JP2008302487A5 - - Google Patents

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Publication number
JP2008302487A5
JP2008302487A5 JP2007153922A JP2007153922A JP2008302487A5 JP 2008302487 A5 JP2008302487 A5 JP 2008302487A5 JP 2007153922 A JP2007153922 A JP 2007153922A JP 2007153922 A JP2007153922 A JP 2007153922A JP 2008302487 A5 JP2008302487 A5 JP 2008302487A5
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JP
Japan
Prior art keywords
suction
substrate
unit
rectangular substrate
base point
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Pending
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JP2007153922A
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Japanese (ja)
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JP2008302487A (en
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Priority to JP2007153922A priority Critical patent/JP2008302487A/en
Priority claimed from JP2007153922A external-priority patent/JP2008302487A/en
Publication of JP2008302487A publication Critical patent/JP2008302487A/en
Publication of JP2008302487A5 publication Critical patent/JP2008302487A5/ja
Pending legal-status Critical Current

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Claims (15)

矩形基板の裏面を吸着保持する多数の吸着部を配列した基板吸着装置において、
前記矩形基板の少なくとも1辺に沿って多数配列され前記基板の裏面を吸着保持する前記吸着部と、
前記吸着部を個々に又は複数纏めた群毎にそれぞれ異なるタイミングで真空吸着可能に制御する制御部とを備え、
前記制御部は、前記多数の吸着部のうち、最初に基板に吸着した前記吸着部または選択された前記吸着部を基点に設定し、この基点となる前記吸着部以外の他の吸着部を前記基点から離れる方向に順番に吸着制御する基板吸着装置。
In a substrate suction device in which a large number of suction parts that hold the back surface of a rectangular substrate are suction-held,
A plurality of adsorbing portions arranged and arranged along at least one side of the rectangular substrate to adsorb and hold the back surface of the substrate ;
A controller that controls vacuum suction at different timings for each of the suction units individually or for each group of a plurality of groups ,
The control unit sets the adsorption unit first adsorbed on the substrate or the selected adsorption unit among the multiple adsorption units as a base point, and sets other adsorption units other than the adsorption unit as the base point to the base unit. A substrate suction device that sequentially controls suction in a direction away from the base point.
前記制御部は、最初に前記矩形基板に吸着する前記吸着部のうち矩形基板の1辺の中央に近い前記吸着部を基点として設定する請求項1に記載の基板吸着装置。 2. The substrate suction apparatus according to claim 1, wherein the control unit sets the suction unit close to the center of one side of the rectangular substrate among the suction units to be first suctioned to the rectangular substrate as a base point . 前記制御部は、前記矩形基板を連続して吸着する複数の吸着部を前記基点として設定し、この基点から離れる方向に前記他の吸着部を順番に吸着制御する請求項1に記載の基板吸着装置。2. The substrate suction according to claim 1, wherein the control unit sets a plurality of suction units that continuously suck the rectangular substrate as the base point, and sequentially controls the other suction units in a direction away from the base point. apparatus. 前記矩形基板の上方に配置され、前記矩形基板を前記吸着部に向けて押付ける吸着補助手段を備え、前記制御部は、この吸着補助手段の押し付けにより吸着した前記吸着部を前記基点に設定する請求項1に記載の基板吸着装置。A suction assisting means that is disposed above the rectangular substrate and presses the rectangular substrate toward the suctioning part, and the control part sets the suctioning part sucked by the suction assisting means as the base point. The substrate suction apparatus according to claim 1. 前記吸着補助手段は、前記矩形基板の1辺の中間位置に配置され、前記制御部は、前記吸着補助手段により選択された前記吸着部を基点にして前記他の吸着部を前記基点から離れる方向に順番に吸着制御する請求項4に記載の基板吸着装置。The suction assisting unit is disposed at an intermediate position on one side of the rectangular substrate, and the control unit is configured to move the other suction unit away from the base point based on the suction unit selected by the suction assisting unit. The substrate suction apparatus according to claim 4, wherein suction control is performed in order. 前記吸着補助手段は、前記矩形基板の1辺の端部に配置され、前記制御部は、前記吸着補助手段により選択された前記吸着部を基点にして前記他の吸着部を前記基点から離れる方向に順番に吸着制御する請求項4に記載の基板吸着装置。The suction assisting unit is disposed at an end of one side of the rectangular substrate, and the control unit is configured to leave the other suction unit away from the base point based on the suction unit selected by the suction assisting unit. The substrate suction apparatus according to claim 4, wherein suction control is performed in order. 前記吸着補助手段は、前記矩形基板上で転動する一対のローラからなり、これら一対のローラを前記矩形基板の1辺の中間位置から互いに逆方向に移動可能に設け、前記制御部は、前記矩形基板の1辺の中間位置に配置された前記吸着部を前記基点として設定する請求項4に記載の基板吸着装置。The suction assisting means includes a pair of rollers that roll on the rectangular substrate, and the pair of rollers are provided so as to be movable in opposite directions from an intermediate position on one side of the rectangular substrate. The substrate suction apparatus according to claim 4, wherein the suction portion disposed at an intermediate position on one side of the rectangular substrate is set as the base point. 前記吸着部は、個々に又は複数纏めた群ごとに前記矩形基板の裏面に対して上下方向に移動する支持部に設けられ、前記制御部は、前記矩形基板の1辺の中間位置に配置された前記支持部を上昇させて前記吸着部のうち矩形基板の1辺の中央に近い前記吸着部を基点として設定し、他の支持部を前記基点から離れる方向順番に上昇させて他の吸着部を前記基点から離れる方向に順番に吸着制御する請求項1に記載の基板吸着装置。The suction unit is provided in a support unit that moves in the vertical direction with respect to the back surface of the rectangular substrate individually or in groups of a plurality of groups, and the control unit is disposed at an intermediate position on one side of the rectangular substrate. The supporting portion is lifted to set the suction portion close to the center of one side of the rectangular substrate among the suction portions as a base point, and the other support portions are lifted in the direction away from the base point to be another suction portion. The substrate suction apparatus according to claim 1, wherein suction control is sequentially performed in a direction away from the base point. 前記吸着部は、複数纏められて板金を介して回転可能に支持部に設けられ、この支持部を前記矩形基板の1辺に沿って複数配置し、前記制御部は、前記矩形基板の1辺の中間位置に配置された前記支持部の前記板金を回動させて前記矩形基板に吸着した前記吸着部を前記基点として設定する請求項1に記載の基板吸着装置。A plurality of the suction portions are gathered and provided on the support portion so as to be rotatable via a sheet metal. A plurality of the support portions are arranged along one side of the rectangular substrate, and the control portion is arranged on one side of the rectangular substrate. The substrate suction apparatus according to claim 1, wherein the suction portion that is sucked to the rectangular substrate by rotating the sheet metal of the support portion arranged at an intermediate position is set as the base point. 前記制御部は、前記矩形基板の1辺の中間位置に配置された前記支持部の前記板金を回動させ前記矩形基板を吸着させた状態で隣り合う他の支持部の板金を回動させ、前記矩形基板の中間位置から外側に向けて前記他の吸着部を順番に吸着制御する請求項9に記載の基板吸着装置。The control unit rotates the sheet metal of the support unit disposed at an intermediate position of one side of the rectangular substrate and rotates the sheet metal of another support unit adjacent to the rectangular substrate, The substrate suction apparatus according to claim 9, wherein suction control of the other suction units is sequentially performed from an intermediate position of the rectangular substrate toward the outside. 前記各支持部は、前記矩形基板の裏面に対して上下方向に移動可能に設けられ、前記制御部は、前記支持部材を前記吸着部の吸着面が前記矩形基板の高さ位置よりも高く上昇させた状態で前記支持部の前記板金を回動させて前記吸着部を前記矩形基板の裏面に密着させて吸着制御する請求項9又は10に記載の基板吸着装置。Each of the support portions is provided so as to be movable in the vertical direction with respect to the back surface of the rectangular substrate, and the control unit raises the support member so that the suction surface of the suction portion is higher than the height position of the rectangular substrate. The substrate suction apparatus according to claim 9 or 10, wherein the suction control is performed by rotating the sheet metal of the support portion in a state of being held in close contact with the back surface of the rectangular substrate. 前記吸着部が吸着したかを確認する吸着確認部を備え、この吸着確認部により吸着が確認された前記吸着部を前記基点として設定する請求項1に記載の基板吸着装置。The substrate adsorption apparatus according to claim 1, further comprising an adsorption confirmation unit that confirms whether the adsorption unit has adsorbed, and sets the adsorption unit that has been confirmed to be adsorbed by the adsorption confirmation unit as the base point. 矩形基板を搬送する載置部と、A placement unit for conveying a rectangular substrate;
前記載置部の基板搬送方向に沿って移動可能に設けられ、前記矩形基板の少なくとも1辺を吸着保持する保持移動部とを備え、A holding movement unit that is provided movably along the substrate conveyance direction of the placement unit, and that holds and holds at least one side of the rectangular substrate;
前記請求項1に記載の基板吸着装置を前記保持移動部とする基板搬送装置。A substrate transfer apparatus using the substrate suction apparatus according to claim 1 as the holding and moving unit.
前記載置部は、前記矩形基板に圧縮エアを吐出させて所定に高さに浮上させる機構を有し、前記保持移動部は、前記浮上した矩形基板の少なくとも1辺を吸着保持して搬送方向に搬送する請求項13に記載の基板搬送装置。The placement unit includes a mechanism that discharges compressed air to the rectangular substrate and floats to a predetermined height, and the holding and moving unit sucks and holds at least one side of the floating rectangular substrate in the transport direction. The substrate transfer apparatus according to claim 13, which is transferred to the substrate. 床面に設置されるベース部と、  A base part installed on the floor,
前記ベース部上に固定され、矩形基板を搬送する載置部と、  A mounting unit fixed on the base unit and carrying a rectangular substrate;
前記載置部の基板搬送方向に沿って移動可能に設けられ、前記矩形基板の少なくとも1辺を吸着保持する保持移動部と、A holding and moving part that is provided so as to be movable along the substrate transport direction of the mounting part, and holds and holds at least one side of the rectangular substrate;
前記載置部及び前記保持移動部を跨ぐように前記ベース部に固定された門型フレームと、A portal frame fixed to the base so as to straddle the placement part and the holding and moving part;
前記門型フレームの水平フレーム部に沿って移動可能に設けられ、前記矩形基板の外観検査を行う観察光学系とを備え、An observation optical system that is provided movably along the horizontal frame portion of the portal frame and that performs an appearance inspection of the rectangular substrate;
前記請求項1に記載の基板吸着装置を前記保持移動部とする外観検査装置。An appearance inspection apparatus using the substrate suction apparatus according to claim 1 as the holding and moving unit.
JP2007153922A 2007-06-11 2007-06-11 Substrate sucking device, substrate transporting device, and outside appearance inspecting device Pending JP2008302487A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007153922A JP2008302487A (en) 2007-06-11 2007-06-11 Substrate sucking device, substrate transporting device, and outside appearance inspecting device

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007153922A JP2008302487A (en) 2007-06-11 2007-06-11 Substrate sucking device, substrate transporting device, and outside appearance inspecting device
KR1020080052407A KR20080108904A (en) 2007-06-11 2008-06-04 Substrate adsorption device, substrate transportation device and external inspection equipment
CNA2008101089197A CN101323396A (en) 2007-06-11 2008-06-06 Substrate absorbing apparatus, substrate conveying apparatus and exterior inspection apparatus
TW097121524A TW200906695A (en) 2007-06-11 2008-06-10 Substrate adsorption device, substrate transportation device and external inspection equipment

Publications (2)

Publication Number Publication Date
JP2008302487A JP2008302487A (en) 2008-12-18
JP2008302487A5 true JP2008302487A5 (en) 2010-07-01

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Application Number Title Priority Date Filing Date
JP2007153922A Pending JP2008302487A (en) 2007-06-11 2007-06-11 Substrate sucking device, substrate transporting device, and outside appearance inspecting device

Country Status (4)

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JP (1) JP2008302487A (en)
KR (1) KR20080108904A (en)
CN (1) CN101323396A (en)
TW (1) TW200906695A (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI465313B (en) * 2009-04-07 2014-12-21 Kromax Internat Corp Non-contact platform for locating a panel and method for the same
KR101906129B1 (en) * 2009-11-26 2018-10-08 가부시키가이샤 니콘 Substrate processing apparatus and method for manufacturing display element
KR101309144B1 (en) * 2011-01-10 2013-09-17 엘아이지에이디피 주식회사 Spray nozzle, Substrate transportation device and substrate inspection device using the same
JP5931409B2 (en) * 2011-11-14 2016-06-08 川崎重工業株式会社 Board material transfer system
KR102099882B1 (en) * 2012-12-27 2020-04-13 세메스 주식회사 Apparatus and method fdr treating substrates
CN104058257B (en) * 2013-03-22 2017-07-04 北京北方微电子基地设备工艺研究中心有限责任公司 The auxiliary Qu Pian mechanisms of chip, sheet-fetching system and take piece method
JP6280805B2 (en) * 2014-04-30 2018-02-14 平田機工株式会社 Work shape measurement system and control method
CN110625540B (en) * 2014-05-03 2021-10-29 株式会社半导体能源研究所 Film-like member supporting apparatus
CN105058401A (en) * 2015-08-07 2015-11-18 天津联欣盈塑胶科技有限公司 Mechanical hand for clamping plastic product
US9999977B2 (en) 2015-08-26 2018-06-19 Berkshire Grey, Inc. Systems and methods for providing vacuum valve assemblies for end effectors
CN105397828B (en) * 2015-11-27 2017-03-29 大连理工大学 A kind of large scale variable diameters robot clamp for pile end board processing
CN105428290B (en) * 2015-12-23 2018-06-29 上海华虹宏力半导体制造有限公司 Wafer conveying device and its vacuum suction machinery hand
US9776809B1 (en) * 2016-03-31 2017-10-03 Core Flow Ltd. Conveying system with vacuum wheel
TWI648211B (en) * 2016-12-20 2019-01-21 亞智科技股份有限公司 Method for sucking substrate and suction device
CN106927258A (en) * 2017-01-26 2017-07-07 江苏东旭亿泰智能装备有限公司 A kind of conveyer and its transfer approach for glass substrate
CN108238447A (en) * 2018-01-16 2018-07-03 京东方科技集团股份有限公司 Transmission system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI327986B (en) * 2003-05-06 2010-08-01 Olympus Corp Substrate absorption device

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