JP2008302487A - 基板吸着装置及び基板搬送装置並びに外観検査装置 - Google Patents

基板吸着装置及び基板搬送装置並びに外観検査装置 Download PDF

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Publication number
JP2008302487A
JP2008302487A JP2007153922A JP2007153922A JP2008302487A JP 2008302487 A JP2008302487 A JP 2008302487A JP 2007153922 A JP2007153922 A JP 2007153922A JP 2007153922 A JP2007153922 A JP 2007153922A JP 2008302487 A JP2008302487 A JP 2008302487A
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Japan
Prior art keywords
suction
substrate
glass substrate
unit
adsorption
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Pending
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JP2007153922A
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English (en)
Japanese (ja)
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JP2008302487A5 (enExample
Inventor
Tomokazu Kiuchi
智一 木内
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Olympus Corp
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Olympus Corp
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2007153922A priority Critical patent/JP2008302487A/ja
Priority to KR1020080052407A priority patent/KR20080108904A/ko
Priority to CNA2008101089197A priority patent/CN101323396A/zh
Priority to TW097121524A priority patent/TW200906695A/zh
Publication of JP2008302487A publication Critical patent/JP2008302487A/ja
Publication of JP2008302487A5 publication Critical patent/JP2008302487A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

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  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Liquid Crystal (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2007153922A 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置 Pending JP2008302487A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007153922A JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置
KR1020080052407A KR20080108904A (ko) 2007-06-11 2008-06-04 기판 흡착 장치, 기판 반송 장치 및 외관 검사 장치
CNA2008101089197A CN101323396A (zh) 2007-06-11 2008-06-06 基板吸附装置和基板搬送装置以及外观检查装置
TW097121524A TW200906695A (en) 2007-06-11 2008-06-10 Substrate adsorption device, substrate transportation device and external inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007153922A JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置

Publications (2)

Publication Number Publication Date
JP2008302487A true JP2008302487A (ja) 2008-12-18
JP2008302487A5 JP2008302487A5 (enExample) 2010-07-01

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ID=40187135

Family Applications (1)

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JP2007153922A Pending JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置

Country Status (4)

Country Link
JP (1) JP2008302487A (enExample)
KR (1) KR20080108904A (enExample)
CN (1) CN101323396A (enExample)
TW (1) TW200906695A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104058257A (zh) * 2013-03-22 2014-09-24 北京北方微电子基地设备工艺研究中心有限责任公司 晶片的辅助取片机构、取片系统及取片方法
CN105058401A (zh) * 2015-08-07 2015-11-18 天津联欣盈塑胶科技有限公司 一种夹取塑料产品的机械手
CN105397828A (zh) * 2015-11-27 2016-03-16 大连理工大学 一种用于管桩端板加工的大尺寸变直径机器人夹具
WO2022202396A1 (ja) * 2021-03-25 2022-09-29 東京エレクトロン株式会社 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム
WO2022210940A1 (ja) * 2021-03-31 2022-10-06 東京エレクトロン株式会社 基板搬送装置、塗布処理装置および基板搬送方法

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI465313B (zh) * 2009-04-07 2014-12-21 Kromax Internat Corp 非接觸式定位平臺與定位方法
JP5887935B2 (ja) * 2009-11-26 2016-03-16 株式会社ニコン 基板処理装置、表示素子の製造方法および基板処理方法
KR101309144B1 (ko) * 2011-01-10 2013-09-17 엘아이지에이디피 주식회사 분사노즐, 이를 이용한 기판 반송장치 및 기판 검사장치
JP5931409B2 (ja) * 2011-11-14 2016-06-08 川崎重工業株式会社 板材の搬送システム
KR102099882B1 (ko) * 2012-12-27 2020-04-13 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
JP6280805B2 (ja) * 2014-04-30 2018-02-14 平田機工株式会社 ワーク形状測定システム及び制御方法
CN110625540B (zh) * 2014-05-03 2021-10-29 株式会社半导体能源研究所 薄膜状部件支撑设备
CA2996868C (en) 2015-08-26 2021-02-16 Berkshire Grey, Inc. Systems and methods for providing vacuum valve assemblies for end effectors
CN105428290B (zh) * 2015-12-23 2018-06-29 上海华虹宏力半导体制造有限公司 晶圆传输装置及其真空吸附机械手
US9776809B1 (en) * 2016-03-31 2017-10-03 Core Flow Ltd. Conveying system with vacuum wheel
TWI648211B (zh) * 2016-12-20 2019-01-21 亞智科技股份有限公司 吸取基板的方法與吸取裝置
CN106927258A (zh) * 2017-01-26 2017-07-07 江苏东旭亿泰智能装备有限公司 一种用于玻璃基板的传送装置及其传送方法
CN108238447A (zh) * 2018-01-16 2018-07-03 京东方科技集团股份有限公司 传输系统

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004100254A1 (ja) * 2003-05-06 2004-11-18 Olympus Corporation 基板吸着装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004100254A1 (ja) * 2003-05-06 2004-11-18 Olympus Corporation 基板吸着装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104058257A (zh) * 2013-03-22 2014-09-24 北京北方微电子基地设备工艺研究中心有限责任公司 晶片的辅助取片机构、取片系统及取片方法
CN105058401A (zh) * 2015-08-07 2015-11-18 天津联欣盈塑胶科技有限公司 一种夹取塑料产品的机械手
CN105397828A (zh) * 2015-11-27 2016-03-16 大连理工大学 一种用于管桩端板加工的大尺寸变直径机器人夹具
WO2022202396A1 (ja) * 2021-03-25 2022-09-29 東京エレクトロン株式会社 基板搬送装置、塗布処理装置、基板搬送方法および基板搬送プログラム
JPWO2022202396A1 (enExample) * 2021-03-25 2022-09-29
WO2022210940A1 (ja) * 2021-03-31 2022-10-06 東京エレクトロン株式会社 基板搬送装置、塗布処理装置および基板搬送方法

Also Published As

Publication number Publication date
CN101323396A (zh) 2008-12-17
TW200906695A (en) 2009-02-16
KR20080108904A (ko) 2008-12-16

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