JP2011014943A5 - - Google Patents

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Publication number
JP2011014943A5
JP2011014943A5 JP2010236658A JP2010236658A JP2011014943A5 JP 2011014943 A5 JP2011014943 A5 JP 2011014943A5 JP 2010236658 A JP2010236658 A JP 2010236658A JP 2010236658 A JP2010236658 A JP 2010236658A JP 2011014943 A5 JP2011014943 A5 JP 2011014943A5
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JP
Japan
Prior art keywords
processing chamber
plasma processing
substrate
high frequency
edge ring
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Pending
Application number
JP2010236658A
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English (en)
Japanese (ja)
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JP2011014943A (ja
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Publication date
Priority claimed from US09/345,639 external-priority patent/US6344105B1/en
Application filed filed Critical
Publication of JP2011014943A publication Critical patent/JP2011014943A/ja
Publication of JP2011014943A5 publication Critical patent/JP2011014943A5/ja
Pending legal-status Critical Current

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JP2010236658A 1999-06-30 2010-10-21 エッチング速度の均一性を改良する技術 Pending JP2011014943A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/345,639 US6344105B1 (en) 1999-06-30 1999-06-30 Techniques for improving etch rate uniformity

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001506576A Division JP4792185B2 (ja) 1999-06-30 2000-06-29 エッチング速度の均一性を改良するプラズマ処理チャンバ

Publications (2)

Publication Number Publication Date
JP2011014943A JP2011014943A (ja) 2011-01-20
JP2011014943A5 true JP2011014943A5 (enExample) 2011-10-13

Family

ID=23355856

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Application Number Title Priority Date Filing Date
JP2001506576A Expired - Lifetime JP4792185B2 (ja) 1999-06-30 2000-06-29 エッチング速度の均一性を改良するプラズマ処理チャンバ
JP2010236658A Pending JP2011014943A (ja) 1999-06-30 2010-10-21 エッチング速度の均一性を改良する技術

Family Applications Before (1)

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JP2001506576A Expired - Lifetime JP4792185B2 (ja) 1999-06-30 2000-06-29 エッチング速度の均一性を改良するプラズマ処理チャンバ

Country Status (9)

Country Link
US (1) US6344105B1 (enExample)
EP (2) EP1898444B1 (enExample)
JP (2) JP4792185B2 (enExample)
KR (1) KR100743872B1 (enExample)
CN (2) CN100392791C (enExample)
AU (1) AU5908600A (enExample)
DE (2) DE60038175T2 (enExample)
TW (1) TW463235B (enExample)
WO (1) WO2001001445A1 (enExample)

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