JP2009229410A - 電気試験用接触子及びその製造方法 - Google Patents

電気試験用接触子及びその製造方法 Download PDF

Info

Publication number
JP2009229410A
JP2009229410A JP2008078560A JP2008078560A JP2009229410A JP 2009229410 A JP2009229410 A JP 2009229410A JP 2008078560 A JP2008078560 A JP 2008078560A JP 2008078560 A JP2008078560 A JP 2008078560A JP 2009229410 A JP2009229410 A JP 2009229410A
Authority
JP
Japan
Prior art keywords
contact
reinforcing
contact portion
recess
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008078560A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009229410A5 (enExample
Inventor
Yuko Yamada
優子 山田
Hideki Hirakawa
秀樹 平川
Akira Soma
亮 相馬
Takayuki Hayashizaki
孝幸 林崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2008078560A priority Critical patent/JP2009229410A/ja
Priority to TW098104020A priority patent/TWI399544B/zh
Priority to KR1020090015145A priority patent/KR101029987B1/ko
Publication of JP2009229410A publication Critical patent/JP2009229410A/ja
Publication of JP2009229410A5 publication Critical patent/JP2009229410A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K73/00—Drawn nets

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Environmental Sciences (AREA)
  • Animal Husbandry (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP2008078560A 2008-03-25 2008-03-25 電気試験用接触子及びその製造方法 Pending JP2009229410A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2008078560A JP2009229410A (ja) 2008-03-25 2008-03-25 電気試験用接触子及びその製造方法
TW098104020A TWI399544B (zh) 2008-03-25 2009-02-09 Contactors for electrical testing and methods for their manufacture
KR1020090015145A KR101029987B1 (ko) 2008-03-25 2009-02-24 전기 시험용 접촉자 및 그 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008078560A JP2009229410A (ja) 2008-03-25 2008-03-25 電気試験用接触子及びその製造方法

Publications (2)

Publication Number Publication Date
JP2009229410A true JP2009229410A (ja) 2009-10-08
JP2009229410A5 JP2009229410A5 (enExample) 2011-03-31

Family

ID=41244964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008078560A Pending JP2009229410A (ja) 2008-03-25 2008-03-25 電気試験用接触子及びその製造方法

Country Status (3)

Country Link
JP (1) JP2009229410A (enExample)
KR (1) KR101029987B1 (enExample)
TW (1) TWI399544B (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9052342B2 (en) 2011-09-30 2015-06-09 Formfactor, Inc. Probe with cantilevered beam having solid and hollow sections
US9146257B2 (en) 2012-08-10 2015-09-29 Kabushiki Kaisha Nihon Micronics Contact probe and probe card
US9435854B2 (en) 2012-07-06 2016-09-06 Kabushiki Kaisha Nihon Micronics Electrical contactor and contact method for the same
KR20170064058A (ko) * 2015-11-30 2017-06-09 삼성전자주식회사 프로브 카드 및 그를 포함하는 테스트 장치
CN111825056A (zh) * 2020-07-17 2020-10-27 杭州电子科技大学 基于飞秒激光与高温成型悬臂梁探针的方法及悬臂梁探针
KR20210018086A (ko) 2019-08-09 2021-02-17 가부시키가이샤 니혼 마이크로닉스 전기적 접촉자 및 전기적 접속장치
KR20210018087A (ko) 2019-08-09 2021-02-17 가부시키가이샤 니혼 마이크로닉스 전기적 접촉자 및 전기적 접속장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6068925B2 (ja) * 2012-10-23 2017-01-25 株式会社日本マイクロニクス プローブの製造方法
KR102762781B1 (ko) * 2022-06-24 2025-02-05 주식회사 가온닉스 전자부품의 회로 검사용 프로브 제조 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0390865A (ja) * 1989-09-01 1991-04-16 Sumitomo Electric Ind Ltd プローブカードのプローブ
JP2005351846A (ja) * 2004-06-14 2005-12-22 Micronics Japan Co Ltd プローブ針
JP2007271343A (ja) * 2006-03-30 2007-10-18 Sumitomo Electric Ind Ltd コンタクトプローブおよびその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3745184B2 (ja) * 1999-03-25 2006-02-15 株式会社東京カソード研究所 プローブカード用探針及びその製造方法
JP2001337110A (ja) * 2000-05-29 2001-12-07 Bureijingu:Kk プローブピンおよびプローブカード
JP4527267B2 (ja) * 2000-11-13 2010-08-18 東京エレクトロン株式会社 コンタクタの製造方法
AU2003261854A1 (en) * 2003-05-13 2004-12-03 Kabushiki Kaisha Nihon Micronics Probe for testing electric conduction
WO2006075408A1 (ja) * 2005-01-14 2006-07-20 Kabushiki Kaisha Nihon Micronics 通電試験用プローブ
JP2007192719A (ja) * 2006-01-20 2007-08-02 Japan Electronic Materials Corp プローブカード

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0390865A (ja) * 1989-09-01 1991-04-16 Sumitomo Electric Ind Ltd プローブカードのプローブ
JP2005351846A (ja) * 2004-06-14 2005-12-22 Micronics Japan Co Ltd プローブ針
JP2007271343A (ja) * 2006-03-30 2007-10-18 Sumitomo Electric Ind Ltd コンタクトプローブおよびその製造方法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9052342B2 (en) 2011-09-30 2015-06-09 Formfactor, Inc. Probe with cantilevered beam having solid and hollow sections
US9435854B2 (en) 2012-07-06 2016-09-06 Kabushiki Kaisha Nihon Micronics Electrical contactor and contact method for the same
US9146257B2 (en) 2012-08-10 2015-09-29 Kabushiki Kaisha Nihon Micronics Contact probe and probe card
KR20170064058A (ko) * 2015-11-30 2017-06-09 삼성전자주식회사 프로브 카드 및 그를 포함하는 테스트 장치
KR102466151B1 (ko) 2015-11-30 2022-11-15 삼성전자주식회사 프로브 카드 및 그를 포함하는 테스트 장치
KR20210018086A (ko) 2019-08-09 2021-02-17 가부시키가이샤 니혼 마이크로닉스 전기적 접촉자 및 전기적 접속장치
KR20210018087A (ko) 2019-08-09 2021-02-17 가부시키가이샤 니혼 마이크로닉스 전기적 접촉자 및 전기적 접속장치
US11255878B2 (en) 2019-08-09 2022-02-22 Kabushiki Kaisha Nihon Micronics Electrical contactor and electrical connecting apparatus
US11372022B2 (en) 2019-08-09 2022-06-28 Kabushiki Kaisha Nihon Micronics Electrical contactor and electrical connecting apparatus
TWI787636B (zh) * 2019-08-09 2022-12-21 日商日本麥克隆尼股份有限公司 電性接觸件及電性連接裝置
CN111825056A (zh) * 2020-07-17 2020-10-27 杭州电子科技大学 基于飞秒激光与高温成型悬臂梁探针的方法及悬臂梁探针

Also Published As

Publication number Publication date
TWI399544B (zh) 2013-06-21
KR20090102636A (ko) 2009-09-30
TW200940999A (en) 2009-10-01
KR101029987B1 (ko) 2011-04-20

Similar Documents

Publication Publication Date Title
JP5046909B2 (ja) 電気試験用接触子、これを用いる電気的接続装置、及び接触子の製造方法
JP4421481B2 (ja) 通電試験用プローブ
JP2009229410A (ja) 電気試験用接触子及びその製造方法
JP2009229410A5 (enExample)
JP4792465B2 (ja) 通電試験用プローブ
US8063651B2 (en) Contact for electrical test of electronic devices, probe assembly and method for manufacturing the same
JP5631131B2 (ja) 通電試験用プローブ及びプローブ組立体
KR100988814B1 (ko) 프로브 카드용 프로브 및 그 제조 방법
JP5438908B2 (ja) 電気的試験用接触子、これを用いた電気的接続装置及び接触子の製造方法
JP4917017B2 (ja) 通電試験用プローブ及びこれを用いた電気的接続装置
JP2009216562A5 (enExample)
JP5351453B2 (ja) コンタクトプローブ複合体
JP2010002391A (ja) コンタクトプローブ及びその形成方法
JP2010002184A (ja) コンタクトプローブ
JP5087371B2 (ja) 電気試験用接触子の製造方法
JP2006337229A (ja) 通電試験用プローブ
JP4571007B2 (ja) 通電試験用プローブ
US7316065B2 (en) Method for fabricating a plurality of elastic probes in a row
JP5276836B2 (ja) プローブカード
JP2007113946A (ja) 通電試験用プローブ
JP2009300079A (ja) コンタクトプローブ及びプローブカード
KR20070107737A (ko) 통전 테스트용 프로브 및 이를 사용한 전기적 접속 장치
JP2009216554A (ja) コンタクトプローブの製造方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110214

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110214

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120720

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121106

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20130402