JP5701331B2 - エラストマースタンプへの接着の動的コントロールによるパターン転送印刷 - Google Patents
エラストマースタンプへの接着の動的コントロールによるパターン転送印刷 Download PDFInfo
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- JP5701331B2 JP5701331B2 JP2013095896A JP2013095896A JP5701331B2 JP 5701331 B2 JP5701331 B2 JP 5701331B2 JP 2013095896 A JP2013095896 A JP 2013095896A JP 2013095896 A JP2013095896 A JP 2013095896A JP 5701331 B2 JP5701331 B2 JP 5701331B2
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Description
E=(stress)/(strain)=[(L0/ΔL)×(F/A)] (II)
ここで、Eはヤング率、L0は平衡長さ、ΔLは印加されたストレス下での長さ変化、Fは印加された力、Aは力が印加される面積である。一実施形態において、ヤング率はストレスによって変化する。ヤング率はまた、Lame定数の点から以下の式によって表されることが可能である:
E=μ(3λ+2μ)/(λ+μ) (III)
Waals相互作用によって通常支配される一般的な接着力によって駆動されるコンフォーマル接触をもたらす。部材40と転送表面15間の接着はエラストマーの粘弾性作用ゆえに速度感応性(つまり動的コントロール可能)であり、かなり速い分離速度(通常は、本明細書に提示されているシステムについては約10cm/s以上の速さ)でドナー基板20から転送デバイス10を分離することは、転送デバイス10の表面15に部材40を優先的に接着させ、ドナー基板表面25から持ち上げるのに十分な接着力をもたらす(図1B)。これらの部材40によって「インク付け」された転送デバイス10は受取り(デバイス)基板30に接触させられる(図1C)。かなり遅い分離速度(約1mm/s以下の速さ)で転送デバイス10を除去することによって部材40は、受取り基板表面35に優先的に接着し、かつ転送表面15から分離する(図1D)。転送は、平坦なスタンプによって、または幾つかのセットのオブジェクトのみに接触し、かつこれらをドナー基板から転送する構造要素によって均一に実施可能である。図1に図示された実施形態は(表面にストレスが加えられていない場合の)平坦な表面を描いている。しかしながら、以下に論じられるように、転送表面15、ドナー表面25および受取り表面35のいずれかは湾曲されてもよい(図20D参照)。
[0108]GPDMS=G0[1+φ(v)]
[0109]ここでφはvの増加関数であり、G0は定数である。
[0113]本発明は、ドナー基板表面から受取り基板表面に複数の構造を転送印刷する方法を包含している。例えば、図4は、単一のエラストマースタンプによるI形状のシリコンミクロ構造(挿絵参照)によって印刷された30mm×30mmGaAsウェーハを示している。単一のステップにおいて、インク付きエラストマースタンプは周囲条件におけるパターンを100mmGaAsウェーハ上に直接印刷する。このアレイは約24,000個のミクロ構造を含有しており、ミクロ加工、ピックアップおよび印刷を含むプロセス全体の歩留まりは(アレイから欠落している100個未満のミクロ構造に対応する)99.5%よりも大きい。受取り基板の表面上の粒子は通常最も重大な欠陥要因である。受取り基板の慎重な処理および取り扱いを含めて慎重にすれば、印刷効率は100%に近づくことが可能である。
[0119]高速剥離速度での部材からスタンプへの強力接着は、実施例1に図示されているオブジェクトクラスの確実な高歩留まり印刷を達成するには必須である。この接着は、全長に沿ってドナー基板にイオン結合されている材料構造を実際に除去するにはかなり強力でありうる。図11は、一例として、パターンリボンをバルク雲母のドナー基板から開裂するためにかなりの高速剥離速度で雲母と接触しているスタンプを除去することによって印刷された薄い高品質白雲母(グレードV−1雲母)のパターンを示している。PDMSスタンプはまた、パターニングされていないグレードV−1雲母や黒鉛(図12)からシートを開裂し、SiO2に接着されている雲母シートを持ち上げることができ、このことはスタンプ・ミクロ構造インタフェースが、高速剥離速度で、少なくとも6J/m2の強度でドナー基板に接着されている構造を除去するほど強力であることを示す。高速剥離速度で存在する大きな接着力は最小レベルの低速に削減される。
[0120]本明細書に開示されている転送デバイスは、例えば、シリカミクロスフィア(図13)および花粉の粒(図14)などの極めて非平面的かつ球状の構造をピックアップおよび解放することができ、これらは硬質の受取り基板に対する非常に小さい接触面積を有する。
[0121]本明細書に開示されている転送印刷プロセスは確立されたテクノロジーにおいて多数の用途を有しており、この例外的な機能は他のデバイスのチャンスを作成する。このような機能の1つを例示するために、シリコン構造およびフォトダイオードがレンズの湾曲表面上に印刷される。円筒形基板を回転させることによって、あるいは丸い基板を平坦かつ柔らかいスタンプに押圧することによって、非平面印刷は進行する。図15は、円筒形ガラスレンズ上に印刷されたシリコンミクロ構造アレイを示している。図16は、低コストの丸いポリカーボネートレンズ上に印刷されたシリコンミクロ構造アレイを示している。図17は、通常のデバイスの電流・電圧特徴を具備するガラスレンズ上に印刷された完全に機能的な単結晶シリコンフォトダイオードを図示している(図18)。このような非平面的なミクロ加工は、湾曲集光または結像光学での光検出およびエネルギー生成を含む用途で貴重である。
[0129]本発明の別の態様は、層を転送するために、本発明のエラストマーおよび/または粘弾性の転送デバイスを使用しており、転送された層の深さつまり厚さは動的コントロール可能である(図28)。概して、分離速度が速いほど、転送層の厚さは厚くなる。したがって、分離速度をコントロールすることによって、転送層の厚さつまり深さはコントロールされる。
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Claims (14)
- 印刷可能な半導体要素をドナー基板表面からエラストマー転送デバイスの転送表面に転送するための方法であって、
前記転送表面を有するエラストマー転送デバイスを提供するステップと、
ドナー表面を有するドナー基板を提供するステップであって、前記ドナー表面が前記印刷可能な半導体要素を有するステップと、
前記転送表面の少なくとも一部を前記印刷可能な半導体要素の少なくとも一部に接触させるステップと、
前記印刷可能な半導体要素の少なくとも一部が前記ドナー表面から前記転送表面に転送されるように、1cm秒−1以上の剥離速度で前記転送表面を前記ドナー表面から分離するステップであって、前記剥離速度は、前記転送表面と前記印刷可能な半導体要素との間の接触エリアにおける非均一な分離力によってもたらされる、ステップと、
を備える方法。 - 前記印刷可能な半導体要素が1つ以上のブリッジ要素を介して前記ドナー基板に接続されており、前記剥離速度が前記ブリッジ要素の破砕をもたらすほど速いため、前記ドナー表面からの前記印刷可能な半導体要素の解放をもたらす、請求項1に記載の方法。
- 印刷可能な半導体要素のパターンは、前記ドナー表面から前記転送表面に転送される、請求項1に記載の方法。
- 前記エラストマー転送デバイスは、エラストマー転送スタンプ、又は、複合多層転送デバイスを備える、請求項1に記載の方法。
- 前記エラストマー転送デバイスは、ポリ( ジメチルシロキサン)層を備える、請求項1に記載の方法。
- 前記剥離速度は、10cm/秒以上である、請求項1に記載の方法。
- 前記分離するステップは、前記転送表面と前記ドナー表面の垂直分離によって実行される、請求項1に記載の方法。
- 印刷可能な半導体要素のアレイをドナー基板表面からエラストマー転送デバイスの転送表面に転送するための方法であって、
前記転送表面を有するエラストマー転送デバイスを提供するステップと、
ドナー表面を有するドナー基板を提供するステップであって、前記ドナー表面が前記印刷可能な半導体要素のアレイを有するステップと、
前記転送表面の少なくとも一部を前記印刷可能な半導体要素のアレイの少なくとも一部に接触させるステップと、
前記印刷可能な半導体要素のアレイの少なくとも一部が前記ドナー表面から前記転送表面に転送されるように、1cm秒−1以上の剥離速度で前記転送表面を前記ドナー表面から分離するステップであって、前記剥離速度は、前記転送表面と前記印刷可能な半導体要素との間の接触エリアにおける非均一な分離力によってもたらされる、ステップと、
を備える方法。 - 前記剥離速度は、10cm/秒以上である、請求項8に記載の方法。
- 前記印刷可能な半導体要素のアレイは、ミクロ構造、ナノ構造、又は、ミクロ構造とナノ構造の両方を備える、請求項8に記載の方法。
- 前記転送表面と接触している前記印刷可能な半導体要素のアレイの少なくとも95%が、前記ドナー表面から前記転送表面に転送される、請求項8に記載の方法。
- 前記分離するステップでは、前記印刷可能な半導体要素のアレイの前記少なくとも一部が前記ドナー表面から前記転送表面に転送されるように、前記印刷可能な半導体要素のアレイとマザーウェーハとを接続するアンカーが破壊される、請求項8に記載の方法。
- 前記印刷可能な半導体要素は、完全または部分的に前記ドナー表面からアンダーカットされている、請求項12に記載の方法。
- 前記印刷可能な半導体要素は、完全または部分的に前記ドナー表面からアンダーカットされている、請求項2に記載の方法。
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JP2007027693A (ja) | 2007-02-01 |
JP5297581B2 (ja) | 2013-09-25 |
EP2937896B1 (en) | 2022-05-04 |
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JP5734261B2 (ja) | 2015-06-17 |
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JP2013080934A (ja) | 2013-05-02 |
EP4040474A1 (en) | 2022-08-10 |
EP2937896A1 (en) | 2015-10-28 |
KR101269566B1 (ko) | 2013-06-07 |
KR20080015921A (ko) | 2008-02-20 |
KR20130006712A (ko) | 2013-01-17 |
KR101308548B1 (ko) | 2013-09-23 |
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JP5164833B2 (ja) | 2013-03-21 |
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