JP2010534406A5 - - Google Patents

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JP2010534406A5
JP2010534406A5 JP2010517027A JP2010517027A JP2010534406A5 JP 2010534406 A5 JP2010534406 A5 JP 2010534406A5 JP 2010517027 A JP2010517027 A JP 2010517027A JP 2010517027 A JP2010517027 A JP 2010517027A JP 2010534406 A5 JP2010534406 A5 JP 2010534406A5
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substrate
template mold
diffraction grating
sensor system
light
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JP2010517027A
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Japanese (ja)
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JP2010534406A (ja
JP4791597B2 (ja
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Priority claimed from US12/175,258 external-priority patent/US7837907B2/en
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JP2010517027A 2007-07-20 2008-07-18 ナノ・インプリント・プロセスにおける基板のアラインメント・システム及び方法 Active JP4791597B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US95100207P 2007-07-20 2007-07-20
US60/951,002 2007-07-20
US12/175,258 US7837907B2 (en) 2007-07-20 2008-07-17 Alignment system and method for a substrate in a nano-imprint process
US12/175,258 2008-07-17
PCT/US2008/008817 WO2009014655A1 (en) 2007-07-20 2008-07-18 Alignment system and method for a substrate in a nano-imprint process

Publications (3)

Publication Number Publication Date
JP2010534406A JP2010534406A (ja) 2010-11-04
JP2010534406A5 true JP2010534406A5 (https=) 2011-07-14
JP4791597B2 JP4791597B2 (ja) 2011-10-12

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JP2010517027A Active JP4791597B2 (ja) 2007-07-20 2008-07-18 ナノ・インプリント・プロセスにおける基板のアラインメント・システム及び方法

Country Status (8)

Country Link
US (2) US7837907B2 (https=)
EP (1) EP2171537B1 (https=)
JP (1) JP4791597B2 (https=)
KR (1) KR101487301B1 (https=)
CN (1) CN101772733B (https=)
AT (1) ATE556357T1 (https=)
MY (1) MY150368A (https=)
WO (1) WO2009014655A1 (https=)

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