JP2008302487A5 - - Google Patents

Claims (15)

In a substrate suction device in which a large number of suction parts that hold the back surface of a rectangular substrate are suction-held,
A plurality of adsorbing portions arranged and arranged along at least one side of the rectangular substrate to adsorb and hold the back surface of the substrate ;
A controller that controls vacuum suction at different timings for each of the suction units individually or for each group of a plurality of groups ,
The control unit sets the adsorption unit first adsorbed on the substrate or the selected adsorption unit among the multiple adsorption units as a base point, and sets other adsorption units other than the adsorption unit as the base point to the base unit. A substrate suction device that sequentially controls suction in a direction away from the base point. 2. The substrate suction apparatus according to claim 1, wherein the control unit sets the suction unit close to the center of one side of the rectangular substrate among the suction units to be first suctioned to the rectangular substrate as a base point . 2. The substrate suction according to claim 1, wherein the control unit sets a plurality of suction units that continuously suck the rectangular substrate as the base point, and sequentially controls the other suction units in a direction away from the base point. apparatus. A suction assisting means that is disposed above the rectangular substrate and presses the rectangular substrate toward the suctioning part, and the control part sets the suctioning part sucked by the suction assisting means as the base point. The substrate suction apparatus according to claim 1. The suction assisting unit is disposed at an intermediate position on one side of the rectangular substrate, and the control unit is configured to move the other suction unit away from the base point based on the suction unit selected by the suction assisting unit. The substrate suction apparatus according to claim 4, wherein suction control is performed in order. The suction assisting unit is disposed at an end of one side of the rectangular substrate, and the control unit is configured to leave the other suction unit away from the base point based on the suction unit selected by the suction assisting unit. The substrate suction apparatus according to claim 4, wherein suction control is performed in order. The suction assisting means includes a pair of rollers that roll on the rectangular substrate, and the pair of rollers are provided so as to be movable in opposite directions from an intermediate position on one side of the rectangular substrate. The substrate suction apparatus according to claim 4, wherein the suction portion disposed at an intermediate position on one side of the rectangular substrate is set as the base point. The suction unit is provided in a support unit that moves in the vertical direction with respect to the back surface of the rectangular substrate individually or in groups of a plurality of groups, and the control unit is disposed at an intermediate position on one side of the rectangular substrate. The supporting portion is lifted to set the suction portion close to the center of one side of the rectangular substrate among the suction portions as a base point, and the other support portions are lifted in the direction away from the base point to be another suction portion. The substrate suction apparatus according to claim 1, wherein suction control is sequentially performed in a direction away from the base point. A plurality of the suction portions are gathered and provided on the support portion so as to be rotatable via a sheet metal. A plurality of the support portions are arranged along one side of the rectangular substrate, and the control portion is arranged on one side of the rectangular substrate. The substrate suction apparatus according to claim 1, wherein the suction portion that is sucked to the rectangular substrate by rotating the sheet metal of the support portion arranged at an intermediate position is set as the base point. The control unit rotates the sheet metal of the support unit disposed at an intermediate position of one side of the rectangular substrate and rotates the sheet metal of another support unit adjacent to the rectangular substrate, The substrate suction apparatus according to claim 9, wherein suction control of the other suction units is sequentially performed from an intermediate position of the rectangular substrate toward the outside. Each of the support portions is provided so as to be movable in the vertical direction with respect to the back surface of the rectangular substrate, and the control unit raises the support member so that the suction surface of the suction portion is higher than the height position of the rectangular substrate. The substrate suction apparatus according to claim 9 or 10, wherein the suction control is performed by rotating the sheet metal of the support portion in a state of being held in close contact with the back surface of the rectangular substrate. The substrate adsorption apparatus according to claim 1, further comprising an adsorption confirmation unit that confirms whether the adsorption unit has adsorbed, and sets the adsorption unit that has been confirmed to be adsorbed by the adsorption confirmation unit as the base point. A placement unit for conveying a rectangular substrate;
A holding movement unit that is provided movably along the substrate conveyance direction of the placement unit, and that holds and holds at least one side of the rectangular substrate;
A substrate transfer apparatus using the substrate suction apparatus according to claim 1 as the holding and moving unit. The placement unit includes a mechanism that discharges compressed air to the rectangular substrate and floats to a predetermined height, and the holding and moving unit sucks and holds at least one side of the floating rectangular substrate in the transport direction. The substrate transfer apparatus according to claim 13, which is transferred to the substrate.   A base part installed on the floor,
  A mounting unit fixed on the base unit and carrying a rectangular substrate;
A holding and moving part that is provided so as to be movable along the substrate transport direction of the mounting part, and holds and holds at least one side of the rectangular substrate;
A portal frame fixed to the base so as to straddle the placement part and the holding and moving part;
An observation optical system that is provided movably along the horizontal frame portion of the portal frame and that performs an appearance inspection of the rectangular substrate;
An appearance inspection apparatus using the substrate suction apparatus according to claim 1 as the holding and moving unit.