JP2008512566A - 薄く高密度のセラミック層の製造方法 - Google Patents
薄く高密度のセラミック層の製造方法 Download PDFInfo
- Publication number
- JP2008512566A JP2008512566A JP2007530578A JP2007530578A JP2008512566A JP 2008512566 A JP2008512566 A JP 2008512566A JP 2007530578 A JP2007530578 A JP 2007530578A JP 2007530578 A JP2007530578 A JP 2007530578A JP 2008512566 A JP2008512566 A JP 2008512566A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- temperature
- ceramic
- layer
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 238000000034 method Methods 0.000 claims abstract description 23
- 239000002245 particle Substances 0.000 claims abstract description 21
- 239000000843 powder Substances 0.000 claims abstract description 17
- 239000007921 spray Substances 0.000 claims abstract description 11
- 239000000654 additive Substances 0.000 claims abstract description 8
- 238000002844 melting Methods 0.000 claims abstract description 8
- 230000008018 melting Effects 0.000 claims abstract description 8
- 230000000996 additive effect Effects 0.000 claims abstract description 7
- 238000007750 plasma spraying Methods 0.000 claims abstract description 6
- 239000000203 mixture Substances 0.000 claims abstract description 4
- 230000007704 transition Effects 0.000 claims abstract 2
- 239000000725 suspension Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 45
- 239000007789 gas Substances 0.000 description 10
- 239000003792 electrolyte Substances 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 238000010626 work up procedure Methods 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/123—Spraying molten metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
- H01M8/124—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
- H01M8/1246—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
- H01M2008/1293—Fuel cells with solid oxide electrolytes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Energy (AREA)
- General Chemical & Material Sciences (AREA)
- Electrochemistry (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Coating By Spraying Or Casting (AREA)
- Laminated Bodies (AREA)
Abstract
【解決手段】 この課題は、基体上に大気プラズマ溶射法によって薄く高密度のセラミック層を製造する方法において、以下の
− 基体を塗布すべきセラミックの溶融温度(ケルビン)の少なくとも1/4に相当する温度に予熱し、
− 溶射添加物として50μm以下のd50−値を持つセラミック粉末又はセラミック粉末混合物を使用し、
− 基体に衝突する際に200m/秒よりも早い粒子速度を調整し、
− 粒子温度を、該粒子が基体表面に衝突する際に、被覆すべきセラミックの溶融温度より少なくとも5%(ケルビン温度)上にある様に調整し、
− 溶射添加物の量及びプラズマバーナーの転移速度を、基体の一度の通過の際に100μmより薄い層厚に調節する様に調整し、
− 薄く、かつ、同時に10−1mbarL/(cm2S)より少ない漏出量の気密な層を、基体の一度の通過で該基体上に生じさせる
各段階を含むことを特徴とする、上記方法によって解決される。
Description
− 一回の層塗工工程で層を製造(一つの層):これは、プラズマバーナーが一度だけの被覆工程で基体に塗工することを意味する。一工程だけを使用することが異なる溶射層の間でのひび割れ傾向を減少させる。このことは普通の多数の工程を必要とする慣用の技術に対峙するものである。
− 最高で約100μmの析出層厚の調整:これは分節性ヒビ割れの発生を避ける。
− 使用するセラミックの溶融温度の少なくとも25%(ケルビン温度)の高温に基体を予熱する:この手段は既に析出した粒子を一部再溶融することによって個々の溶射薄層の間の接合を改善する。
− プロセスパラメータを適切に選択することによって、200m/秒以上、特に250m/秒以上の値の、基体に溶射する際の早い粒子速度の調整:これによって微小ヒビ割れを生じる傾向の少ない薄い溶射薄層が生じる。
− パラメータの適切な選択によって溶融温度の少なくとも5%、さらに好ましくは10%上という値の比較的に高い粒子温度を、基体に溶射する際に調整:これは再溶融及び結合を促進し、このことが微細ヒビ割れを抑制する。
A)高温燃料電池用電解質層:
アノードを備えた多孔質基体をプラズマバーナーにて約500℃の温度に予熱する。プラズマバーナーとしては例えばSulzer Metco社のTRIPLEX II バーナー又はF4 -バーナーを使用する。電力及びプロセスガス流は、高いプロセスガス速度及びプロセスガス温度が生じるような高さを選択する。粉末としてはイットリアで十分に安定化された溶融し破砕された20μmのd50−値の酸化ジルコニウム(YSZ)を使用する。粒子速度は基体に衝突する際に300m/秒以上であり、温度は3000℃である。溶射距離は90mmである。溶射被覆の際の基体温度は約800℃に達する。ロボット速度及び粉末供給速度は、一つの工程で約90μmの厚さの高密度YSZ−層が生じるように選択する。このために調整したロボット速度は150mm/秒である。
B)繊維複合材料のための腐食防止層:
CFC−材料よりなる繊維複合材料(炭素繊維複合体)に未だヒビ割れを持つ多層を設ける。この層を、基体並びに多層に対しての腐食性又は酸化性の大気の攻撃を避けるために、ここに説明した本発明に従って、La2Hf2O7よりなる別の気密な層で被覆する。場合によっては、多層とLa2Hf2O7との間の反応を抑制するためにセラミック中間層を挟み込んでもよい。
Claims (5)
- 基体上に大気プラズマ溶射法によって薄く高密度のセラミック層を製造する方法において、以下の
− 基体を塗布すべきセラミックの溶融温度(ケルビン温度)の少なくとも1/4に相当する温度に予熱し、
− 溶射添加物として50μm以下のd50−値を持つセラミック粉末又はセラミック粉末混合物を使用し、
− 基体に衝突する際に200m/秒よりも早い粒子速度を調整し、
− 粒子温度を、該粒子が基体表面に衝突する際に、被覆すべきセラミックの溶融温度より少なくとも5%(ケルビン温度)上にある様に調整し、
− 溶射添加物の量及びプラズマバーナーの転移速度を、基体の一度の通過の際に100μmより薄い層厚に調節する様に調整し、
− 薄く、かつ、同時に10−1mbarL/(cm2S)より少ない漏出量の気密な層を、基体の一度の通過で該基体上に生じさせる
各段階を含むことを特徴とする、上記方法。 - 溶射添加物として30μm以下のd50−値を持つセラミック粉末又はセラミック粉末混合物を使用する、請求項1に記載の方法。
- 懸濁物の状態の粉末をプラズマ火炎の中に導入する、請求項1又は2に記載の方法。
- 基体に衝突する際に250m/秒より大きい粒子速度に調整する請求項1〜3のいずれか一つに記載の方法。
- 粒子が、基体表面に衝突する際に被覆すべきセラミックの溶融温度(ケルビン温度)より少なくとも10%上にある温度を有するように調整する、請求項1〜4のいずれか一つに記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004044597A DE102004044597B3 (de) | 2004-09-13 | 2004-09-13 | Verfahren zur Herstellung dünner, dichter Keramikschichten |
DE102004044597.4 | 2004-09-13 | ||
PCT/DE2005/001380 WO2006029587A1 (de) | 2004-09-13 | 2005-08-04 | Verfahren zur herstellung dünner, dichter keramikschichten |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008512566A true JP2008512566A (ja) | 2008-04-24 |
JP2008512566A5 JP2008512566A5 (ja) | 2011-04-14 |
JP4738414B2 JP4738414B2 (ja) | 2011-08-03 |
Family
ID=35262123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007530578A Expired - Fee Related JP4738414B2 (ja) | 2004-09-13 | 2005-08-04 | 薄く高密度のセラミック層の製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20070259126A1 (ja) |
EP (1) | EP1789600B1 (ja) |
JP (1) | JP4738414B2 (ja) |
DE (1) | DE102004044597B3 (ja) |
ES (1) | ES2387891T3 (ja) |
WO (1) | WO2006029587A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011522115A (ja) * | 2008-05-30 | 2011-07-28 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | 特性を低下させる添加物なしの高いコランダム含有量を有する熱溶射されたAl2O3層及びその製造方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008007870A1 (de) * | 2008-02-06 | 2009-08-13 | Forschungszentrum Jülich GmbH | Wärmedämmschichtsystem sowie Verfahren zu seiner Herstellung |
US9725797B2 (en) | 2008-04-30 | 2017-08-08 | United Technologies Corporation | Process for forming an improved durability thick ceramic coating |
US20110048017A1 (en) * | 2009-08-27 | 2011-03-03 | General Electric Company | Method of depositing protective coatings on turbine combustion components |
DE102013017888A1 (de) | 2013-10-28 | 2015-04-30 | Robert Brockmann | Verfahren zur Verheilung der Passivschicht eines Bauteils von Aluminium zur Wiedererlangung der Gasdichtheit |
US10196728B2 (en) * | 2014-05-16 | 2019-02-05 | Applied Materials, Inc. | Plasma spray coating design using phase and stress control |
JP6590686B2 (ja) * | 2014-12-24 | 2019-10-16 | トーカロ株式会社 | 絶縁軸受、並びに軸受のコーティング方法 |
KR102400415B1 (ko) * | 2015-06-12 | 2022-05-19 | 엘코겐 오와이 | 고체 산화물 전지들의 구조 플레이트들용 보호 장치 및 상기 보호 장치를 형성하는 방법 |
DK3350862T3 (da) * | 2015-09-14 | 2019-12-02 | Elcogen Oy | Beskyttelsesindretning til strukturplader af fastoxidceller og fremgangsmåde til fremstilling af beskyttelsesindretningen |
US11404710B2 (en) | 2018-12-17 | 2022-08-02 | Cummins Enterprise Llc | Assembled portion of a solid oxide fuel cell and methods for inspecting the same |
DE102020126082A1 (de) | 2020-10-06 | 2022-04-07 | Forschungszentrum Jülich GmbH | Verfahren zur Herstellung einer Beschichtung sowie Beschichtung |
Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63218272A (ja) * | 1987-03-06 | 1988-09-12 | Hideo Nagasaka | 溶射方法及び装置 |
JPH0297656A (ja) * | 1988-10-03 | 1990-04-10 | Toyota Motor Corp | 隙間制御用溶射皮膜 |
JPH02267254A (ja) * | 1989-04-07 | 1990-11-01 | Nkk Corp | 低圧プラズマ溶射を用いた熱間静水圧加工方法 |
JPH0443565A (ja) * | 1990-06-07 | 1992-02-13 | Meidensha Corp | 燃料電池用酸素極の製造法 |
JPH04323358A (ja) * | 1991-01-16 | 1992-11-12 | Sumitomo Metal Ind Ltd | プラズマ溶射方法 |
JPH0574465A (ja) * | 1991-07-12 | 1993-03-26 | Yoshida Kogyo Kk <Ykk> | 固体電解質型燃料電池の製造方法 |
JPH06240435A (ja) * | 1993-02-22 | 1994-08-30 | Ngk Insulators Ltd | 気密膜の製造方法 |
JPH11350106A (ja) * | 1998-06-04 | 1999-12-21 | Hitachi Ltd | 構造部材の製造法 |
JP2000282214A (ja) * | 1999-03-30 | 2000-10-10 | Nippon Steel Weld Prod & Eng Co Ltd | 溶射方法および装置 |
JP2001115248A (ja) * | 1999-10-20 | 2001-04-24 | Toyota Motor Corp | 溶射方法、溶射装置及び粉末通路装置 |
JP2002037665A (ja) * | 2000-07-24 | 2002-02-06 | Mitsubishi Heavy Ind Ltd | 溶射用中空セラミックス粉末及びその製造方法 |
JP2002348653A (ja) * | 2001-03-21 | 2002-12-04 | Shin Etsu Chem Co Ltd | 希土類酸化物溶射用粒子、溶射部材および耐食性部材 |
JP2003226953A (ja) * | 2002-02-05 | 2003-08-15 | Tocalo Co Ltd | 焼結部材や複合部材等への溶射皮膜の形成方法および溶射皮膜被覆部材 |
JP2003253417A (ja) * | 2002-02-19 | 2003-09-10 | Praxair Technol Inc | プラズマ溶射酸素輸送膜 |
JP2004143591A (ja) * | 2002-09-26 | 2004-05-20 | Alstom | 窒化アルミニウム(AlN)基板の製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4172068A (en) * | 1978-07-24 | 1979-10-23 | International Minerals & Chemical Corporation | Foundry core composition of aggregate and a binder therefor |
JPH0362459A (ja) * | 1989-07-28 | 1991-03-18 | Onoda Cement Co Ltd | 固体電解質型燃料電池及びその製造方法 |
US5858470A (en) * | 1994-12-09 | 1999-01-12 | Northwestern University | Small particle plasma spray apparatus, method and coated article |
US6306517B1 (en) * | 1996-07-29 | 2001-10-23 | General Electric Company | Thermal barrier coatings having an improved columnar microstructure |
US5976695A (en) * | 1996-10-02 | 1999-11-02 | Westaim Technologies, Inc. | Thermally sprayable powder materials having an alloyed metal phase and a solid lubricant ceramic phase and abradable seal assemblies manufactured therefrom |
EP1344272A2 (de) * | 2000-08-30 | 2003-09-17 | Siemens Aktiengesellschaft | Verfahren zum herstellen einer festkeramischen brennstoffzelle |
US6638416B2 (en) * | 2001-09-24 | 2003-10-28 | Delphi Technologies, Inc. | Hydrogen sensing process |
US20040018409A1 (en) * | 2002-02-28 | 2004-01-29 | Shiqiang Hui | Solid oxide fuel cell components and method of manufacture thereof |
DE10309968A1 (de) * | 2003-03-07 | 2004-09-23 | Forschungszentrum Jülich GmbH | Verfahren zur Herstellung eines Schichtsystems umfassend einen metallischen Träger und eine Anodenfunktionsschicht |
-
2004
- 2004-09-13 DE DE102004044597A patent/DE102004044597B3/de not_active Withdrawn - After Issue
-
2005
- 2005-08-04 ES ES05773241T patent/ES2387891T3/es active Active
- 2005-08-04 JP JP2007530578A patent/JP4738414B2/ja not_active Expired - Fee Related
- 2005-08-04 US US11/662,787 patent/US20070259126A1/en not_active Abandoned
- 2005-08-04 EP EP05773241A patent/EP1789600B1/de not_active Not-in-force
- 2005-08-04 WO PCT/DE2005/001380 patent/WO2006029587A1/de active Application Filing
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63218272A (ja) * | 1987-03-06 | 1988-09-12 | Hideo Nagasaka | 溶射方法及び装置 |
JPH0297656A (ja) * | 1988-10-03 | 1990-04-10 | Toyota Motor Corp | 隙間制御用溶射皮膜 |
JPH02267254A (ja) * | 1989-04-07 | 1990-11-01 | Nkk Corp | 低圧プラズマ溶射を用いた熱間静水圧加工方法 |
JPH0443565A (ja) * | 1990-06-07 | 1992-02-13 | Meidensha Corp | 燃料電池用酸素極の製造法 |
JPH04323358A (ja) * | 1991-01-16 | 1992-11-12 | Sumitomo Metal Ind Ltd | プラズマ溶射方法 |
JPH0574465A (ja) * | 1991-07-12 | 1993-03-26 | Yoshida Kogyo Kk <Ykk> | 固体電解質型燃料電池の製造方法 |
JPH06240435A (ja) * | 1993-02-22 | 1994-08-30 | Ngk Insulators Ltd | 気密膜の製造方法 |
JPH11350106A (ja) * | 1998-06-04 | 1999-12-21 | Hitachi Ltd | 構造部材の製造法 |
JP2000282214A (ja) * | 1999-03-30 | 2000-10-10 | Nippon Steel Weld Prod & Eng Co Ltd | 溶射方法および装置 |
JP2001115248A (ja) * | 1999-10-20 | 2001-04-24 | Toyota Motor Corp | 溶射方法、溶射装置及び粉末通路装置 |
JP2002037665A (ja) * | 2000-07-24 | 2002-02-06 | Mitsubishi Heavy Ind Ltd | 溶射用中空セラミックス粉末及びその製造方法 |
JP2002348653A (ja) * | 2001-03-21 | 2002-12-04 | Shin Etsu Chem Co Ltd | 希土類酸化物溶射用粒子、溶射部材および耐食性部材 |
JP2003226953A (ja) * | 2002-02-05 | 2003-08-15 | Tocalo Co Ltd | 焼結部材や複合部材等への溶射皮膜の形成方法および溶射皮膜被覆部材 |
JP2003253417A (ja) * | 2002-02-19 | 2003-09-10 | Praxair Technol Inc | プラズマ溶射酸素輸送膜 |
JP2004143591A (ja) * | 2002-09-26 | 2004-05-20 | Alstom | 窒化アルミニウム(AlN)基板の製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011522115A (ja) * | 2008-05-30 | 2011-07-28 | フラウンホーファー−ゲゼルシャフト ツル フェルデルング デル アンゲヴァンテン フォルシュング エー ファウ | 特性を低下させる添加物なしの高いコランダム含有量を有する熱溶射されたAl2O3層及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
ES2387891T3 (es) | 2012-10-03 |
JP4738414B2 (ja) | 2011-08-03 |
US20070259126A1 (en) | 2007-11-08 |
EP1789600A1 (de) | 2007-05-30 |
WO2006029587A1 (de) | 2006-03-23 |
DE102004044597B3 (de) | 2006-02-02 |
EP1789600B1 (de) | 2012-05-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4738414B2 (ja) | 薄く高密度のセラミック層の製造方法 | |
JP6768513B2 (ja) | 遮熱被覆および被覆方法 | |
US7678428B2 (en) | Plasma spraying method | |
JP2009536984A (ja) | セラミックコーティングを得る方法および得られたセラミックコーティング | |
CN104674217B (zh) | 一种含双层结构粘结层的热障涂层的制备方法 | |
RU2325467C2 (ru) | Способ получения создающего термический барьер покрытия | |
US8871010B2 (en) | Plasma spray method for the manufacture of an ion conductive membrane | |
CN106011721B (zh) | 一种采用热喷涂法制备多层涂层的方法 | |
JP5943649B2 (ja) | 遮熱コーティング材の製造方法 | |
EP2113582A2 (en) | Process for forming an improved durability thick ceramic coating | |
KR100859672B1 (ko) | 용사 코팅 방법 | |
JP2008514816A (ja) | 溶射法を用いた気密結晶性ムライト層の製造法 | |
US20170009329A1 (en) | Conductive Additive Electric Current Sintering | |
CN105695917A (zh) | 一种耐高温抗烧蚀TiB2-MoSi2复合涂层及其制备方法 | |
JP4988334B2 (ja) | 金属製担体およびアノード作用層を含む層系の製造方法 | |
JP2018003103A (ja) | 遮熱コーティング法及び遮熱コーティング膜並びにタービン部材 | |
KR20210069838A (ko) | 고경도를 갖는 반도체 프로세싱 챔버용 부품의 제조방법 | |
TW201536960A (zh) | 陶瓷熔射塗膜包覆構件及半導體製造裝置用構件 | |
Verlotski | Coatings of carbide-metal systems (Cr3C2-NiCr and WC-Co-Cr) deposited by high-velocity atmospheric plasma spraying from specially modified fine-grained powders | |
Oh et al. | Effect of the Raw Material and Coating Process Conditions on the Densification of 8 wt% Y 2 O 3-ZrO 2 Thermal Barrier Coating by Atmospheric Plasma Spray | |
JP2006307311A (ja) | 耐食性部材およびその製造方法 | |
JPH05202460A (ja) | ペロブスカイト型酸化物の溶射方法及び溶射皮膜並びに固体電解質型燃料電池及びその製造方法。 | |
JPH11124662A (ja) | 自己修復性断熱皮膜およびその製造方法 | |
KR100653043B1 (ko) | 고상산화물 연료전지 분리판의 코팅층 형성방법 | |
Wang et al. | Mullite coatings produced by APS and SPS: effect of powder morphology and spray processing on the microstructure, crystallinity and mechanical properties |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080527 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20100518 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100924 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101026 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110125 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110201 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110225 |
|
A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20110225 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110412 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110426 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140513 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |