JP2009238298A - 垂直磁気記録媒体および垂直磁気記録媒体の製造方法 - Google Patents
垂直磁気記録媒体および垂直磁気記録媒体の製造方法 Download PDFInfo
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/674—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having differing macroscopic or microscopic structures, e.g. differing crystalline lattices, varying atomic structures or differing roughnesses
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- Crystallography & Structural Chemistry (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
【解決手段】本発明にかかる垂直磁気記録媒体100の製造方法は、ディスク基体110上に少なくとも下地層118、第1磁気記録層122a、第2磁気記録層122bをこの順に備える垂直磁気記録媒体100であって、第1磁気記録層122aおよび第2磁気記録層122bは柱状に成長した結晶粒子の間に非磁性物質からなる粒界部を形成したグラニュラー構造の強磁性層であり、第1磁気記録層122a中の結晶粒子の平均粒径をAnm、第2磁気記録層122b中の結晶粒子の平均粒径をBnmとした場合、A<Bであることを特徴としている。
【選択図】 図4
Description
本発明にかかる垂直磁気記録媒体の製造方法の実施形態について説明する。図1は本実施形態にかかる垂直磁気記録媒体100の構成を説明する図である。図1に示す垂直磁気記録媒体100は、基体としてのディスク基体110、付着層112、第1軟磁性層114a、スペーサ層114b、第2軟磁性層114c、前下地層116、第1下地層118a、第2下地層118b、非磁性グラニュラー層120、第1磁気記録層122a、第2磁気記録層122b、連続層124、媒体保護層126、潤滑層128で構成されている。なお第1軟磁性層114a、スペーサ層114b、第2軟磁性層114cは、あわせて軟磁性層114を構成する。第1下地層118aと第2下地層118bはあわせて下地層118を構成する。第1磁気記録層122aと第2磁気記録層122bとはあわせて磁気記録層122を構成する。
ディスク基体110上に、真空引きを行った成膜装置を用いて、DCマグネトロンスパッタリング法にてAr雰囲気中で、付着層112から連続層124まで順次成膜を行った。付着層112は、CrTiとした。軟磁性層114は、第1軟磁性層114a、第2軟磁性層114cの組成はFeCoTaZrとし、スペーサ層114bの組成はRuとした。前下地層116の組成はfcc構造のNiW合金とした。下地層118は、第1下地層118aは低圧Ar下でRuを成膜し、第2下地層118bは高圧Ar下でRuを成膜した。非磁性グラニュラー層120の組成は非磁性のCoCr−SiO2とした。磁気記録層122は下記の実施例および比較例の構成で形成した。連続層124の組成はCoCrPtBとした。媒体保護層126はCVD法によりC2H4およびCNを用いて成膜し、潤滑層128はディップコート法によりPFPEを用いて形成した。
110 …ディスク基体
112 …付着層
114 …軟磁性層
114a …第1軟磁性層
114b …スペーサ層
114c …第2軟磁性層
116 …前下地層
118 …下地層
118a …第1下地層
118b …第2下地層
120 …非磁性グラニュラー層
122 …磁気記録層
122a …第1磁気記録層
122b …第2磁気記録層
124 …連続層
126 …媒体保護層
128 …潤滑層
Claims (7)
- 基体上に少なくとも下地層、第1磁気記録層、第2磁気記録層をこの順に備える垂直磁気記録媒体であって、
第1磁気記録層および第2磁気記録層は柱状に成長した結晶粒子の間に非磁性物質からなる粒界部を形成したグラニュラー構造の強磁性層であり、
前記第1磁気記録層中の前記結晶粒子の平均粒径をAnm、前記第2磁気記録層中の前記結晶粒子の平均粒径をBnmとした場合、A<Bであることを特徴とする垂直磁気記録媒体。 - 前記第1磁気記録層中の前記結晶粒子の平均粒径と、前記第2磁気記録層中の前記結晶粒子の平均粒径との比は、0.8<A/B<1であることを特徴とする請求項1記載の垂直磁気記録媒体。
- 前記第1磁気記録層と第2磁気記録層の総厚が15nm以下であることを特徴とする請求項1または2に記載の垂直磁気記録媒体。
- 前記非磁性物質は、クロム、酸素、または酸化物のいずれか、または複数を含むことを特徴とする請求項1から3のいずれか1項に記載の垂直磁気記録媒体。
- 前記酸化物は、SiO2、TiO2、Cr2O3、Ta2O5、Nb2O5、B2O3またはZrO2の群から選択された、1または複数の酸化物を含むことを特徴とする請求項4に記載の垂直磁気記録媒体。
- 前記第2磁気記録層に含まれる酸化物は、SiO2、TiO2、Cr2O3、Ta2O5、Nb2O5、B2O3またはZrO2の群から選択された、1または複数の酸化物を含むことを特徴とする請求項4に記載の垂直磁気媒体。
- 基体上に少なくとも下地層、第1磁気記録層、及び第2磁気記録層をこの順に備える垂直磁気記録媒体の製造方法であって、
前記第1磁気記録層として組成がクロム、酸素、または酸化物のいずれか、または複数の酸化物を含む磁性ターゲットを用いて、ガス圧を約0.5Pa、電力を約100から約700Wとすることにより、柱状に成長した結晶粒子の間に非磁性の粒界部を形成したグラニュラー構造の強磁性層を形成し、
組成がクロム、酸素、または酸化物のいずれか、または複数の酸化物を含む磁性ターゲットを用いて、ガス圧を約0.5Pa、電力を約100から約1000Wとすることにより、前記第2磁気記録層として柱状に成長した結晶粒子の間に非磁性の粒界部を形成したグラニュラー構造の強磁性層を形成することにより、
前記第1磁気記録層中の前記結晶粒子の平均粒径をAnm、前記第2磁気記録層中の前記結晶粒子の平均粒径をBnmとした場合、A<Bとすることを特徴とする垂直磁気記録媒体の製造方法。
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JP2008082250A JP2009238298A (ja) | 2008-03-26 | 2008-03-26 | 垂直磁気記録媒体および垂直磁気記録媒体の製造方法 |
PCT/JP2009/056050 WO2009119708A1 (ja) | 2008-03-26 | 2009-03-26 | 垂直磁気記録媒体および垂直磁気記録媒体の製造方法 |
US12/934,935 US8580410B2 (en) | 2008-03-26 | 2009-03-26 | Perpendicular magnetic recording medium and process for manufacture thereof |
US14/051,414 US9183869B2 (en) | 2008-03-26 | 2013-10-10 | Perpendicular magnetic recording medium and method of manufacturing perpendicular magnetic recording medium |
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US10100398B2 (en) | 2010-03-30 | 2018-10-16 | Kabushiki Kaisha Toshiba | Magnetic recording medium, method of manufacturing the same, and magnetic recording/reproduction apparatus |
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US9183869B2 (en) | 2015-11-10 |
US20140044992A1 (en) | 2014-02-13 |
US20110097600A1 (en) | 2011-04-28 |
US8580410B2 (en) | 2013-11-12 |
WO2009119708A1 (ja) | 2009-10-01 |
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