JP2009158918A5 - - Google Patents

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JP2009158918A5
JP2009158918A5 JP2008244684A JP2008244684A JP2009158918A5 JP 2009158918 A5 JP2009158918 A5 JP 2009158918A5 JP 2008244684 A JP2008244684 A JP 2008244684A JP 2008244684 A JP2008244684 A JP 2008244684A JP 2009158918 A5 JP2009158918 A5 JP 2009158918A5
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gas
chamber
hydrogen
amount
containing gas
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JP2008244684A
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JP2009158918A (ja
JP5451018B2 (ja
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JP2008244684A 2007-09-24 2008-09-24 選択的酸化プロセスの酸化物成長速度の改良方法 Active JP5451018B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/860,161 US7951728B2 (en) 2007-09-24 2007-09-24 Method of improving oxide growth rate of selective oxidation processes
US11/860,161 2007-09-24

Related Child Applications (1)

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JP2011201340A Division JP2012044192A (ja) 2007-09-24 2011-09-15 選択的酸化プロセスの酸化物成長速度の改良方法

Publications (3)

Publication Number Publication Date
JP2009158918A JP2009158918A (ja) 2009-07-16
JP2009158918A5 true JP2009158918A5 (enExample) 2011-11-04
JP5451018B2 JP5451018B2 (ja) 2014-03-26

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JP2008244684A Active JP5451018B2 (ja) 2007-09-24 2008-09-24 選択的酸化プロセスの酸化物成長速度の改良方法
JP2011201340A Pending JP2012044192A (ja) 2007-09-24 2011-09-15 選択的酸化プロセスの酸化物成長速度の改良方法

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JP2011201340A Pending JP2012044192A (ja) 2007-09-24 2011-09-15 選択的酸化プロセスの酸化物成長速度の改良方法

Country Status (7)

Country Link
US (3) US7951728B2 (enExample)
EP (2) EP3540763A1 (enExample)
JP (2) JP5451018B2 (enExample)
KR (1) KR101028441B1 (enExample)
CN (2) CN101404253A (enExample)
SG (1) SG151226A1 (enExample)
TW (2) TWI436425B (enExample)

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