JP2008277798A5 - - Google Patents

Download PDF

Info

Publication number
JP2008277798A5
JP2008277798A5 JP2008094894A JP2008094894A JP2008277798A5 JP 2008277798 A5 JP2008277798 A5 JP 2008277798A5 JP 2008094894 A JP2008094894 A JP 2008094894A JP 2008094894 A JP2008094894 A JP 2008094894A JP 2008277798 A5 JP2008277798 A5 JP 2008277798A5
Authority
JP
Japan
Prior art keywords
conductive film
insulating film
film
integrated circuit
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008094894A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008277798A (ja
JP5422138B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2008094894A priority Critical patent/JP5422138B2/ja
Priority claimed from JP2008094894A external-priority patent/JP5422138B2/ja
Publication of JP2008277798A publication Critical patent/JP2008277798A/ja
Publication of JP2008277798A5 publication Critical patent/JP2008277798A5/ja
Application granted granted Critical
Publication of JP5422138B2 publication Critical patent/JP5422138B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2008094894A 2007-04-06 2008-04-01 半導体装置の作製方法 Expired - Fee Related JP5422138B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008094894A JP5422138B2 (ja) 2007-04-06 2008-04-01 半導体装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007100062 2007-04-06
JP2007100062 2007-04-06
JP2008094894A JP5422138B2 (ja) 2007-04-06 2008-04-01 半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2008277798A JP2008277798A (ja) 2008-11-13
JP2008277798A5 true JP2008277798A5 (enExample) 2011-05-06
JP5422138B2 JP5422138B2 (ja) 2014-02-19

Family

ID=39537436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008094894A Expired - Fee Related JP5422138B2 (ja) 2007-04-06 2008-04-01 半導体装置の作製方法

Country Status (3)

Country Link
US (1) US8353459B2 (enExample)
EP (1) EP1978472A3 (enExample)
JP (1) JP5422138B2 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8698697B2 (en) * 2007-06-12 2014-04-15 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
USD602922S1 (en) * 2008-05-09 2009-10-27 Semiconductor Energy Laboratory Co., Ltd. Contactless data carrier
USD645029S1 (en) * 2008-05-09 2011-09-13 Semiconductor Energy Laboratory Co., Ltd. Antenna
US20110073357A1 (en) * 2008-06-02 2011-03-31 Nxp B.V. Electronic device and method of manufacturing an electronic device
USD605642S1 (en) * 2008-09-10 2009-12-08 Semiconductor Energy Laboratory Co., Ltd. Contactless data carrier
US9016585B2 (en) 2008-11-25 2015-04-28 Thin Film Electronics Asa Printed antennas, methods of printing an antenna, and devices including the printed antenna
JP2010128937A (ja) * 2008-11-28 2010-06-10 Fujitsu Ltd Rfidユニット
US8164190B2 (en) * 2009-06-25 2012-04-24 International Business Machines Corporation Structure of power grid for semiconductor devices and method of making the same
USD614175S1 (en) * 2009-09-25 2010-04-20 Avery Dennison Corporation High frequency antenna
JP5418510B2 (ja) * 2010-02-25 2014-02-19 日立化成株式会社 評価用半導体チップ、評価システム及びそのリペア方法
JP2011253898A (ja) * 2010-06-01 2011-12-15 Nippon Telegr & Teleph Corp <Ntt> 半導体装置及び製造方法
JP2012049338A (ja) * 2010-08-27 2012-03-08 Hitachi Ltd ヒータ配線付き半導体チップ
DE102013006624B3 (de) 2013-04-18 2014-05-28 Forschungszentrum Jülich GmbH Hochfrequenzleiter mit verbesserter Leitfähigkeit und Verfahren seiner Herstellung
JP6402017B2 (ja) 2013-12-26 2018-10-10 株式会社半導体エネルギー研究所 半導体装置
USD850424S1 (en) * 2016-12-14 2019-06-04 AQ Corporation Flexible PCB dual antenna module for use in smartphone
FR3073307B1 (fr) * 2017-11-08 2021-05-28 Oberthur Technologies Dispositif de securite tel qu'une carte a puce
US11437331B2 (en) * 2019-10-17 2022-09-06 Taiwan Semiconductor Manufacturing Co., Ltd. Chip structure and method for forming the same
USD896208S1 (en) * 2019-10-22 2020-09-15 Avery Dennison Retail Information Services, Llc Antenna
USD896795S1 (en) * 2019-10-22 2020-09-22 Avery Dennison Retail Information Services, Llc Antenna
US11303011B2 (en) 2019-11-27 2022-04-12 AQ Corporation Smartphone antenna in flexible PCB
JP6985477B1 (ja) * 2020-09-25 2021-12-22 アオイ電子株式会社 半導体装置および半導体装置の製造方法
KR20220169152A (ko) * 2021-06-18 2022-12-27 삼성전자주식회사 반도체 장치

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63216361A (ja) * 1987-03-04 1988-09-08 Nec Corp 多層配線構造
JPH03234020A (ja) * 1990-02-09 1991-10-18 Fujitsu Ltd 半導体装置の製造方法
JP3441082B2 (ja) * 1990-05-31 2003-08-25 株式会社東芝 平面型磁気素子
US5801432A (en) * 1992-06-04 1998-09-01 Lsi Logic Corporation Electronic system using multi-layer tab tape semiconductor device having distinct signal, power and ground planes
JPH10116901A (ja) * 1996-10-11 1998-05-06 Sony Corp 半導体装置及びその製造方法
US6837438B1 (en) * 1998-10-30 2005-01-04 Hitachi Maxell, Ltd. Non-contact information medium and communication system utilizing the same
JP2000137779A (ja) 1998-10-30 2000-05-16 Hitachi Maxell Ltd 非接触情報媒体とその製造方法
US6373447B1 (en) * 1998-12-28 2002-04-16 Kawasaki Steel Corporation On-chip antenna, and systems utilizing same
JP2000295024A (ja) 1999-04-06 2000-10-20 Sony Corp 非接触タグ
US6421013B1 (en) * 1999-10-04 2002-07-16 Amerasia International Technology, Inc. Tamper-resistant wireless article including an antenna
JP4214542B2 (ja) 1999-11-22 2009-01-28 株式会社エフ・イー・シー アンテナ搭載形の通信用icユニットの製造方法
JP4236790B2 (ja) 2000-03-02 2009-03-11 大日本印刷株式会社 アンテナシートおよび非接触式データキャリア
US6841862B2 (en) * 2000-06-30 2005-01-11 Nec Corporation Semiconductor package board using a metal base
JP2002092566A (ja) * 2000-09-13 2002-03-29 Dainippon Printing Co Ltd コイルオンチップモジュールとその製造方法、および非接触型icカード
JPWO2002089157A1 (ja) 2001-04-27 2004-08-19 味の素株式会社 多層コイルおよびその製造方法
JP2002368525A (ja) 2001-06-11 2002-12-20 Ajinomoto Co Inc アンテナコイル
JP2003124312A (ja) * 2001-10-15 2003-04-25 Seiko Epson Corp 半導体装置およびその製造方法
JP3646720B2 (ja) * 2003-06-19 2005-05-11 セイコーエプソン株式会社 半導体装置及びその製造方法、回路基板並びに電子機器
US7120987B2 (en) * 2003-08-05 2006-10-17 Avery Dennison Corporation Method of making RFID device
JP2005094319A (ja) 2003-09-17 2005-04-07 Matsushita Electric Ind Co Ltd 非接触icタグ用コイルアンテナ
JP4059498B2 (ja) * 2003-10-24 2008-03-12 ローム株式会社 半導体装置
KR101205191B1 (ko) * 2003-12-19 2012-11-27 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 집적 회로
WO2005074402A2 (en) * 2004-02-10 2005-08-18 Cyrips Pte Ltd An integrated circuit
US8049669B2 (en) * 2004-03-26 2011-11-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising circuit between first and second conducting wires
WO2006028231A1 (en) * 2004-09-10 2006-03-16 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US7061099B2 (en) * 2004-09-30 2006-06-13 Intel Corporation Microelectronic package having chamber sealed by material including one or more intermetallic compounds
JP4718192B2 (ja) * 2005-01-17 2011-07-06 新光電気工業株式会社 リーダ/ライタ
JP5023506B2 (ja) 2005-02-28 2012-09-12 Dic株式会社 導電性塗料の製造方法
JP4827618B2 (ja) * 2005-05-31 2011-11-30 株式会社半導体エネルギー研究所 アンテナの作製方法、半導体装置の作製方法
US7685706B2 (en) * 2005-07-08 2010-03-30 Semiconductor Energy Laboratory Co., Ltd Method of manufacturing a semiconductor device
JP2007183776A (ja) * 2006-01-06 2007-07-19 Renesas Technology Corp 半導体装置
JP2007250924A (ja) * 2006-03-17 2007-09-27 Sony Corp インダクタ素子とその製造方法、並びにインダクタ素子を用いた半導体モジュール
US9064198B2 (en) * 2006-04-26 2015-06-23 Murata Manufacturing Co., Ltd. Electromagnetic-coupling-module-attached article
JP2008217776A (ja) * 2007-02-09 2008-09-18 Semiconductor Energy Lab Co Ltd 半導体装置
US8816484B2 (en) * 2007-02-09 2014-08-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
EP2141769A4 (en) * 2007-04-27 2010-08-11 Murata Manufacturing Co WIRELESS IC DEVICE

Similar Documents

Publication Publication Date Title
JP2008277798A5 (enExample)
US20150040382A1 (en) Inductor element and manufacturing method thereof
JP2009055055A5 (enExample)
TWI253161B (en) Chip carrier and chip package structure thereof
JP2012023721A5 (ja) アンテナの作製方法、半導体装置
WO2010052973A1 (ja) 半導体装置及びその製造方法
US20100314744A1 (en) Substrate having single patterned metal layer exposing patterned dielectric layer, chip package structure including the substrate, and manufacturing methods thereof
TW200919661A (en) Package substrate and method for fabricating the same
JP2011100991A5 (enExample)
JP2015072996A5 (enExample)
JP2004518022A5 (enExample)
WO2007021736A2 (en) Semiconductor device having improved mechanical and thermal reliability
JP2006310799A5 (enExample)
JP2005203763A5 (enExample)
KR101384793B1 (ko) 내식성 및 내마모성이 우수한 단자를 구비하는 인쇄회로기판 및 그 제조 방법
TW201138043A (en) Circuit board structure, packaging structure and method for making the same
TW200823580A (en) Wiring laminated film and wiring circuit
JP2010080943A5 (enExample)
JP2008288562A5 (enExample)
TW200803674A (en) Method for fabricating circuit board with electrically connected structure
JP2005311331A5 (enExample)
JP4714260B2 (ja) 薄膜抵抗器構造物およびその製造方法
TWI345433B (en) Circuit board having conductive bumps and fabrication method thereof
CN103367304B (zh) 封装基板、覆晶式封装及其制造方法
JP6057285B2 (ja) 半導体素子搭載用基板