TW200906695A - Substrate adsorption device, substrate transportation device and external inspection equipment - Google Patents

Substrate adsorption device, substrate transportation device and external inspection equipment Download PDF

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Publication number
TW200906695A
TW200906695A TW097121524A TW97121524A TW200906695A TW 200906695 A TW200906695 A TW 200906695A TW 097121524 A TW097121524 A TW 097121524A TW 97121524 A TW97121524 A TW 97121524A TW 200906695 A TW200906695 A TW 200906695A
Authority
TW
Taiwan
Prior art keywords
absorbing
substrate
glass substrate
portions
absorbing portion
Prior art date
Application number
TW097121524A
Other languages
English (en)
Chinese (zh)
Inventor
Tomokazu Kiuchi
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Publication of TW200906695A publication Critical patent/TW200906695A/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Liquid Crystal (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW097121524A 2007-06-11 2008-06-10 Substrate adsorption device, substrate transportation device and external inspection equipment TW200906695A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007153922A JP2008302487A (ja) 2007-06-11 2007-06-11 基板吸着装置及び基板搬送装置並びに外観検査装置

Publications (1)

Publication Number Publication Date
TW200906695A true TW200906695A (en) 2009-02-16

Family

ID=40187135

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097121524A TW200906695A (en) 2007-06-11 2008-06-10 Substrate adsorption device, substrate transportation device and external inspection equipment

Country Status (4)

Country Link
JP (1) JP2008302487A (enExample)
KR (1) KR20080108904A (enExample)
CN (1) CN101323396A (enExample)
TW (1) TW200906695A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI465313B (zh) * 2009-04-07 2014-12-21 Kromax Internat Corp 非接觸式定位平臺與定位方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5887935B2 (ja) * 2009-11-26 2016-03-16 株式会社ニコン 基板処理装置、表示素子の製造方法および基板処理方法
KR101309144B1 (ko) * 2011-01-10 2013-09-17 엘아이지에이디피 주식회사 분사노즐, 이를 이용한 기판 반송장치 및 기판 검사장치
JP5931409B2 (ja) * 2011-11-14 2016-06-08 川崎重工業株式会社 板材の搬送システム
KR102099882B1 (ko) * 2012-12-27 2020-04-13 세메스 주식회사 기판 처리 장치 및 기판 처리 방법
CN104058257B (zh) * 2013-03-22 2017-07-04 北京北方微电子基地设备工艺研究中心有限责任公司 晶片的辅助取片机构、取片系统及取片方法
JP6280805B2 (ja) * 2014-04-30 2018-02-14 平田機工株式会社 ワーク形状測定システム及び制御方法
CN110625540B (zh) * 2014-05-03 2021-10-29 株式会社半导体能源研究所 薄膜状部件支撑设备
CN105058401A (zh) * 2015-08-07 2015-11-18 天津联欣盈塑胶科技有限公司 一种夹取塑料产品的机械手
CA2996868C (en) 2015-08-26 2021-02-16 Berkshire Grey, Inc. Systems and methods for providing vacuum valve assemblies for end effectors
CN105397828B (zh) * 2015-11-27 2017-03-29 大连理工大学 一种用于管桩端板加工的大尺寸变直径机器人夹具
CN105428290B (zh) * 2015-12-23 2018-06-29 上海华虹宏力半导体制造有限公司 晶圆传输装置及其真空吸附机械手
US9776809B1 (en) * 2016-03-31 2017-10-03 Core Flow Ltd. Conveying system with vacuum wheel
TWI648211B (zh) * 2016-12-20 2019-01-21 亞智科技股份有限公司 吸取基板的方法與吸取裝置
CN106927258A (zh) * 2017-01-26 2017-07-07 江苏东旭亿泰智能装备有限公司 一种用于玻璃基板的传送装置及其传送方法
CN108238447A (zh) * 2018-01-16 2018-07-03 京东方科技集团股份有限公司 传输系统
TW202301531A (zh) * 2021-03-25 2023-01-01 日商東京威力科創股份有限公司 基板搬送裝置、塗佈處理裝置、基板搬送方法及基板搬送程式
TW202306651A (zh) * 2021-03-31 2023-02-16 日商東京威力科創股份有限公司 基板搬送裝置、塗佈處理裝置及基板搬送方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4553841B2 (ja) * 2003-05-06 2010-09-29 オリンパス株式会社 基板吸着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI465313B (zh) * 2009-04-07 2014-12-21 Kromax Internat Corp 非接觸式定位平臺與定位方法

Also Published As

Publication number Publication date
JP2008302487A (ja) 2008-12-18
CN101323396A (zh) 2008-12-17
KR20080108904A (ko) 2008-12-16

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