JP2008504695A - CMOSにおいてキャリア移動度を向上させる方法(MOSFETデバイスの圧縮SiGe<110>成長および構造) - Google Patents
CMOSにおいてキャリア移動度を向上させる方法(MOSFETデバイスの圧縮SiGe<110>成長および構造) Download PDFInfo
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- 229910000577 Silicon-germanium Inorganic materials 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 64
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000013078 crystal Substances 0.000 claims abstract description 12
- 239000008367 deionised water Substances 0.000 claims abstract description 10
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 10
- 239000004065 semiconductor Substances 0.000 claims abstract description 7
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000002253 acid Substances 0.000 claims abstract description 3
- 238000000151 deposition Methods 0.000 claims abstract description 3
- 238000001035 drying Methods 0.000 claims abstract description 3
- 239000000969 carrier Substances 0.000 claims abstract 3
- 230000008021 deposition Effects 0.000 claims abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 7
- 229920005591 polysilicon Polymers 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 5
- 229910052732 germanium Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 230000003746 surface roughness Effects 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 2
- 229910021332 silicide Inorganic materials 0.000 claims 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 2
- 238000001289 rapid thermal chemical vapour deposition Methods 0.000 abstract description 10
- -1 dilute HF Chemical compound 0.000 abstract description 2
- 239000012535 impurity Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 description 28
- 239000000956 alloy Substances 0.000 description 28
- 229910052710 silicon Inorganic materials 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 7
- 238000002955 isolation Methods 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 238000001069 Raman spectroscopy Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 238000004151 rapid thermal annealing Methods 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 229910000078 germane Inorganic materials 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000003917 TEM image Methods 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 2
- 238000000089 atomic force micrograph Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910052914 metal silicate Inorganic materials 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 108091006149 Electron carriers Proteins 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Abstract
【解決手段】 キャリアを伝導させるための構造およびこれを形成するための方法を記載する。これは、 <110>において上面を有するSiまたはSiGeの単結晶基板と、この基板とはGe濃度が異なるSiGeの擬似格子整合またはエピタキシャル層と、を含み、これによって擬似格子整合層に歪みがかかっている。半導体エピタキシャル層を形成するための方法を記述する。これは、急速熱化学的気相堆積(RTCVD)ツールにおいて擬似格子整合またはエピタキシャル層を形成するステップを含み、ツール内の温度を約600℃まで上昇させ、Si含有ガスおよびGe含有ガスの双方を導入する。エピタキシャル堆積のために基板を化学的に準備するための方法を記述する。これは、基板を、オゾン、希薄HF、脱イオン化水、HCl酸および脱イオン化水を含む一連の槽にそれぞれ浸漬し、その後、基板を不活性雰囲気において乾燥させて、不純物のない、RMS粗さが約0.1nm未満の基板表面を得る。
【選択図】 図1
Description
1.Si<110>基板上に擬似格子整合SiGeチャネル層を含むMOSFETデバイス、
2.RTCVDによって擬似格子整合SiGe層を形成する方法、および、RTCVDの前にシリコン表面を化学的に処理する方法であるが、当業者には、変更および変形が、添付の特許請求の範囲によってのみ限定される本発明の広範な範囲から逸脱することなく、可能であることは明らかであろう。
Claims (24)
- キャリアを伝導するための構造であって、
<110>において上面を有するSiまたはSiGeの単結晶基板と、
前記基板の上に形成したSiGeの擬似格子整合層であって、前記基板よりもGe濃度が高く、これによって圧縮性の歪みがかかっている、擬似格子整合層と、
を含む、構造。 - 前記擬似格子整合層の上にゲート誘電体を更に含む、請求項1に記載の構造。
- 前記ゲート誘電体の上にゲート電極を更に含む、請求項2に記載の構造。
- 前記ゲート誘電体の各側において前記擬似格子整合層に形成されたソースおよびドレイン領域を更に含み、前記ソースおよびドレイン領域の間にチャネルを形成する、請求項3に記載の構造。
- 前記ゲート誘電体の上にポリシリコン・ゲート電極を更に含み、MOSFETを形成する、請求項2に記載の構造。
- 前記ゲート誘電体の上にポリシリコン・ゲルマニウム・ゲート電極を更に含む、請求項2に記載の構造。
- 前記ゲート誘電体の上に金属および金属シリサイドのゲート電極の一方を更に含む、請求項2に記載の構造。
- 前記ゲート誘電体が3.9よりも大きい誘電率を有する、請求項2に記載の構造。
- 前記基板の表面が0.1nmのRMSを有する、請求項1に記載の構造。
- 前記SiGeの擬似格子整合層が20nm未満の厚さを有する、請求項1に記載の構造。
- キャリアを伝導するための構造を形成するための方法であって、
<110>において上面を有するSiまたはSiGeの単結晶基板を選択するステップと、
前記基板の上に形成したSiGeの擬似格子整合層であって、前記基板よりもGe濃度が高く、これによって圧縮性の歪みがかかっている、擬似格子整合層を形成するステップと、
を含む、方法。 - 前記擬似格子整合層の上にゲート誘電体を形成するステップを更に含む、請求項11に記載の方法。
- 前記ゲート誘電体の上にゲート電極を形成するステップを更に含む、請求項12に記載の方法。
- 前記ゲート誘電体の各側において前記擬似格子整合層にソースおよびドレイン領域を形成して前記ソースおよびドレイン領域の間にチャネルを形成するステップを更に含む、請求項13に記載の方法。
- 前記ゲート誘電体の上にポリシリコン・ゲート電極を形成してMOSFETを形成するステップを更に含む、請求項12に記載の方法。
- 前記ゲート誘電体の上にポリシリコン・ゲルマニウム・ゲート電極を形成するステップを更に含む、請求項12に記載の方法。
- 前記ゲート誘電体の上に金属および金属シリサイドのゲート電極の一方を形成するステップを更に含む、請求項12に記載の方法。
- 3.9よりも大きい誘電率を有する前記ゲート誘電体を選択するステップを更に含む、請求項12に記載の方法。
- 0.1nmのRMS未満の前記基板の表面を化学的に処理するステップを更に含む、請求項11に記載の方法。
- 20nm未満の厚さを有する前記SiGeの擬似格子整合層を形成するステップを更に含む、請求項11に記載の方法。
- 半導体エピタキシャル層を形成するための方法であって、
<110>において上面を有するSiまたはSiGeの単結晶基板を選択するステップと、
前記単結晶基板を急速化学的気相堆積ツール内に装着するステップと、
前記ツール内の圧力を0.2トール未満に低下させるステップと、
前記ツール内の温度を600℃まで上昇させるステップと、
Si含有ガスおよびGe含有ガスの双方を導入し、これによって、前記基板の上に、前記基板とは異なるGe濃度を有するSiGeの擬似格子整合層を形成し、これによって前記擬似格子整合層を歪ませる、ステップと、
を含む、方法。 - 0.1nmのRMS粗さ未満の前記基板の表面を化学的に処理するステップを更に含む、請求項21に記載の方法。
- 前記ツール内の温度を400℃未満に低下させる時間期間の後、エピタキシャル成長を終了させるステップを更に含む、請求項21に記載の方法。
- エピタキシャル堆積のために基板を化学的に処理するための方法であって、
0.2nm未満の表面粗さを有するSiまたはSiGe基板を選択するステップと、
前記基板を脱イオン化水において23℃で10PPMオゾンの第1の槽に浸漬するステップと、
前記基板を希薄HF100:1の第2の槽に少なくとも1分間浸漬するステップと、
前記基板を脱イオン化水の第3の槽に少なくとも5分間浸漬するステップと、
前記基板をHCl酸および脱イオン化水の少なくとも1:100の23℃の第4の槽に浸漬するステップと、
前記基板を脱イオン化水の第5の槽に少なくとも5分間浸漬するステップと、
前記基板を前記第5の槽から取り出して、窒素を含む雰囲気において少なくとも30℃の温度で前記基板を乾燥させるステップと、
を含む、方法。
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US10/875,727 US7187059B2 (en) | 2004-06-24 | 2004-06-24 | Compressive SiGe <110> growth and structure of MOSFET devices |
US10/875,727 | 2004-06-24 | ||
PCT/US2005/022643 WO2006002410A2 (en) | 2004-06-24 | 2005-06-21 | Compressive sige <110> growth mosfet devices |
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JP2008504695A5 JP2008504695A5 (ja) | 2008-06-19 |
JP5314891B2 JP5314891B2 (ja) | 2013-10-16 |
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EP (1) | EP1794786A4 (ja) |
JP (1) | JP5314891B2 (ja) |
CN (1) | CN101160664B (ja) |
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Also Published As
Publication number | Publication date |
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WO2006002410A2 (en) | 2006-01-05 |
EP1794786A4 (en) | 2008-12-24 |
CN101160664A (zh) | 2008-04-09 |
TW200601419A (en) | 2006-01-01 |
EP1794786A2 (en) | 2007-06-13 |
JP5314891B2 (ja) | 2013-10-16 |
US20050285159A1 (en) | 2005-12-29 |
WO2006002410A3 (en) | 2007-12-06 |
US7187059B2 (en) | 2007-03-06 |
CN101160664B (zh) | 2010-09-08 |
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