JP2008302487A5 - - Google Patents

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Publication number
JP2008302487A5
JP2008302487A5 JP2007153922A JP2007153922A JP2008302487A5 JP 2008302487 A5 JP2008302487 A5 JP 2008302487A5 JP 2007153922 A JP2007153922 A JP 2007153922A JP 2007153922 A JP2007153922 A JP 2007153922A JP 2008302487 A5 JP2008302487 A5 JP 2008302487A5
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JP
Japan
Prior art keywords
suction
substrate
unit
rectangular substrate
base point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007153922A
Other languages
English (en)
Japanese (ja)
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JP2008302487A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007153922A priority Critical patent/JP2008302487A/ja
Priority claimed from JP2007153922A external-priority patent/JP2008302487A/ja
Priority to KR1020080052407A priority patent/KR20080108904A/ko
Priority to CNA2008101089197A priority patent/CN101323396A/zh
Priority to TW097121524A priority patent/TW200906695A/zh
Publication of JP2008302487A publication Critical patent/JP2008302487A/ja
Publication of JP2008302487A5 publication Critical patent/JP2008302487A5/ja
Pending legal-status Critical Current

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JP2007153922A 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置 Pending JP2008302487A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007153922A JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置
KR1020080052407A KR20080108904A (ko) 2007-06-11 2008-06-04 기판 흡착 장치, 기판 반송 장치 및 외관 검사 장치
CNA2008101089197A CN101323396A (zh) 2007-06-11 2008-06-06 基板吸附装置和基板搬送装置以及外观检查装置
TW097121524A TW200906695A (en) 2007-06-11 2008-06-10 Substrate adsorption device, substrate transportation device and external inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007153922A JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置

Publications (2)

Publication Number Publication Date
JP2008302487A JP2008302487A (ja) 2008-12-18
JP2008302487A5 true JP2008302487A5 (enrdf_load_stackoverflow) 2010-07-01

Family

ID=40187135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007153922A Pending JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置

Country Status (4)

Country Link
JP (1) JP2008302487A (enrdf_load_stackoverflow)
KR (1) KR20080108904A (enrdf_load_stackoverflow)
CN (1) CN101323396A (enrdf_load_stackoverflow)
TW (1) TW200906695A (enrdf_load_stackoverflow)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI465313B (zh) * 2009-04-07 2014-12-21 Kromax Internat Corp 非接觸式定位平臺與定位方法
KR101843545B1 (ko) * 2009-11-26 2018-03-30 가부시키가이샤 니콘 기판 처리 장치 및 표시 소자의 제조 방법
KR101309144B1 (ko) * 2011-01-10 2013-09-17 엘아이지에이디피 주식회사 분사노즐, 이를 이용한 기판 반송장치 및 기판 검사장치
JP5931409B2 (ja) * 2011-11-14 2016-06-08 川崎重工業株式会社 板材の搬送システム
KR102099882B1 (ko) * 2012-12-27 2020-04-13 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
CN104058257B (zh) * 2013-03-22 2017-07-04 北京北方微电子基地设备工艺研究中心有限责任公司 晶片的辅助取片机构、取片系统及取片方法
JP6280805B2 (ja) * 2014-04-30 2018-02-14 平田機工株式会社 ワーク形状測定システム及び制御方法
KR102342231B1 (ko) * 2014-05-03 2021-12-21 가부시키가이샤 한도오따이 에네루기 켄큐쇼 필름상 부재 지지 장치
CN105058401A (zh) * 2015-08-07 2015-11-18 天津联欣盈塑胶科技有限公司 一种夹取塑料产品的机械手
ES3033211T3 (en) * 2015-08-26 2025-07-31 Berkshire Grey Operating Company Inc Systems and methods for providing vacuum valve assemblies for end effectors
CN105397828B (zh) * 2015-11-27 2017-03-29 大连理工大学 一种用于管桩端板加工的大尺寸变直径机器人夹具
CN105428290B (zh) * 2015-12-23 2018-06-29 上海华虹宏力半导体制造有限公司 晶圆传输装置及其真空吸附机械手
US9776809B1 (en) * 2016-03-31 2017-10-03 Core Flow Ltd. Conveying system with vacuum wheel
TWI648211B (zh) * 2016-12-20 2019-01-21 亞智科技股份有限公司 吸取基板的方法與吸取裝置
CN106927258A (zh) * 2017-01-26 2017-07-07 江苏东旭亿泰智能装备有限公司 一种用于玻璃基板的传送装置及其传送方法
CN108238447A (zh) * 2018-01-16 2018-07-03 京东方科技集团股份有限公司 传输系统
WO2022202396A1 (ja) * 2021-03-25 2022-09-29 東京エレクトロン株式会社 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム
TW202306651A (zh) * 2021-03-31 2023-02-16 日商東京威力科創股份有限公司 基板搬送裝置、塗佈處理裝置及基板搬送方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI327986B (en) * 2003-05-06 2010-08-01 Olympus Corp Substrate absorption device

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