KR20150068575A

KR20150068575A - Board grip and carrying device and method for using thereof

Info

Publication number: KR20150068575A
Application number: KR1020130154345A
Authority: KR
Inventors: 김상록
Original assignee: 주식회사 킴스코퍼레이션
Priority date: 2013-12-12
Filing date: 2013-12-12
Publication date: 2015-06-22

Abstract

The present invention relates to a board grip, a carrying device and a method for using the same. A board grip and a carrying device to execute a continuous carrying as a follow-up process by gripping a returned substrate along a roller table comprise: a sliding block moved parallel to the roller table along a guide rail; a carrying unit driving block installed on the sliding block to be lifted; an operation cylinder fixed on an upper surface of the carrying unit driving block, and including an operating rod emerged in a widthwise direction of the roller table; a rotation motor fixed on a lower surface of the operating rod; a line shaft-fixed in the rotation motor, and arranged in the direction of being perpendicular to the operating rod; a column vertically fixed in the line; a vision camera installed on a lower surface of the operating rod; a plurality of adsorption units installed on the column; and a controller which is a microprocessor to synchronize the moving speed with the line speed of the roller table by controlling the sliding block, and to adsorb and arrange a substrate by controlling the driving of the carrying unit driving block, the operation cylinder, the rotation motor, the vision camera and the adsorption unit. In accordance with the present invention, because the carrying device and the roller table were not stopped at the time of carrying the substrate, carrying efficiency and workability are improved and productivity is increased.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a substrate holding apparatus,

The present invention relates to a substrate holding apparatus, a transfer apparatus, and a transfer method using the substrate holding apparatus. More particularly, the present invention relates to a substrate holding apparatus, A holding device, and a conveying method using the same.

2. Description of the Related Art In general, various types of transfer devices, mainly a robot system, are used for transferring substrates such as display panels and PCBs, including semiconductor lines.

And, related prior arts disclose a number of patented technologies including registered patent No. 0746575, registered patent No. 0979615. [

However, most of the prior art related to substrate transfer is a disconnection type transfer method using a robot arm or a structure in which the transfer is simply vertical or horizontal even if continuous transfer is performed. Therefore, it takes a lot of time for transfer and complication of control logic .

In addition, since the transported substrates are transported in a state in which they are transported in a slightly tilted state without being accurately transported in a precisely positioned state, in order to accurately grasp and transport these substrates, driving of the roller table is stopped, It is not efficient enough to recognize the degree of tilting and then rotate the conveying device by tilting, then descend, suction, grip, and then transfer. There is a drawback that it takes a lot of time.

In addition, most of the related art related to substrate transfer is a method in which the substrate is adsorbed and transported in an air-absorbing manner. When the air is adsorbed, the substrate completely adheres to the lower surface of the adsorber. Therefore, Scratches and damage to the main parts of the substrate are generated, which causes not only quality deterioration, but also causes poor substrate driving.

As another example for improving this, there is an example in which air is blown from the LCD substrate transfer line to the bottom of the substrate to transfer the substrate in a floating state, but this is not a method of transferring the substrate on the roller table, The present invention has a limitation that it can not be used when the substrate is attracted and held and then lifted to another processing line as in the present invention.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above-mentioned problems occurring in the prior art, and it is an object of the present invention to provide a roller table which, when the substrate is transported through a roller table according to a line speed, The present invention provides a substrate holding apparatus, a transfer apparatus, and a transfer method using the same.

In addition, the present invention prevents the surface of the substrate from being damaged by improving the quality of the substrate by allowing the bottom surface of the adsorber to be adsorbed while keeping the substrate at a predetermined interval without adsorbing on the bottom surface of the adsorber for transporting the substrate, The present invention provides a substrate holding apparatus, a transfer apparatus, and a transfer method using the same.

In order to accomplish the above object, the present invention provides a substrate holding and transferring apparatus for holding a substrate carried along a roller table and continuously transferring the substrate to a subsequent process, the apparatus comprising: A sliding block for moving along the guide rail in parallel with the roller table; A transfer unit driving block mounted on the sliding block and moved up and down; An actuating cylinder fixed to the upper surface of the conveying unit driving block and having an actuating rod projecting and retracting in the width direction of the roller table; A rotation motor fixed to a lower surface of the operation rod; A transverse shaft axially fixed to the rotary motor and arranged in a direction orthogonal to the operating rod; A platform secured perpendicularly to the platform; A vision camera provided on a lower surface of the operation rod; A plurality of adsorption units installed in the extensor; A controller which controls the sliding block to synchronize the moving speed with the line speed of the roller table, and controls the driving of the transfer unit driving block, the operating cylinder, the rotary motor, the vision camera and the suction unit to pick up and align the substrate; And a transfer unit for transferring the substrate.

In this case, the guide rail is a rack, and the means for moving along the rack is a pinion rotated by a motor.

The adsorption unit is also an air suction type adsorption type.

In addition, the adsorption unit is formed in the form of a double pipe composed of a discharge pipe as an inner pipe and a suction pipe as an outer pipe, discharging air through the discharge pipe, and sucking air through the suction pipe to bring the substrate into contact with the lower end face of the absorption unit And is also attracted and held in a state of being spaced apart by a certain distance.

Further, the suction pressure sucked through the suction pipe is larger than the discharge pressure discharged through the discharge pipe.

In addition, the present invention provides a method of transferring a substrate using the above-described substrate holding and transfer apparatus, The control unit may include a first step of receiving and confirming a line speed of a substrate to be transferred; A controller for checking the line speed of the substrate through the first step, the controller controlling the sliding speed of the sliding block to synchronize the sliding speed to the line speed to be equal to the line speed; A third step of capturing an image with a vision camera when the speed is synchronized through the second step; A fourth step of driving the rotation motor after the control unit reads the image photographed through the third step to rotate the horizontal axis and the horizontal axis to coincide with the substrate and to keep the horizontal axis and the extension axis close to the substrate; A fifth step of driving the adsorption unit to adsorb the substrate after the fourth step; And a sixth step of reversely rotating the sucked substrate to place the substrate in a regularly arranged state.

According to the present invention, not only the roller table but also the conveying device are not stopped at the time of transferring the substrate, so that the conveying efficiency is improved, the productivity is improved, and the workability is improved.

In addition, since the substrate does not stick to the adsorber when the substrate is adsorbed for transferring the substrate, surface defects including scratches on the substrate surface are prevented, thereby improving the quality of the substrate and preventing malfunction.

1 is an exemplary view of a substrate holding and transferring apparatus according to the present invention.
FIGS. 2 to 5 are views illustrating an operating state of the substrate holding and transferring apparatus according to the present invention.
FIG. 6 is a flow chart showing a transfer method using a substrate holding and transferring apparatus according to the present invention.
7 and 8 are exemplary structural views of a suction unit for transferring a substrate according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Before describing the present invention, the following specific structural or functional descriptions are merely illustrative for the purpose of describing an embodiment according to the concept of the present invention, and embodiments according to the concept of the present invention may be embodied in various forms, And should not be construed as limited to the embodiments described herein.

In addition, since the embodiments according to the concept of the present invention can make various changes and have various forms, specific embodiments are illustrated in the drawings and described in detail herein. However, it should be understood that the embodiments according to the concept of the present invention are not intended to limit the present invention to specific modes of operation, but include all modifications, equivalents and alternatives falling within the spirit and scope of the present invention.

1 to 5, a substrate holding and transferring apparatus according to the present invention includes a roller table 100 (see FIG. 2).

The roller table 100 carries a function of transporting a substrate B placed thereon by a plurality of rolls arranged and driven by rotation.

A transfer unit 200, which is movable in the longitudinal direction of the roller table 100, is installed on one side of the roller table 100.

At this time, a guide rail 210 is installed on one side of the roller table 100 to move the transfer unit 200, and a sliding block 220 is assembled to the guide rail 210 And is configured to be movable along the guide rail 210.

In this case, since the sliding block 220 is a normal driving block, a detailed description thereof will be omitted. In the sliding block 220, a transfer unit driving block 230 is installed. The transfer unit driving block 230 Can be moved in the vertical direction along the sliding block 220. The sliding block 220 may be a cylinder type or a motor and a ball screw type. Racks and pinions may also be used.

However, since these are well known structures widely known throughout the industry, the illustration is omitted.

An actuating cylinder 240 is fixed to an upper surface of the conveying unit driving block 220 and an actuating rod 250 is installed in the actuating cylinder 240 so that the roller table 110 in the width direction.

A rotation motor 260 is fixed to an end of the operation rod 250.

The rotation motor 260 is configured to be able to freely rotate the horizontal axis 262 fixed on the motor shaft 360 ° while being fixed to the operation rod 250.

Therefore, the length of the horizontal axis 262 can be adjusted in the width direction of the roller table 100 by the forward and backward movement of the operation rod 250, The position of the substrate B can be easily detected because the substrate B can be rotated, and the substrate B can be configured to be tilted correspondingly to the tilting state of the substrate B.

In addition, the horizontal legs 262 are vertically arranged on both sides with the operating rod 250 interposed therebetween, and the vertical legs 264 are fixed to the horizontal legs 262, respectively.

In other words, the extensions 264 are arranged in the width direction of the roller table 100.

At this time, it is preferable that the length of the extension 264 is formed to correspond to the substrate B.

In addition, a plurality of absorption units 266 are mounted on the extension 264.

The suction unit 266 may have various shapes, but an air suction type is particularly preferable.

In addition, a vision camera 270 is installed at an end of the operation rod 250, that is, at a slight distance from the rotation motor 260, and the vision camera 270 is connected to a controller (not shown).

The control unit is a kind of microprocessor that analyzes the image captured by the vision camera 270 for a very short time and controls the operation of the rotation motor 260 and the operation of the operation cylinder 240, Thereby controlling the operation of the adsorption unit 266.

The present invention having such a configuration operates in the following manner.

As shown in FIGS. 2 to 6, the control unit firstly receives a line speed of the substrate B to be conveyed and confirms the received line speed (S100).

Accordingly, the control unit can recognize the conveying speed of the substrate B, so that the conveying unit 200 according to the present invention can be synchronized with the conveying speed.

At this time, since the line speed is the rotational driving speed of the roller table 100, it is easy to confirm the line speed.

2, the controller performs a second step S110 of adjusting the sliding speed of the sliding block 220 to synchronize the sliding speed with the line speed to be equal to the line speed.

Then, as shown in FIG. 3, the transfer unit 200 moves simultaneously with the substrate B at the top of the substrate B.

Therefore, when viewed from the side of the substrate B, the transfer unit 200 seems to be relatively immovable.

If the speeds of the transfer unit 200 and the substrate B are synchronized with each other through the second step S110, a third step S120 of imaging with the vision camera 270 is performed as shown in FIGS. .

The image picked up in the third step S120 is read by the control unit, and it is clearly analyzed as to how the substrate B is turned during the conveyance according to the reading.

At this time, since such a reading or analysis algorithm is known in various forms, such an algorithm can be used, and since the present invention does not feature such an algorithm itself, its explanation is omitted here.

And this reading is done in a very short time because it is an electrical signal processing process.

When the reading is completed, the control unit controls the rotation motor 260 to rotate the horizontal frame 262 and the vertical frame 264 so that the vertical frame 264 is parallel to one side of the board B, A fourth step S130 is performed in which the conveyance unit 200 including the horizontal axis 262 and the operation rod 250 is lowered and held at a finely spaced distance from the substrate B by operating the second stage 230.

Thereafter, the fifth step S140 of driving the suction unit 266 to suction the substrate B and the sixth step of rotating the suctioned substrate B as shown in FIG. 5 to rotate the substrate B accurately (150) is performed, and the process is transferred to the subsequent process.

At this time, the process of rotating the substrate (B) and positioning the substrate (B) in a normal direction can be very easily performed by rotating the substrate (262) and the substrate (264) in a direction opposite to the rotation of the substrate .

As described above, since the substrate holding, transferring apparatus, and transferring method according to the present invention do not need to line up the substrate for substrate suction during transferring the substrate, it is possible to improve the working efficiency, increase the productivity, and shorten the working time .

In addition, as shown in FIGS. 7 and 8, the adsorption unit 266 is connected to the air supply and suction pipe 300 to suck and simultaneously supply air, that is, blow the air. 3, the adsorption unit 266 is configured in a form in which the inside is divided.

At this time, the air supply and suction pipe 300 is also formed in the form of a double pipe so as to discharge the air through the inner pipe inside and to suck air through the outer pipe provided outside the inner pipe. At this time, The center of the circle is concentric.

The inside of the adsorption unit 266 is composed of a discharge pipe 266a which is an inner pipe and a suction pipe 266b which is an outer appearance of a concentric circle surrounding the discharge pipe 266a.

The discharge pipe (266a) is provided with a discharge channel (310), and the discharge channel (310) is configured to communicate with the inner pipe of the air supply and suction pipe (300).

On the other hand, a suction passage 320 is formed in the suction pipe 266b, and the suction passage 320 is configured to communicate with an external appearance of the air supply and suction pipe 300. [

At this time, the suction pressure sucked through the suction pipe 266b must be larger than the discharge pressure discharged through the discharge pipe 266a. If the suction pressure is too high, the substrate B is adhered to the lower end face of the suction unit 266, .

The relation between the suction pressure and the discharge pressure may be maintained only to the extent that the substrate B is not attached, that is, the substrate B is not adhered to the substrate B finely.

To this end, the suction operation is carried out first through the suction pipe 266b, whereby the air is discharged through the discharge pipe 266a when the substrate B is to be sucked, so that the substrate B is changed to the suction unit 266 The substrate B is maintained in a state where it is not adsorbed by the discharge pressure immediately before it is adsorbed and remains in a fine state. When the instantaneous suction pressure and the discharge pressure maintain the equilibrium state, the substrate B does not stick to the state The substrate B can be sucked and held and transported without sucking it.

Such a control can be achieved by constructing a table so that quantitative control can be performed through dozens of experiments, and a control unit (microprocessor) automatically adjusts the suction pressure and the discharge pressure based on the table.

Therefore, it is not an impossibility to implement at all. For example, a magnetic levitation train is not a case of using air, but a similar example.

Thus, when the substrate B is first sucked through the suction pipe 266b of the suction unit 266, the substrate B is raised by the suction pressure.

Thereafter, when air is discharged through the discharge pipe 266a immediately before the substrate B comes into contact with the lower end of the absorption unit 266, the substrate B to be adsorbed is pushed back and attached to the lower end face of the absorption unit 266 I try not to fall.

However, in this process, since the suction pipe 266b continuously sucks the substrate B, the substrate B tends to be sucked again, and at the same time, the air discharged from the discharge pipe 266a tries to fall again. However, (B) is not adhered to the lower end surface of the absorption unit 266, but can be transported while gripped as if it is adsorbed at a certain distance, that is, in a slightly detached state.

100: roller table 200: conveying unit
210: guide rail 220: sliding block
230: transfer unit drive block 240: operation cylinder
250: operating rod 260: rotating motor
270: Vision camera B: substrate

Claims

A substrate holding and conveying apparatus for holding a substrate conveyed along a roller table and continuously conveying the substrate to a subsequent process, comprising:
A sliding block for moving along the guide rail in parallel with the roller table;
A transfer unit driving block mounted on the sliding block and moved up and down;
An actuating cylinder fixed to the upper surface of the conveying unit driving block and having an actuating rod projecting and retracting in the width direction of the roller table;
A rotation motor fixed to a lower surface of the operation rod;
A transverse shaft axially fixed to the rotary motor and arranged in a direction orthogonal to the operating rod;
A platform secured perpendicularly to the platform;
A vision camera provided on a lower surface of the operation rod;
A plurality of adsorption units installed in the extensor;
A controller which controls the sliding block to synchronize the moving speed with the line speed of the roller table, and controls the driving of the transfer unit driving block, the operating cylinder, the rotary motor, the vision camera and the suction unit to pick up and align the substrate; Wherein the substrate holding apparatus comprises a substrate holder for holding the substrate.

The method of claim 1,
Wherein the guide rail is a rack, and the means for moving along the rack is a pinion rotated by a motor.

The method of claim 1,
Wherein the adsorption unit is an air suction type adsorption system.

The method of claim 1,
Wherein the adsorption unit comprises:
And a suction pipe for sucking the air through the suction pipe, so that the substrate is separated from the lower end surface of the suction unit by a predetermined distance So as to attract and hold the substrate.

The method of claim 4,
Wherein the suction pressure sucked through the suction pipe is greater than the discharge pressure discharged through the discharge pipe.

A method of transferring a substrate using the substrate holding and transferring apparatus according to any one of claims 1 to 5, the method comprising:
The control unit may include a first step of receiving and confirming a line speed of a substrate to be transferred;
A controller for checking the line speed of the substrate through the first step, the controller controlling the sliding speed of the sliding block to synchronize the sliding speed to the line speed to be equal to the line speed;
A third step of capturing an image with a vision camera when the speed is synchronized through the second step;
A fourth step of driving the rotation motor after the control unit reads the image photographed through the third step to rotate the horizontal axis and the horizontal axis to coincide with the substrate and to keep the horizontal axis and the extension axis close to the substrate;
A fifth step of driving the adsorption unit to adsorb the substrate after the fourth step;
And a sixth step of reversely rotating the adsorbed substrate to place the substrate in a regularly arranged state.