JP2009500858A5 - - Google Patents

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JP2009500858A5
JP2009500858A5 JP2008520442A JP2008520442A JP2009500858A5 JP 2009500858 A5 JP2009500858 A5 JP 2009500858A5 JP 2008520442 A JP2008520442 A JP 2008520442A JP 2008520442 A JP2008520442 A JP 2008520442A JP 2009500858 A5 JP2009500858 A5 JP 2009500858A5
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Japan
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chamber
workpiece
digital
charged particle
digital flash
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JP2008520442A
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JP2009500858A (ja
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Priority claimed from PCT/US2006/026725 external-priority patent/WO2007008792A2/en
Publication of JP2009500858A publication Critical patent/JP2009500858A/ja
Publication of JP2009500858A5 publication Critical patent/JP2009500858A5/ja
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JP2008520442A 2005-07-08 2006-07-10 制御された粒子ビームを生成するための装置及び方法 Pending JP2009500858A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69778005P 2005-07-08 2005-07-08
PCT/US2006/026725 WO2007008792A2 (en) 2005-07-08 2006-07-10 Apparatus and method for controlled particle beam manufacturing

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JP2009500858A JP2009500858A (ja) 2009-01-08
JP2009500858A5 true JP2009500858A5 (enExample) 2009-09-03

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JP2008520442A Pending JP2009500858A (ja) 2005-07-08 2006-07-10 制御された粒子ビームを生成するための装置及び方法

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US (10) US7259373B2 (enExample)
EP (1) EP2027594B1 (enExample)
JP (1) JP2009500858A (enExample)
KR (1) KR101359562B1 (enExample)
CN (1) CN101248505B (enExample)
AT (1) ATE537550T1 (enExample)
WO (1) WO2007008792A2 (enExample)

Families Citing this family (169)

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