JP2009539606A5 - - Google Patents
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- Publication number
- JP2009539606A5 JP2009539606A5 JP2009515594A JP2009515594A JP2009539606A5 JP 2009539606 A5 JP2009539606 A5 JP 2009539606A5 JP 2009515594 A JP2009515594 A JP 2009515594A JP 2009515594 A JP2009515594 A JP 2009515594A JP 2009539606 A5 JP2009539606 A5 JP 2009539606A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- reservoir
- liquid
- pressure distribution
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 61
- 239000007788 liquid Substances 0.000 claims 32
- 239000012530 fluid Substances 0.000 claims 14
- 238000009825 accumulation Methods 0.000 claims 7
- 238000000034 method Methods 0.000 claims 7
- 239000000463 material Substances 0.000 claims 3
- 238000000926 separation method Methods 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 2
- 239000000523 sample Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 238000013022 venting Methods 0.000 claims 2
- 239000003153 chemical reaction reagent Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000004377 microelectronic Methods 0.000 claims 1
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US81308306P | 2006-06-13 | 2006-06-13 | |
| US60/813,083 | 2006-06-13 | ||
| US82962306P | 2006-10-16 | 2006-10-16 | |
| US60/829,623 | 2006-10-16 | ||
| US88719407P | 2007-01-30 | 2007-01-30 | |
| US60/887,194 | 2007-01-30 | ||
| PCT/US2007/070911 WO2007146892A2 (en) | 2006-06-13 | 2007-06-11 | Liquid dispensing systems encompassing gas removal |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009539606A JP2009539606A (ja) | 2009-11-19 |
| JP2009539606A5 true JP2009539606A5 (enExample) | 2010-07-29 |
| JP5698456B2 JP5698456B2 (ja) | 2015-04-08 |
Family
ID=38832759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009515594A Active JP5698456B2 (ja) | 2006-06-13 | 2007-06-11 | 気体除去を含む液体分配システム |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US8336734B2 (enExample) |
| JP (1) | JP5698456B2 (enExample) |
| KR (3) | KR101357961B1 (enExample) |
| CN (2) | CN103101867B (enExample) |
| TW (1) | TWI458554B (enExample) |
| WO (1) | WO2007146892A2 (enExample) |
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-
2007
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- 2007-06-11 WO PCT/US2007/070911 patent/WO2007146892A2/en not_active Ceased
- 2007-06-11 KR KR1020137005773A patent/KR101357961B1/ko active Active
- 2007-06-11 CN CN201310032070.0A patent/CN103101867B/zh active Active
- 2007-06-11 KR KR1020087032126A patent/KR100997506B1/ko active Active
- 2007-06-11 JP JP2009515594A patent/JP5698456B2/ja active Active
- 2007-06-11 KR KR1020107019461A patent/KR20100102240A/ko not_active Ceased
- 2007-06-11 CN CN2007800254307A patent/CN101484782B/zh active Active
- 2007-06-13 TW TW96121417A patent/TWI458554B/zh active
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2012
- 2012-12-13 US US13/713,078 patent/US9120616B2/en active Active
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2015
- 2015-07-30 US US14/814,155 patent/US20160039659A1/en not_active Abandoned
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