JP2009295628A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2009295628A JP2009295628A JP2008144915A JP2008144915A JP2009295628A JP 2009295628 A JP2009295628 A JP 2009295628A JP 2008144915 A JP2008144915 A JP 2008144915A JP 2008144915 A JP2008144915 A JP 2008144915A JP 2009295628 A JP2009295628 A JP 2009295628A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 122
- 238000000034 method Methods 0.000 title claims abstract description 43
- 239000003550 marker Substances 0.000 claims abstract description 40
- 238000004519 manufacturing process Methods 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000005530 etching Methods 0.000 claims abstract description 18
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 5
- 229910052710 silicon Inorganic materials 0.000 abstract description 5
- 239000010703 silicon Substances 0.000 abstract description 5
- 238000000206 photolithography Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 21
- 230000007547 defect Effects 0.000 description 8
- 239000002344 surface layer Substances 0.000 description 8
- 239000012535 impurity Substances 0.000 description 5
- 229910021418 black silicon Inorganic materials 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000001698 pyrogenic effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
- H01L2223/5446—Located in scribe lines
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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Abstract
【解決手段】n型シリコン基板21の表面にn型半導体22を形成し、n型半導体22の表面にマスク酸化膜を形成する。次いで、フォトリソグラフィおよびエッチングによってマスク酸化膜を開口し、シリコン基板21に達する第1のトレンチを形成する。同時に、第1のトレンチよりも深い第2のトレンチが形成される。次いで、第1のトレンチをp型半導体27で埋める。同時に、第2のトレンチがp型半導体28で埋められる。次いで、n型半導体22の表面を研磨し平坦化する。ここまでのプロセスで、並列pn構造が形成される。このとき、第2のトレンチの上部はp型半導体28で埋まらずに残り、並列pn構造の表面に窪みが形成される。この窪みが、後の工程において位置合わせマーカとして機能する。
【選択図】図9
Description
22 n型半導体
27 p型半導体(活性部領域)
28 p型半導体(マーカ部領域)
Claims (2)
- 第1導電型半導体の基板の主面に、第1の開口部および前記第1の開口部よりも開口幅の広い第2の開口部を有するマスクを形成するマスク工程と、
前記第1導電型半導体の前記基板の、前記第1の開口部および前記第2の開口部に露出する半導体部分をエッチングして前記第1の開口部に第1のトレンチを形成するとともに、前記第2の開口部に前記第1のトレンチよりも深い第2のトレンチを形成するエッチング工程と、
前記第1のトレンチおよび前記第2のトレンチを第2導電型半導体で埋める埋め込み工程と、
を含み、
前記第2のトレンチの幅は、前記第1のトレンチの幅の1.6倍以上かつ2.5倍以下であり、
前記エッチング工程の後、前記埋め込み工程の前に、前記マスク工程により残された前記マスクを全て除去し、
前記埋め込み工程では、前記第1のトレンチが前記第2導電型半導体で埋まり、かつ前記第2のトレンチの上端部が前記第2導電型半導体で埋まらずに残るように前記第2導電型半導体を成長させることにより、前記第1導電型半導体と前記第2導電型半導体とが交互に繰り返し接合された構造と、デバイス形成時の目印となるマーカを、同時に形成することを特徴とする半導体装置の製造方法。 - 前記第1のトレンチの前記基板平面上のパターンをストライプ形状とし、前記第2のトレンチの前記基板平面上のパターンを矩形状とすることを特徴とする請求項1に記載の半導体装置の製造方法。
Priority Applications (2)
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JP2008144915A JP5509543B2 (ja) | 2008-06-02 | 2008-06-02 | 半導体装置の製造方法 |
US12/476,887 US7964472B2 (en) | 2008-06-02 | 2009-06-02 | Method of producing semiconductor device |
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JP2008144915A JP5509543B2 (ja) | 2008-06-02 | 2008-06-02 | 半導体装置の製造方法 |
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JP2009295628A true JP2009295628A (ja) | 2009-12-17 |
JP5509543B2 JP5509543B2 (ja) | 2014-06-04 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011159917A (ja) * | 2010-02-03 | 2011-08-18 | Denso Corp | 半導体基板の製造方法 |
JP2011165987A (ja) * | 2010-02-11 | 2011-08-25 | Denso Corp | 半導体基板の製造方法 |
JP2015159271A (ja) * | 2014-01-24 | 2015-09-03 | 株式会社デンソー | 半導体装置の製造方法 |
JP2021125478A (ja) * | 2020-01-31 | 2021-08-30 | 株式会社デンソー | 窒化物半導体装置の製造方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5509543B2 (ja) * | 2008-06-02 | 2014-06-04 | 富士電機株式会社 | 半導体装置の製造方法 |
US8519476B2 (en) * | 2009-12-21 | 2013-08-27 | Alpha And Omega Semiconductor Incorporated | Method of forming a self-aligned charge balanced power DMOS |
CN102184859A (zh) * | 2011-04-08 | 2011-09-14 | 上海先进半导体制造股份有限公司 | 冷mos超结结构的制造方法以及冷mos超结结构 |
JP6510280B2 (ja) * | 2015-03-11 | 2019-05-08 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
CN112635659B (zh) * | 2019-10-09 | 2023-03-24 | 中芯国际集成电路制造(上海)有限公司 | 半导体结构及其形成方法 |
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JP2009272324A (ja) * | 2008-04-30 | 2009-11-19 | Fuji Electric Device Technology Co Ltd | 半導体装置の製造方法 |
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-
2008
- 2008-06-02 JP JP2008144915A patent/JP5509543B2/ja active Active
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Patent Citations (5)
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JP2004063894A (ja) * | 2002-07-30 | 2004-02-26 | Fuji Electric Holdings Co Ltd | 半導体基板の製造方法 |
US6767800B1 (en) * | 2003-03-19 | 2004-07-27 | Nanya Technology Corporation | Process for integrating alignment mark and trench device |
US20040232461A1 (en) * | 2003-05-23 | 2004-11-25 | Taiwan Semiconductor Manufacturing Co. | Single poly-si process for dram by deep n well (nw) plate |
JP2006024866A (ja) * | 2004-07-09 | 2006-01-26 | Fuji Electric Holdings Co Ltd | 半導体素子の製造方法 |
JP2009272324A (ja) * | 2008-04-30 | 2009-11-19 | Fuji Electric Device Technology Co Ltd | 半導体装置の製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011159917A (ja) * | 2010-02-03 | 2011-08-18 | Denso Corp | 半導体基板の製造方法 |
JP2011165987A (ja) * | 2010-02-11 | 2011-08-25 | Denso Corp | 半導体基板の製造方法 |
JP2015159271A (ja) * | 2014-01-24 | 2015-09-03 | 株式会社デンソー | 半導体装置の製造方法 |
JP2021125478A (ja) * | 2020-01-31 | 2021-08-30 | 株式会社デンソー | 窒化物半導体装置の製造方法 |
JP7363539B2 (ja) | 2020-01-31 | 2023-10-18 | 株式会社デンソー | 窒化物半導体装置の製造方法 |
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US7964472B2 (en) | 2011-06-21 |
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