JP2009512369A5 - - Google Patents
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- JP2009512369A5 JP2009512369A5 JP2008535876A JP2008535876A JP2009512369A5 JP 2009512369 A5 JP2009512369 A5 JP 2009512369A5 JP 2008535876 A JP2008535876 A JP 2008535876A JP 2008535876 A JP2008535876 A JP 2008535876A JP 2009512369 A5 JP2009512369 A5 JP 2009512369A5
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Links
- 239000010410 layer Substances 0.000 claims description 21
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 239000011248 coating agent Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 8
- 238000005304 joining Methods 0.000 claims description 6
- 239000012790 adhesive layer Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 18
- 239000000463 material Substances 0.000 claims 4
- 239000000853 adhesive Substances 0.000 claims 2
- 230000001070 adhesive effect Effects 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 229910000679 solder Inorganic materials 0.000 claims 2
- SWPMTVXRLXPNDP-UHFFFAOYSA-N 4-hydroxy-2,6,6-trimethylcyclohexene-1-carbaldehyde Chemical compound CC1=C(C=O)C(C)(C)CC(O)C1 SWPMTVXRLXPNDP-UHFFFAOYSA-N 0.000 claims 1
- 229920000106 Liquid crystal polymer Polymers 0.000 claims 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000005459 micromachining Methods 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
- 239000012044 organic layer Substances 0.000 claims 1
- 239000011368 organic material Substances 0.000 claims 1
- 239000004033 plastic Substances 0.000 claims 1
- 239000002985 plastic film Substances 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 230000000284 resting effect Effects 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 238000005476 soldering Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
- 239000010953 base metal Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005050398A DE102005050398A1 (de) | 2005-10-20 | 2005-10-20 | Gehäuse mit Hohlraum für ein mechanisch empfindliches elektronisches Bauelement und Verfahren zur Herstellung |
| PCT/DE2006/001736 WO2007045204A1 (de) | 2005-10-20 | 2006-09-29 | Gehäuse mit hohlraum für ein mechanisch empfindliches elektronisches bauelement und verfahren zur herstellung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009512369A JP2009512369A (ja) | 2009-03-19 |
| JP2009512369A5 true JP2009512369A5 (enExample) | 2012-08-02 |
Family
ID=37758890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008535876A Pending JP2009512369A (ja) | 2005-10-20 | 2006-09-29 | 機械的に敏感な電子構成素子のための中空室を備えたハウジングおよび該ハウジングを製造するための方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20090127697A1 (enExample) |
| JP (1) | JP2009512369A (enExample) |
| DE (2) | DE102005050398A1 (enExample) |
| WO (1) | WO2007045204A1 (enExample) |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005008512B4 (de) | 2005-02-24 | 2016-06-23 | Epcos Ag | Elektrisches Modul mit einem MEMS-Mikrofon |
| DE102005008514B4 (de) * | 2005-02-24 | 2019-05-16 | Tdk Corporation | Mikrofonmembran und Mikrofon mit der Mikrofonmembran |
| DE102005008511B4 (de) * | 2005-02-24 | 2019-09-12 | Tdk Corporation | MEMS-Mikrofon |
| US8011082B2 (en) * | 2005-11-09 | 2011-09-06 | Koninklijke Philips Electronics N.V. | Method of manufacturing a package carrier |
| DE102005053767B4 (de) * | 2005-11-10 | 2014-10-30 | Epcos Ag | MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau |
| DE102005053765B4 (de) * | 2005-11-10 | 2016-04-14 | Epcos Ag | MEMS-Package und Verfahren zur Herstellung |
| DE102007010711B4 (de) * | 2007-02-28 | 2018-07-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Schaltanordnung, Messvorrichtung damit und Verfahren zu deren Herstellung |
| DE102007020288B4 (de) * | 2007-04-30 | 2013-12-12 | Epcos Ag | Elektrisches Bauelement |
| DE102007028288B4 (de) * | 2007-06-20 | 2013-06-06 | Epcos Ag | Mit akustischen Wellen arbeitendes MEMS Bauelement und Verfahren zur Herstellung |
| DE102008028299B3 (de) | 2008-06-13 | 2009-07-30 | Epcos Ag | Systemträger für elektronische Komponente und Verfahren für dessen Herstellung |
| WO2010077311A1 (en) * | 2008-12-17 | 2010-07-08 | Sand9, Inc. | Multi-port mechanical resonating devices and related methods |
| DE102009007837A1 (de) | 2009-02-06 | 2010-08-19 | Epcos Ag | Sensormodul und Verfahren zum Herstellen von Sensormodulen |
| JP5045769B2 (ja) * | 2009-03-04 | 2012-10-10 | 株式会社デンソー | センサ装置の製造方法 |
| DE102009002559A1 (de) * | 2009-04-22 | 2010-10-28 | Robert Bosch Gmbh | Sensoranordnung |
| US20110037162A1 (en) * | 2009-07-24 | 2011-02-17 | Aeroflex Microelectronic Solutions | Hermetic packaging and method of forming the same |
| US8736388B2 (en) | 2009-12-23 | 2014-05-27 | Sand 9, Inc. | Oscillators having arbitrary frequencies and related systems and methods |
| DE102010012042B4 (de) | 2010-03-19 | 2025-02-06 | Tdk Corporation | Bauelement mit einem Chip in einem Hohlraum und einer spannungsreduzierten Befestigung |
| DE102010054782B4 (de) | 2010-12-16 | 2025-02-06 | Snaptrack, Inc. | Gehäustes elektrisches Bauelement |
| DE102010055627A1 (de) * | 2010-12-22 | 2012-06-28 | Epcos Ag | Elektrisches Modul zur Aufnahme durch Bestückungsautomaten mittels Erzeugung eines Vakuums |
| DE102011004577B4 (de) * | 2011-02-23 | 2023-07-27 | Robert Bosch Gmbh | Bauelementträger, Verfahren zur Herstellung eines solchen Bauelementträgers sowie Bauteil mit einem MEMS-Bauelement auf einem solchen Bauelementträger |
| JP2013046167A (ja) * | 2011-08-23 | 2013-03-04 | Seiko Epson Corp | 振動デバイス、及び振動デバイスの製造方法 |
| US8436433B1 (en) * | 2011-10-13 | 2013-05-07 | Rosemount Aerospace Inc. | Unattached contained semiconductor devices |
| DE102012108106B4 (de) * | 2012-08-31 | 2016-06-16 | Epcos Ag | MEMS Bauteil und Verfahren zur Herstellung eines mit akustischen Wellen arbeitenden MEMS Bauteils |
| DE102013100197A1 (de) * | 2013-01-10 | 2014-07-10 | Continental Automotive Gmbh | Sensoreinheit für ein Kraftfahrzeug zur Montage auf einer Leiterplatte und Mitteln zum Dämpfen der Übertragung hochfrequenter Störungen |
| DE102013100388B4 (de) | 2013-01-15 | 2014-07-24 | Epcos Ag | Bauelement mit einer MEMS Komponente und Verfahren zur Herstellung |
| DE102013103494A1 (de) * | 2013-04-08 | 2014-10-09 | Pro-Micron Gmbh & Co. Kg | Dehnungsmesssensor |
| JP6193480B2 (ja) * | 2013-05-24 | 2017-09-06 | スナップトラック・インコーポレーテッド | 微小電気機械システムデバイスパッケージおよび微小電気機械システムデバイスパッケージを製造するための方法 |
| DE102013106353B4 (de) * | 2013-06-18 | 2018-06-28 | Tdk Corporation | Verfahren zum Aufbringen einer strukturierten Beschichtung auf ein Bauelement |
| DE102014105861B4 (de) * | 2014-04-25 | 2015-11-05 | Infineon Technologies Ag | Sensorvorrichtung und Verfahren zum Herstellen einer Sensorvorrichtung |
| DE102014106503B4 (de) | 2014-05-08 | 2016-03-03 | Epcos Ag | Verfahren zur Herstellung eines Mikrofons |
| DE102014008839B4 (de) * | 2014-06-20 | 2021-09-30 | Kunststoff-Zentrum In Leipzig Gemeinnützige Gmbh | Dehnungskompensierendes Verbindungselement für ein Mikroelektroniksystem |
| US10442683B2 (en) * | 2016-04-14 | 2019-10-15 | Akustica, Inc. | Corrugated package for microelectromechanical system (MEMS) device |
| WO2018009543A1 (en) * | 2016-07-07 | 2018-01-11 | Molex, Llc | Molded interconnect device and method of making same |
| US10028411B2 (en) * | 2016-07-26 | 2018-07-17 | Continental Automotive Systems, Inc. | Electronic controller with laser weld sealed housing |
| TWI660487B (zh) * | 2017-12-19 | 2019-05-21 | 英屬開曼群島商錼創科技股份有限公司 | 微型元件結構 |
| CN108358160B (zh) * | 2018-04-18 | 2023-08-01 | 中国兵器工业集团第二一四研究所苏州研发中心 | 吊装式可释放应力的mems器件封装结构 |
| JP7401200B2 (ja) * | 2019-06-14 | 2023-12-19 | 太陽誘電株式会社 | 電子デバイスの製造方法 |
| DE102019214478A1 (de) * | 2019-09-23 | 2021-03-25 | Infineon Technologies Ag | Photoakustischer gassensor |
| US11616027B2 (en) | 2019-12-17 | 2023-03-28 | Analog Devices International Unlimited Company | Integrated circuit packages to minimize stress on a semiconductor die |
| CN116097426B (zh) * | 2020-09-25 | 2025-05-13 | 华为技术有限公司 | 芯片及其制作方法、电子设备 |
| CN114337586A (zh) * | 2021-11-05 | 2022-04-12 | 深圳市科瀚电子有限公司 | 一种贴片音叉谐振器的结构及加工方法 |
| WO2023129468A1 (en) * | 2021-12-31 | 2023-07-06 | Sitime Corporation | Suspension for resonators and mems devices |
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-
2005
- 2005-10-20 DE DE102005050398A patent/DE102005050398A1/de not_active Withdrawn
-
2006
- 2006-09-29 JP JP2008535876A patent/JP2009512369A/ja active Pending
- 2006-09-29 US US12/090,529 patent/US20090127697A1/en not_active Abandoned
- 2006-09-29 DE DE112006002336T patent/DE112006002336A5/de not_active Withdrawn
- 2006-09-29 WO PCT/DE2006/001736 patent/WO2007045204A1/de not_active Ceased
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