JP2008277798A5 - - Google Patents
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- Publication number
- JP2008277798A5 JP2008277798A5 JP2008094894A JP2008094894A JP2008277798A5 JP 2008277798 A5 JP2008277798 A5 JP 2008277798A5 JP 2008094894 A JP2008094894 A JP 2008094894A JP 2008094894 A JP2008094894 A JP 2008094894A JP 2008277798 A5 JP2008277798 A5 JP 2008277798A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive film
- insulating film
- film
- integrated circuit
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 6
- 239000010949 copper Substances 0.000 claims 4
- 239000010931 gold Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 238000007747 plating Methods 0.000 claims 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- 229910017052 cobalt Inorganic materials 0.000 claims 2
- 239000010941 cobalt Substances 0.000 claims 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 229910052759 nickel Inorganic materials 0.000 claims 2
- 229910052697 platinum Inorganic materials 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- 238000010030 laminating Methods 0.000 claims 1
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008094894A JP5422138B2 (ja) | 2007-04-06 | 2008-04-01 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007100062 | 2007-04-06 | ||
| JP2007100062 | 2007-04-06 | ||
| JP2008094894A JP5422138B2 (ja) | 2007-04-06 | 2008-04-01 | 半導体装置の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008277798A JP2008277798A (ja) | 2008-11-13 |
| JP2008277798A5 true JP2008277798A5 (enExample) | 2011-05-06 |
| JP5422138B2 JP5422138B2 (ja) | 2014-02-19 |
Family
ID=39537436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008094894A Expired - Fee Related JP5422138B2 (ja) | 2007-04-06 | 2008-04-01 | 半導体装置の作製方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8353459B2 (enExample) |
| EP (1) | EP1978472A3 (enExample) |
| JP (1) | JP5422138B2 (enExample) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8698697B2 (en) * | 2007-06-12 | 2014-04-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| USD602922S1 (en) * | 2008-05-09 | 2009-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Contactless data carrier |
| USD645029S1 (en) * | 2008-05-09 | 2011-09-13 | Semiconductor Energy Laboratory Co., Ltd. | Antenna |
| US20110073357A1 (en) * | 2008-06-02 | 2011-03-31 | Nxp B.V. | Electronic device and method of manufacturing an electronic device |
| USD605642S1 (en) * | 2008-09-10 | 2009-12-08 | Semiconductor Energy Laboratory Co., Ltd. | Contactless data carrier |
| US9016585B2 (en) | 2008-11-25 | 2015-04-28 | Thin Film Electronics Asa | Printed antennas, methods of printing an antenna, and devices including the printed antenna |
| JP2010128937A (ja) * | 2008-11-28 | 2010-06-10 | Fujitsu Ltd | Rfidユニット |
| US8164190B2 (en) * | 2009-06-25 | 2012-04-24 | International Business Machines Corporation | Structure of power grid for semiconductor devices and method of making the same |
| USD614175S1 (en) * | 2009-09-25 | 2010-04-20 | Avery Dennison Corporation | High frequency antenna |
| JP5418510B2 (ja) * | 2010-02-25 | 2014-02-19 | 日立化成株式会社 | 評価用半導体チップ、評価システム及びそのリペア方法 |
| JP2011253898A (ja) * | 2010-06-01 | 2011-12-15 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置及び製造方法 |
| JP2012049338A (ja) * | 2010-08-27 | 2012-03-08 | Hitachi Ltd | ヒータ配線付き半導体チップ |
| DE102013006624B3 (de) | 2013-04-18 | 2014-05-28 | Forschungszentrum Jülich GmbH | Hochfrequenzleiter mit verbesserter Leitfähigkeit und Verfahren seiner Herstellung |
| JP6402017B2 (ja) | 2013-12-26 | 2018-10-10 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| USD850424S1 (en) * | 2016-12-14 | 2019-06-04 | AQ Corporation | Flexible PCB dual antenna module for use in smartphone |
| FR3073307B1 (fr) * | 2017-11-08 | 2021-05-28 | Oberthur Technologies | Dispositif de securite tel qu'une carte a puce |
| US11437331B2 (en) * | 2019-10-17 | 2022-09-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Chip structure and method for forming the same |
| USD896208S1 (en) * | 2019-10-22 | 2020-09-15 | Avery Dennison Retail Information Services, Llc | Antenna |
| USD896795S1 (en) * | 2019-10-22 | 2020-09-22 | Avery Dennison Retail Information Services, Llc | Antenna |
| US11303011B2 (en) | 2019-11-27 | 2022-04-12 | AQ Corporation | Smartphone antenna in flexible PCB |
| JP6985477B1 (ja) * | 2020-09-25 | 2021-12-22 | アオイ電子株式会社 | 半導体装置および半導体装置の製造方法 |
| KR20220169152A (ko) * | 2021-06-18 | 2022-12-27 | 삼성전자주식회사 | 반도체 장치 |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63216361A (ja) * | 1987-03-04 | 1988-09-08 | Nec Corp | 多層配線構造 |
| JPH03234020A (ja) * | 1990-02-09 | 1991-10-18 | Fujitsu Ltd | 半導体装置の製造方法 |
| JP3441082B2 (ja) * | 1990-05-31 | 2003-08-25 | 株式会社東芝 | 平面型磁気素子 |
| US5801432A (en) * | 1992-06-04 | 1998-09-01 | Lsi Logic Corporation | Electronic system using multi-layer tab tape semiconductor device having distinct signal, power and ground planes |
| JPH10116901A (ja) * | 1996-10-11 | 1998-05-06 | Sony Corp | 半導体装置及びその製造方法 |
| US6837438B1 (en) * | 1998-10-30 | 2005-01-04 | Hitachi Maxell, Ltd. | Non-contact information medium and communication system utilizing the same |
| JP2000137779A (ja) | 1998-10-30 | 2000-05-16 | Hitachi Maxell Ltd | 非接触情報媒体とその製造方法 |
| US6373447B1 (en) * | 1998-12-28 | 2002-04-16 | Kawasaki Steel Corporation | On-chip antenna, and systems utilizing same |
| JP2000295024A (ja) | 1999-04-06 | 2000-10-20 | Sony Corp | 非接触タグ |
| US6421013B1 (en) * | 1999-10-04 | 2002-07-16 | Amerasia International Technology, Inc. | Tamper-resistant wireless article including an antenna |
| JP4214542B2 (ja) | 1999-11-22 | 2009-01-28 | 株式会社エフ・イー・シー | アンテナ搭載形の通信用icユニットの製造方法 |
| JP4236790B2 (ja) | 2000-03-02 | 2009-03-11 | 大日本印刷株式会社 | アンテナシートおよび非接触式データキャリア |
| US6841862B2 (en) * | 2000-06-30 | 2005-01-11 | Nec Corporation | Semiconductor package board using a metal base |
| JP2002092566A (ja) * | 2000-09-13 | 2002-03-29 | Dainippon Printing Co Ltd | コイルオンチップモジュールとその製造方法、および非接触型icカード |
| JPWO2002089157A1 (ja) | 2001-04-27 | 2004-08-19 | 味の素株式会社 | 多層コイルおよびその製造方法 |
| JP2002368525A (ja) | 2001-06-11 | 2002-12-20 | Ajinomoto Co Inc | アンテナコイル |
| JP2003124312A (ja) * | 2001-10-15 | 2003-04-25 | Seiko Epson Corp | 半導体装置およびその製造方法 |
| JP3646720B2 (ja) * | 2003-06-19 | 2005-05-11 | セイコーエプソン株式会社 | 半導体装置及びその製造方法、回路基板並びに電子機器 |
| US7120987B2 (en) * | 2003-08-05 | 2006-10-17 | Avery Dennison Corporation | Method of making RFID device |
| JP2005094319A (ja) | 2003-09-17 | 2005-04-07 | Matsushita Electric Ind Co Ltd | 非接触icタグ用コイルアンテナ |
| JP4059498B2 (ja) * | 2003-10-24 | 2008-03-12 | ローム株式会社 | 半導体装置 |
| KR101205191B1 (ko) * | 2003-12-19 | 2012-11-27 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 집적 회로 |
| WO2005074402A2 (en) * | 2004-02-10 | 2005-08-18 | Cyrips Pte Ltd | An integrated circuit |
| US8049669B2 (en) * | 2004-03-26 | 2011-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising circuit between first and second conducting wires |
| WO2006028231A1 (en) * | 2004-09-10 | 2006-03-16 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US7061099B2 (en) * | 2004-09-30 | 2006-06-13 | Intel Corporation | Microelectronic package having chamber sealed by material including one or more intermetallic compounds |
| JP4718192B2 (ja) * | 2005-01-17 | 2011-07-06 | 新光電気工業株式会社 | リーダ/ライタ |
| JP5023506B2 (ja) | 2005-02-28 | 2012-09-12 | Dic株式会社 | 導電性塗料の製造方法 |
| JP4827618B2 (ja) * | 2005-05-31 | 2011-11-30 | 株式会社半導体エネルギー研究所 | アンテナの作製方法、半導体装置の作製方法 |
| US7685706B2 (en) * | 2005-07-08 | 2010-03-30 | Semiconductor Energy Laboratory Co., Ltd | Method of manufacturing a semiconductor device |
| JP2007183776A (ja) * | 2006-01-06 | 2007-07-19 | Renesas Technology Corp | 半導体装置 |
| JP2007250924A (ja) * | 2006-03-17 | 2007-09-27 | Sony Corp | インダクタ素子とその製造方法、並びにインダクタ素子を用いた半導体モジュール |
| US9064198B2 (en) * | 2006-04-26 | 2015-06-23 | Murata Manufacturing Co., Ltd. | Electromagnetic-coupling-module-attached article |
| JP2008217776A (ja) * | 2007-02-09 | 2008-09-18 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
| US8816484B2 (en) * | 2007-02-09 | 2014-08-26 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| EP2141769A4 (en) * | 2007-04-27 | 2010-08-11 | Murata Manufacturing Co | WIRELESS IC DEVICE |
-
2008
- 2008-03-20 EP EP20080005387 patent/EP1978472A3/en not_active Withdrawn
- 2008-03-26 US US12/076,997 patent/US8353459B2/en not_active Expired - Fee Related
- 2008-04-01 JP JP2008094894A patent/JP5422138B2/ja not_active Expired - Fee Related
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