JP2011023930A - 弾性波素子とこれを用いた電子機器 - Google Patents
弾性波素子とこれを用いた電子機器 Download PDFInfo
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- 239000010936 titanium Substances 0.000 claims description 10
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 239000011733 molybdenum Substances 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 2
- 239000012212 insulator Substances 0.000 abstract description 29
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- 239000010949 copper Substances 0.000 description 9
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- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
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Abstract
【解決手段】本発明の弾性波素子1は、内部電極4と側壁5との間に設けられかつ側壁5の外側に突出すると共に内部電極4よりもメッキ液溶解性の低い材質からなる腐食防止層15を備える。この腐食防止層15により、たとえ側壁5と内部電極4との間に隙間が生じ、側壁5と内部電極4との境界部分に電極下地層9が十分に付着しなくとも、内部電極4と側壁5との間の腐食防止層15により、電解メッキ処理工程における内部電極4の腐食を抑制することができる。
【選択図】図1
Description
以下、本発明の実施の形態1における弾性波素子について図面を参照しながら説明する。
2 圧電基板
3 IDT電極
4 内部電極
5 側壁
6 接着層
7 蓋体
8 空間
9 電極下地層
10 絶縁体
11 外部電極
12 接続電極
13 蓋体下地層
14 蓋体補強層
15 腐食防止層
Claims (8)
- 圧電基板と、
前記圧電基板の上に設けられたIDT電極と、
前記圧電基板の上に設けられると共に前記IDT電極に電気的に接続された内部電極と、
前記内部電極の上であって前記IDT電極の周囲に設けられた側壁と、
前記側壁の上に前記IDT電極上の空間を覆うように設けられた蓋体と、
前記内部電極の上であって前記空間及び前記側壁の外側に設けられた電極下地層と、
前記電極下地層の上に設けられた接続電極とを備え、
前記内部電極と前記側壁との間に設けられかつ前記側壁の外側に突出すると共に前記内部電極よりもメッキ液溶解性の低い材質からなる腐食防止層を備えた弾性波素子。 - 前記腐食防止層は金属からなる請求項1に記載の弾性波素子。
- 前記腐食防止層はチタン、クロム、モリブデン、タングステン、金、白金の少なくとも一種からなる単体金属、又はこれらを主成分とする合金からなる請求項1に記載の弾性波素子。
- 前記腐食防止層は、窒化ケイ素、酸窒化ケイ素、酸化ケイ素を主成分とする媒質からなる請求項1に記載の弾性波素子。
- 前記腐食防止層は酸化金属からなる請求項1に記載の弾性波素子。
- 前記腐食防止層は前記側壁の底面全面と前記内部電極との間に設けられた請求項1に記載の弾性波素子。
- 前記蓋体は前記側壁の上面の外縁部より内側に形成された請求項1に記載の弾性波素子。
- 請求項1に記載の弾性波素子と、
前記弾性波素子に接続された半導体集積回路素子と、
前記半導体集積回路素子に接続された再生装置とを備えた電子機器。
Priority Applications (2)
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JP2009166541A JP5521417B2 (ja) | 2009-07-15 | 2009-07-15 | 弾性波素子とこれを用いた電子機器 |
US12/836,867 US8334737B2 (en) | 2009-07-15 | 2010-07-15 | Acoustic wave device and electronic apparatus using the same |
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JP2009166541A JP5521417B2 (ja) | 2009-07-15 | 2009-07-15 | 弾性波素子とこれを用いた電子機器 |
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JP2011023930A true JP2011023930A (ja) | 2011-02-03 |
JP5521417B2 JP5521417B2 (ja) | 2014-06-11 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012144370A1 (ja) * | 2011-04-19 | 2012-10-26 | 京セラ株式会社 | 電子部品および弾性波装置 |
JP2013115664A (ja) * | 2011-11-29 | 2013-06-10 | Taiyo Yuden Co Ltd | 弾性波デバイス及び多層基板 |
JP2014099781A (ja) * | 2012-11-15 | 2014-05-29 | Nippon Dempa Kogyo Co Ltd | 圧電部品 |
JP2015012428A (ja) * | 2013-06-28 | 2015-01-19 | 京セラ株式会社 | 弾性波装置、電子部品モジュールおよび移動体端末 |
JP2016119684A (ja) * | 2016-01-26 | 2016-06-30 | 京セラ株式会社 | 弾性波装置およびその製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101706257B1 (ko) * | 2015-01-13 | 2017-02-13 | (주)와이솔 | 압전소자 디바이스 |
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JPH10270975A (ja) * | 1996-03-08 | 1998-10-09 | Matsushita Electric Ind Co Ltd | 電子部品とその製造方法 |
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JPH05275963A (ja) * | 1991-11-15 | 1993-10-22 | Oki Electric Ind Co Ltd | 弾性表面波フィルタ |
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