JP2009508322A5 - - Google Patents
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- Publication number
- JP2009508322A5 JP2009508322A5 JP2008514820A JP2008514820A JP2009508322A5 JP 2009508322 A5 JP2009508322 A5 JP 2009508322A5 JP 2008514820 A JP2008514820 A JP 2008514820A JP 2008514820 A JP2008514820 A JP 2008514820A JP 2009508322 A5 JP2009508322 A5 JP 2009508322A5
- Authority
- JP
- Japan
- Prior art keywords
- printable semiconductor
- semiconductor element
- transfer device
- bridge
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 56
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 13
- 238000000034 method Methods 0.000 claims 13
- 229910052710 silicon Inorganic materials 0.000 claims 13
- 239000010703 silicon Substances 0.000 claims 13
- 238000005530 etching Methods 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 3
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 229920001971 elastomer Polymers 0.000 claims 1
- 239000000806 elastomer Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000000873 masking effect Effects 0.000 claims 1
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| USPCT/US2005/019354 | 2005-06-02 | ||
| PCT/US2005/019354 WO2005122285A2 (en) | 2004-06-04 | 2005-06-02 | Methods and devices for fabricating and assembling printable semiconductor elements |
| US11/145,574 US7622367B1 (en) | 2004-06-04 | 2005-06-02 | Methods and devices for fabricating and assembling printable semiconductor elements |
| US11/145,574 | 2005-06-02 | ||
| US11/145,542 US7557367B2 (en) | 2004-06-04 | 2005-06-02 | Stretchable semiconductor elements and stretchable electrical circuits |
| US11/145,542 | 2005-06-02 | ||
| PCT/US2006/021161 WO2006130721A2 (en) | 2005-06-02 | 2006-06-01 | Printable semiconductor structures and related methods of making and assembling |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012246602A Division JP5734261B2 (ja) | 2005-06-02 | 2012-11-08 | 印刷可能な半導体構造、並びに関連する製造方法及び組立方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009508322A JP2009508322A (ja) | 2009-02-26 |
| JP2009508322A5 true JP2009508322A5 (enExample) | 2012-05-10 |
| JP5164833B2 JP5164833B2 (ja) | 2013-03-21 |
Family
ID=37787994
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008514820A Active JP5164833B2 (ja) | 2005-06-02 | 2006-06-01 | 印刷可能な半導体構造の製造方法 |
| JP2006154975A Active JP5297581B2 (ja) | 2005-06-02 | 2006-06-02 | エラストマースタンプへの接着の動的コントロールによるパターン転送印刷 |
| JP2012246602A Active JP5734261B2 (ja) | 2005-06-02 | 2012-11-08 | 印刷可能な半導体構造、並びに関連する製造方法及び組立方法 |
| JP2013095896A Active JP5701331B2 (ja) | 2005-06-02 | 2013-04-30 | エラストマースタンプへの接着の動的コントロールによるパターン転送印刷 |
| JP2014177486A Active JP6002725B2 (ja) | 2005-06-02 | 2014-09-01 | 印刷可能な半導体構造、並びに関連する製造方法及び組立方法 |
Family Applications After (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006154975A Active JP5297581B2 (ja) | 2005-06-02 | 2006-06-02 | エラストマースタンプへの接着の動的コントロールによるパターン転送印刷 |
| JP2012246602A Active JP5734261B2 (ja) | 2005-06-02 | 2012-11-08 | 印刷可能な半導体構造、並びに関連する製造方法及び組立方法 |
| JP2013095896A Active JP5701331B2 (ja) | 2005-06-02 | 2013-04-30 | エラストマースタンプへの接着の動的コントロールによるパターン転送印刷 |
| JP2014177486A Active JP6002725B2 (ja) | 2005-06-02 | 2014-09-01 | 印刷可能な半導体構造、並びに関連する製造方法及び組立方法 |
Country Status (3)
| Country | Link |
|---|---|
| EP (2) | EP4040474B1 (enExample) |
| JP (5) | JP5164833B2 (enExample) |
| KR (2) | KR101269566B1 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2925221B1 (fr) * | 2007-12-17 | 2010-02-19 | Commissariat Energie Atomique | Procede de transfert d'une couche mince |
| WO2009111641A1 (en) * | 2008-03-05 | 2009-09-11 | The Board Of Trustees Of The University Of Illinois | Stretchable and foldable electronic devices |
| KR101004849B1 (ko) | 2008-09-02 | 2010-12-28 | 삼성전기주식회사 | 박막소자 제조방법 |
| KR101077789B1 (ko) | 2009-08-07 | 2011-10-28 | 한국과학기술원 | Led 디스플레이 제조 방법 및 이에 의하여 제조된 led 디스플레이 |
| KR101113692B1 (ko) | 2009-09-17 | 2012-02-27 | 한국과학기술원 | 태양전지 제조방법 및 이에 의하여 제조된 태양전지 |
| KR101221871B1 (ko) | 2009-12-07 | 2013-01-15 | 한국전자통신연구원 | 반도체 소자의 제조방법 |
| US9442285B2 (en) * | 2011-01-14 | 2016-09-13 | The Board Of Trustees Of The University Of Illinois | Optical component array having adjustable curvature |
| KR20250133999A (ko) | 2012-12-28 | 2025-09-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
| JP6124051B2 (ja) * | 2013-02-01 | 2017-05-10 | 国立大学法人九州工業大学 | 細胞培養シート、およびその製造方法、並びにこれを用いた細胞培養容器 |
| JP6078920B2 (ja) | 2013-02-13 | 2017-02-15 | 国立大学法人広島大学 | 薄膜形成方法、及びそれを用いて作製した半導体基板ならびに電子デバイス |
| US10002700B2 (en) | 2013-02-27 | 2018-06-19 | Qualcomm Incorporated | Vertical-coupling transformer with an air-gap structure |
| US9634645B2 (en) * | 2013-03-14 | 2017-04-25 | Qualcomm Incorporated | Integration of a replica circuit and a transformer above a dielectric substrate |
| DE102013006624B3 (de) * | 2013-04-18 | 2014-05-28 | Forschungszentrum Jülich GmbH | Hochfrequenzleiter mit verbesserter Leitfähigkeit und Verfahren seiner Herstellung |
| US9449753B2 (en) | 2013-08-30 | 2016-09-20 | Qualcomm Incorporated | Varying thickness inductor |
| TWI660520B (zh) * | 2014-01-15 | 2019-05-21 | 美國密西根州立大學 | 經由印刷方法整合磊晶剝離太陽能電池與小型拋物線集光器陣列 |
| US9906318B2 (en) | 2014-04-18 | 2018-02-27 | Qualcomm Incorporated | Frequency multiplexer |
| US11472171B2 (en) * | 2014-07-20 | 2022-10-18 | X Display Company Technology Limited | Apparatus and methods for micro-transfer-printing |
| US10522389B2 (en) | 2014-10-28 | 2019-12-31 | Analog Devices, Inc. | Transfer printing method |
| US10748793B1 (en) | 2019-02-13 | 2020-08-18 | X Display Company Technology Limited | Printing component arrays with different orientations |
| TWI728364B (zh) | 2019-05-21 | 2021-05-21 | 國立陽明交通大學 | 氮化鎵異質整合於矽基板之半導體結構及其製造方法 |
| US11062936B1 (en) | 2019-12-19 | 2021-07-13 | X Display Company Technology Limited | Transfer stamps with multiple separate pedestals |
| KR102300920B1 (ko) * | 2020-11-09 | 2021-09-13 | 한국과학기술원 | InP 기판을 이용한 소자 제조 방법 |
| WO2024209537A1 (ja) * | 2023-04-04 | 2024-10-10 | 日本電信電話株式会社 | 転写スタンプ |
| CN120050969B (zh) * | 2025-02-25 | 2025-11-14 | 上海新微半导体有限公司 | 锑化物hemt结构、外延结构及其制备方法 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US678752A (en) * | 1901-03-18 | 1901-07-16 | Hugh P Mcardle | Automatic means for throwing switches. |
| JPS59232437A (ja) * | 1983-06-15 | 1984-12-27 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
| US4766670A (en) | 1987-02-02 | 1988-08-30 | International Business Machines Corporation | Full panel electronic packaging structure and method of making same |
| JPH03110855A (ja) * | 1989-09-26 | 1991-05-10 | Nissan Motor Co Ltd | 半導体装置の製造方法 |
| US5376561A (en) * | 1990-12-31 | 1994-12-27 | Kopin Corporation | High density electronic circuit modules |
| EP0784542B1 (en) * | 1995-08-04 | 2001-11-28 | International Business Machines Corporation | Stamp for a lithographic process |
| JP3761269B2 (ja) * | 1996-12-27 | 2006-03-29 | シチズン時計株式会社 | 液晶表示装置の製造方法 |
| FR2781925B1 (fr) * | 1998-07-30 | 2001-11-23 | Commissariat Energie Atomique | Transfert selectif d'elements d'un support vers un autre support |
| US6787052B1 (en) * | 2000-06-19 | 2004-09-07 | Vladimir Vaganov | Method for fabricating microstructures with deep anisotropic etching of thick silicon wafers |
| JP4538951B2 (ja) * | 2000-12-15 | 2010-09-08 | ソニー株式会社 | 素子の選択転写方法、画像表示装置の製造方法及び液晶表示装置の製造方法 |
| TW574753B (en) * | 2001-04-13 | 2004-02-01 | Sony Corp | Manufacturing method of thin film apparatus and semiconductor device |
| JP4524561B2 (ja) * | 2001-07-24 | 2010-08-18 | セイコーエプソン株式会社 | 転写方法 |
| JP2003197881A (ja) * | 2001-12-27 | 2003-07-11 | Seiko Epson Corp | 半導体集積回路、半導体集積回路の製造方法、半導体素子部材、電気光学装置、電子機器 |
| JP4757469B2 (ja) * | 2002-05-17 | 2011-08-24 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US6805809B2 (en) * | 2002-08-28 | 2004-10-19 | Board Of Trustees Of University Of Illinois | Decal transfer microfabrication |
| JP4378672B2 (ja) * | 2002-09-03 | 2009-12-09 | セイコーエプソン株式会社 | 回路基板の製造方法 |
| JP4042608B2 (ja) * | 2003-04-01 | 2008-02-06 | セイコーエプソン株式会社 | トランジスタ及び電子機器 |
| US7078298B2 (en) * | 2003-05-20 | 2006-07-18 | Sharp Laboratories Of America, Inc. | Silicon-on-nothing fabrication process |
| JP4341296B2 (ja) * | 2003-05-21 | 2009-10-07 | 富士ゼロックス株式会社 | フォトニック結晶3次元構造体の製造方法 |
| JP4877870B2 (ja) * | 2004-01-30 | 2012-02-15 | 株式会社半導体エネルギー研究所 | 半導体装置の製造方法 |
| US11394720B2 (en) | 2019-12-30 | 2022-07-19 | Itron, Inc. | Time synchronization using trust aggregation |
-
2006
- 2006-06-01 KR KR1020087000080A patent/KR101269566B1/ko active Active
- 2006-06-01 EP EP22164385.1A patent/EP4040474B1/en active Active
- 2006-06-01 JP JP2008514820A patent/JP5164833B2/ja active Active
- 2006-06-01 EP EP15163216.3A patent/EP2937896B1/en active Active
- 2006-06-01 KR KR1020127032629A patent/KR101308548B1/ko active Active
- 2006-06-02 JP JP2006154975A patent/JP5297581B2/ja active Active
-
2012
- 2012-11-08 JP JP2012246602A patent/JP5734261B2/ja active Active
-
2013
- 2013-04-30 JP JP2013095896A patent/JP5701331B2/ja active Active
-
2014
- 2014-09-01 JP JP2014177486A patent/JP6002725B2/ja active Active
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