JP2013065836A - 電極部材およびこれを用いた電力用半導体装置 - Google Patents
電極部材およびこれを用いた電力用半導体装置 Download PDFInfo
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Abstract
【解決手段】電力用半導体装置において、回路基板3の回路面3fsに第1の面が接合された電力用半導体素子4、5の第2の面に形成された電極と、外部回路と接続するための配線部材7Cと、を電気接続するための電極部材6であって、前記電極と電気接続するための第1の電気接続部6fsと、配線部材7Cを回路面3fsから距離をおくように架設するとともに、配線部材7Cと電気接続するための第2の電気接続部6jと、第2の電気接続部6jと第1の電気接続部6fsとの間に形成され、回路面6fsにおける前記第1の面が接合された部分から離れた部分と接合するための接合部である接合部6fbと、を備える。
【選択図】図2
Description
図1〜図3は、本発明の実施の形態1にかかる電力用半導体装置用電極部材および電力用半導体装置を説明するためのもので、図1は電力用半導体装置のパッケージから封止体12を除いた場合の上面図、図2は図1のII−II線による断面を示す部分断面図、図3は図1のIII−III線による断面であって、III−III線近傍の部材のみを記載した断面図である。また、図4〜図6は、本実施の形態の変形例にかかる電極部材の構成を説明するためのもので、図4と図5は第1の変形例にかかる電極部材およびそれを用いた電力用半導体装置の構成を説明するための図、図6は第2の変形例にかかる電極部材およびそれを用いた電力用半導体装置の構成を説明するための図である。はじめに、本実施の形態にかかる電力用半導体装置および電極部材の構成と動作について図1〜3を用いて説明する。
外部との電気接続とを終えた電力用半導体装置の端子9Cにゲート信号を出力することによりIGBT5を駆動させると、電力用半導体素子であるダイオード4、IGBT5をはじめとする電力用半導体素子、および主電力の電気系統である電線7C内に電流が流れ、端子9A、9Bを介して制御された主電力が出力される。その際、電気抵抗分の電力ロスが熱へと変換され、発熱が生ずるが、主な発熱源は電力用半導体素子に偏るので、電力用半導体装置内で温度差が生じる。しかも、絶縁基板31と、金属からなる放熱板2、電線7Cおよび電極部材6とは線膨張係数が異なっているので、電力用半導体装置内の部材間で、熱による変位に伴う応力(熱応力)が発生する。
本発明の技術思想を具現化するのは、上記実施の形態に示した形状に限られるものではなく、様々な形態が適用できる。そこで、以下に、本実施の形態に対して具体的な2つの変形例を挙げて説明する。
図4と図5は、本実施の形態1の第1の変形例にかかる電極部材およびそれを用いた電力用半導体装置の構成を説明するためのもので、図4は本変形例にかかる電極部材を用いた電力用半導体装置の中の一つの電力用半導体素子の近傍部分を示すもので、図1と同様にパッケージから封止体を除いた場合の上面図、図5は図4のV−V線による断面を示す部分断面図である。本変形例にかかる電極部材206およびそれを用いた電力用半導体装置では、図1〜図3で説明した電極部材6に対し、図4、5に示すように、電極部材206の接合部の配置および形状を変更するとともに、回路基板203の構成に合わせ、回路基板203との接合材料も変更したものである。以下、図4,5に基づいて説明する。
また、図6は第2の変形例にかかる電極部材を用いた電力用半導体装置の中の一つの電力用半導体素子の近傍部分を示すもので、図1と同様にパッケージから封止体を除いた場合の上面図である。本変形例にかかる電極部材306およびそれを用いた電力用半導体装置では、図1〜図3で説明した電極部材6に対し、図6に示すように、電極部材306の回路基板303との接合部6fbが形成された部分6sを、ダイオード4の矩形の電極面の4辺のうち、3辺を囲むように形成したものである。
本実施の形態2では、実施の形態1と較べて、電極部材の電力用半導体素子との接合部の形状を変更したものである。図7は、本実施の形態2にかかる電極部材およびそれを用いた電力用半導体装置の構成を説明するためのもので、図7(a)は電力用半導体装置中の2つの電力用半導体素子とそれらと電気接合された電極部材を含む部分の断面図、図7(b)は図7(a)で示した部分の内、一つの電力用半導体素子との接合部を含む部分上面図である。
3 回路基板(31:絶縁基板、32:回路パターン、33:金属層、3fr:放熱面、3fs:回路面)、
4 ダイオード(電力用半導体素子)、 5 IGBT(電力用半導体素子)、
6 電極部材(6b:屈曲部、6c:切込部、6d:凹状部、6fe:第2の接合部、6fs:電力用半導体素子との接合部(第1の電気接続部)、6fb:回路基板との接合部(接合部)、6j:電線との架橋接合部(第2の電気接続部)、6h:開口部、6s:接合部6fbを形成する特別な形状(囲む形状)部分、6t:薄肉部、6v:折り曲げ部、6w:接合部(6fbを形成する特別な形状(幅広形状)部分))
7 配線部材(7C:(架設される)電線、7Y:ボンディングワイヤ)、
8 接合材料(8A:はんだ、8B:はんだ、8C:導電性接着剤)、
9 端子、
Jb:電極部材の接合部と回路基板との接合部分、Jc:電極部材の第2の電気接続部と配線部材との接合部分、Js:電極部材の第1の電気接続部と電力用半導体素子との接合部分、Je:電極部材の第2の接合部と回路基板との接合部分、
百位の数字の違いは変形例による構成の相違を示す。
Claims (9)
- 電力用半導体装置において、回路基板の回路面に第1の面が接合された電力用半導体素子の第2の面に形成された電極と、外部回路と接続するための配線部材と、を電気接続するための電極部材であって、
前記電極と電気接続するための第1の電気接続部と、
前記配線部材を前記回路面から距離をおくように架設するとともに、前記配線部材と電気接続するための第2の電気接続部と、
前記第2の電気接続部と前記第1の電気接続部との間に形成され、前記回路面における前記第1の面が接合された部分から離れた部分と接合するための接合部と、
を備えたことを特徴とする電極部材。 - 前記第1の電気接続部は、前記電極との接合領域において、内側よりも外側の方が前記電極との間隔が広がるように形成されていることを特徴とする請求項1に記載の電極部材。
- 前記第1の電気接続部には、前記電極との接合領域において、厚み方向に貫通するとともに、面の延在方向に延びる複数の切込が交差する切込部が形成されていることを特徴とする請求項1または2に記載の電極部材。
- 前記回路面における前記第1の面が接合された部分から離れた部分と接合するために、前記接合部との間に前記第1の電気接続部が位置するように前記第1の電気接続部から延在するように形成された第2の接合部と、
を備えたことを特徴とする請求項1ないし3のいずれか1項に記載の電極部材。 - 前記接合部は、矩形形状をなす前記電力用半導体素子の4側面のうち、当該接合部が対向する側面と平行な方向における長さが、前記対向する側面の長さより長い、
ことを特徴とする請求項1ないし4のいずれか1項に記載の電極部材。 - 回路基板と、
前記回路基板の回路面に第1の面が接合された電力用半導体素子と、
前記回路基板の回路面とは逆の面に接合された放熱部材と、
外部回路と接続するための配線部材と、
請求項1ないし5のいずれか1項に記載の電極部材と、を備え、
前記配線部材が、前記電極部材により、前記回路面から距離をおくように架設されることを特徴とする電力用半導体装置。 - 前記第1の電気接続部と前記電極との電気接続が第1の接合材料を用いた接合により行われ、
前記接合部と前記回路面との接合が第2の接合材料により行われ、
前記第1の接合材料の弾性率よりも、前記第2の接合材料の弾性率の方が低いことを特徴とする請求項6に記載の電力用半導体装置。 - 前記電力用半導体素子がワイドバンドギャップ半導体材料により形成されていることを特徴とする請求項6または7に記載の電力用半導体装置。
- 前記ワイドバンドギャップ半導体材料は、炭化ケイ素、窒化ガリウム系材料、およびダイヤモンド、のうちのいずれかであることを特徴とする請求項8に記載の電力用半導体装置。
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