JP2009502533A5 - - Google Patents
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- Publication number
- JP2009502533A5 JP2009502533A5 JP2008523966A JP2008523966A JP2009502533A5 JP 2009502533 A5 JP2009502533 A5 JP 2009502533A5 JP 2008523966 A JP2008523966 A JP 2008523966A JP 2008523966 A JP2008523966 A JP 2008523966A JP 2009502533 A5 JP2009502533 A5 JP 2009502533A5
- Authority
- JP
- Japan
- Prior art keywords
- hardness
- abrasive
- particles
- conditioning
- composite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/191,722 US7169031B1 (en) | 2005-07-28 | 2005-07-28 | Self-contained conditioning abrasive article |
| PCT/US2006/028064 WO2007015911A1 (en) | 2005-07-28 | 2006-07-19 | Self-contained conditioning abrasive article |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009502533A JP2009502533A (ja) | 2009-01-29 |
| JP2009502533A5 true JP2009502533A5 (enExample) | 2009-09-03 |
Family
ID=37402642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008523966A Pending JP2009502533A (ja) | 2005-07-28 | 2006-07-19 | 自蔵型コンディショニング研磨物品 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7169031B1 (enExample) |
| EP (1) | EP1910026B1 (enExample) |
| JP (1) | JP2009502533A (enExample) |
| KR (1) | KR101299266B1 (enExample) |
| CN (1) | CN101232968B (enExample) |
| DE (1) | DE602006007857D1 (enExample) |
| TW (1) | TWI399260B (enExample) |
| WO (1) | WO2007015911A1 (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7494519B2 (en) * | 2005-07-28 | 2009-02-24 | 3M Innovative Properties Company | Abrasive agglomerate polishing method |
| US7594845B2 (en) * | 2005-10-20 | 2009-09-29 | 3M Innovative Properties Company | Abrasive article and method of modifying the surface of a workpiece |
| US7573073B2 (en) * | 2005-11-22 | 2009-08-11 | 3M Innovative Properties Company | Arrays of light emitting articles and method of manufacturing same |
| US20070128991A1 (en) * | 2005-12-07 | 2007-06-07 | Yoon Il-Young | Fixed abrasive polishing pad, method of preparing the same, and chemical mechanical polishing apparatus including the same |
| US20080098659A1 (en) * | 2006-10-26 | 2008-05-01 | Chien-Min Sung | Methods for securing individual abrasive particles to a substrate in a predetermined pattern |
| KR20090089431A (ko) * | 2006-11-17 | 2009-08-21 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | Led 광원용 광학 접합 조성물 |
| US20100051970A1 (en) * | 2006-11-17 | 2010-03-04 | Ouderkirk Andrew J | Planarized led with optical extractor |
| CN101548398A (zh) * | 2006-11-20 | 2009-09-30 | 3M创新有限公司 | 用于led光源的光学粘合组合物 |
| JP4561732B2 (ja) * | 2006-11-20 | 2010-10-13 | トヨタ自動車株式会社 | 移動体位置測位装置 |
| US8323072B1 (en) | 2007-03-21 | 2012-12-04 | 3M Innovative Properties Company | Method of polishing transparent armor |
| US8038750B2 (en) | 2007-07-13 | 2011-10-18 | 3M Innovative Properties Company | Structured abrasive with overlayer, and method of making and using the same |
| KR101604505B1 (ko) * | 2008-07-03 | 2016-03-17 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 고정 연마 입자 및 그로부터 제조된 물품 |
| EP2419243A1 (en) * | 2009-04-17 | 2012-02-22 | 3M Innovative Properties Company | Metal particle transfer article, metal modified substrate, and method of making and using the same |
| US8603350B2 (en) * | 2009-07-17 | 2013-12-10 | Ohara Inc. | Method of manufacturing substrate for information storage media |
| WO2013003816A2 (en) * | 2011-06-30 | 2013-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | A method of polishing a workpiece with an abrasive segment comprising abrasive aggregates having silicon carbide particles |
| US20130065490A1 (en) | 2011-09-12 | 2013-03-14 | 3M Innovative Properties Company | Method of refurbishing vinyl composition tile |
| CN102490111B (zh) * | 2011-11-24 | 2014-06-11 | 上海华力微电子有限公司 | 一种固定磨料化学机械研磨装置 |
| US9050697B2 (en) * | 2012-03-20 | 2015-06-09 | Jh Rhodes Company, Inc. | Self-conditioning polishing pad and a method of making the same |
| JP6016301B2 (ja) | 2013-02-13 | 2016-10-26 | 昭和電工株式会社 | 単結晶SiC基板の表面加工方法、その製造方法及び単結晶SiC基板の表面加工用研削プレート |
| US9633831B2 (en) * | 2013-08-26 | 2017-04-25 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing composition for polishing a sapphire surface and methods of using same |
| JP5954293B2 (ja) * | 2013-10-17 | 2016-07-20 | 信越半導体株式会社 | 研磨用の発泡ウレタンパッドのドレッシング装置 |
| WO2015088953A1 (en) * | 2013-12-09 | 2015-06-18 | 3M Innovative Properties Company | Conglomerate abrasive particles, abrasive articles including the same, and methods of making the same |
| EP2928275A1 (en) * | 2014-04-04 | 2015-10-07 | ABB Technology Ltd | Arrangement for cooling components of a subsea electric system |
| JP6838811B2 (ja) | 2014-05-02 | 2021-03-03 | スリーエム イノベイティブ プロパティズ カンパニー | 断続的構造化研磨物品並びに被加工物の研磨方法 |
| CN103962973A (zh) * | 2014-05-08 | 2014-08-06 | 武汉法山磨料磨具有限公司 | 一种含羧甲基纤维素钠的树脂砂轮的制作方法 |
| US10086500B2 (en) | 2014-12-18 | 2018-10-02 | Applied Materials, Inc. | Method of manufacturing a UV curable CMP polishing pad |
| US10195713B2 (en) | 2016-08-11 | 2019-02-05 | 3M Innovative Properties Company | Lapping pads and systems and methods of making and using the same |
| US10654146B2 (en) * | 2018-01-23 | 2020-05-19 | Seagate Technology Llc | One or more charging members used in the manufacture of a lapping plate, and related apparatuses and methods of making |
| CN109894930B (zh) * | 2019-03-22 | 2021-06-25 | 湖南科技大学 | 一种缓释型柔性磨具及抛光方法 |
| CN111300224B (zh) * | 2020-04-10 | 2021-05-21 | 昆山顺天金属制品有限公司 | 一种磨料精选的精加工打磨机 |
| CN118927171A (zh) * | 2024-09-19 | 2024-11-12 | 郑州磨料磨具磨削研究所有限公司 | 一种研抛一体化复合磨具及其制备方法和应用 |
Family Cites Families (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US100246A (en) * | 1870-03-01 | 1870-03-01 | Liam e | |
| US4311489A (en) * | 1978-08-04 | 1982-01-19 | Norton Company | Coated abrasive having brittle agglomerates of abrasive grain |
| US4652275A (en) * | 1985-08-07 | 1987-03-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
| US4799939A (en) * | 1987-02-26 | 1989-01-24 | Minnesota Mining And Manufacturing Company | Erodable agglomerates and abrasive products containing the same |
| JPS63274782A (ja) | 1987-05-02 | 1988-11-11 | Mishima Kosan Co Ltd | ステンレス鋼のラッピング液 |
| JPH01183370A (ja) * | 1988-01-11 | 1989-07-21 | Noritake Dia Kk | 複合ボンドダイヤモンド砥石とその製造法 |
| US5078753A (en) * | 1990-10-09 | 1992-01-07 | Minnesota Mining And Manufacturing Company | Coated abrasive containing erodable agglomerates |
| JPH04250983A (ja) * | 1990-11-01 | 1992-09-07 | Noritake Co Ltd | 研削用複合砥石 |
| US5152917B1 (en) * | 1991-02-06 | 1998-01-13 | Minnesota Mining & Mfg | Structured abrasive article |
| US5437754A (en) * | 1992-01-13 | 1995-08-01 | Minnesota Mining And Manufacturing Company | Abrasive article having precise lateral spacing between abrasive composite members |
| JPH0615572A (ja) * | 1992-07-01 | 1994-01-25 | Matsushita Electric Ind Co Ltd | 研削砥石 |
| MY114512A (en) * | 1992-08-19 | 2002-11-30 | Rodel Inc | Polymeric substrate with polymeric microelements |
| US5435816A (en) * | 1993-01-14 | 1995-07-25 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article |
| CH686787A5 (de) * | 1993-10-15 | 1996-06-28 | Diametal Ag | Schleifbelag fuer Schleifwerkzeuge und Verfahren zur Herstellung des Schleifbelages. |
| US5632668A (en) * | 1993-10-29 | 1997-05-27 | Minnesota Mining And Manufacturing Company | Method for the polishing and finishing of optical lenses |
| US5454844A (en) * | 1993-10-29 | 1995-10-03 | Minnesota Mining And Manufacturing Company | Abrasive article, a process of making same, and a method of using same to finish a workpiece surface |
| WO1995020469A1 (en) * | 1994-01-28 | 1995-08-03 | Minnesota Mining And Manufacturing Company | Coated abrasive containing erodible agglomerates |
| US5562745A (en) * | 1994-03-16 | 1996-10-08 | Minnesota Mining And Manufacturing Company | Abrasive articles, methods of making abrasive articles, and methods of using abrasive articles |
| BR9509116A (pt) * | 1994-09-30 | 1997-11-18 | Minnesota Mining & Mfg | Artigo abrasivo revestido processos para produzir o mesmo e processo para desbastar uma peça dura |
| US5958794A (en) * | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
| US5702811A (en) * | 1995-10-20 | 1997-12-30 | Ho; Kwok-Lun | High performance abrasive articles containing abrasive grains and nonabrasive composite grains |
| US6595831B1 (en) * | 1996-05-16 | 2003-07-22 | Ebara Corporation | Method for polishing workpieces using fixed abrasives |
| JPH09314457A (ja) * | 1996-05-29 | 1997-12-09 | Speedfam Co Ltd | ドレッサ付き片面研磨装置 |
| JP3709044B2 (ja) * | 1996-10-17 | 2005-10-19 | 昭和電工株式会社 | ガラス研磨用研磨材組成物およびその製造方法 |
| JPH10156704A (ja) * | 1996-12-03 | 1998-06-16 | Toshiba Mach Co Ltd | 研磨方法およびその装置 |
| US5938506A (en) * | 1997-06-03 | 1999-08-17 | Speedfam-Ipec Corporation | Methods and apparatus for conditioning grinding stones |
| US6126523A (en) * | 1997-09-08 | 2000-10-03 | The Institute Of Physical And Chemical Research | Optical dressing method, machining device based on this method, grindstone and polishing cloth |
| US6183346B1 (en) * | 1998-08-05 | 2001-02-06 | 3M Innovative Properties Company | Abrasive article with embossed isolation layer and methods of making and using |
| JP4049510B2 (ja) | 1999-03-24 | 2008-02-20 | 株式会社オハラ | 情報記憶媒体用ガラス基板材またはガラスセラミックス基板材の加工方法 |
| US20020077037A1 (en) * | 1999-05-03 | 2002-06-20 | Tietz James V. | Fixed abrasive articles |
| JP4030247B2 (ja) * | 1999-05-17 | 2008-01-09 | 株式会社荏原製作所 | ドレッシング装置及びポリッシング装置 |
| US6319108B1 (en) * | 1999-07-09 | 2001-11-20 | 3M Innovative Properties Company | Metal bond abrasive article comprising porous ceramic abrasive composites and method of using same to abrade a workpiece |
| US6602117B1 (en) * | 2000-08-30 | 2003-08-05 | Micron Technology, Inc. | Slurry for use with fixed-abrasive polishing pads in polishing semiconductor device conductive structures that include copper and tungsten and polishing methods |
| US6551366B1 (en) * | 2000-11-10 | 2003-04-22 | 3M Innovative Properties Company | Spray drying methods of making agglomerate abrasive grains and abrasive articles |
| US6645624B2 (en) * | 2000-11-10 | 2003-11-11 | 3M Innovative Properties Company | Composite abrasive particles and method of manufacture |
| US20030100246A1 (en) | 2001-02-20 | 2003-05-29 | Kazuto Hirokawa | Polishing apparatus and dressing method |
| US6485355B1 (en) * | 2001-06-22 | 2002-11-26 | International Business Machines Corporation | Method to increase removal rate of oxide using fixed-abrasive |
| CN100360447C (zh) * | 2001-08-02 | 2008-01-09 | 3M创新有限公司 | 玻璃陶瓷 |
| JP2003251560A (ja) * | 2002-02-28 | 2003-09-09 | Sanwa Kenma Kogyo Kk | ドレッシング用成形体およびその製造方法 |
| US6910951B2 (en) | 2003-02-24 | 2005-06-28 | Dow Global Technologies, Inc. | Materials and methods for chemical-mechanical planarization |
| IL156094A0 (en) | 2003-05-25 | 2003-12-23 | J G Systems Inc | Fixed abrasive cmp pad with built-in additives |
| JP4443870B2 (ja) * | 2003-07-07 | 2010-03-31 | 克雄 庄司 | 超砥粒ホイール及びその製造方法 |
| US7160178B2 (en) * | 2003-08-07 | 2007-01-09 | 3M Innovative Properties Company | In situ activation of a three-dimensional fixed abrasive article |
| JP2005271157A (ja) * | 2004-03-25 | 2005-10-06 | Noritake Super Abrasive:Kk | ラップホイール |
-
2005
- 2005-07-28 US US11/191,722 patent/US7169031B1/en not_active Expired - Lifetime
-
2006
- 2006-07-19 CN CN2006800275173A patent/CN101232968B/zh not_active Expired - Fee Related
- 2006-07-19 WO PCT/US2006/028064 patent/WO2007015911A1/en not_active Ceased
- 2006-07-19 DE DE602006007857T patent/DE602006007857D1/de active Active
- 2006-07-19 EP EP06787882A patent/EP1910026B1/en not_active Not-in-force
- 2006-07-19 KR KR1020087002027A patent/KR101299266B1/ko not_active Expired - Fee Related
- 2006-07-19 JP JP2008523966A patent/JP2009502533A/ja active Pending
- 2006-07-27 TW TW095127480A patent/TWI399260B/zh not_active IP Right Cessation
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