JP2009503817A5 - - Google Patents

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Publication number
JP2009503817A5
JP2009503817A5 JP2008522827A JP2008522827A JP2009503817A5 JP 2009503817 A5 JP2009503817 A5 JP 2009503817A5 JP 2008522827 A JP2008522827 A JP 2008522827A JP 2008522827 A JP2008522827 A JP 2008522827A JP 2009503817 A5 JP2009503817 A5 JP 2009503817A5
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JP
Japan
Prior art keywords
metal region
work function
thickness
metal
field effect
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JP2008522827A
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English (en)
Japanese (ja)
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JP2009503817A (ja
JP5743377B2 (ja
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Priority claimed from US11/185,180 external-priority patent/US7317229B2/en
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Publication of JP2009503817A publication Critical patent/JP2009503817A/ja
Publication of JP2009503817A5 publication Critical patent/JP2009503817A5/ja
Application granted granted Critical
Publication of JP5743377B2 publication Critical patent/JP5743377B2/ja
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JP2008522827A 2005-07-20 2006-07-12 ゲート電極構造及び製造方法 Active JP5743377B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/185,180 US7317229B2 (en) 2005-07-20 2005-07-20 Gate electrode structures and methods of manufacture
US11/185,180 2005-07-20
PCT/US2006/027165 WO2007018944A2 (en) 2005-07-20 2006-07-12 Gate electrode structures and methods of manufacture

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013253258A Division JP5754715B2 (ja) 2005-07-20 2013-12-06 ゲート電極構造及び製造方法

Publications (3)

Publication Number Publication Date
JP2009503817A JP2009503817A (ja) 2009-01-29
JP2009503817A5 true JP2009503817A5 (enExample) 2009-07-23
JP5743377B2 JP5743377B2 (ja) 2015-07-01

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Family Applications (2)

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JP2008522827A Active JP5743377B2 (ja) 2005-07-20 2006-07-12 ゲート電極構造及び製造方法
JP2013253258A Active JP5754715B2 (ja) 2005-07-20 2013-12-06 ゲート電極構造及び製造方法

Family Applications After (1)

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JP2013253258A Active JP5754715B2 (ja) 2005-07-20 2013-12-06 ゲート電極構造及び製造方法

Country Status (6)

Country Link
US (2) US7317229B2 (enExample)
EP (1) EP1905095A4 (enExample)
JP (2) JP5743377B2 (enExample)
KR (1) KR101001083B1 (enExample)
TW (1) TWI361488B (enExample)
WO (1) WO2007018944A2 (enExample)

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