bismuth oxide Inorganic materials 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 235000013877 carbamide Nutrition 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 229910000428 cobalt oxide Inorganic materials 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000003891 oxalate salts Chemical class 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000004246 zinc acetate Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/10—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material voltage responsive, i.e. varistors
- H01C7/105—Varistor cores
- H01C7/108—Metal oxide
- H01C7/112—ZnO type
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
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- C04B35/6262—Milling of calcined, sintered clinker or ceramics
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3201—Alkali metal oxides or oxide-forming salts thereof
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3215—Barium oxides or oxide-forming salts thereof
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- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
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- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
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- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
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- C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
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- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
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- C04B2235/3232—Titanium oxides or titanates, e.g. rutile or anatase
- C04B2235/3234—Titanates, not containing zirconia
- C04B2235/3236—Alkaline earth titanates
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Abstract
【解決手段】ドープした酸化亜鉛と高インピーダンス焼結材料を所定の比率でよく混合し、次いでこれを使用して低温の焼結(900℃未満)によって従来技術により酸化亜鉛バリスタを作製することができるように、酸化亜鉛へのドーピングおよび酸化亜鉛粒子の高インピーダンス焼結材料との焼結を2つの独立した処理手順によって実施する。得られた酸化亜鉛バリスタは、内部電極として純銀を使用することができ、バリスタ特性、サーミスタ特性、キャパシタ特性、インダクタ特性、圧電性および磁性のうちの1つまたは複数を特に有する。
【選択図】なし
Description
酸化亜鉛と混合し反応させると主として粒子境界を形成する、金属酸化物のか焼混合物を調製するステップと;
前記金属酸化物のか焼混合物を、主成分としての酸化亜鉛および焼結したとき酸化亜鉛の粒子の成長を抑える粒子成長抑制酸化物と混合することによって複合混合物を形成するステップと;
前記複合混合物を粒状にして粒状混合物を形成するステップと;
前記粒状混合物を焼結させるステップと
を含む。
a)十分な半導性を有するドープZnO粒子を調製するステップと、
b)高インピーダンス焼結材料(またはガラス粉末)を別に調製するステップと、
c)ドープZnO粒子と高インピーダンス焼結材料を所定の比率で混合して混合物を形成するステップと、
d)混合物を用いて既知の従来技術により酸化亜鉛バリスタを作製するステップと、
を含む。
亜鉛イオンを含有する溶液およびドーピングイオンを含有するもう1つの溶液を、結晶学の原理に基づいて調製する。次に、共沈法またはゾル・ゲル法等のナノテクノロジーが適用されて沈殿物が得られる。その沈殿物は次に熱分解を受け、その結果ドーピングイオンをドープしたZnO粒子が得られる。
得られるZnOバリスタの望ましい特性によって決定される組成を有する焼結材料またはガラス粉末の原料が使用される。その材料は、酸化物、水酸化物、炭酸塩、シュウ酸塩からなる群から選択される1つまたは複数を含む。その選択された原料は、混合、粉砕およびか焼を含めた一連の加工処理手順を受けた後、焼結材料に変えられる。次いで、焼結材料は粉砕して所望の細かさの粉末とする。その場合、酸化物は、Bi2O3、B2O3、Sb2O3、Co2O3、MnO2、Cr2O3、V2O5、ZnO、NiOおよびSiO2からなる群から選択される2つ以上の混合物である。
上記のステップa)のZnO粒子および上記のステップb)の高インピーダンス焼結材料またはガラス粉末は、得られるZnOバリスタの望ましい特性に従って適切に作製する。そのとき、ZnO粒子と焼結材料またはガラス粉末は、好ましくは100:2から100:30の範囲、より好ましくは100:5から100:15の範囲の重量比でよく混合する。
最後に、上記のステップc)の生成物としての混合物を、高温のか焼、粉砕、バインダー添加、テープ加圧、焼結および銀電極コーティングにより処理して得られるZnOバリスタを製造する。それに関して、か焼温度は、望ましくは、950℃±10℃から1100℃±10℃の範囲である。
1.耐圧、非線形係数、C値、リーク電流、サージ吸収能力およびESD吸収能力を含めた得られたZnOバリスタのバリスタ特性は、ZnO粒子にドーピングするイオンの種類を選択するか、またはZnO粒子と高インピーダンス焼結材料の重量比を修正することによって変更または調節することができる。
2.得られたZnOバリスタのバリスタ特性は、ZnO粒子にドーピングするイオンの量を変えることによって変更または調節することができる。
3.得られたZnOバリスタのバリスタ特性は、少なくとも2種類のドーピングイオンをZnO粒子にドーピングするか、または焼結温度を制御することによって変更または調節することができる。
4.得られたZnOバリスタのバリスタ特性は、焼結材料またはガラス粉末の組成を修正することによって変更または調節することができる。
5.適切なドーピングイオンをドープしたZnO粒子を使用し、焼結材料の組成を修正することによって、低温の焼結を介して、内部電極として純銀が作製され、優れたバリスタ特性を有するZnOバリスタを製造することが可能である。
6.さまざまな配合の焼結材料を使用することによって、バリスタ特性およびサーミスタ特性を有する二重機能の要素を製造することが可能である。例えば、得られたZnOバリスタは、バリスタ特性およびサーミスタ特性を同時に有することができ、またはバリスタ特性およびインダクタ特性を同時に有することができ、またはバリスタ特性およびキャパシタ特性を同時に有することができる。
Claims (8)
- 酸化亜鉛(ZnO)バリスタを製造するためのプロセスにおいて、
a)1つまたは複数の種類のドーピングイオンをドープしたZnO粒子を調製するステップであって、前記ドーピングイオンの種類がAg、Li、Cu、Al、Ce、Co、Cr、In、Ga、La、Y、Nb、Ni、Pr、Sb、Se、Ti、V、W、Zr、Si、B、FeおよびSnからなる群から選択され、前記ドーピングイオンのドーピング量がZnOの15mol%未満であるステップと、
b)原料を焼結し、焼結原料を粉砕して微粉末にすることによって作製される高インピーダンス焼結材料またはガラス粉末を調製するステップであって、前記原料が、酸化物、水酸化物、炭酸塩、シュウ酸塩、チタン酸バリウム酸化物、ニッケルマンガンコバルト酸化物、ソフトフェライト、チタン酸塩またはそれらの任意の組み合わせであるステップと、
c)ステップa)で調製したZnO粒子と、ステップb)で調製した高インピーダンス焼結材料またはガラス粉末とを100:2から100:30の範囲の重量比でよく混合して混合物を得るステップと、
d)ステップc)の混合物を、高温のか焼、粉砕、バインダー添加、テープ加圧、焼結および銀電極コーティングにより処理してZnOバリスタを製造するステップと
を含むことを特徴とするプロセス。 - ステップa)のドーピングイオンのドーピング量が、ZnOの10mol%未満であることを特徴とする、請求項1に記載の酸化亜鉛(ZnO)バリスタを製造するためのプロセス。
- ステップa)のドーピングイオンのドーピング量が、ZnOの2mol%未満であることを特徴とする、請求項1に記載の酸化亜鉛(ZnO)バリスタを製造するためのプロセス。
- ステップc)のZnO粒子と高インピーダンス焼結材料またはガラス粉末の重量比が、100:5から100:15の範囲であることを特徴とする、請求項1に記載の酸化亜鉛(ZnO)バリスタを製造するためのプロセス。
- 前記酸化物が、Bi2O3、B2O3、Sb2O3、Co2O3、MnO2、Cr2O3、V2O5、ZnO、NiOおよびSiO2からなる群から選択される2つ以上の混合物であることを特徴とする、請求項1に記載の酸化亜鉛(ZnO)バリスタを製造するためのプロセス。
- ステップd)の高温のか焼を行うためのか焼温度が、950℃から1100℃の範囲であることを特徴とする、請求項1に記載の酸化亜鉛(ZnO)バリスタを製造するためのプロセス。
- ステップa)が、ZnO粉末を、ドーピングイオンを含有する溶液に浸し、その浸したZnO粉末を空気中、アルゴンガス中、または水素もしくは一酸化炭素を含むガス中で乾燥およびか焼して、1種または複数の前記イオンをドープしたZnO粒子を生成することを含むことを特徴とする、請求項1に記載の酸化亜鉛(ZnO)バリスタを製造するためのプロセス。
- ステップd)の高温のか焼を行うためのか焼温度が、850℃から940℃の範囲であることを特徴とする、請求項7に記載の酸化亜鉛(ZnO)バリスタを製造するためのプロセス。
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