JP2009130294A - 実装方法 - Google Patents
実装方法 Download PDFInfo
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- JP2009130294A JP2009130294A JP2007306573A JP2007306573A JP2009130294A JP 2009130294 A JP2009130294 A JP 2009130294A JP 2007306573 A JP2007306573 A JP 2007306573A JP 2007306573 A JP2007306573 A JP 2007306573A JP 2009130294 A JP2009130294 A JP 2009130294A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
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- Die Bonding (AREA)
- Led Device Packages (AREA)
Abstract
【解決手段】ダイボンド装置のステージ110(図1(a)参照)の表面側に基板たるウェハ200を載置する基板載置工程を行った後、チップたるLEDチップ1とステージ110の表面側に載置されたウェハ200との互いの接合面を接触させLEDチップ1側から加熱することによりLEDチップ1とウェハ200との互いの接合面を加熱して両者を接合させる接合工程を行う。基板載置工程では、ステージ110上に断熱層120を介してウェハ200を載置する。また、基板載置工程よりも前にウェハ200におけるLEDチップ1の搭載予定領域を含む所定領域201(図1(b),(c)参照)の周囲に熱絶縁用穴202(図1(b),(c)参照)を形成する熱絶縁用穴形成工程を備えている。
【選択図】図1
Description
以下では、本実施形態の実装方法を適用して製造するデバイスの一例であってチップとしてLEDチップを備えた発光装置について図2〜図6に基づいて説明し、その後、本実施形態の実装方法について図1に基づいて説明する。
本実施形態の実装方法は実施形態1と略同じであり、熱絶縁用穴形成工程において、図9に示すように、熱絶縁用穴202として、平面視形状がスパイラル状(ここでは、矩形状の所定領域201の4辺に沿った形状)のスリットを形成するようにしている点が相違するだけである。ここにおいて、本実施形態では、熱絶縁用穴202として、2つのスパイラル状のスリットを所定領域201の中心に対して回転対称となるように形成している。なお、熱絶縁用穴202を構成するスリットの幅は20μmに設定してあるが、この値は特に限定するものではない。
本実施形態の実装方法は実施形態1と略同じであり、熱絶縁用穴形成工程において、図11に示すように、熱絶縁用穴202として、多数の小孔を所定領域201の周囲に形成するようにしている点が相違するだけである。なお、本実施形態では、単位格子が正三角形の仮想的な2次元三角格子の各格子点に対応する各部位に円形状の小孔からなる熱絶縁用穴202を形成してある。ここで、本実施形態では、熱絶縁用穴202の内径を20μmとし、熱絶縁用穴202の配列ピッチを40μmに設定してあるが、これらの数値は特に限定するものではない。
110 ステージ
120 断熱層
140 ヘッド
150 吸着コレット
200 ウェハ(基板)
201 所定領域
202 熱絶縁用穴
Claims (6)
- 熱伝導性を有する基板上に複数個のチップを実装する実装方法であって、ステージの表面側に基板を載置する基板載置工程と、チップとステージの表面側に載置された基板との互いの接合面を接触させチップ側から加熱することによりチップと基板との互いの接合面を加熱して両者を接合させる接合工程とを備え、基板載置工程よりも前に基板におけるチップの搭載予定領域を含む所定領域の周囲に熱絶縁用穴を形成する熱絶縁用穴形成工程を備えることを特徴とする実装方法。
- 前記熱絶縁用穴形成工程では、前記熱絶縁用穴を前記基板の厚み方向に貫通する形で形成することを特徴とする請求項1記載の実装方法。
- 前記熱絶縁用穴形成工程では、前記熱絶縁用穴として、前記所定領域の外周に沿った形状の複数のスリットを多重に形成することを特徴とする請求項2記載の実装方法。
- 前記熱絶縁用穴形成工程では、前記熱絶縁用穴として、平面視形状がスパイラル状のスリットを形成することを特徴とする請求項2記載の実装方法。
- 前記熱絶縁用穴形成工程では、前記熱絶縁用穴として、多数の小孔を前記所定領域の周囲に形成することを特徴とする請求項2記載の実装方法。
- 前記基板載置工程においては、前記基板を前記ステージの前記表面側に断熱層を介して載置することを特徴とする請求項1ないし請求項5のいずれか1項に記載の実装方法。
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JP2007306573A JP5536980B2 (ja) | 2007-11-27 | 2007-11-27 | 実装方法 |
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JP2007306573A JP5536980B2 (ja) | 2007-11-27 | 2007-11-27 | 実装方法 |
Publications (2)
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JP2009130294A true JP2009130294A (ja) | 2009-06-11 |
JP5536980B2 JP5536980B2 (ja) | 2014-07-02 |
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JP2007306573A Expired - Fee Related JP5536980B2 (ja) | 2007-11-27 | 2007-11-27 | 実装方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012038957A (ja) * | 2010-08-09 | 2012-02-23 | Toshiba Corp | 発光装置 |
JP2013538461A (ja) * | 2010-09-21 | 2013-10-10 | ▲セン▼國光 | パッケージ済み発光ダイオードの作製方法 |
JP2016096243A (ja) * | 2014-11-14 | 2016-05-26 | 日置電機株式会社 | 回路基板および測定装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1041440A (ja) * | 1996-07-26 | 1998-02-13 | Nec Home Electron Ltd | モジュール部品 |
JP2000188358A (ja) * | 1998-12-22 | 2000-07-04 | Rohm Co Ltd | 半導体装置 |
JP2003124614A (ja) * | 2001-10-16 | 2003-04-25 | Matsushita Electric Ind Co Ltd | 電子部品の熱圧着装置 |
JP2006032383A (ja) * | 2004-07-12 | 2006-02-02 | Matsushita Electric Ind Co Ltd | 部品搭載装置および基板載置ステージ |
JP2006310874A (ja) * | 2005-04-29 | 2006-11-09 | Philips Lumileds Lightng Co Llc | Rgb熱隔離基板 |
-
2007
- 2007-11-27 JP JP2007306573A patent/JP5536980B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1041440A (ja) * | 1996-07-26 | 1998-02-13 | Nec Home Electron Ltd | モジュール部品 |
JP2000188358A (ja) * | 1998-12-22 | 2000-07-04 | Rohm Co Ltd | 半導体装置 |
JP2003124614A (ja) * | 2001-10-16 | 2003-04-25 | Matsushita Electric Ind Co Ltd | 電子部品の熱圧着装置 |
JP2006032383A (ja) * | 2004-07-12 | 2006-02-02 | Matsushita Electric Ind Co Ltd | 部品搭載装置および基板載置ステージ |
JP2006310874A (ja) * | 2005-04-29 | 2006-11-09 | Philips Lumileds Lightng Co Llc | Rgb熱隔離基板 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012038957A (ja) * | 2010-08-09 | 2012-02-23 | Toshiba Corp | 発光装置 |
US8921870B2 (en) | 2010-08-09 | 2014-12-30 | Kabushiki Kaisha Toshiba | Light emitting device |
JP2013538461A (ja) * | 2010-09-21 | 2013-10-10 | ▲セン▼國光 | パッケージ済み発光ダイオードの作製方法 |
JP2016096243A (ja) * | 2014-11-14 | 2016-05-26 | 日置電機株式会社 | 回路基板および測定装置 |
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