Ji, 9 9 ο 經漓部中央標準局員工消費合作社印製 A7 、 _B7__ 五、發明説明（i ) 發明領域 本發明之發明領域係有關於用於從一儲存槽向一輸 出管線傳送液體的系統，尤其是用於需要高純度及準確液 體流率控制之半導體工業中使用的液體傳送系統。 習知技術説明 許多半導體製造步驟中需要使用高純度的液體，如 酸及溶劑，且使用多種不同的液體傳送系統以傳送此液 體。因爲需要相當精確地控制製造步驟，在傳送液體是也 需要類似的精確控制。囡此，依賴泵移動液體的液體傳送 系統比不使用泵移動液體之系統的需要性較低。 習知技術中的液體傳送系統不需要泵，一般是在一 可加壓之液體維持容器内使用可控制的氣壓以應用可控制 方式從容器中推動液體。習知技術已知一系統，其使用兩 個可受壓之液體維持容器以交替傳送液體，其中一容器裝 液體，而第二容器則加壓以分配其内的液體。經由從兩可 加壓容器中裝入及分配液體，可得到一固定可控制的液體 流。但是在裝入液體循環期間，將液體裝入容器將是一項 問題。習知技術中使用固定的眞空，柚送，或相當的壓力 在裝液體循環中從供應槽中將液體移至各容器中。固宕的 眞空或壓力將改變其些型式的液體某些的化學性質，如從 溶劑中去除揮發性的有機化合物或在液體中加入小泡末， 在此偵測此泡沫且在液體中視爲粒子性雜質。抽出此高純 (請先閱讀背面之注意事項再填寫本頁) 裝· 訂 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 7( 9 9 ο 經滴部中央標準局員工消費合作社印製 A7 、 B7 _ 五、發明説明（2) 度的化學物質將污染粒子且追蹤金屬離子。 本發明中經由將可加壓的容器置於供應槽下方，使 得可應用虹吸效應而從供應槽中將液體向容器中傳送，因 而改進此液體傳送系統。一當虹吸效應建立後，不再需要 應用壓力或維持的眞空效應而從供應槽將液體移至容器 中，因此改進了從系統中輸出之液體的品質。 發明概述 本發明的優點爲將一液體從一供應槽傳送到一液體 維持容器時，並不需要相當大的壓力，也不需要相當大的 眞空度。 本發明的另一優點爲使用虹吸效應將一液體從一供 應槽向液體維持容器傳送。 本發明再一優點爲在半導體製造程序步驟中可分配 高純度的液體。 本發明又一優點爲可減少在分配液體時產生的小泡 沫。 本發明又一優點爲提供一自動液體傳送系統，其可 在控制的流率下傳送高純度液體。 本發明的液體傳送系統包舍一液體供應槽及至少兩 個可加壓的液體維持容器。液體維持容器置於供應槽下 方，且一液體供應管線連接至各容器的供應槽。操作液體 供應管線，因此從槽至各容器中產生一虹吸作用，因而從 (請先閱讀背面之注意事項再填寫本頁)‘ -裝· 訂 (線 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 71 9 9 ο A7 ' B7 五、發明説明（3 ) 槽中將液體傳送至各容器。交替充填及加壓各容器以容器 中分配液體，使得一容器裝入液體，而另一容器則在分配 液體，而達成一固定可控制的輸出液體流。較佳實施例包 括一液體再循環管線以再循環或者固定地移動系統内的液 體，而達到完全的混合，及一線上過濾器以改進液體的純 由下文中的説明可更進一步了解本發明之特徵及優 點，閱讀時並請參考附圖。 圖式之簡單説明 圖一爲本發明之基本液體傳送系統的示意圖。 圖二爲本發明中使用之三通閥的截面圖。 圖三爲本發明中使用之三通閥的戴面圖。 圖四爲本發明中使用之雙向閥的截面圖。 圖五爲本發明中擴充的液體傳送系統。 圖號説明 (請先閱讀背面之注意事項再填寫本頁)· 經濟部中央標率局員Η消費合作社印製 国號 元件名稱 10 液體傳送系統 14 > 55 > 600 槽 20 供應管線 26 虹吸管 34 ^ 42 液體維持容器 5 本紙張尺度適用中國國家標準（CNS ) Α4規格（2丨0Χ297公釐） 509970 A7 B7 五、發明説明（4 ) 50 三通閥 74 過濾器 80 洩水管線 96 液體出口流率控制閥 100 感測器 104 出口管線 136 氣體調整器 184 ^ 188 管線 196 文氏閥 230 ^ 232 止回閥 260 PTFE閥體 264 PTFE鐵氟龍膜 268 上進入口 272 ^ 276 下出口 (請先閲讀背面之注意事項再填寫本頁) 經滴部中央標準局t貝Η消費合作社印製 604 638 630 660 664 684 692 液體供應管線 空氣操作閥 返回管線 外部過濾器 過濾器饋入管線 電磁空氣閥 控制器 較佳實施例之詳細説明 6 本纸張尺度適用中國國家標準（CNS ) A4規格（2丨0X297公釐） 7( 9 9 ο 經濟部中央標準局員工消費合作社印製 A7 、 B7__ 五、發明説明（5 ) 圖一示本發明之較佳液體傳送系統10，其中一單一 管線顯示氣體管路，而以雙管線顯示液體管路。如圖一所 示，在對應可受壓之液體維持容器34，42的垂直高處配 置液體供應槽Η。在較佳實施例中，槽14爲55加侖的 桶子，如一般在化學工業上所見者；但是，本發明中也可 以使用如任意尺寸的罐子及手提袋。在槽14中配置一蓋 子I6。在某些系統安裝中，蓋子I6可打開以承受大氣壓 力，而在其他的系統安裝中，應用受壓密封將蓋子16與 槽相結合，使得槽I4中液體的化學穩定性可達到最小， 且槽爲可受壓者，此將於下文中加以説明。一液體供應管 線2〇經蓋子I6結合槽14，使得液體供應管線2G的内部 槽管線部位22向下突出至槽Η之底部的線端24。液體 供應管線2〇傳送液體至兩容器34及42中，容器34及42 配置在槽I4下方，使得含端部位24的内部槽管線24包 含一虹吸管26，且使用虹吸效應以將液體從槽14向容器 34，42傳送〇 虹吸管26相當有用，其中該虹吸管可允許55加侖 桶子可在垂直定向上以相當簡單的方式安裝，且允許液體 有效地加以去除。因爲許多化學程序極需要純的化學性， 最好是可從槽14中去除液體，而不必使用大的眞空裝置。 尤其是，已知抽眞空以傳送液體可改變化學的一般性，而 導致化學性質下降。使用經供應管線2 〇的虹吸管2 6可利 用重力而改進液體傳送系統1 〇中的化學性質。下文詳細 説明液體傳送系統10之特徵。液體供應管線20從液體供 7__ 本紙張尺度適用中國國家標準（CNS ) Λ4規格（210X 297公釐） (請先閱讀背面之注意事項再填寫本頁) -裝· 、1Τ 線 509970 A7 B7 經潢部中央標準局員工消費合作社印製 五、發明説明（6 ) 應槽14連接閥3〇(以文字A表示），此將於下文中加以説 明’並請參考附圖二。在管線2〇中的管線感測器28用於 指不管線20中液體出現與否。可動作閥3()以經管線π 供應液體給第一可受壓之液體維持容器34或經管線Μ給 第一可受壓之液體維持容器Μ。來自容器％的液體經管 線54傳送至三通閥5〇(在圖三中以文字B表示），在此來 自槽42的液體經管線58傳送至三通閥5〇。來自閥中 的液體傳送予一液體流過管線Μ,此液體流過管線至一 雙向閥66中（以文字F表示，且顯示在圖四中）。通常液 體流過閥66至液體饋入閥7〇，且然後至過濾器74，但是 如果閥66動作，則液體流至洩水管線8Q。在此較佳實施 例中’在管線7〇中平行置於兩過濾器74，以從液體中去 除不需要的雜質。可由閥Μ進接的液體返回閥84用於使 液體再循環，而從過遽器回到供應槽Η。通常，通過過 濾器以的液體經平行管線92至液體出口流率控制閥96 及感測器100，再到出口管線1〇4。在某些系統安裝中， 可使用一液體入口返回管線104，而將液體返回槽14，其 中該液體已經官線1 〇 4輸出予一使用者加以處理。 由氣體壓力控制來自容器^及仏中液體的流通， 最好使用相當具惰性之氣體，如氮但是在多種不同的應用 中也可以使用空氣或其他的氣體。如圖一中所示者，來自 氣體源20的氮經傳送管線1S4饋入一三通閥〗28(文中以 文字E表不）。在來自閥128的第一栅中，將受壓的氣體 經管線I32饋入至三通閥中（文中以文字D表示），該 (請先閱讀背面之注意事項再填寫本頁) -裝· 訂 # 線 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐) 509970 經滴部中央標準局員工消費合作社印製 ΑΊ 五、發明説明（7 ) 管線132係由氣體調整器136控制。然後受壓的氣體可由 閥U0控制，經氣體管線I44至容器34，或者是經氣體 管線148至容器142。 回到閥12 8後’從閥12 8之左侧管制，傳送受壓的 氣體經一氣體調整器ISO及管線I52至一管線控制閥 156(也以文字G表示）。閥I56的動作使得受壓的氣體通 過管線16〇，經調整器I64至供應槽Η。調整器164允許 氣體進入槽14中，對於從槽14中去除的液體可提供大量 可替代之氣體，或者是增強/辅助虹吸管效應。 爲了將液體填入槽34或G中，有必要將從容器34， 42中，將由進入液體所取代的氣體去除。爲了從容器34 及U中元成去除氣體的作業，由氣體管線及188將 一三通閥8〇結合對應的管線及。最好此三通閥 經一連接氣體排放管路2〇G的文氏閥196的吸入口 195， 其中該閥係連接氣體排放管線2〇〇。用於操作文氏閥 i96<受壓氣體經一由氣體去除器2〇8連接的氣體管線2〇4 連接受壓氣體管線I52，該氣體管線1S2係連接閥128。 因此，當閥12〇打開時，其允許在這些槽裝入液體期間， 氣體可從容器34或42中流出。另外，如果文氏閥196動 作則及入力可經閥作用，而簡化從容器34及42 中去除替代氣體的作業。一排放氣體之洩水管線22()連接 在洩水管線80及排放管線200之間。 因此，一般需了解，當在供應槽I4中有液體，且閥 的開口朝向合器34或42時，則虹吸效應（假設液體在 (請先閱讀背面之注意事項再填寫本頁).Ji, 9 9 ο Printed by A7, _B7__ of the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Education 5. Field of Invention (i) Field of the Invention The field of the invention relates to a system for transferring liquid from a storage tank to an output line , Especially for liquid delivery systems used in the semiconductor industry where high purity and accurate liquid flow rate control are required. Description of the Conventional Technology Many semiconductor manufacturing steps require the use of high-purity liquids, such as acids and solvents, and the use of many different liquid delivery systems to deliver this liquid. Because the manufacturing steps need to be controlled fairly accurately, similar precision control is also required when transferring liquids. As a result, liquid delivery systems that rely on pumps to move liquid are less demanding than systems that do not use pumps to move liquid. Liquid delivery systems in the prior art do not require a pump. Generally, a pressurized liquid maintenance container uses a controlled air pressure to push the liquid from the container in a controlled manner. A system is known in the art that uses two compressible liquids to maintain containers to alternately transfer liquids, one of which holds the liquid and the second container is pressurized to dispense the liquid therein. By filling and dispensing liquid from two pressurizable containers, a fixed and controllable liquid flow is obtained. Filling the container with the liquid during the filling cycle will be a problem. Conventional techniques use fixed emptying, pomelo delivery, or equivalent pressure to move the liquid from the supply tank to each container during the liquid filling cycle. Constant emptiness or pressure will change some chemical properties of some types of liquids, such as removing volatile organic compounds from solvents or adding vesicles to the liquid. The foam is detected here and treated as particles in the liquid. Sexual impurities. Draw out this high purity (please read the precautions on the back before filling this page) The size of the bound and bound paper is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 7 (9 9 ο employees of the Central Bureau of Standards of the Ministry of Economic Affairs Consumer cooperatives print A7, B7 _ V. Description of the invention (2) Degree of chemical substances will pollute particles and track metal ions. In the present invention, by placing a pressurizable container under the supply tank, the siphon effect can be applied to The liquid transfer system is improved in the supply tank by transferring liquid to the container. Once the siphon effect is established, there is no longer a need to apply pressure or maintain the emptying effect to move liquid from the supply tank to the container, thus improving the slave system The quality of the liquid output. Summary of the invention The advantage of the present invention is that when transferring a liquid from a supply tank to a liquid maintenance container, there is no need for considerable pressure or considerable emptying. One advantage is the use of the siphon effect to transfer a liquid from a supply tank to the liquid holding container. Another advantage of the present invention is that it can be divided in the semiconductor manufacturing process steps. High-purity liquid. Another advantage of the present invention is that it can reduce the small foam generated when the liquid is dispensed. Another advantage of the present invention is to provide an automatic liquid transfer system that can transfer high-purity liquid at a controlled flow rate. The present invention The liquid delivery system includes a liquid supply tank and at least two pressurizable liquid holding containers. The liquid holding container is placed below the supply tank, and a liquid supply line is connected to the supply tank of each container. The liquid supply line is operated, so From the tank to each container, a siphon effect is generated, so from (please read the precautions on the back before filling this page) '-binding · binding (line paper size applies Chinese National Standard (CNS) A4 size (210X 297 mm) ) 71 9 9 ο A7 'B7 V. Description of the invention (3) Transfer liquid to each container in the tank. Alternately fill and pressurize each container to distribute the liquid in the container so that one container is filled with liquid and the other container is in Distributes liquid to achieve a fixed and controllable output liquid flow. The preferred embodiment includes a liquid recirculation line to recirculate or move the liquid in the system fixedly To achieve complete mixing, and an in-line filter to improve the purity of the liquid, the features and advantages of the present invention can be further understood from the description below. Please refer to the drawings when reading. Schematic diagram of the basic liquid delivery system of the invention. Figure 2 is a cross-sectional view of a three-way valve used in the present invention. Figure three is a wearing view of the three-way valve used in the present invention. Figure four is a two-way valve used in the present invention Figure 5 shows the extended liquid delivery system in the present invention. Explanation of drawing numbers (please read the precautions on the back before filling out this page). Member of the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives printed the country name component name 10 Liquid Conveying system 14 > 55 > 600 tank 20 supply line 26 siphon 34 ^ 42 liquid holding container 5 This paper size applies to China National Standard (CNS) A4 specification (2 丨 0 × 297 mm) 509970 A7 B7 V. Description of the invention (4 ) 50 Three-way valve 74 Filter 80 Drain line 96 Liquid outlet flow rate control valve 100 Sensor 104 Outlet line 136 Gas regulator 184 ^ 188 Line 196 Valve 230 ^ 232 Check valve 260 PTFE valve body 264 PTFE Teflon membrane 268 Upper entrance 272 ^ 276 Lower exit (please read the precautions on the back before filling this page) Printed 604 638 630 660 664 684 692 Liquid supply line Air operated valve Return line External filter Filter feed line Solenoid air valve controller Detailed description of the preferred embodiment 6 This paper size applies to China National Standard (CNS) A4 Specifications (2 丨 0X297 mm) 7 (9 9 ο A7, B7__ printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (5) Figure 1 shows the preferred liquid transfer system 10 of the present invention, of which a single pipeline The gas lines are shown, and the liquid lines are shown in double lines. As shown in Fig. 1, a liquid supply trough is provided at a vertical height corresponding to the pressure-retainable liquid holding containers 34,42. In the preferred embodiment, the tank 14 is a 55 gallon bucket, as commonly seen in the chemical industry; however, cans and totes of any size, such as can be used in the present invention. A cover I6 is arranged in the groove 14. In some system installations, the cover I6 can be opened to withstand atmospheric pressure, while in other system installations, a pressure seal is used to combine the cover 16 with the tank, so that the chemical stability of the liquid in the tank I4 can be minimized, and The trough is pressurizable, which will be explained below. A liquid supply pipe line 20 is combined with the groove 14 through the cover I6, so that the inner groove line portion 22 of the liquid supply line 2G protrudes downward to the line end 24 at the bottom of the groove. The liquid supply line 20 transfers liquid to the two containers 34 and 42. The containers 34 and 42 are arranged below the tank I4, so that the internal tank line 24 including the end portion 24 includes a siphon 26 and uses the siphon effect to move the liquid from the tank 14 It is quite useful to transfer the siphon 26 to the containers 34, 42, where the siphon may allow a 55 gallon bucket to be installed in a vertical orientation in a relatively simple manner and allow liquid to be removed efficiently. Because many chemical procedures require pure chemistry, it is desirable to remove liquid from the tank 14 without having to use a large venting device. In particular, it is known that evacuating to transport liquids can change the generality of chemistry, resulting in a decrease in chemistry. The use of a siphon 26 through the supply line 20 can use gravity to improve the chemistry in the liquid delivery system 10. The features of the liquid delivery system 10 are explained in detail below. Liquid supply line 20 from liquid supply 7__ This paper size applies Chinese National Standard (CNS) Λ4 specification (210X 297 mm) (Please read the precautions on the back before filling this page)-Installation, 1T line 509970 A7 B7 Warp decoration Printed by the Ministry of Standards and Staff ’s Consumer Cooperatives. 5. Description of the invention (6) The valve 14 (shown as A) in the tank 14 shall be described below, and please refer to Figure 2. The line sensor 28 in line 20 is used to indicate the presence or absence of liquid in line 20. The actuable valve 3 () supplies liquid to the first pressurizable liquid maintenance container 34 via the line π or to the first pressurizable liquid maintenance container M via the line M. The liquid from the container% is transferred to the three-way valve 50 through the line 54 (indicated by the letter B in Fig. 3), and the liquid from the tank 42 is transferred to the three-way valve 50 through the line 58. The liquid from the valve is delivered to a liquid flow line M, which flows through the line to a two-way valve 66 (indicated by the letter F and shown in Figure 4). Normally the liquid flows through the valve 66 to the liquid feed valve 70 and then to the filter 74, but if the valve 66 is activated, the liquid flows to the drain line 8Q. In this preferred embodiment, 'two filters 74 are placed in parallel in line 70 to remove unwanted impurities from the liquid. A liquid return valve 84, which can be accessed by the valve M, is used to recirculate the liquid and return from the purifier to the supply tank. Generally, the liquid passing through the filter passes the parallel line 92 to the liquid outlet flow control valve 96 and the sensor 100, and then to the outlet line 104. In some system installations, a liquid inlet return line 104 may be used, and the liquid is returned to the tank 14, where the liquid has been output to the user for processing at line 104. The gas pressure controls the flow of liquid from the container ^ and 仏. It is best to use a relatively inert gas such as nitrogen but air or other gases can also be used in many different applications. As shown in Fig. 1, nitrogen from the gas source 20 is fed into a three-way valve 28 through the transfer line 1S4 (noted by the letter E in the text). In the first grid from valve 128, the pressurized gas is fed to the three-way valve (indicated by the text D) through line I32. (Please read the precautions on the back before filling this page)-Installation · Order # The size of the paper is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 509970 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Industry Ⅴ. Description of the invention (7) The pipeline 132 is controlled by the gas regulator 136 . The pressurized gas can then be controlled by valve U0, via gas line I44 to vessel 34, or via gas line 148 to vessel 142. After returning to the valve 12 8 ′, control is performed from the left side of the valve 12 8, and the pressurized gas is transmitted through a gas regulator ISO and a line I52 to a line control valve 156 (also indicated by the letter G). The action of the valve I56 causes the pressurized gas to pass through the line 16 and through the regulator I64 to the supply trough. The regulator 164 allows gas to enter the tank 14 and provides a large amount of alternative gas for the liquid removed from the tank 14 or enhances / assisted the siphon effect. In order to fill the liquid into the tank 34 or G, it is necessary to remove the gas replaced by the entering liquid from the containers 34, 42. In order to remove the gas from the container 34 and the U element, a three-way valve 80 is combined with the corresponding pipeline and by the gas line and 188. Preferably, the three-way valve passes a suction port 195 of a venturi valve 196 connected to the gas discharge line 20G, wherein the valve is connected to the gas discharge line 200. It is used to operate the venturi valve i96 < the pressurized gas is connected to the pressurized gas line I52 via a gas line 204 connected by a gas remover 208, and the gas line 1S2 is connected to the valve 128. Therefore, when the valve 120 is opened, it allows gas to flow out of the container 34 or 42 during the filling of these tanks with liquid. In addition, if the venturi valve 196 is operated, the input force can be applied through the valve to simplify the operation of removing the substitute gas from the containers 34 and 42. An exhaust gas drain line 22 () is connected between the drain line 80 and the drain line 200. Therefore, it is generally necessary to understand that when there is liquid in the supply tank I4, and the opening of the valve faces the coupling 34 or 42, the siphon effect (assuming the liquid is in (please read the precautions on the back before filling this page).
才::紙張尺度is财關家料（-—- 509970 A7 B7 經濟i'^中央標準局員工消費合作社印製 五、發明説明（8) 管線20中）將導致液體從供應槽I4流向容器34或42中， 而替代氣體則經閥128，158流入槽14。 從槽Η中開始一虹吸效應的支要_^構爲從虹吸管26 中抽眞空。爲了抽眞空，氣體閥打開，且關閉閥156， 而使得受壓的氣體流過管線至文氏閥I%。此導致從 文氏閥I96的吸入口 i92中產生一眞空且回至閥ι8〇。閥 ISO可經管線I84或〗88而使得開口向容器34或42，且 ©閥3〇開口向槽34或42之對應的管線28或46時，在 回至槽14的管線2〇中將產生眞空。一當產生虹吸時，眞 丄效應將不會持續’而重力所產生的虹吸流動將持續，而 使得當系統中需要時，流體從槽U中流動。相當重要的 事情爲揮發性液體可去除眞空壓力，而儘可能地引起虹吸 現象，而在液體中保留VOC，且不會影響液體的化學性質。 另外，過多的眞空曝露將使得在液體中存在泡沫，而導致 在化學上超高純度之應用的品質不佳。 另外，作爲經管線2〇引發虹吸現象的第二機構，如 果適當地動作閥I28及I56的話，則受壓的氣體可進入供 應槽I4中，以輔助液體從供應槽I4經管線20至容器34 或42的流動，囡此使得容器34或42中灌入液體。當在 系統中10處理一黏滯性液體時，使用此輔助虹吸現象的 壓力將引發虹吸現象。 最好使用另一不同的填空程序以將液體從容器34及 42中經閥5〇傳送到管線7〇中。爲了將液體從34中傳送， 適當地開啓閥I28及U0,而使得受壓的氣體流過管線i44 10_ 本纸張尺度適用中國國家標準(i ) △了規格（2l〇X297公釐） "" I丨丨； ,·1 (請先閱讀背面之注意事項再填寫本頁) •裝· 訂 ·#線 509970 經濟部中央標準局員工消費合作衽印製 A7 ___一____B7__ 五、發明説明（9 ) 進入容器34中，且打開閥50而允許液體從容器34中流 出。當容器34幾乎空虛時，動作閥以使得受壓的氣 體流過管線I48而進入容器42。同時，操作閥Μ以允許 液體從容器42流入管線70中。當來自容器42的液體經 管線7〇流出而使得沒有液體時，來自供應槽u的液體同 時灌入容器34中，此如上文所述者。當容器ο幾乎沒有 液體時，閥14〇動作，而使得受壓氣體流過管線144，而 令液體從閥34中流出，此時閥50已適當動作而允許液體 從容器34中流出。當液體從容器34中流出時，容器42 開始灌水。因此須了解液體可持續地經由交替從容器3 4 及4 2中灌入及抽出液體而經管線7 〇傳送。經由適當地控 制系統10中多種不同的閥，經管線7〇之液體的流動速率 可維持固定。須更進一步了解液體傳送系統1〇沒有使用 反復泵或其他導致脈衝式壓力1流的裝置。而是液體傳送 系統10提供一固定的壓力液體流，在低流動速率下，經 ，控制閥96，此液體流可適當地控制。因此氣體控制及 女全上的原因，經氣體管線234結合氣體釋放止回閥23〇 及232予槽U的氣體傳送管線16〇。 爲了使躓者可完全了解液體傳送系統1 〇的操作，列 出一閥表（表1)，其中"0”表開，"C”指關閉，且,,A"表示 閥30’ 表示閥5〇, "c"表示閥18〇,，，D"表示閥14〇, "E„ 表不閥m ’ 〃F"表示閥α，且”G”爲閥ls〇。熟習本技術 者可經由圖一了解表i中閥設定，因此在此不詳加説明。 (請先閱讀背面之注意事項再填寫本買) -裝- 訂 -f 本紙張尺度適用中國國家榡準（CMS ) A4規格（210X29*7公釐） 509970 A7 __ B7 五、發明説明（10) 無有 壓力壓力 1A 1B 1C 1D 2A 2B 2C 2E 2E 1G 1F 1E 1 裝 0 C 0 C C C 0 0 C C 一 C C C PV1 裝♦〇 C 0 C 0 0 0 〇 0 0 0 0 0 PV1 壓PV C ----— C C C C C C C C C C C C 裝 C '----- C ----- C C 0 C 〇 C C C C C 0 PV2 裝X C C C 0 C 0 C C C C C 0 PV2 壓PVC C C C C 0 C 0 C C C C C 至 · C C C C C C 0 0 0 0 0 C C 止 在- C C C C C C C C 0 0 0 C C 止 —--—_____^ " (請先閱讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 口依據其他壓力槽狀態而定 c 關閉 〇打開 圖一中顯示閥3〇所使用之較佳三通闊的截面。商業上此 類土的閥了爲可Tewksburg · MA的Marcvalve公司所產生 cNsTa4^ ( 210X291^) 一 7( 9 9 ο 經濟部中央標率局員工消費合作社印利木 A7 、 _B7__ 五、發明説明（11) 的10〇3WDTSANPC編號之閥。此閥之特徵爲含氣動制動器 的PTFE閥體26〇及PTFE鐵氟龍膜2以。閥30有一上進 入口 268及一下出口 272及276。閥30中一項明顯的特 徵爲在由於出口 272及276中定位在下部，所以在膜室不 會聚積任何液體。 圖三爲一最好三通閥5〇的截面。商業上此類型的閥 爲上述 Marcvalve公司’編號1 〇〇3WMSBANPC的闕，此閥 具有一含氣動制動器的PTFE閥體3〇0及PTFE鐵氟龍膜 3〇4。進入口 3〇8定位閥體300的中間部位，而出口 310 則定位閥體3〇〇的下部（當適當地安裝閥體時）。在此配置 中，閥5 0的自行洩水，而使得閥體3 0 0内殘留的液體達 到最小。 圖四中顯示一較佳雙向閥66的截面圖。此閥66在 市面上有銷售者如Ma rcvalve公司所生產之閥，其閥號爲 1002WTLFANPC，此閥具有一 ΡΤΡΈ閥體320 , 一氣動制動 器及一 PTFE鐵氟龍膜3M。經適當定位，閥入口 326朝 上，而正常的閥出口 3M中配置在中央部位，且閥洩水口 332則向下配置在膜3M的下部。當閥66動作時，液體 將經出口 332洩出，使得沒有任何液體殘留在膜324之室 内。 圖五示一擴充的液體傳送系統4 0 0，一般包含所示 之液體傳送系統及圖一所示的液體傳送系統，與圖一相似 的結構以相同的編號表示。一般顯示系統400使得其主要 組件一般包容單一櫃子結構及/或與之結合，其具有 (請先閱讀背面之注意事項再填寫本頁)' -裝· 訂 .線 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）· 509970 A7 B7 經濟部中*標準局員工消費合作社印製 五、發明説明（12) " 體之輸人及輸出的多個外部互連結，及 提袋等），且。槽、14爲一55加命桶子（或罐子或手 uw, J ^ 16，當純度及化學上的需要允許時，開 J: 。，外，在較佳實施财在榧子結構術中 ^ 14 ’且密封榧子結構術且可加壓，而蓋子Μ沒 、3可加壓密封的櫃子結構術結合。在此類型的配置 ’加f櫃子簡㈣可對槽14巾的_產生壓力；當 ，^爲-55加侖桶子時（沒有有效地加壓而回應破裂的 危險），此配置尤其有用。 履體傳送系統400包含液體供應槽η，虹吸管26， 其虹吸管經料2G將液㈣送給兩個可加壓的維持容器 34及42 j用圖一的系統1〇，在槽14下方配置容器μ 及使得重力及虹吸管％主要用於從槽Η中傳送液 ，至谷器34’ 42。來自氣體源12〇中的氮氣經闕14〇交 、饋入槽34及42中，以從槽Μ及42中傳送液體，在下 文中將以系統1〇説明此現象。在系統1〇中，由文氏閥196 經閥34及42至槽Η而使槽内形成眞空，因此引起虹吸 效應。 片a ^統4〇〇及系統10之間的第一項差異爲至閥14〇的 氮氣管線/不會如系統10 —般通過閥I28。而是在系統400 中，來自氣體源12〇的氮氣通過一空氣操作的比例閥408。 閥408允許操作員控制進入槽34及42中的氣壓，因此控 制來自容器34及42之液體的流率。來自容器34及42的 液體闕5〇至言線？〇,此管線7〇由空氣操作的閥4〇9所 (請先閲讀背面之注意事項再填寫本頁r -裝· 訂 線 ______ 14 本紙張尺度適用中關家標準（CNS )八视格（2lQx 297公瘦） 509970 經滴部中央標準局員工消費合作社印製 A7 、 B7_ 五、發明説明（13) 控制。另外，來自閥5〇的液體可經空氣操作閥411至茂 水閥8〇。對各容器34及42供應液位偵測器41〇，此債測 器&供容器34及42内是否有液體的資訊。另外，使用感 測器4〇4以偵測從槽14中流出的液體。在較佳實施例中， 使用在管線中的感測空氣的電容性感測器以偵測槽中沒有 液體的時間。決定槽14中的液體量的另一種方法爲將一 度量器4〇6放入槽I4中，該度量器的輸出即指示槽Η中 液體的充填狀態。 在從閥I28至槽u的氣體管線1S2中放一氣流計412 以控制進入可受壓槽η中的氣體壓力。較佳之氣流計412 ^量測範園介於0至0.5CFH。在氣體管線1S2中提供一 單向的止回閥4ie以更進一步流過系統4〇〇的氣體，且氣 體管線16〇將來自止回閥4le的氣體輸入槽14中。爲了 提供氣壓控制的功能，由單向止回閥420控制的氣體排放 管線與氣體供應管線^2結合。當在系統氣體管線中， 氣體壓力大於止間42〇所允許的壓力時，氣體排放管線 饋入氣體排放200中。另外，較佳實施例中包含一氮 ，喷灑喷嘴422，此噴嘴422由結合在閥Μ6而來自供應 管線I24中的空氣操作閥424控制。 系統400包括一樣本埠口 43〇及一集水器44〇，此 爲另外添加的特徵，而不包含在圖-的基本系、统10中。 ，用取樣口 43G使操㈣可選擇流過⑽4G0的液體樣 ^此—目的’樣本管線434結合來自過遽器74 ' 、’ 84。使用一空氣操作閾436以控制流過樣本 - -— 15 本紙張尺度適财® 規格（210X297公釐） —- (請先閲讀背面之注意事項再填寫本頁) 裝· 訂 線 509970 A7 B7 經满部中央標準局員工消費合作社印製 五、發明説明（14) 管線434至樣本埠口 Co的液體之流動。一樣本埠口排放 管線438用於從取樣口 43〇中將液體排放入排放器440 中。排放器44〇包括一液體偵測器444及一排放泵448， 使用排放泵將在排放器44〇中留下的任何液體抽出排放管 線452，且通過一止回閥456至連接洩水管線8〇的洩水 管線46〇。在較佳實施例中，棑放泵由從清潔之乾燥 空氣（CDA)之氣源MS經空氣管線464的空氣操作，其中 該CDA係由一手動閥472及空氣操作閥476所控制。爲了 簡化取樣口 43〇的清潔工作，由空氣控制閥484操作的& 氣供應管線48〇結合取樣口供應管線，使得氮氣可： 接至取樣口以清潔且乾燥該取樣口。 ^ 在系統4〇〇中包含一去離子水供應系統49〇。去 子水供應系統49〇包含一去離子水供應管線494，此管 可爲一手動閥498及一氣體操作閥5〇4操作，且包含可嫉 手動閥512操作的去離子水返回管線5〇8。使用返二= 使得當去離子水沒有流過系统時，可維持流過 $ 管線之去離子水的固定移動，以防止去離子不流2及:： 導致不流動之水的純度問題。如圖五中可 及可 作空氣閥5〇4，去離子水可經管緩 ’、！由操 ^…m g、線514進入取樣口 430， (請先閲讀背面之注意事項再填寫本頁广 -裝 訂 線· 以清潔取樣口 43〇。去離子水嗔運喷嘴516 結合供應管線494，且由空氣操作閥wo控制” 去離子水也可以經管線524 線中的空氣操作閥$28。因此， 置在液體傳送管 使用閥5以輸入管線2〇中，以、、太’勒々子水可經管線524 Μ潔谷器34，42，及容器 可經管線518 本紙張尺度適用中國國家標率（CNS ) Α4規格 509970 Α7 Β7 五、發明説明（15) 3〇’5〇,且一般所有的液體供應系統管線。另外，經閥528， 去離子水可經控制而將液體加入系統4 0 0内（包含槽Η内 的液體）以應用可控制方式調整流過系統之液體的濃度。 爲了 &供液體濃度控制資訊，在液體傳送管線系統中導電 極534，如從過濾器74至槽Η的液體返回管線84。因此 使用液體傳送系統400 ,可經控制而經由空氣操作閥536 控制的再循環管線84，將去離子水混合槽14中的液體， 直到偵測器534指示已可能預定的濃度爲止，在此然後混 合液體可從管線104中輸出。 由手動閥，空氣操作閥544及手動閥'Μ控制 經輸出管線1〇4輸出的液體。另外，壓力傳導器MS連接 輸出管線1〇4以提供與液體輸出壓力及流率相關的控制資 訊。使用此控制資訊以提供控制信號給比例閥4〇8，以控 制輸入容器34及42中的氣壓，且因此控制輸出液體的流 率〇 經濟部中央標準局員工消費合作社印繁 (請先閲讀背面之注意事項再填寫本頁)· 在多種不同的工業應用中，最好是將架構一或多個 55加侖桶子的外侧槽6〇〇結合一與槽14有關的日槽（維 持每日系統操作中使用的適量液體），或者其他液體維持 槽。槽6〇0之操作性安裝包括一壓力密封蓋子⑽2及一液 體供應管線6〇4，該管線從槽6〇〇至結合在管線2〇中的 空氣掭作閾6〇8。因此來自槽600中的液體直接經閥6〇8 進入管線2〇中，以更進一步輸入容器34及42中。最好 管線的一端在槽6㈣的底部，其方式與槽U之 管線20的一端24類似。如同槽I4,在槽600之輸出管 17 本紙張又度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） 經濟、哪中央榡準局員工消費合作社印製 509970 A7 __— —__B7 五、發明説明（16) 線6=上使用一管線感測器612以感測槽600中液體的充 填狀態，且使用液位感測器61S以提供槽6〇〇中的高及低 液位。在較佳實施例中，槽6GG位在容器34及ο上方， 使得可經管線6〇4而完成虹吸效應。所以，如上文中相關 於槽I4的説明，善用虹吸效應也可以在槽6〇〇中達到相 同的效應。氣體管線結合管線1S2以受壓的氣體經壓 力岔封蓋子6〇2予槽6〇0。使用經由管線62〇的氣體以強 迫液體流過管線6〇4以啓動虹吸效應，且提供當來自⑽ 的液體產生虹吸效應時，提供大量可替代之氣體。 才疋供液體返回管線630以將液體傳送回槽6QQ中。 經管線1〇4中的接點634至液體供應管線646管線642中 的空氣操作閥638操作液體返回管線63〇，其管制液體不 ^流入槽I4返回管線84，即至槽6㈣返回管線63〇，該 管線63〇係由空氣操作閥648所控制。系統洩水管線65〇 連接接點634，且由空氣操作閥652及止回閥GW所控制 以傳送液體至排放管線80。 可預期在多種不同的工業安裝中，除了使用過濾器 7 4外，尚使用外部過濾器66 0。爲了達到此一目的，過遽 器饋入管線664結合液體傳送管線7〇至多個形成平行配 置的外部過濾器MO中，因此至返回管線，此管線由 至液體輸出管線1〇4的空氣操作閥672所控制。因此須了 解過滤器66〇可與過滤器74形成平行安裝。 上文中所述的液體傳送系統4 〇 〇爲一使用多個氣體 控制閥（如閥424)以完成液體傳送操作的自動系統。在較 _18 度適用中國國家標準（CNS ) A4規格（210X297公釐〉 -- (請先閲讀背面之注意事項再填寫本頁 •裴 -訂 509970 A7 B7 五、發明説明（17) 佳實施例中，經空氣控制閥經一空氣管68結合一般配置 在控制板上的電子控制電磁空氣閥684。使用來自多個系 統4〇0之感測器的電子信號，及至控制器692的操作員指 令以操作系統4〇0。文中已應用較佳實施例説明本發明， 熟習本技術者須了解可對上述實施例進行不同的改變及修 飾而不偏移本發明的精神及觀點。因此下文説明的申請專 利範園係用於涵蓋全部此類的本發明的精神及觀點内的改 變及修飾之例子。 (請先閱讀背面之注意事項再填寫本頁). 經濟部中决標準局員Η消費合作社印製 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐）Talent :: Paper scale is financial household materials (---- 509970 A7 B7 economy i '^ printed by the Consumer Standards Cooperative of the Central Bureau of Standards 5. Description of invention (8) in pipeline 20) will cause liquid to flow from supply tank I4 to container 34 Or 42 and the replacement gas flows into the tank 14 through the valves 128, 158. The key to starting a siphon effect from the trough is to evacuate from the siphon tube 26. In order to evacuate, the gas valve is opened and the valve 156 is closed, so that the pressurized gas flows through the pipeline to the venturi valve 1%. This results in a emptiness from the suction port i92 of the venturi valve I96 and returns to the valve ι80. The valve ISO can be opened to the container 34 or 42 through line I84 or 88, and when the valve 30 is opened to the corresponding line 28 or 46 of the slot 34 or 42, the return to the line 20 of the slot 14 will be generated. Emptiness. Once a siphon is generated, the 眞 丄 effect will not continue 'and the siphon flow produced by gravity will continue, so that when needed in the system, the fluid flows from the tank U. The important thing is that volatile liquids can remove the air pressure and cause siphoning as much as possible, while retaining VOCs in the liquid without affecting the chemical properties of the liquid. In addition, excessive air exposure will result in the presence of foam in the liquid, resulting in poor quality for chemically ultra-high purity applications. In addition, as the second mechanism that causes the siphon phenomenon through the pipeline 20, if the valves I28 and I56 are properly operated, the pressurized gas can enter the supply tank I4 to assist the liquid from the supply tank I4 through the pipeline 20 to the container 34. Or the flow of 42 which in turn causes the container 34 or 42 to be filled with liquid. When a viscous liquid is processed in the system 10, the pressure of using this auxiliary siphon phenomenon will cause the siphon phenomenon. Preferably, a different fill-in procedure is used to transfer liquid from containers 34 and 42 through valve 50 to line 70. In order to transfer the liquid from 34, the valves I28 and U0 are appropriately opened, so that the pressured gas flows through the pipeline i44 10_ This paper size applies the Chinese national standard (i) △ specifications (2l0X297 mm) " " I 丨 丨;, · 1 (Please read the precautions on the back before filling in this page) • Binding · Binding · # 线 509970 Employee Cooperative Cooperation of the Central Standards Bureau of the Ministry of Economic Affairs 衽 Printing A7 ___ 一 ____B7__ V. Invention Explanation (9) Enter the container 34 and open the valve 50 to allow liquid to flow out of the container 34. When the container 34 is almost empty, the valve is activated so that the pressurized gas flows through the line I48 and enters the container 42. At the same time, the valve M is operated to allow liquid to flow from the container 42 into the line 70. When the liquid from the container 42 flows out through the line 70 so that there is no liquid, the liquid from the supply tank u is simultaneously filled into the container 34, as described above. When there is almost no liquid in the container ο, the valve 140 operates, so that the pressurized gas flows through the line 144, and the liquid flows out of the valve 34. At this time, the valve 50 has been properly operated to allow the liquid to flow out of the container 34. When the liquid flows out of the container 34, the container 42 starts to be filled with water. It is therefore important to understand that the liquid can be continuously conveyed through line 70 by alternately filling and withdrawing liquid from containers 3 4 and 42. By appropriately controlling the various valves in the system 10, the flow rate of the liquid through line 70 can be maintained constant. It must be further understood that the liquid delivery system 10 does not use repetitive pumps or other devices that cause a pulsating pressure of 1 flow. Instead, the liquid delivery system 10 provides a fixed pressure liquid flow, which can be appropriately controlled at low flow rates through the control valve 96. For gas control and women's overall reasons, gas release check valves 23 and 232 are connected to the gas transmission line 16 of the tank U through the gas line 234. In order to make people fully understand the operation of the liquid delivery system 10, a valve table (Table 1) is listed, in which " 0 "means open, " C" means closed, and "A" means valve 30 'means Valve 5〇, " c " means valve 18〇 ,, D " means valve 14〇, " E „means valve m '〃F " means valve α, and" G "is valve lso. Familiarize yourself with the technology Those who can understand the valve settings in Table i through Figure 1 will not explain in detail here. (Please read the precautions on the back before filling out this purchase)-Packing-Ordering -f This paper size applies to China National Standards (CMS) A4 Specifications (210X29 * 7mm) 509970 A7 __ B7 V. Description of the invention (10) Without pressure and pressure 1A 1B 1C 1D 2A 2B 2C 2E 2E 1G 1F 1E 1 installed 0 C 0 CCC 0 0 CC one CCC PV1 installed ♦ 〇 C 0 C 0 0 0 〇0 0 0 0 0 PV1 pressure PV C ----- CCCCCCCCCCCC installed C '----- C ----- CC 0 C 〇CCCCC 0 PV2 installed XCCC 0 C 0 CCCCC 0 PV2 PVC PVC CCCC 0 C 0 CCCCC to CCCCCC 0 0 0 0 0 CC only On-CCCCCCCC 0 0 0 CC Only ------- _____ ^ " (Please read the precautions on the back before filling out this page) The printed port of the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs depends on the status of other pressure tanks. C Closed. Opening Figure 1 shows the preferred three-way wide cross section for valve 30. Commercially, this type of soil valve is cNsTa4 ^ (210X291 ^)-7 (9 9 ο economically produced by Marcvalve of Tewksburg · MA. Ministry of Standards and Technology Bureau staff consumer cooperative Yinlim A7, _B7__ V. Invention description (11) 1003WDTSANPC numbered valve. This valve features a PTFE valve body 26 with a pneumatic brake and a PTFE Teflon membrane 2 The valve 30 has an upper inlet port 268 and a lower outlet port 272 and 276. One obvious feature of the valve 30 is that since the outlet ports 272 and 276 are positioned at the lower portion, no liquid will accumulate in the membrane chamber. Figure 3 is a cross section of a preferred three-way valve 50. Commercially this type of valve is the above-mentioned Marcvalve Corporation's No. 2003 WMSBANPC. This valve has a PTFE valve body 300 with a pneumatic brake and a PTFE Teflon membrane 300. The inlet port 308 positions the middle portion of the valve body 300, while the outlet port 310 positions the lower portion of the valve body 300 (when the valve body is properly installed). In this configuration, the valve 50 automatically drains water, so that the remaining liquid in the valve body 300 is minimized. A cross-sectional view of a preferred two-way valve 66 is shown in FIG. This valve 66 is sold on the market by a valve produced by a company such as Marcvalve. Its valve number is 1002 WTLFANPC. This valve has a PTΤ body 320, a pneumatic brake, and a PTFE Teflon membrane 3M. After proper positioning, the valve inlet 326 faces upward, while the normal valve outlet 3M is arranged at the center, and the valve drain outlet 332 is arranged downward at the lower part of the membrane 3M. When the valve 66 is activated, the liquid will leak through the outlet 332 so that no liquid remains in the chamber of the membrane 324. Fig. 5 shows an extended liquid delivery system 400, which generally includes the liquid delivery system shown and the liquid delivery system shown in Fig. 1. Structures similar to Fig. 1 are denoted by the same reference numerals. The general display system 400 makes its main components generally accommodate a single cabinet structure and / or combine with it, which has (please read the precautions on the back before filling out this page) '-binding · binding. Threaded paper dimensions apply Chinese national standards ( CNS) A4 specification (210X297 mm) · 509970 A7 B7 Printed by the Ministry of Economic Affairs * Standards Bureau's Consumer Cooperative Cooperative V. Invention Description (12) " Multiple external interconnections for input and output of the body, and bags etc. ), And. Slot, 14 is a 55 plus life bucket (or jar or hand uw, J ^ 16, when purity and chemical requirements allow, open J :. In addition, in the best practice of Choi in the structure of 榧 ^ 14 ' And sealed rafter structure and can be pressurized, while the lid M, 3 can be pressurized and sealed cabinet structure combined. In this type of configuration 'plus f cabinet Jian ㈣ can generate pressure on the 14 towel slot; when, ^ This configuration is particularly useful when the barrel is -55 gallons (without effectively pressurizing in response to the danger of rupture). The crawler delivery system 400 includes a liquid supply tank η, a siphon tube 26, and the siphon tube feeds liquid maggots to the two The two pressurizable maintenance containers 34 and 42 j use the system 10 of FIG. 1 to arrange the container μ below the tank 14 and make the gravity and siphon% mainly used to transfer liquid from the tank to the trough 34 '42. From The nitrogen in the gas source 120 passes through 阙 140 and is fed into the tanks 34 and 42 to transfer liquid from the tanks M and 42. This phenomenon will be described below with the system 10. In the system 10, the text The valve 196 passes through the valves 34 and 42 to the groove to form a hollow in the groove, thereby causing a siphon effect. 片 a ^ The first difference between system 400 and system 10 is that the nitrogen line to valve 14 / will not pass through valve I28 as in system 10. Instead, in system 400, nitrogen from gas source 120 passes through a Air operated proportional valve 408. The valve 408 allows the operator to control the air pressure into the tanks 34 and 42 and therefore control the flow rate of the liquid from the containers 34 and 42. The liquid from the containers 34 and 42 阙 50 to the speech line? 〇, This pipeline 70 is operated by an air operated valve 409 (please read the precautions on the back before filling in this page r-binding · binding line ______ 14 This paper size is applicable to the Zhongguanjia standard (CNS) eight-view grid (2lQx 297 thin) 509970 Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Discharge A7, B7_ V. Invention Description (13) Control. In addition, the liquid from the valve 50 can be operated through the air operated valve 411 to the water-growing valve 80. Each of the containers 34 and 42 is provided with a liquid level detector 41. This debt detector & provides information on whether there is liquid in the containers 34 and 42. In addition, a sensor 404 is used to detect the outflow from the tank 14. Liquid. In a preferred embodiment, the capacitive sensing of air in the pipeline is used. The device detects the time when there is no liquid in the tank. Another way to determine the amount of liquid in the tank 14 is to place a meter 4 into the tank I4, and the output of the meter indicates the filling status of the liquid in the tank. An airflow meter 412 is placed in the gas line 1S2 from the valve I28 to the tank u to control the pressure of the gas entering the pressure-receivable tank η. The preferred airflow meter 412 ^ measures the range between 0 and 0.5 CFH. In the gas A one-way check valve 4ie is provided in the line 1S2 to further flow the gas through the system 400, and the gas line 160 enters the gas from the check valve 4le into the tank 14. In order to provide the function of air pressure control, a gas discharge line controlled by a one-way check valve 420 is combined with a gas supply line ^ 2. When the gas pressure in the system gas line is greater than the allowable pressure in the interval 42 °, the gas discharge line is fed into the gas discharge 200. In addition, the preferred embodiment includes a nitrogen spray nozzle 422 which is controlled by an air operated valve 424 incorporated in the supply line I24 in combination with the valve M6. The system 400 includes the same port 43 and a water collector 44, which are additional features and are not included in the basic system and system 10 of FIG. With the sampling port 43G, the operation can select a liquid sample flowing through 4G0. ^ This—the purpose 'sample line 434 is combined with the filters 74', '84. Use an air-operated threshold 436 to control the flow of the sample---15 paper size suitable for financial ® specifications (210X297 mm) —- (Please read the precautions on the back before filling this page) Binding · 509970 A7 B7 Warp Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the People's Republic of China V. Invention Description (14) The flow of liquid from line 434 to the sample port Co. A sample port drain line 438 is used to drain liquid from the sampling port 43 into the drain 440. The drain 44 includes a liquid detector 444 and a drain pump 448. Any liquid left in the drain 44 is drained out of the drain line 452 using a drain pump, and connected to the drain line 8 through a check valve 456 〇's drain line 46〇. In the preferred embodiment, the dump pump is operated by air from a clean dry air (CDA) air source MS via an air line 464, where the CDA is controlled by a manual valve 472 and an air operated valve 476. In order to simplify the cleaning of the sampling port 43o, the & gas supply line 48o operated by the air control valve 484 combined with the sampling port supply line allows nitrogen to: connect to the sampling port to clean and dry the sampling port. ^ Deionized water supply system 49 is included in system 400. The deionized water supply system 49 includes a deionized water supply line 494, which can be operated by a manual valve 498 and a gas operated valve 504, and includes a deionized water return line 5 which can be operated by a manual valve 512. 8. Use back to two = so that when the deionized water does not flow through the system, the fixed movement of the deionized water flowing through the $ pipeline can be maintained to prevent the deionized non-flow 2 and :: causing the purity problem of the non-flowing water. As shown in Figure 5, it can be used as an air valve 504, and deionized water can be slowed through the pipe. ^ ... mg, line 514 enters the sampling port 430, (Please read the precautions on the back before filling in this page-binding line · to clean the sampling port 43. Deionized water transport nozzle 516 combined with the supply line 494, and Controlled by air-operated valve wo ”Deionized water can also be operated through the air-operated valve $ 28 in line 524. Therefore, it is placed in the liquid transfer pipe using valve 5 to enter line 20, so that the water can be Via line 524 Μ Valley cleaner 34,42, and the container can pass through line 518 This paper size is applicable to China National Standard (CNS) A4 specifications 509970 Α7 Β7 V. Description of the invention (15) 3 0'50, and generally all Liquid supply system pipeline. In addition, through valve 528, deionized water can be controlled to add liquid to the system 400 (including the liquid in the tank) to adjust the concentration of the liquid flowing through the system in a controlled manner. For & For liquid concentration control information, the conducting electrode 534 in the liquid transfer line system, such as the liquid return line 84 from the filter 74 to the tank. Therefore, using the liquid transfer system 400, it can be controlled by the air operated valve 536 Circulate the line 84 to mix the liquid in the deionized water mixing tank 14 until the detector 534 indicates that a predetermined concentration is possible, and then the mixed liquid can be output from the line 104. Manual valve, air operated valve 544 and manual The valve 'M controls the liquid output through the output line 104. In addition, the pressure transmitter MS is connected to the output line 104 to provide control information related to the liquid output pressure and flow rate. Use this control information to provide a control signal to the ratio Valve 408 to control the air pressure in the input containers 34 and 42 and therefore control the flow rate of the output liquid. The employee's cooperative of the Central Standards Bureau of the Ministry of Economic Affairs and the Consumer Cooperatives printed and printed (Please read the precautions on the back before filling this page). In many different industrial applications, it is best to combine the outer tank 600 of one or more 55-gallon drums with a day tank associated with tank 14 (to maintain the proper amount of liquid used in daily system operation), or other Liquid holding tank. The operational installation of tank 600 includes a pressure-tight lid ⑽2 and a liquid supply line 604, which runs from tank 600 to air incorporated in line 掭. The threshold is 608. Therefore, the liquid from the tank 600 directly enters the pipeline 20 through the valve 608 to be further input into the containers 34 and 42. It is preferable that one end of the pipeline is at the bottom of the tank 6㈣, and its manner is the same as that of the tank One end 24 of U pipeline 20 is similar. Like slot I4, the output tube 17 in slot 600 is also suitable for the Chinese National Standard (CNS) A4 specification (210 × 297 mm). 509970 A7 __— —__ B7 V. Description of the invention (16) Line 6 = A line sensor 612 is used to sense the filling state of the liquid in the tank 600, and a level sensor 61S is used to provide the tank 600. High and low levels. In a preferred embodiment, the groove 6GG is located above the containers 34 and ο, so that the siphon effect can be completed through the line 604. Therefore, as explained above with respect to slot I4, the same effect can be achieved in slot 600 by making good use of the siphon effect. The gas line is combined with the line 1S2 to seal the cover 602 to the tank 600 with a pressure gas through a pressure fork. The gas via line 62 is used to force the liquid to flow through line 604 to initiate the siphon effect, and to provide a large amount of alternative gas when the liquid from tritium produces a siphon effect. Only the liquid return line 630 is provided to transfer the liquid back to the tank 6QQ. The liquid return line 63 is operated via the air operation valve 638 in the line 104 to the liquid supply line 646 in the line 642 through the contact 634 in the line 104, which controls the liquid to flow into the return line 84 in the tank I4, and returns to the line 63 in the tank 6 槽. The line 63 is controlled by an air operated valve 648. The system drain line 65 is connected to the contact 634 and is controlled by the air operated valve 652 and the check valve GW to transfer liquid to the discharge line 80. It is expected that in many different industrial installations, an external filter 66 0 will be used in addition to the filter 7 4. In order to achieve this, the feeder feed line 664 is combined with the liquid transfer line 70 to a plurality of external filters MO in a parallel configuration, so to the return line, this line is operated by the air to the liquid output line 104 672 controlled. Therefore, it should be understood that the filter 66 may be installed in parallel with the filter 74. The liquid transfer system 400 described above is an automatic system that uses multiple gas control valves (such as valve 424) to perform liquid transfer operations. Applicable to China National Standard (CNS) A4 specifications (210X297 mm) at _18 degrees-(Please read the notes on the back before filling in this page • Pei-Booking 509970 A7 B7 V. Description of Invention (17) In the process, the air control valve is combined with an electronically controlled electromagnetic air valve 684 which is generally arranged on the control panel via an air pipe 68. Electronic signals from sensors of multiple systems 400 and operator instructions to the controller 692 are used. The operating system 400 is used. The preferred embodiments have been used to describe the present invention. Those skilled in the art must understand that the above embodiments can be changed and modified without departing from the spirit and perspective of the present invention. Therefore, the following description The patent application park is an example of changes and modifications within the spirit and perspective of the present invention that covers all such examples. (Please read the precautions on the back before filling out this page.) The paper size of the paper is applicable to China National Standard (CNS) Α4 (210 × 297 mm)