JP2009026782A - Sheet transfer device, sheet treatment and transfer system, and sheet transfer method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce the production cost, while making the X-axial installation space of a sheet transfer device small. <P>SOLUTION: A pair of transfer arms 35 are installed on a device body movable in X-axial direction at Y-axial intervals; each arm 35 has a first suction pad 39 on one X-axial end and a second suction pad 41 on the other X-axial end; the device includes positioning mechanisms 51, 55, 59, 61 positioning a sheet W onto the device body immediately, after drawing out the sheet W from a first sheet treatment device 3A, and the like, toward the device body by the transfer arm 35 and positioning mechanisms 53, 57, 59, 61 for positioning the sheet W onto the device body 17, immediately prior to feeding the sheet W, from the device body toward a second sheet treatment device 5A by the transfer arm 35 and the like. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  In the present invention, a thin plate such as a glass substrate is floated between the first thin plate processing apparatus disposed in the first processing station and the second thin plate processing apparatus disposed in the second processing station. The present invention relates to a thin plate transfer device and the like.

  As a prior art of a thin plate transfer device used in the field of clean transfer, there is one shown in Patent Document 1, and the configuration of the thin plate transfer device according to the prior art will be briefly described below.

  That is, an apparatus main body is provided at a transfer station between the first processing station and the second processing station, and a U-shaped support member is provided on the apparatus main body so as to be movable in the X-axis direction. A support member moving motor for moving the support member in the X-axis direction is provided at an appropriate position of the apparatus main body. The support member is provided with a hand for supporting the thin plate from below so that the hand can move in the X-axis direction. A hand moving motor for moving the hand in the X-axis direction is provided at an appropriate position of the support member. It has been.

  The apparatus main body is provided with a roller conveyor that moves the thin plate in the X-axis direction so that it can be moved up and down. A conveyor elevating cylinder (an example of a conveyor elevating actuator) that raises and lowers the roller conveyor is provided at an appropriate position of the apparatus main body. Is provided. The roller conveyor includes a plurality of transfer rollers that can rotate around an axis parallel to the Y-axis direction, and a roller rotation motor that rotates the plurality of transfer rollers.

  Therefore, driving the support member moving motor moves the support member to one side in the X-axis direction with respect to the apparatus body, and driving the hand moving motor moves the hand to one side in the X-axis direction with respect to the support member. Then, the thin plate positioned at a predetermined position of the first thin plate processing apparatus is supported by the hand from below. The support member moving motor is driven to move the support member to the other side in the X axis direction with respect to the apparatus main body, and the hand moving motor is driven to move the hand to the other side in the X axis direction with respect to the support member. Then, the thin plate is pulled out from the first thin plate processing apparatus to the apparatus main body side.

  After pulling out the thin plate from the first thin plate processing apparatus to the apparatus main body side, the conveyor is raised by driving the conveyor lifting cylinder, and a plurality of transfer rollers in the conveyor are projected upward with respect to the support position of the hand The thin plate is transferred from the hand to a plurality of transfer rollers. And a thin plate can be sent to a 2nd thin plate processing apparatus from the apparatus main body side by rotating a some transfer roller by the drive of the actuator for roller rotation.

As described above, the thin plate can be transferred from the first thin plate processing apparatus to the second thin plate processing apparatus. (Note that the thin plate can be transferred from the second thin plate processing apparatus to the first thin plate processing apparatus by performing an operation opposite to the above-described operation.)
WO2006 / 129385

  By the way, in the thin plate transfer apparatus according to the prior art as described above, in addition to the hand and the hand moving motor, in addition to the hand and the hand moving motor, the roller conveyor and the conveyor are used to transfer the thin plate from the first thin plate processing apparatus to the second thin plate processing apparatus. An elevating cylinder is required, and the manufacturing cost of the thin plate transfer device tends to increase.

  On the other hand, instead of a hand, a hand moving motor, etc., a suction pad (moving in the X-axis direction) is provided in the apparatus main body and sucks the back surface of the thin plate on both ends (one end side and the other end side) in the X-axis direction. By using a plurality of transfer arms having a first suction pad on one end side and a second suction pad on the other end side, it is possible to omit the roller conveyor and the conveyor lifting / lowering actuator from the components of the thin plate transfer device. . That is, the thin plate is pulled out from the first thin plate processing apparatus by sucking the back surface of the thin plate with the plurality of first suction pads and moving the plurality of transfer arms to the other side in the X-axis direction. Next, the suction state by the plurality of first suction pads is released, the plurality of transfer arms are moved to one side in the X-axis direction, and the back surface of the thin plate is sucked by the plurality of second suction pads. And a thin plate is sent out to a 2nd thin plate processing apparatus by moving a some transfer arm to the other side of a X-axis direction. Thereby, a thin plate can be transferred from a 1st thin plate processing apparatus to a 2nd thin plate processing apparatus, without using a roller conveyor and a conveyor raising / lowering actuator.

  However, when a thin plate is transferred from the first thin plate processing apparatus to the second thin plate processing apparatus using a plurality of transfer arms, it is necessary to sufficiently secure the movement range of the transfer arm in the X-axis direction. For this reason, the installation space in the X-axis direction of the thin plate transfer device is enlarged, and it is difficult to effectively use the factory space.

  Therefore, an object of the present invention is to provide a thin plate transfer device, a thin plate processing transfer system, and a thin plate transfer method having a novel configuration that can solve the above-described problems.

  The first feature of the present invention is that it is disposed in a first processing unit that is disposed in a first processing station and performs processing on a thin plate, and a second processing station that is spaced apart in the X-axis direction from the first processing station. A thin plate transfer apparatus for transferring a thin plate in a floated state between a second thin plate processing apparatus and a second thin plate processing apparatus that performs processing on the thin plate, wherein the transfer station is between the first processing station and the second processing station. An apparatus main body provided in the apparatus main body, a levitating unit provided in the apparatus main body for levitating a thin plate, and provided in the apparatus main body movable in the X-axis direction and spaced in the Y-axis direction, respectively in the X-axis direction. A first suction pad that extends and has a first suction pad that sucks the back surface or surface of the thin plate on one end side in the X-axis direction, and a second suction pad that sucks the back surface or surface of the thin plate on the other end side in the X-axis direction. A plurality of transfer arms each for pulling out a thin plate from the first thin plate processing apparatus and sending the thin plate to the second thin plate processing apparatus; and moving the plurality of transfer arms in the X-axis direction. An actuator for arm movement, a positioning mechanism for immediately after pulling out the thin plate relative to the apparatus main body immediately after the thin plate is pulled out from the first thin plate processing apparatus to the apparatus main body by the transfer arm, and the transfer arm. A gist is provided with a positioning mechanism for immediately before feeding, which positions a thin plate with respect to the apparatus main body immediately before the thin plate is sent from the apparatus main body side to the second thin plate processing apparatus.

  Here, in the claims and the specification of the present application, “provided” means not only directly provided but also indirectly provided via an intermediate member. The “processing” means process processing, conveyance processing, storage processing, and the like, and the process processing includes etching processing, CVD processing, PVD processing, and the like.

  According to the first feature, the plurality of transfer arms are moved to one side in the X-axis direction by driving the arm moving actuator, and are moved to a predetermined position of the first thin plate processing apparatus by the plurality of first suction pads. Adsorb the back or front surface of the thin plate. Next, the plurality of transfer arms are moved to the other side in the X-axis direction by driving the arm moving actuator while the levitation unit is levitating, so that the transfer arm moves the thin plate from the first thin plate processing apparatus. Is pulled out toward the apparatus main body. Further, immediately after the thin plate is pulled out, the thin plate is positioned with respect to the apparatus main body by the positioning mechanism immediately after the pulling out. Then, the suction state by the plurality of first suction pads is released, the plurality of transfer arms are moved to one side in the X-axis direction by driving the arm moving actuator, and the plurality of second suction pads or The back surface or front surface of the thin plate is sucked by the plurality of first suction pads.

  After the back surface or front surface of the thin plate is sucked by the plurality of second suction pads or the plurality of first suction pads, the plurality of transfer arms are moved by driving the arm moving actuator while the floating unit is lifted. Move to the other side in the axial direction. And just before sending out a thin plate from the apparatus main body side to the second thin plate processing apparatus by the transfer arm, the thin plate is positioned with respect to the apparatus main body by the positioning mechanism for immediately before delivery.

  After the thin plate is positioned with respect to the apparatus main body by the positioning mechanism immediately before delivery, the suction state by the plurality of second suction pads or the plurality of first suction pads is released, and the arm moving actuator is driven. The plurality of transfer arms are moved to one side in the X-axis direction, and the back surface or the surface of the thin plate is sucked by the plurality of second suction pads. Then, while moving the levitation unit, the plurality of transfer arms are moved to the other side in the X-axis direction by driving the arm moving actuator, whereby the thin plate is moved from the apparatus main body side by the transfer arm. 2 It sends out to a thin plate processing apparatus, and the adsorption state by a plurality of the 2nd adsorption pads is cancelled.

  As described above, the thin plate can be transferred from the first thin plate processing apparatus to the second thin plate processing apparatus in a floating state.

  In short, a plurality of transfer arms are provided in the apparatus main body so as to be movable in the X-axis direction, each transfer arm has the first suction pad on one end side in the X-axis direction, and the other end side in the X-axis direction. Therefore, the thin plate can be transferred from the first thin plate processing apparatus to the second thin plate processing apparatus without using a roller conveyor and a conveyor lifting / lowering actuator.

  In addition, immediately after the thin plate is pulled out from the first thin plate processing apparatus to the apparatus main body side, the thin plate is positioned with respect to the apparatus main body by the positioning mechanism for pulling out immediately, and the plurality of transfer arms are moved in the X-axis direction. And moving the thin plate from the apparatus main body side to the second thin plate processing apparatus immediately before the thin plate is sent to the second thin plate processing apparatus by positioning the thin plate with respect to the apparatus main body by the positioning mechanism for immediately before sending, Since it is moved to one side in the X-axis direction, it is possible to sufficiently suppress the movement range of the transfer arm in the X-axis direction from being expanded.

  According to a second aspect of the present invention, in the thin plate processing transfer system for processing and transferring a thin plate, the first thin plate processing apparatus which is disposed in the first processing station and performs processing on the thin plate, and the first A second thin plate processing apparatus, which is disposed in a second processing station spaced apart in the X-axis direction from the processing station and performs processing on a thin plate, and a transfer station between the first processing station and the second processing station. And a thin plate transfer device comprising the invention-specifying matters described in claim 1.

  The second feature also has the same effect as the first feature.

  According to a third aspect of the present invention, the thin plate transfer apparatus according to the first feature is used to separate the first thin plate processing apparatus disposed in the first processing station from the first processing station in the X-axis direction. In a thin plate transfer method of transferring a thin plate in a floated state with a second thin plate processing apparatus disposed in a second processing station, a plurality of transfer arms are moved to one side in the X-axis direction. A first step of sucking a back surface or a front surface of a thin plate located at a predetermined position of the first thin plate processing apparatus by the first suction pad, and a plurality of the above-mentioned while moving the levitation unit after the first step. By moving the transfer arm to the other side in the X-axis direction, the transfer arm pulls out the thin plate from the first thin plate processing apparatus toward the apparatus main body, and immediately after pulling out the thin plate, immediately after pulling out. A second step of positioning the thin plate with respect to the apparatus main body by a positioning mechanism; and after completion of the second step, the suction state by the plurality of first suction pads is released, and the plurality of transfer arms are moved in the X-axis direction. A third step of sucking the back surface or the front surface of the thin plate by the plurality of second suction pads or the plurality of first suction pads, and after the completion of the third step, the levitation unit is levitated While operating, the plurality of transfer arms are moved to the other side in the X-axis direction, and immediately before the thin plate is sent from the apparatus main body side to the second thin plate processing apparatus by the transfer arm, And a plurality of second suction pads or a plurality of first suction pads after completion of the fourth step. A fifth step of releasing the suction state by the pad, moving the plurality of transfer arms to one side in the X-axis direction, and sucking the back or front surface of the thin plate by the plurality of second suction pads; After the step is completed, the plurality of transfer arms are moved to the other side in the X-axis direction while the levitation unit is lifted to move the thin plate from the apparatus main body side to the second thin plate processing apparatus by the transfer arm. And a sixth step of releasing the suction state by the plurality of second suction pads.

  According to the third feature, as described above, a thin plate can be transferred from the first thin plate processing apparatus to the second thin plate processing apparatus without using a roller conveyor and a conveyor lifting / lowering actuator.

  In addition, immediately after the thin plate is pulled out from the first thin plate processing apparatus to the apparatus main body side, the thin plate is positioned with respect to the apparatus main body by the positioning mechanism for pulling out immediately, and the plurality of transfer arms are moved in the X-axis direction. And moving the thin plate from the apparatus main body side to the second thin plate processing apparatus immediately before the thin plate is sent to the second thin plate processing apparatus by positioning the thin plate with respect to the apparatus main body by the positioning mechanism for immediately before sending, Since it is moved to one side in the X-axis direction, it is possible to sufficiently suppress the movement range of the transfer arm in the X-axis direction from being expanded.

  According to the present invention, it is possible to transfer a thin plate from the first thin plate processing apparatus to the second thin plate processing apparatus without using a roller conveyor and a conveyor lifting / lowering actuator, and to move the transfer arm in the X-axis direction. Since the expansion of the range can be sufficiently suppressed, the installation cost in the X-axis direction of the thin plate transfer device can be reduced and the factory space can be effectively used while reducing the manufacturing cost of the thin plate transfer device. can do.

  An embodiment of the present invention will be described with reference to FIGS.

  Here, FIG. 1 is a view taken along line II in FIG. 2, FIG. 2 is a plan view mainly showing a thin plate transfer device according to an embodiment of the present invention, and FIG. 3 (a) is IIIA-IIIA in FIG. FIG. 3B is a diagram along the line IIIB-IIIB in FIG. 2, FIG. 4A is a diagram along the line IVA-IVA in FIG. 2, and FIG. 2 is a view taken along the line IVB-IVB in FIG. 2, FIGS. 5 to 7 are diagrams for explaining a thin plate transfer method according to the embodiment of the present invention, and FIG. 8 is a thin plate processing transfer system according to the embodiment of the present invention. FIG.

  As shown in FIG. 8, the thin plate processing transfer system 1 according to the embodiment of the present invention performs various processing on the thin plate W such as a glass substrate (in the embodiment of the present invention, process processing and storage processing). ) And transfer system. An outline of the thin plate processing transfer system 1 is as follows.

  In the first processing station PS1, a plurality of first thin plate processing apparatuses 3A, 3B, 3C for processing the thin plate W are arranged along the Y-axis direction (in other words, the front-rear direction). In addition, a plurality of second thin plate processing apparatuses 5A, 5B, and 5C that perform processing of the thin plate W are Y in the second processing station PS2 that is separated from the first processing station PS1 in the X-axis direction (in other words, the left-right direction). Arranged along the axial direction. Further, the transfer station TS between the first processing station PS1 and the second processing station PS2 receives the thin plate W between the first thin plate processing apparatuses 3A, 3B, 3C and the second thin plate processing apparatuses 5A, 5B, 5C. A thin plate transfer device 7 for transferring in a floating state is provided.

  Here, the first thin plate processing apparatus 3A and the second thin plate processing apparatus 5A are devices that perform storage processing on the thin plate W, as disclosed in JP-A-2005-170675, and the first thin plate processing apparatuses 3B and 3C. And the 2nd thin plate processing apparatuses 5B and 5C are apparatuses which perform process processes, such as an etching process or a CVD process, with respect to the thin plate W. FIG. In addition, an appropriate position of the first thin plate processing apparatus 3A, a thin plate carry-in / out section 9 of the first thin plate processing apparatuses 3B and 3C, an appropriate position of the second thin plate processing apparatus 5A, and a thin plate carry-in / out of the second thin plate processing apparatuses 5B and 5C The part 11 is provided with a plurality of levitation units 13 that levitate the thin plate W with air pressure, and a plurality of hole-like nozzles 13n for ejecting air are formed on the upper surface of each levitation unit 13, respectively. ing.

  Next, a specific configuration of the thin plate transfer device 7 of the thin plate processing transfer system 1 will be described.

  As shown in FIGS. 1 and 2, a pair of guide rails 15 extending in the Y-axis direction are provided on the floor surface of the transfer station TS, and the apparatus main body 17 is attached to the Y-axis in the pair of guide rails 15. The apparatus main body 17 includes a leg frame 19 guided and supported by a pair of guide rails 15 and a support frame 21 provided horizontally above the leg frame 19. ing. An apparatus main body moving motor (an example of an apparatus main body moving actuator) 23 for moving the apparatus main body 17 in the Y-axis direction is provided at an appropriate position of the leg frame 19, and this apparatus main body moving motor 23 is provided. The output shaft is integrally provided with a pinion 25, and a rack 27 that meshes with the pinion 25 and extends in the Y-axis direction is provided between the pair of guide rails 15 on the floor surface of the transfer station TS. It has been.

  The support frame 21 is provided with a plurality of levitation units 29 that levitate the thin plate W by the air pressure along the X-axis direction and the Y-axis direction. Nozzle-shaped nozzles 29n are respectively formed. Instead of forming a plurality of hole-shaped nozzles 29n on the upper surface of each levitation unit 29, as shown in Japanese Patent Application Laid-Open No. 2006-182563, a frame-like shape inclined toward the center of the unit with respect to the vertical direction. A nozzle may be formed.

  In the support frame 21, a pair of support brackets 31 (front support bracket 31 and rear support bracket 31) extending in the X-axis direction are spaced apart in the Y-axis direction (separated in the Y-axis direction). Each support bracket 31 is provided with a slider 33 movably in the X-axis direction. Each slider 33 is provided with a transfer arm 35 that can be moved up and down via a lifting rod 37, and the pair of transfer arms 35 is connected to one of the first thin plate processing apparatuses 3A (3B, 3C). The thin plate W is pulled out and sent out, and the thin plate W is fed out and drawn out from the second thin plate processing apparatus 5A (5B, 5C). In other words, the support frame 21 is provided with a pair of transfer arms 35 that can move in the X-axis direction via the support bracket 31, the slider 33, and the lifting rod 37, can move up and down, and are spaced apart in the Y-axis direction. ing. Each transfer arm 35 extends in the X-axis direction, has a first suction pad 39 for sucking the back surface of the thin plate W on one end side in the X-axis direction, and the other end side in the X-axis direction. Each has a second suction pad 41 for sucking the back surface of the thin plate W. Further, each slider 33 is provided with an arm elevating air cylinder (an example of an arm elevating actuator) 43 for elevating the transfer arm 35 having a corresponding relationship.

  Each support bracket 31 is provided with an endless timing belt 45 extending in the X-axis direction so as to be able to travel via a plurality of pulleys 47, and each slider 33 is appropriately connected to the timing belt 45 having a corresponding relationship. Each is linked to a position. An arm moving motor (an example of an arm moving actuator) 49 for moving the pair of transfer arms 35 integrally with the slider 33 in the X-axis direction is provided at an appropriate position of the front support bracket 31. The output shaft (not shown) of the arm moving motor 49 is linked to a pair of timing belts 45 via an arm connecting mechanism (not shown) including a connecting shaft.

  As shown in FIG. 2, the thin plate transfer device 7 has the X axis of the thin plate W immediately after the thin plate W is pulled out from any one of the first thin plate processing apparatuses 3A (3B, 3C) to the apparatus main body 17 side (immediately after the thin plate is pulled out). A pair of first X-axis reference rollers 51 that can come into contact with one end surface (left end surface) in the direction, immediately before the thin plate W is sent from the device main body 17 side to any of the second thin plate processing devices 5A (5B, 5C) (just before the thin plate is sent) ) A pair of second X-axis reference rollers 53 that can abut against one end surface in the X-axis direction of the thin plate W, and a first X that can abut against the other end surface (right end surface) in the X-axis direction of the thin plate W immediately after the thin plate is pulled out. The shaft urging roller 55, the second X-axis urging roller 57 capable of abutting against the other end surface in the X-axis direction of the thin plate W immediately before feeding the thin plate, and the one end surface (front end surface) of the thin plate W in the Y-axis direction can be abutted. Pair of Y-axis reference rollers 9, and the other end face of the Y-axis direction of the thin plate W and a Y biasing axis roller 61 that can abut with a biasing force to (rear end face). The pair of first X-axis reference rollers 51, the pair of second X-axis reference rollers 53, the first X-axis biasing roller 55, and the second X-axis biasing roller 57 are floated by the thin plate floating height position (the floating unit 29). The pair of Y-axis reference roller 59 and the Y-axis biasing roller 61 are placed at the height of the thin-plate floating height (see FIGS. 3A and 3B). In contrast, it protrudes upward (see FIGS. 4A and 4B). The peripheral configuration of the first X-axis reference roller 51, the peripheral configuration of the second X-axis reference roller 53, the peripheral configuration of the first X-axis biasing roller 55, the peripheral configuration of the second X-axis biasing roller 57, and the Y-axis reference roller 59 The peripheral configuration and the peripheral configuration of the pair of Y-axis biasing rollers 61 are as follows.

  That is, as shown in FIGS. 1 and 3A, the first left block 63 can move in the X-axis direction via the left guide 65 at one end portion (left end portion) of the support frame 21 in the X-axis direction. The first left block reference position (the position indicated by the phantom line in FIG. 3A) and the first left block retracted position (first left block reference) are provided at appropriate positions of the support frame 21. The first left block 63 is moved in the X-axis direction between the position and the position retracted to one side in the X-axis direction (left side in FIG. 3A) (the position indicated by the solid line in FIG. 3A). A first left block moving air cylinder 67 to be moved is provided. The first left block 63 is provided with a roller support member 69 that supports the first X-axis reference roller 51 so as to be rotatable about the vertical axis so as to be lifted and lowered via a lifting rod (not shown). The left block 63 is provided with a first X-axis reference roller raising / lowering air cylinder 71 for raising and lowering the first X-axis reference roller 51 integrally with the roller support member 69 (peripheral configuration of the first X-axis reference roller 51).

  Similarly, a second left block 73 is provided in the vicinity of one end (near the left end) of the support frame 21 in the X-axis direction so as to be movable in the X-axis direction via the left guide 65. The appropriate positions include a second left block reference position (a position indicated by an imaginary line in FIG. 3A) and a second left block retracted position (one side in the X-axis direction from the second left block reference position (see FIG. 3). 3 (a left side in FIG. 3 (a)) (second left block moving air cylinder for moving the second left block 73 in the X-axis direction) to the position retracted to the position (shown by the solid line in FIG. 3 (a)) 75 is provided. The second left block 73 is provided with a roller support member 77 that supports the second X-axis reference roller 53 so as to be rotatable about the vertical axis so as to be lifted and lowered via a lifting rod (not shown). The left block 73 is provided with a second X-axis reference roller lifting / lowering air cylinder 79 that moves the second X-axis reference roller 53 integrally with the roller support member 77 (peripheral configuration of the second X-axis reference roller 53).

  As shown in FIGS. 1 and 3B, the first light block 81 moves in the X-axis direction via the light guide 83 near the other end portion in the X-axis direction (near the right end portion) of the support frame 21. The first light block reference position (the position indicated by the phantom line in FIG. 3B) and the first light block retreat position (the first light block) are provided at appropriate positions on the support frame 21. The first light block 81 is moved from the reference position to the other side in the X-axis direction (the position indicated by the solid line in FIG. 3B) retracted to the other side in the X-axis direction (the right side in FIG. 3B). A first light block moving air cylinder 85 that moves in the direction is provided. The first light block 81 includes a roller support member 87 that supports the first X-axis urging roller 55 so as to be rotatable about the vertical axis via an attachment member 89 having a U-shaped cross section and a lifting rod (not shown). The first light block 81 is provided with a first X-axis reference roller lifting / lowering air cylinder 91 that lifts and lowers the first X-axis urging roller 55 integrally with the roller support member 87. Further, a spring 93 that biases the first X-axis biasing roller 55 to one side in the X-axis direction (left side in FIG. 3B) is provided at an appropriate position of the mounting member 89 (first X The peripheral configuration of the shaft urging roller 55).

  Similarly, a second light block 95 is provided at the other end portion (right end portion) of the support frame 21 in the X-axis direction so as to be movable in the X-axis direction via the light guide 83. The second light block reference position (the position indicated by the phantom line in FIG. 3B) and the second light block retracted position (from the second light block reference position to the other side in the X-axis direction (FIG. 3) The second light block moving air cylinder 97 for moving the second light block 95 in the X-axis direction between the position retracted to the right side in (b) (the position indicated by the solid line in FIG. 3B)). Is provided. The second light block 95 includes a roller support member 99 that supports the second X-axis urging roller 57 so as to be rotatable about the vertical axis via an attachment member 101 having a U-shaped cross section and a lifting rod (not shown). The second light block 95 is provided with a second X-axis reference roller lifting / lowering air cylinder 103 that lifts and lowers the second X-axis urging roller 57 integrally with the roller support member 99. Furthermore, a spring 105 that urges the second X-axis urging roller 57 to one side in the X-axis direction (left side in FIG. 3B) is provided at an appropriate position of the mounting member 101 (second X The peripheral configuration of the shaft urging roller 57).

  As shown in FIGS. 1 and 4A, a front block 107 is provided at one end portion (front end portion) of the support frame 21 in the Y-axis direction so as to be movable in the Y-axis direction via a front guide 109. The front block reference position (the position indicated by the phantom line in FIG. 4A) and the front block retracted position (one side in the Y-axis direction from the front block reference position) 4 (a) is provided with a front block moving air cylinder 111 that moves the front block 107 in the Y-axis direction to a position retracted to the right side in FIG. 4 (a) (position indicated by a solid line in FIG. 4 (a)). ing. The front block 107 is provided with a roller support member 113 that supports the Y-axis reference roller 59 so as to be rotatable around the vertical axis (a peripheral configuration of the Y-axis reference roller 59).

  As shown in FIGS. 1 and 4B, a rear block 115 is provided on the other end portion (rear end portion) of the support frame 21 in the Y-axis direction so as to be movable in the Y-axis direction via a rear guide 117. The rear frame reference position (the position indicated by the phantom line in FIG. 4B) and the rear block retract position (from the rear block reference position to the other side in the Y-axis direction) are appropriately positioned on the support frame 21. A rear block moving air cylinder 119 for moving the rear block 115 in the Y-axis direction with respect to a position retracted to the left side in FIG. 4B (a position indicated by a solid line in FIG. 4B). Is provided. The rear block 115 is provided with a roller support member 121 that rotatably supports the Y-axis urging roller 61 about the vertical axis via an attachment member 123 having a U-shaped cross section. At the position, a spring 125 is provided to bias the Y-axis biasing roller 61 toward one side in the Y-axis direction (right side in FIG. 4B) (peripheral configuration of the Y-axis biasing roller 61). .

  With the above configuration, immediately after the thin plate W is pulled out from any one of the first thin plate processing apparatuses 3A (3B, 3C) to the apparatus main body 17 side, the pair of first X axis reference roller lifting / lowering air cylinders 71 is driven. The 1X axis reference roller 51 is raised and protrudes upward with respect to the thin plate flying height position. Next, by driving the pair of first left block moving air cylinders 67, the pair of first left blocks 63 is moved from the first left block retraction position to the first left block reference position, thereby making a pair of first left block movement positions. The 1X-axis reference roller 51 is abutted against one end surface of the thin plate W in the X-axis direction. Then, with the first X-axis urging roller 55 protruding upward with respect to the thin plate floating height position, the first light block 81 is moved to the first light block by driving the pair of first light block moving air cylinders 85. By moving the block from the blocking position to the first light block reference position, the first X-axis urging roller 55 is abutted against the other end surface of the thin plate W in the X-axis direction by the urging force of the spring 93. Thus, the thin plate W can be positioned in the X-axis direction with respect to the apparatus main body 17 immediately after the thin plate W is pulled out from any of the first thin plate processing apparatuses 3A (3B, 3C) to the apparatus main body 17 side.

  Further, by driving the pair of front block moving air cylinders 111, the pair of front blocks 107 are moved from the front block retracted position to the front block reference position, whereby the pair of Y-axis reference rollers 59 are moved to the Y of the thin plate W. It abuts against one end face in the axial direction. Then, by driving the pair of rear block moving air cylinders 119, the rear block 115 is moved from the light block retracted position to the rear block reference position, whereby the Y-axis biasing roller 61 is moved in the Y-axis direction of the thin plate W. It abuts against the other end surface with the biasing force of the spring 125. Accordingly, the thin plate W can be positioned in the Y-axis direction with respect to the apparatus main body 17 immediately after the thin plate W is pulled out from any one of the first thin plate processing apparatuses 3A (3B, 3C) to the apparatus main body 17 side.

  The pair of first X-axis reference rollers 51, the first X-axis urging roller 55, the Y-axis reference roller 59, the pair of Y-axis urging rollers 61, and their peripheral configurations are any of the first thin plate processing apparatuses 3A. This corresponds to a positioning mechanism for immediately after pulling out, which positions the thin plate W with respect to the apparatus main body 17 immediately after the thin plate W is pulled out from (3B, 3C) to the apparatus main body side.

  Similarly, a pair of second X-axis is driven by driving a pair of second X-axis reference roller raising / lowering air cylinders 79 immediately before the thin plate W is sent from the apparatus main body 17 side to any of the second thin-plate processing apparatuses 5A (5B, 5C). The reference roller 53 is raised and protruded upward with respect to the thin plate flying height position. Next, by driving the pair of second left block moving air cylinders 75, the pair of second left blocks 73 is moved from the second left block retraction position to the second left block reference position, thereby causing a pair of second left block movement positions. The 2X-axis reference roller 53 is abutted against one end surface of the thin plate W in the X-axis direction. Then, the second light block 95 is moved to the second light block 95 by driving the pair of second light block moving air cylinders 97 with the second X-axis urging roller 57 protruding upward with respect to the thin plate floating height position. By moving the block from the blocking position to the second light block reference position, the second X-axis urging roller 57 abuts against the other end surface of the thin plate W in the X-axis direction with the urging force of the spring 105. Thus, the thin plate W can be positioned in the X-axis direction with respect to the apparatus main body 17 immediately before the thin plate W is sent from the apparatus main body 17 side to any of the second thin plate processing apparatuses 5A (5B, 5C).

  Further, the pair of Y-axis reference rollers 59 is abutted against one end surface of the thin plate W in the Y-axis direction. Then, the Y-axis biasing roller 61 is abutted against the other end surface of the thin plate W in the Y-axis direction with the biasing force of the spring 125. Accordingly, the thin plate W can be positioned in the Y-axis direction with respect to the apparatus main body 17 immediately before the thin plate W is sent from the apparatus main body 17 side to any of the second thin plate processing apparatuses 5A (5B, 5C).

  The pair of second X-axis reference rollers 53, the second X-axis urging roller 57, the Y-axis reference roller 59, the pair of Y-axis urging rollers 61, and their peripheral configurations are either a thin plate from the apparatus main body side. This corresponds to a positioning mechanism for immediately before sending that positions the thin plate W with respect to the apparatus main body 17 immediately before sending it to the second thin plate processing apparatus.

  Next, a thin plate transfer method according to an embodiment of the present invention will be described with reference to FIGS.

  The thin plate transfer method according to the embodiment of the present invention is a method of transferring a thin plate in a state of being floated between, for example, the first thin plate processing apparatus 3A and the second thin plate processing apparatus 5C. Steps 6 to 6 are provided.

(i) First Step As shown in FIG. 5A, the apparatus main body 17 is moved in the Y-axis direction by driving the apparatus main body moving motor 23, and the apparatus main body 17 is adjacent to the first thin plate processing apparatus 3A. It is positioned at a position (in other words, a position where the thin plate W can be pulled out from the first thin plate processing apparatus 3A to the apparatus main body 17 side). Next, the arm moving motor 49 is driven to move the pair of transfer arms to one side in the X-axis direction (left side in FIGS. 5 to 7). The first suction pad 39 is positioned below the thin plate W located at a predetermined position of the first thin plate processing apparatus 3A. Then, the pair of transfer arms 35 are raised by driving the pair of arm raising / lowering air cylinders 43, and the pair of first suction pads 39 sucks the portion on the other end side in the X-axis direction on the back surface of the thin plate W.

(ii) Second Step After the completion of the first step, the pair of transfer arms 35 is moved to the other side in the X-axis direction by driving the arm moving motor 49 while ejecting air from the nozzles 29n of the plurality of floating units 29 (see FIG. 5 to the right side in FIG. 7, as shown in FIG. 5C, the pair of transfer arms 35 moves the thin plate W from the first thin plate processing apparatus 3 </ b> A to the apparatus main body 17 side (the floating unit 29 side). ) Pull out.

  Further, immediately after the thin plate W is pulled out, as described above, the pair of first X-axis reference rollers 51 abut against one end surface in the X-axis direction of the thin plate W, and the first X-axis biasing roller 55 is moved to the X-axis of the thin plate W. And a pair of Y-axis reference rollers 59 butted against one end surface of the thin plate W in the Y-axis direction, and the Y-axis biasing roller 61 is pushed in the Y-axis direction of the thin plate W. The thin plate W is positioned with respect to the apparatus main body 17 in the X-axis direction and the Y-axis direction by abutting against the other end surface with the biasing force of the spring 125.

(iii) Third Step After the completion of the second step, the suction state by the pair of first suction pads 39 is released, and the pair of transfer arms 35 is lowered by driving the pair of arm elevating air cylinders 43. Then, as shown in FIG. 6A, the pair of transfer arms 35 is moved to one side in the X-axis direction by driving the arm moving motor 49, and the pair of arm lifting / lowering air cylinders 43 is driven. The transfer arm 35 is raised, and the back surface of the thin plate W is sucked by the plurality of second suction pads 41. Further, the first X-axis reference roller 51 and the first X-axis urging roller 55 are recessed downward with respect to the thin plate flying height position, and the first left block 63 is moved to the first left block retracting position. One light block 81 is positioned at the first light block retract position, the front block 107 is positioned at the front block retract position, and the rear block 115 is positioned at the rear block retract position.

  Further, after the start of the third step and before the end of the fifth step, the apparatus main body 17 is moved in the Y-axis direction by driving the apparatus main body moving motor 23, and the apparatus main body 17 is moved to the second thin plate processing apparatus 5C. (In other words, a position where the thin plate can be sent from the apparatus main body 17 side to the second thin plate processing apparatus 5C).

(iv) Fourth Step After the completion of the third step, the pair of transfer arms 35 are moved to the other side in the X-axis direction by driving the arm moving motor 49 while ejecting air from the nozzles 29n of the plurality of floating units 29. Let And just before sending the thin plate W from the apparatus main body 17 side to the second thin plate processing apparatus 5C by the pair of transfer arms 35, as described above, the pair of second X-axis reference rollers 53 is connected to one end surface of the thin plate W in the X-axis direction. The second X-axis urging roller 57 is abutted against the other end surface of the thin plate W in the X-axis direction by the urging force of the spring 105, and the pair of Y-axis reference rollers 59 are opposed to one end surface of the thin plate W in the Y-axis direction. By abutting and abutting the Y-axis biasing roller 61 against the other end surface in the Y-axis direction of the thin plate W with the biasing force of the spring 125, the thin plate W is brought into contact with the apparatus main body 17 as shown in FIG. Positioning in the X-axis direction and the Y-axis direction.

(v) Fifth Step After the completion of the fourth step, the suction state by the pair of first suction pads 39 is released, and the pair of transfer arms 35 are lowered by driving the pair of arm lifting / lowering air cylinders 43. 7A, the pair of transfer arms 35 is moved to one side in the X-axis direction by driving the arm moving motor 49, and the pair of arm raising / lowering air cylinders 43 is driven. The transfer arm 35 is raised, and a portion on one end side in the X-axis direction on the back surface of the thin plate W is sucked by the plurality of second suction pads 41. Further, the pair of second X-axis reference roller 53 and second X-axis urging roller 57 are recessed downward with respect to the thin plate floating height position, and the second left block 73 is moved to the second left block retreat position. The two light blocks 95 are positioned at the second light block retracted position, the front block 107 is positioned at the front block retracted position, and the rear block 115 is positioned at the rear block retracted position.

(vi) Sixth Step After completion of the fifth step, the pair of transfer arms 35 are moved to one side in the X-axis direction by driving the arm moving motor 49 while jetting air from the nozzles 29n of the plurality of floating units 29. By doing so, as shown in FIG. 7B, the thin plate W is sent out from the apparatus main body 17 side to the second thin plate processing apparatus 5C. Then, the suction state by the pair of second suction pads 41 is released, and the pair of transfer arms 35 are lowered by driving the pair of arm lifting / lowering air cylinders 43.

  As described above, for example, the thin plate W can be transferred from the first thin plate processing apparatus 3 </ b> A to the second thin plate processing apparatus 5 </ b> C in a floating state. Note that, by causing the thin plate transfer device 7 to perform an operation reverse to the above-described operation, for example, the thin plate W can be transferred from the second thin plate processing device 5C to the first thin plate processing device 3A in a floating state.

  Then, the effect | action and effect of embodiment of this invention are demonstrated.

  A pair of transfer arms 35 are provided on the apparatus body 17 so as to be movable in the X-axis direction. Each transfer arm 35 has a first suction pad 39 on one end side in the X-axis direction, and on the other end side in the X-axis direction. Since each of the second suction pads 41 is provided, any of the first thin plate processing apparatuses 3A (3B, 3C) to any of the second thin plate processing apparatuses 5A (without using the roller conveyor and the conveyor lifting / lowering actuator) The thin plate W can be transferred to 5B, 5C).

  Further, immediately after the thin plate W is pulled out from any of the first thin plate processing apparatuses 3A (3B, 3C) to the apparatus main body 17 side, the thin plate W is positioned with respect to the apparatus main body 17, and the plurality of transfer arms 35 are set to X. While moving to one side in the axial direction, the thin plate W is positioned with respect to the device main body 17 immediately before the thin plate W is sent from the device main body 17 side to any of the second thin plate processing apparatuses 5A (5B, 5C). Since the plurality of transfer arms 35 are moved to one side in the X-axis direction, it is possible to sufficiently suppress the movement range of the transfer arm 35 in the X-axis direction from being expanded.

  As described above, according to the embodiment of the present invention, any first thin plate processing apparatus 3A (3B, 3C) to any second thin plate processing apparatus 5A (5B) can be used without using a roller conveyor and a conveyor lifting / lowering actuator. , 5C) and can sufficiently suppress the movement range of the transfer arm 35 in the X-axis direction from being expanded, and thus the manufacturing cost of the thin plate transfer device 7 (in other words, While reducing the manufacturing cost of the thin plate processing transfer system 1, the installation space in the X axis direction of the thin plate transfer device 7 (in other words, the installation space in the X axis direction of the thin plate processing transfer system 1) is reduced, Can be used effectively.

  The present invention is not limited to the description of the above-described embodiment. For example, instead of the levitation unit 29 that levitates the thin plate W by air pressure, the levitation unit that levitates the thin plate W using ultrasonic waves. In addition, the present invention can be implemented in various modes. Further, the scope of rights encompassed by the present invention is not limited to these embodiments.

FIG. 3 is a view taken along line II in FIG. 2. It is a top view which mainly shows the thin plate transfer apparatus which concerns on embodiment of this invention. 3A is a view taken along the line IIIA-IIIA in FIG. 2, and FIG. 3B is a view taken along the line IIIB-IIIB in FIG. 4A is a view taken along line IVA-IVA in FIG. 2, and FIG. 4B is a view taken along line IVB-IVB in FIG. It is a figure explaining the thin plate transfer method which concerns on embodiment of this invention. It is a figure explaining the thin plate transfer method which concerns on embodiment of this invention. It is a figure explaining the thin plate transfer method which concerns on embodiment of invention. It is a typical top view of a thin plate processing transfer system concerning an embodiment of the present invention.

Explanation of symbols

PS1 First processing station PS2 Second processing station TS Transfer station W Thin plate 1 Thin plate processing transfer system 3A First thin plate processing device 3B First thin plate processing device 3C Second thin plate processing device 5A Second thin plate processing device 5B Second thin plate processing device 5C Second thin plate processing device 7 Thin plate transfer device 17 Device main body 23 Device main body moving motor 29 Lifting unit 35 Transfer arm 39 First suction pad 41 Second suction pad 49 Arm moving motor 51 First X-axis reference roller 53 Second X-axis Reference roller 55 First X-axis biasing roller 57 Second X-axis biasing roller 59 Y-axis reference roller 61 Y-axis biasing roller

Claims (4)

A first thin plate processing apparatus that is disposed in the first processing station and performs processing on the thin plate, and a second thin film processing device that is disposed in the second processing station spaced apart in the X-axis direction from the first processing station and performs processing on the thin plate. In the thin plate transfer device that transfers the thin plate in a floated state with the second thin plate processing device to be performed,
An apparatus main body provided at a transfer station between the first processing station and the second processing station;
A levitation unit provided in the apparatus main body for levitating a thin plate;
A first suction that is movable in the X-axis direction and spaced in the Y-axis direction, extends in the X-axis direction, and sucks the back or surface of the thin plate on one end side in the X-axis direction. A second suction pad for sucking the back or front surface of the thin plate on the other end side in the X-axis direction, respectively, and pulling out the thin plate from the first thin plate processing apparatus or removing the thin plate into the second thin plate processing A plurality of transfer arms for feeding thin plates to the device;
An arm moving actuator for moving the plurality of transfer arms in the X-axis direction;
Immediately after pulling out the thin plate from the first thin plate processing apparatus to the apparatus main body side by the transfer arm, a positioning mechanism for immediately after pulling that positions the thin plate with respect to the apparatus main body,
A thin plate transfer apparatus comprising: a positioning mechanism for immediately before sending a thin plate relative to the apparatus main body immediately before the transfer arm feeds the thin plate from the apparatus main body side to the second thin plate processing apparatus. . In a thin plate processing transfer system for processing and transferring thin plates,
A first thin plate processing apparatus which is disposed in the first processing station and processes a thin plate;
A second thin plate processing apparatus that is disposed in a second processing station that is spaced apart from the first processing station in the X-axis direction and that performs processing on a thin plate;
A thin plate processing transfer system, comprising: a thin plate transfer device that is disposed at a transfer station between the first processing station and the second processing station and comprises the invention specific matter according to claim 1. A plurality of the first thin plate processing apparatuses are disposed along the Y-axis direction at the first processing station, and a plurality of the second thin plate processing apparatuses are disposed along the Y-axis direction at the second processing station,
The apparatus main body in the thin plate transfer device is provided to be movable in the Y axis direction between the transfer stations, and the thin plate transfer device includes an apparatus main body moving actuator for moving the device main body in the Y axis direction. The thin plate processing transfer system according to claim 2. Using the thin plate transfer device according to claim 1, the first thin plate processing device disposed in the first processing station and the second processing station spaced apart in the X-axis direction from the first processing station. In the thin plate transfer method of transferring the thin plate in a floating state with the second thin plate processing apparatus,
A first step of moving a plurality of transfer arms to one side in the X-axis direction and sucking a back surface or a front surface of a thin plate located at a predetermined position of the first thin plate processing apparatus by a plurality of first suction pads;
After completion of the first step, the plurality of transfer arms are moved to the other side in the X-axis direction while moving the levitation unit to move the thin plate from the first thin plate processing apparatus to the apparatus main body side. And a second step of positioning the thin plate with respect to the apparatus main body by the positioning mechanism for immediately after pulling out, immediately after pulling out the thin plate;
After completion of the second step, the suction state by the plurality of first suction pads is released, the plurality of transfer arms are moved to one side in the X-axis direction, and the plurality of second suction pads or the plurality of suction pads are moved. A third step of adsorbing the back surface or the front surface of the thin plate by the first suction pad;
After the third step, the plurality of transfer arms are moved to the other side in the X-axis direction while the levitation unit is lifted, and the second thin plate processing is performed from the apparatus main body side by the transfer arms. A fourth step of positioning the thin plate with respect to the apparatus main body by a positioning mechanism for immediately before delivery, immediately before delivery to the apparatus;
After completion of the fourth step, the suction state by the plurality of second suction pads or the plurality of first suction pads is released, and the plurality of transfer arms are moved to one side in the X-axis direction, A fifth step of adsorbing the back surface or front surface of the thin plate by the second suction pad;
After completion of the fifth step, the plurality of transfer arms are moved to the other side in the X-axis direction while moving the levitation unit to move the thin plate to the second thin plate processing apparatus by the transfer arm. And a sixth step of releasing the suction state by the plurality of second suction pads.

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