JP2009515377A5 - - Google Patents

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Publication number
JP2009515377A5
JP2009515377A5 JP2008532373A JP2008532373A JP2009515377A5 JP 2009515377 A5 JP2009515377 A5 JP 2009515377A5 JP 2008532373 A JP2008532373 A JP 2008532373A JP 2008532373 A JP2008532373 A JP 2008532373A JP 2009515377 A5 JP2009515377 A5 JP 2009515377A5
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Japan
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input signal
phase
oscillator
output waveform
integrator
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JP2008532373A
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English (en)
Japanese (ja)
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JP4537483B2 (ja
JP2009515377A (ja
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Priority claimed from PCT/US2006/036786 external-priority patent/WO2007044191A2/en
Publication of JP2009515377A publication Critical patent/JP2009515377A/ja
Publication of JP2009515377A5 publication Critical patent/JP2009515377A5/ja
Application granted granted Critical
Publication of JP4537483B2 publication Critical patent/JP4537483B2/ja
Expired - Fee Related legal-status Critical Current
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JP2008532373A 2005-09-21 2006-09-21 高分解能および広ダイナミックレンジ積分器 Expired - Fee Related JP4537483B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US71930405P 2005-09-21 2005-09-21
US71930605P 2005-09-21 2005-09-21
US71930505P 2005-09-21 2005-09-21
US72789705P 2005-10-18 2005-10-18
PCT/US2006/036786 WO2007044191A2 (en) 2005-09-21 2006-09-21 High resolution and wide dynamic range integrator

Publications (3)

Publication Number Publication Date
JP2009515377A JP2009515377A (ja) 2009-04-09
JP2009515377A5 true JP2009515377A5 (enExample) 2010-01-07
JP4537483B2 JP4537483B2 (ja) 2010-09-01

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Family Applications (4)

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JP2008532372A Active JP5242399B2 (ja) 2005-09-21 2006-09-21 ゲインを制御した高ダイナミックレンジ感度センサ素子またはアレイのためのシステムおよび方法
JP2008532373A Expired - Fee Related JP4537483B2 (ja) 2005-09-21 2006-09-21 高分解能および広ダイナミックレンジ積分器
JP2008532376A Expired - Fee Related JP4699524B2 (ja) 2005-09-21 2006-09-21 測光およびリアルタイムのレポート能力を有する画像センサ素子またはアレイのためのシステムおよび方法
JP2008532377A Expired - Fee Related JP5059767B2 (ja) 2005-09-21 2006-09-21 高ダイナミックレンジ感度センサ素子またはアレイのためのシステムおよび方法

Family Applications Before (1)

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JP2008532372A Active JP5242399B2 (ja) 2005-09-21 2006-09-21 ゲインを制御した高ダイナミックレンジ感度センサ素子またはアレイのためのシステムおよび方法

Family Applications After (2)

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JP2008532376A Expired - Fee Related JP4699524B2 (ja) 2005-09-21 2006-09-21 測光およびリアルタイムのレポート能力を有する画像センサ素子またはアレイのためのシステムおよび方法
JP2008532377A Expired - Fee Related JP5059767B2 (ja) 2005-09-21 2006-09-21 高ダイナミックレンジ感度センサ素子またはアレイのためのシステムおよび方法

Country Status (5)

Country Link
US (5) US7786422B2 (enExample)
EP (4) EP1938584A4 (enExample)
JP (4) JP5242399B2 (enExample)
KR (4) KR100970599B1 (enExample)
WO (4) WO2007035860A2 (enExample)

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US10462391B2 (en) 2015-08-14 2019-10-29 Kla-Tencor Corporation Dark-field inspection using a low-noise sensor
US10313622B2 (en) 2016-04-06 2019-06-04 Kla-Tencor Corporation Dual-column-parallel CCD sensor and inspection systems using a sensor
US10778925B2 (en) 2016-04-06 2020-09-15 Kla-Tencor Corporation Multiple column per channel CCD sensor architecture for inspection and metrology
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