JP2010245212A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP2010245212A JP2010245212A JP2009090776A JP2009090776A JP2010245212A JP 2010245212 A JP2010245212 A JP 2010245212A JP 2009090776 A JP2009090776 A JP 2009090776A JP 2009090776 A JP2009090776 A JP 2009090776A JP 2010245212 A JP2010245212 A JP 2010245212A
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Abstract
【解決手段】半導体装置100は、表面と裏面とを有する絶縁基板1と、絶縁基板1の表面に設けられ、互いに電気的に絶縁された第1導体パターン2および第2導体パターン12と、表面電極と裏面電極とを有し、かつ裏面電極が第1導体パターン2に第1はんだ部材3で接続された半導体素子4と、半導体素子4の表面電極に第2はんだ部材13で接続された板状のリード部材10とを含み、リード部材10と絶縁基板1の表面とが平行になるように、リード部材10は第2導体パターン12にも接続されている。
【選択図】図1
Description
図1は、全体が100で表される、本発明の実施の形態1にかかる電力用半導体装置の断面図であり、ソルダペーストからなるはんだ部材を半導体素子の上下およびリード部材端部の接合部に塗布して、各部材を配置した状態を示す断面図である。また、図2は、電力用半導体装置100の上面図を示す。
なお、電力用半導体装置100は、図示されていない外部との接続用端子や、絶縁基板の裏面に接合される伝熱板などを適宜備えても良い。
従って、リフロー前の状態では、ソルダペーストのチクソトロピックな特性のため、半導体素子4、リード部材10は最終的な位置より高い位置にある。
こうした孤立パターンは、量産における品質の安定性を確保する上できわめて有効であり、生産歩留まりが向上し、低コスト化を図ることができる。
半導体素子4の上面電極5が半導体素子4の中心からずれている場合、平板形状のリード部材10を用いると、図4(a)のように半導体素子4がリード部材10側に引き寄せられて、半導体素子4がリード部材10の短辺方向に傾く現象が観察された。図4(a)では、上面電極5が、半導体素子4の中心より左側に形成されている。
このような現象は、半導体素子4が小さいほど顕著に観察され、半導体素子4の一辺の寸法が10mm以下の場合に特に問題となる。特に、高電流密度の通電が可能で、かつ高温状態での動作が可能なSiC素子では、一辺の寸法が5mm以下のMOSFETの給電接続(上面電極)に対して平板状のリード部材10を用いることが有効であるが、このような現象が問題となる。
半導体素子4の下面電極(図示せず)の接合に関しては、セラミックス製の絶縁基板1の熱膨張係数が半導体素子4に近いため、はんだ部材3の膜厚は100μm以下で足りる。このため、はんだ部材3の所望の厚みの80%以上の粒径を有するNiを主成分とする粒子、ないしはNiめっきを施された金属またはセラミックスの粒子からなるフィラーを混入、分散させたソルダペーストを用いればよい。分散、印刷の特性の観点から粒子は球状に近いことが望ましい。
図6は、本実施の形態3にかかる半導体素子4の上面図であり、制御電極6を有する半導体素子4の接合後の傾きについての対策を示す。図6の半導体素子4では、上面電極5の位置を半導体素子4のほぼ中央に配置している。即ち、リード部材10の幅方向(図6では、上下方向)に対して、距離d1とd2がほぼ等しくなっている。ここで、図6に示すように、d1、d2は、上部電極5の端部から半導体素子4の端部までの距離である。
図8は、全体が300で表される、本発明の実施の形態3にかかる電力用半導体装置の断面図である。電力用半導体装置300は、リード部材10に開口部23が設けられており、他の構造は電力用半導体装置100と同じである。
図9は、本発明の実施の形態5用いるリード部材10であり、(a)は断面図、(b)は上面図を示す。
Claims (12)
- リード部材が接続された半導体素子を有する半導体装置であって、
表面と裏面とを有する絶縁基板と、
該絶縁基板の表面に設けられ、互いに電気的に絶縁された第1導体パターンおよび第2導体パターンと、
表面電極と裏面電極とを有し、該裏面電極が該第1導体パターンに第1はんだ部材で接続された半導体素子と、
該半導体素子の該表面電極に第2はんだ部材で接続された板状のリード部材とを含み、
該リード部材と該絶縁基板の表面とが平行になるように、該リード部材が該第2導体パターンにも接続されたことを特徴とする半導体装置。 - 上記第2導体パターンが、上記第1パターンを挟んでその両側にそれぞれ設けられ、上記リード部材の両端が、該第2導体パターンにそれぞれはんだ部材で接続されたことを特徴とする請求項1に記載の半導体装置。
- 上記リード部材は、その端部において、上記絶縁基板方向に延びた支持部を有することを特徴とする請求項1または2に記載の半導体装置。
- 上記リード部材は、上記表面電極の上方に開口部を有することを特徴とする請求項1または2に記載の半導体装置。
- 上記リード部材は、上記表面電極の上方に突起部を有することを特徴とする請求項1または2に記載の半導体装置。
- 上記第1はんだ部材は、Niを主成分とする粒子、ないしはNiめっきが施された金属またはセラミックスの粒子を含むはんだ材料からなることを特徴とする請求項1に記載の半導体装置。
- 上記半導体素子の表面電極は、点対称な形状であることを特徴とする請求項1に記載の半導体装置。
- 上記第1導体パターンの上に、上記半導体素子が接合される領域を規定するようにソルダーレジストが設けられ、および/または上記第2導体パターンの上に、上記リード部材が接合される領域を規定するようにソルダーレジストが設けられたことを特徴とする請求項1に記載の半導体装置。
- 上記半導体素子は、複数の炭化珪素からなる半導体素子であり、それぞれの表面電極に上記リード部材が接続されたことを特徴とする請求項1または2に記載の半導体装置。
- 半導体素子にリード部材を接続する半導体装置の製造方法であって、
互いに電気的に絶縁された第1導体パターンおよび第2導体パターンを有する絶縁基板を準備する工程と、
該第1導体パターンおよび該第2導体パターンの上に第1ソルダペーストを塗布する工程と、
該第1導体パターンの上に、該第1ソルダペーストを介して半導体素子を載置する工程と、
該半導体素子の上に第2ソルダペーストを塗布する工程と、
該半導体素子の上に、第2ソルダペーストを介して板状のリード部材を載置するとともに、該第2導体パターンの上に、第1ソルダペーストを介してリード部材の端部を載置する工程と、
該第1ソルダーペーストおよび該第2ソルダペーストを同時に溶融させた後、固体して、はんだ接合部を形成する工程とを含むことを特徴とする半導体装置の製造方法。 - 半導体素子にリード部材を接続する半導体装置の製造方法であって、
互いに電気的に絶縁された第1導体パターンおよび第2導体パターンを有する絶縁基板を準備する工程と、
該第1導体パターンおよび該第2導体パターンの上に第1ソルダペーストを塗布する工程と、
該第1導体パターンの上に、該第1ソルダペーストを介して半導体素子を載置する工程と、
板状のリード部材に設けられた開口部が半導体素子の上方に配置されるように、該第2導体パターンの上に、該第1ソルダペーストを介して該リード部材の端部を載置する工程と、
該開口部を通して第2ソルダペーストを該半導体素子の上に塗布して、その一部を該リード部材の上にも塗布する工程と、
該第1ソルダーペーストおよび該第2ソルダペーストを同時に溶融させた後、固体して、はんだ接合部を形成する工程とを含むことを特徴とする半導体装置の製造方法。 - 上記リード部材と上記絶縁基板の表面とが平行になるように、上記第2導体パターンの上に、上記第1ソルダペーストを介して該リード部材の端部を載置することを特徴とする請求項10または11に記載の半導体装置の製造方法。
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WO2021075016A1 (ja) * | 2019-10-17 | 2021-04-22 | 三菱電機株式会社 | 半導体装置および半導体装置の製造方法 |
WO2021145206A1 (ja) * | 2020-01-17 | 2021-07-22 | パナソニックIpマネジメント株式会社 | 半導体装置 |
EP4084061A1 (de) * | 2021-04-28 | 2022-11-02 | Siemens Aktiengesellschaft | Schaltungsträger sowie verfahren zum herstellen einer elektrischen verbindung mit diesem |
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