JP5338575B2 - 弾性波素子とこれを用いた電子機器 - Google Patents
弾性波素子とこれを用いた電子機器 Download PDFInfo
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- JP5338575B2 JP5338575B2 JP2009203248A JP2009203248A JP5338575B2 JP 5338575 B2 JP5338575 B2 JP 5338575B2 JP 2009203248 A JP2009203248 A JP 2009203248A JP 2009203248 A JP2009203248 A JP 2009203248A JP 5338575 B2 JP5338575 B2 JP 5338575B2
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- side wall
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- acoustic wave
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Description
以下、本発明の実施の形態1における弾性波素子について図面を参照しながら説明する。
2 圧電基板
3 IDT電極
4 内部電極
5 側壁
6 接着層
7 蓋体
8 空間
10 絶縁体
13 蓋体下地層
14 蓋体補強層
15 側壁補強層
20 側壁下地層
Claims (5)
- 圧電基板と、
前記圧電基板の上に設けられたIDT電極と、
前記圧電基板の上であって前記IDT電極の周囲に設けられた側壁と、
前記側壁の上に前記IDT電極上の空間を覆うように設けられると共に前記側壁の上面の外縁部より内側に設けられた蓋体と、
前記蓋体と前記側壁との間に設けられた接着層と、
前記圧電基板、前記蓋体、及び前記側壁の上に設けられた絶縁体とを備え、
前記接着層は、前記蓋体の外縁部より外側に突出するように形成された弾性波素子。 - 前記接着層は、前記側壁の上面の外縁部より内側に形成された請求項1に記載の弾性波素子。
- 前記接着層は、前記接着層の端部が前記側壁の上面の外縁部に沿うように形成された請求項1に記載の弾性波素子。
- 前記接着層は、前記絶縁体に対する単位面積あたりの接着力が前記側壁より大きい材料で構成された請求項1に記載の弾性波素子。
- 請求項1に記載の弾性波素子と、
前記弾性波素子に接続された半導体集積回路素子と、
前記半導体集積回路素子に接続された再生装置とを備えた電子機器。
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JP2009203248A JP5338575B2 (ja) | 2009-09-03 | 2009-09-03 | 弾性波素子とこれを用いた電子機器 |
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JP2009203248A JP5338575B2 (ja) | 2009-09-03 | 2009-09-03 | 弾性波素子とこれを用いた電子機器 |
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JP2011055315A JP2011055315A (ja) | 2011-03-17 |
JP5338575B2 true JP5338575B2 (ja) | 2013-11-13 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10389326B2 (en) * | 2014-02-18 | 2019-08-20 | Skyworks Filter Solutions Japan Co., Ltd. | Methods of reducing electric loss in elastic wave elements |
Families Citing this family (1)
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WO2015159465A1 (ja) * | 2014-04-14 | 2015-10-22 | 株式会社村田製作所 | 電子部品及びその製造方法 |
Family Cites Families (3)
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JP4509038B2 (ja) * | 2006-02-01 | 2010-07-21 | 富士通メディアデバイス株式会社 | 弾性波デバイスおよびその製造方法 |
JP5113394B2 (ja) * | 2007-01-23 | 2013-01-09 | 太陽誘電株式会社 | 弾性波デバイス |
JP5117083B2 (ja) * | 2007-03-09 | 2013-01-09 | 太陽誘電株式会社 | 弾性波デバイスおよびその製造方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10389326B2 (en) * | 2014-02-18 | 2019-08-20 | Skyworks Filter Solutions Japan Co., Ltd. | Methods of reducing electric loss in elastic wave elements |
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